Dual-End-Effector Wafer Transfer for Edge Ring Throughput
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Solution Overview
Problem
Existing substrate processing systems face challenges in increasing productivity due to limitations in efficiently transferring and managing edge rings within the vacuum transfer chamber.
Innovation Solution
A substrate processing system is designed with a vacuum transfer chamber, multiple substrate processing modules, a ring stocker, a transfer robot with two end effectors, and a controller that determines the transfer of edge rings and substrates, allowing for the suspension of edge ring transfer to prioritize substrate transfer when an unused end effector is available.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the transfer robot transfers edge rings from the ring stocker to substrate processing modules, then edge ring management is improved, but substrate transfer is delayed when the same end effector is occupied
Solution Approach 1:
The transfer robot is divided into multiple end effectors (at least two), allowing independent operation for different tasks. One end effector can transfer edge rings while another transfers substrates simultaneously, segmenting the previously unified transfer function into specialized sub-functions that operate in parallel.
Solution Approach 2:
The controller dynamically assigns different end effectors to different tasks based on real-time requirements. When substrate transfer is prioritized, the controller can assign an unused end effector to substrate transfer while suspending edge ring transfer operations, creating a dynamic response to changing operational needs.
2Productivity
If the transfer robot prioritizes substrate transfer, then productivity is improved, but edge ring replacement may be delayed
Solution Approach 1:
The system prepares edge rings in advance by storing multiple edge rings in the ring stocker. This preliminary preparation allows the transfer robot to quickly replace edge rings without prolonged delays, as ready-to-use edge rings are already available in the stocker rather than needing to be manufactured or prepared on-demand.
Solution Approach 2:
The ring stocker acts as an intermediary buffer between edge ring storage and substrate processing modules. It temporarily holds edge rings and manages their distribution, decoupling the edge ring replacement process from the substrate transfer process and allowing independent optimization of both operations.
3Device complexity
If a single end effector is used for both edge ring and substrate transfer, then device complexity is reduced, but transfer speed decreases
Solution Approach 1:
The transfer robot's end effectors are segmented into multiple independent units, each capable of performing transfer operations. This segmentation allows parallel execution of transfer tasks, increasing overall transfer speed without significantly increasing the complexity of individual end effector units.
Solution Approach 2:
Each end effector is designed with multi-functionality, capable of transferring both edge rings and substrates. This universal design allows the system to maintain flexibility while achieving parallel operations, as the same basic transfer mechanism can handle different object types without requiring completely separate specialized devices.
Data Source
AI summary
A substrate processing system disclosed here includes a vacuum transfer chamber, a plurality of substrate processing modules, a ring stocker, a transfer robot, and control circuitry. The plurality of substrate processing modules and the ring stocker are connected to the vacuum transfer chamber. When the transfer robot is transferring only a new edge ring using one of at least two end effectors, the controller controls the transfer robot to transfer a substrate via the vacuum transfer chamber using an unused end effector of the at least two end effectors in response to a substrate transfer request.