Wafer Transport Sensor Jig for Position Teaching
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Solution Overview
Problem
Existing methods for teaching the transport position of thin objects like semiconductor wafers require avoiding operations, leading to increased time and reliance on operator proficiency, and often necessitate visual checks, which can be dangerous and inaccurate.
Innovation Solution
A transport apparatus with a transmissive sensor and target members that allow for the acquisition of teaching information through general transport operations, eliminating the need for avoiding maneuvers and reducing backlash corrections, using multiple optical axes and target members to calculate precise position information.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If avoiding operations are performed to acquire teaching information using transmissive sensors, then position information can be detected, but the operation time increases and backlash correction becomes necessary
Solution Approach 1:
Instead of moving the sensor to detect the target (avoiding operation), the patent inverts the approach by moving the target member into the sensor's detection path during normal transport operation. The target member is positioned at the transport destination and moved along the transport track, allowing the sensor to detect it during regular operations without requiring special avoiding maneuvers.
Solution Approach 2:
The target member serves dual purposes: it is both the object being transported and the detection target for teaching position information. By making the target member itself the detection target, the system eliminates the need for separate teaching operations, allowing the same transport operation to serve both transportation and position detection functions.
2Measurement precision
If avoiding operations are performed for teaching, then position information can be acquired, but backlash correction is required between teaching and transport operations
Solution Approach 1:
The transport operation is made universal to serve both teaching and transport functions simultaneously. The same transport operation that moves the target member to its destination also provides the teaching information needed for position detection, eliminating the need for separate teaching operations and associated backlash corrections.
Solution Approach 2:
The patent inverts the traditional teaching approach by having the target member actively move into the sensor's detection path during normal transport, rather than moving the sensor to detect a stationary target. This inversion allows teaching information to be acquired during regular transport operations without requiring separate teaching maneuvers that would introduce backlash errors.
3Measurement precision
If operator visual checks are performed for teaching, then transport position can be verified, but safety risks increase and accuracy depends on operator proficiency
Solution Approach 1:
The patent replaces manual visual inspection with an automated optical detection system. Transmissive sensors automatically detect the target member's position and provide teaching information, eliminating the need for operators to visually verify positions. This substitution improves both accuracy (through precise sensor measurement) and safety (by removing operators from dangerous proximity to moving parts).
Solution Approach 2:
The system performs self-verification through automated sensor detection of the target member. The transport apparatus automatically acquires and processes teaching information without requiring operator intervention, making the verification process both safer and more accurate while reducing dependency on operator proficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient acquisition of teaching information without operator intervention, reducing calculation time and preventing collisions in narrow spaces by using a general transport operation method.
Implementation Method 1
a transmissive sensor including light emitting portions and light receiving portions arranged such that two or more optical axes are formed from the light emitting portions to the light receiving portions
Data Source
Figure 1(a)~1(b)
Figure 2(a)~2(b)
Figure 3(a)~3(b)
AI summary
Disclosed are a transport apparatus that holds and transports an object on a predetermined transport track using a transport portion provided at the leading end of an arm and is capable of acquiring the teaching information of a transport position using a normal transport operation, a position teaching method, and a sensor jig. A transmissive sensor (32) is provided in a sensor jig (30) such that the projection segments of an optical axis (41) and an optical axis (42) on a projection plane intersect with each other and neither the project segment of the optical axis (41) nor the projection segment of the optical axis (42) is aligned with the X-direction and the Y-direction. During a position teaching operation, the sensor jig (30) is provided so as to be held by a wafer transport portion (24), thereby detecting target members (51, 52).