Water Discharge System Segmentation for Substrate Processing
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Solution Overview
Problem
Conventional substrate processing apparatuses face inefficiencies in collecting, separating, and recycling used slurry, chemical liquids, and pure water due to long water discharge lines and mixing of materials, leading to increased water consumption and complex processing requirements.
Innovation Solution
A water discharge system with multiple lines and a control mechanism that measures and switches the discharge of liquids based on their properties, allowing for instantaneous detection and separation of used slurry, chemical liquids, and pure water within the apparatus, reducing the need for physical separation means and minimizing water discharge line length.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If waste liquids are collected exclusively at the water discharger installed outside the substrate processing apparatus, then handling of waste liquids is convenient, but water discharge lines become longer and slurry and grinding sludge adhere to the lines, reducing processing efficiency
Solution Approach 1:
The water discharge system is segmented into multiple independent discharge lines (first water discharge line for slurry, second water discharge line for pure water) with separate collection points within the apparatus. This segmentation prevents mixing of different liquid types and reduces line length, eliminating adhesion problems while maintaining handling convenience.
Solution Approach 2:
The collection point is moved from an external location to an internal location within the substrate processing apparatus. This dimensional change in the system architecture allows for shorter discharge lines and prevents slurry adhesion while maintaining operational convenience through integrated control.
2Device complexity
If waste liquids are collected exclusively at the water discharger outside the apparatus, then external processing is simplified, but recyclable slurry, pure water, and grinding sludge coexist in one place requiring complicated processing
Solution Approach 1:
Different liquid types (slurry, pure water, chemical liquids) are collected through separate discharge lines into distinct collection containers within the apparatus. This physical segmentation prevents mixing of recyclable materials, eliminating the need for complicated separation processing and improving recycling efficiency.
Solution Approach 2:
Recyclable liquids (pure water, slurry) are extracted and collected separately from grinding sludge through dedicated discharge lines. This extraction approach isolates valuable recyclable materials before they mix with waste, simplifying subsequent processing and improving recycling efficiency.
3Ease of manufacture
If conventional processing separates slurry and pure water after discharge, then waste liquids are treated, but consumption of pure water increases
Solution Approach 1:
Pure water and slurry are separated at the source through dedicated discharge lines before mixing occurs. This preliminary separation action prevents contamination of recyclable pure water with slurry, reducing the need for additional pure water in subsequent treatment processes and minimizing overall consumption.
Solution Approach 2:
The system replaces post-discharge mechanical separation processes with a controlled switching mechanism that directs liquids to appropriate discharge lines based on real-time detection. This substitution eliminates the need for energy-intensive separation processes and reduces pure water consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables quick, efficient, and cost-effective collection, separation, and recycling of used liquids by eliminating the need for external separation processes, reducing water consumption, and simplifying the recycling process within the substrate processing apparatus.
Implementation Method 1
a measurement device configured to generate water discharge information by measuring the liquid used in the substrate processor
Implementation Method 2
a switching device configured to switch a water discharge line to which the liquid used in the substrate processor is to be discharged among the at least two water discharge lines
Data Source
AI summary
A water discharge system for a substrate processing apparatus comprising a substrate processor that processes a substrate using liquid, includes: at least two water discharge lines capable of discharging the liquid used in the substrate processor; a switching device configured to switch a water discharge line to which the liquid used in the substrate processor is to be discharged among the at least two water discharge lines; a measurement device configured to generate water discharge information by measuring the liquid used in the substrate processor; and a control mechanism configured to control the switching device in accordance with the water discharge information.