Water-Layer Substrate Conveying for Strong Noncontact Holding
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Solution Overview
Problem
Existing substrate conveying methods face challenges such as weak holding force in contactless conveyance, substrate bending with large sizes, and inability to clean the outer circumferential part due to clamp members obstructing the path.
Innovation Solution
A conveying apparatus with a holding pad that forms a water-filled space between the substrate and itself, using a suction unit to improve holding force, and a movement unit to adjust proximity, along with a water supply unit to maintain substrate contact without direct contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If contactless conveyance by Bernoulli effect is used, then substrate surface is protected from contact, but holding force becomes weak
Solution Approach 1:
A water layer is introduced as an intermediary substance between the holding pad and substrate. The water fills the gap and provides both contactless holding through surface tension and sufficient holding force, while preventing direct contact between the holding pad and substrate surface.
Solution Approach 2:
The invention uses a water-based hydraulic system where water is supplied to and sucked from the gap between the holding pad and substrate. This hydraulic approach generates sufficient holding force through water pressure and suction while maintaining contactless conveyance.
2Force
If edge clamp system is used, then substrate outer circumferential part is clamped, but substrate bends when size is large
Solution Approach 1:
The water layer acts as a compliant intermediary that distributes holding force uniformly across the substrate surface rather than concentrating force at the edges. This prevents localized stress that causes bending in large substrates while maintaining effective holding.
3Productivity
If holding force is strengthened for cleaning, then cleaning effectiveness improves, but substrate rotates due to sponge drag
Solution Approach 1:
The water layer serves as a friction-reducing intermediary between the holding pad and substrate. This allows strong holding force to be applied for effective cleaning while minimizing rotational drag from the cleaning sponge, preventing unwanted substrate rotation.
4Object-affected harmful factors
If water layer is used for holding, then contactless conveyance is achieved, but holding force is insufficient
Solution Approach 1:
The system employs active hydraulic control by supplying water to and sucking water from the gap between holding pad and substrate. This dynamic water management creates sufficient holding force through water pressure and suction while maintaining the protective water layer for contactless conveyance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively conveys substrates without direct contact to treated regions, enhancing holding force and enabling thorough cleaning by preventing substrate rotation and clamp interference.
Implementation Method 1
causes a layer of water to intervene in this gap, and holds the substrate by the holding pad with use of the surface tension of the water
Implementation Method 2
a suction unit that sucks the water with which the space is filled and improves a force of holding the substrate
Data Source
AI summary
There is provided a conveying apparatus having a holding surface that holds a held surface of a substrate to convey the substrate. The conveying apparatus includes a holding pad that gets contact with an outer circumferential part of the held surface of the substrate or a side surface of the substrate and forms a space to be filled with water between the held surface of the substrate and the holding surface, a movement unit that causes the holding pad to move in such a direction as to get closer to or further away from the held surface, a water supply unit that supplies the water to the space, and a suction unit that sucks the water with which the space is filled and improves a force of holding the substrate. The conveying apparatus holds the substrate by the holding pad and conveys the substrate with the interposition of the water.