Wave Interface Assembly for Semiconductor ATE Signal Routing

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Solution Overview

Problem

Conventional Automatic Test Equipment (ATE) systems experience signal loss at high frequencies due to elongated signal paths and large waveguide flanges, which limit the convergence of multiple signal paths on integrated circuits and degrade signal integrity.

Innovation Solution

The use of customizable waveguide fabrication technologies and patch antenna arrays allows for efficient signal routing, eliminating the need for large waveguide flanges and coax cables, and integrating various waveguide components into a single structure, thereby reducing signal path losses and simplifying mechanical construction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If conventional waveguide flanges are used to mate waveguide and tester electronics, then signal transmission is enabled, but the large dimensions of these flanges limit the total signal path and prevent close mounting of adjacent waveguides

Engineering Contradiction:
Improvesignal transmission capabilityVSAvoidwaveguide flange size
Core Design Contradiction:
Ease of operationVSArea of stationary object

Solution Approach 1:

The patent combines multiple waveguide flanges into a single integrated flange structure that serves multiple waveguides simultaneously. This merging approach eliminates the need for separate large circular flanges for each waveguide, reducing the overall area occupied while maintaining signal transmission capability. The single flange allows adjacent waveguides to be mounted closer together, enabling tighter routing and convergence on integrated circuits.

Inventive Principle:
Principle #5Merging (Combining)

2Length of stationary object

If longer microstrip transmission lines and coax cables are used to extend signal paths, then test signal transmission is achieved, but signal strength is lost at millimeter frequencies

Engineering Contradiction:
Improvesignal path lengthVSAvoidsignal strength
Core Design Contradiction:
Length of stationary objectVSLoss of energy

Solution Approach 1:

The patent replaces conventional mechanical signal transmission components (coax cables and long microstrip lines) with waveguide technology. Waveguides provide superior signal transmission characteristics at millimeter frequencies, maintaining signal strength over longer distances. The waveguide structure with integrated flanges enables direct coupling between waveguides and tester electronics, eliminating the need for intermediate coaxial adapters and reducing cumulative signal loss.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If conventional circular waveguide flanges are used, then waveguide mating is achieved, but high density port spacing cannot be realized due to large flange dimensions

Engineering Contradiction:
Improvewaveguide mating capabilityVSAvoidport spacing density
Core Design Contradiction:
Ease of operationVSArea of moving object

Solution Approach 1:

The patent transitions from conventional circular waveguide flanges to a rectangular or square flange geometry. This asymmetric shape change allows for more efficient space utilization and enables flanges to be positioned closer together in a grid-like arrangement. The rectangular flange design optimizes the area-to-perimeter ratio, allowing multiple waveguides to be densely packed while maintaining adequate mating surfaces and alignment features.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach minimizes signal path lengths, reduces signal degradation, and enables high-density port spacing, improving the integrity of test signals at millimeter frequencies.

Implementation Method 1

each waveguide is adapted to allow signal traversal from the device under test to a tester diagnostic system

Methodology Applied
Scientific EffectWaveguide: Waveguide

Implementation Method 2

a plurality of patch antennas, each patch antenna proximately positioned relative to each other and the socket, each patch antenna is electrically coupled to the device under test

Methodology Applied
Scientific EffectPatch antenna:

Data Source

PatentUS10393772B2Wave interface assembly for automatic test equipment for semiconductor testing
Publication Date: 2019.08.27 ADVANTEST CORP
  • US10393772B2 patent drawing
  • US10393772B2 patent drawing
  • US10393772B2 patent drawing

AI summary

Embodiments of the present disclosure utilize customizable waveguide fabrication technologies (e.g., 3D printer technology) and patch antenna arrays to create adaptable wave interfaces that can provide efficient signal routing for an ATE system. In this fashion, embodiments of the present disclosure allow for arbitrary waveguide routing from port to port and create high density port spacing at the PCB level and which specifically eliminates the large flange required of prior art waveguides. Furthermore, embodiments include the ability to integrate different waveguide components, including power splitters, couplers, terminations, etc., into a single structure. Thus, embodiments of the present disclosure can reduce signal path losses and simplify the mechanical construction of ATE systems while eliminating the need for coax cables and minimizing the length of PCB microstrips.