Wet Microchip Alignment Using Grooved Transfer Substrates

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Solution Overview

Problem

The pick and place method for transferring micro-LED chips in display apparatus manufacturing faces challenges with decreasing transfer yield rates as micro-LED sizes decrease and display apparatus sizes increase.

Innovation Solution

A wet alignment method for micro-semiconductor chips, involving the supply of a liquid to grooves in a transfer substrate, followed by the alignment of micro-semiconductor chips using a liquid absorber that scans the substrate, allowing the chips to be accurately positioned within the grooves.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If pick and place method is used for transferring micro-LED chips, then transfer process can be performed, but transfer yield rate decreases as micro-LED size decreases and display apparatus size increases

Engineering Contradiction:
Improvetransfer yield rateVSAvoidmicro-LED size
Core Design Contradiction:
ReliabilityVSLength of moving object

Solution Approach 1:

The patent replaces the mechanical pick and place method with a wet alignment method using liquid flow and capillary forces. Liquid is supplied to grooves on the transfer substrate, creating capillary forces that automatically align and hold micro-LED chips in position during transfer, eliminating the need for mechanical gripping and placement operations that fail at small scales.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent uses liquid (hydraulic principle) supplied to grooves on the transfer substrate to create capillary forces for chip alignment and holding. The liquid flow and capillary action provide the necessary forces to position micro-LED chips accurately without mechanical contact, enabling high-yield transfer of small-sized chips.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Reliability

If pick and place method is used for transferring micro-LED chips, then transfer process can be performed, but transfer yield rate decreases as display apparatus size increases

Engineering Contradiction:
Improvetransfer yield rateVSAvoiddisplay apparatus size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent segments the transfer substrate into multiple grooves that can simultaneously hold and align multiple micro-LED chips. This segmented structure allows parallel processing of many chips across large display areas, maintaining high transfer yield rates even as display apparatus size increases, unlike sequential pick and place methods.

Inventive Principle:
Principle #1Segmentation

3Manufacturing precision

If wet alignment method is used with liquid supply to grooves, then alignment accuracy is improved, but process complexity increases

Engineering Contradiction:
Improvealignment accuracyVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent employs self-service alignment where liquid supplied to grooves automatically creates capillary forces that align micro-LED chips without requiring complex external alignment equipment or procedures. The system uses its own liquid supply mechanism to achieve precise alignment, simplifying the overall process despite the added liquid supply component.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enhances the alignment efficiency and accuracy of micro-semiconductor chips on a transfer substrate, improving the transfer yield rate even for smaller micro-LEDs and larger display apparatuses.

Implementation Method 1

aligning the plurality of micro-semiconductor chips with the plurality of grooves by scanning the transfer substrate by using a liquid absorber

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Data Source

PatentUS12230528B2Wet alignment method for micro-semiconductor chip and display transfer structure
Publication Date: 2025.02.18 SAMSUNG ELECTRONICS CO LTD
  • US12230528B2 patent drawing
  • US12230528B2 patent drawing
  • US12230528B2 patent drawing

AI summary

A wet alignment method for a micro-semiconductor chip and a display transfer structure are provided. The wet alignment method for a micro-semiconductor chip includes: supplying a liquid to a transfer substrate including a plurality of grooves; supplying the micro-semiconductor chip onto the transfer substrate; scanning the transfer substrate by using an absorber capable of absorbing the liquid. According to the wet alignment method, the micro-semiconductor chip may be transferred onto a large area.