Four-Stage Wien Filter Monochromator for Electron Beam Dispersion Control

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Solution Overview

Problem

Double Wien filter type monochromators experience angular dispersion before and after the focal plane, leading to non-uniform electron beam energy and blurred TEM images, especially when a defocused electron beam is used, due to non-uniform angles of electron rays relative to the optical axis.

Innovation Solution

A monochromator with four stages of Wien filters, where the first and second pairs are arranged symmetrically with respect to one plane, and the third and fourth pairs symmetrically with respect to another, producing identical electromagnetic fields, reduces positional and angular dispersion by canceling out these effects at the focal plane.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a double Wien filter type monochromator is used, then energy dispersion is canceled out at the focal plane, but angular dispersion occurs before and after the focal plane leading to non-uniform electron beam energy and blurred TEM images

Engineering Contradiction:
Improveenergy resolutionVSAvoidspatial resolution uniformity
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The monochromator is divided into four separate Wien filter stages instead of two, with each stage contributing to the cancellation of dispersion effects. The first pair of Wien filters (W1, W2) cancels positional dispersion, while the second pair (W3, W4) cancels angular dispersion, achieving both energy resolution and spatial resolution uniformity simultaneously

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs asymmetric arrangement of the four Wien filter stages with specific symmetries: W1 and W2 are symmetric with respect to a first plane, W3 and W4 are symmetric with respect to a second plane, and the pairs are symmetric with respect to a third plane. This controlled asymmetry allows independent optimization of energy dispersion cancellation and angular dispersion cancellation

Inventive Principle:
Principle #4Asymmetry

2Device complexity

If a single Wien filter type monochromator is used, then the structure is simpler, but energy dispersion remains and spatial resolution exhibits anisotropy

Engineering Contradiction:
Improvemonochromator structureVSAvoidspatial resolution isotropy
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The monochromator is divided into four separate Wien filter stages instead of two, with each stage contributing to the cancellation of dispersion effects. The first pair of Wien filters (W1, W2) cancels positional dispersion, while the second pair (W3, W4) cancels angular dispersion, achieving both energy resolution and spatial resolution uniformity simultaneously

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs asymmetric arrangement of the four Wien filter stages with specific symmetries: W1 and W2 are symmetric with respect to a first plane, W3 and W4 are symmetric with respect to a second plane, and the pairs are symmetric with respect to a third plane. This controlled asymmetry allows independent optimization of energy dispersion cancellation and angular dispersion cancellation

Inventive Principle:
Principle #4Asymmetry

3Measurement precision

If an energy-selecting slit is used to monochromatize electron rays, then energy resolution is improved, but the virtual electron source becomes stretched in the direction of energy dispersion

Engineering Contradiction:
Improveenergy resolutionVSAvoidelectron source shape
Core Design Contradiction:
Measurement precisionVSShape

Solution Approach 1:

The monochromator is divided into four separate Wien filter stages instead of two, with each stage contributing to the cancellation of dispersion effects. The first pair of Wien filters (W1, W2) cancels positional dispersion, while the second pair (W3, W4) cancels angular dispersion, achieving both energy resolution and spatial resolution uniformity simultaneously

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs asymmetric arrangement of the four Wien filter stages with specific symmetries: W1 and W2 are symmetric with respect to a first plane, W3 and W4 are symmetric with respect to a second plane, and the pairs are symmetric with respect to a third plane. This controlled asymmetry allows independent optimization of energy dispersion cancellation and angular dispersion cancellation

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The four-stage Wien filter monochromator ensures a circular virtual electron source, eliminating anisotropy in spatial resolution and reducing chromatic aberration, resulting in uniform electron beam energy across the sample area, enhancing the quality of TEM and STEM images by minimizing angular dispersion.

Implementation Method 1

The first, second, third, and fourth Wien filters produce electromagnetic fields which are identical in sense and strength

Methodology Applied
Scientific EffectElectromagnetic field: Electric Field

Implementation Method 2

Rays of an electron beam emitted from an electron source 3 are collimated by the electrostatic lens 4 and spectrally dispersed by the Wien filter 5

Methodology Applied
Scientific EffectElectron beam dispersion: Dispersion (of waves)

Implementation Method 3

The electron rays passed through the energy-selecting slit 6 are collimated by the Wien filter 7 and converged into one point by the electrostatic lens 8

Methodology Applied
Scientific EffectElectrostatic lens focusing: Electrostatic Lens

Implementation Method 4

energy dispersion is canceled out at the focal point of the electron rays passed through the monochromator

Methodology Applied
Scientific EffectChromatic aberration correction:

Data Source

PatentEP3758042B1Monochromator and charged particle beam system
Publication Date: 2021.09.08 JEOL LTD
  • EP3758042B1 patent drawingFigure 1
  • EP3758042B1 patent drawingFigure 2
  • EP3758042B1 patent drawingFigure 3

AI summary

There is provided a monochromator capable of reducing angular dispersion in electron rays. In the monochromator (100), a first Wien filter (10) and a second Wien filter (20) are arranged symmetrically with respect to a first plane of symmetry (Ml). A third Wien filter (30) and a fourth Wien filter (40) are arranged symmetrically with respect to a second plane of symmetry (M2). A pair of the first and second Wien filters (10, 20) and a pair of the third and fourth Wien filters (30, 40) are arranged symmetrically with respect to a third plane of symmetry (M3). The first through fourth Wien filters (10, 20, 30, 40) produce their respective electromagnetic fields which are identical in sense and strength.