Wafer-Level Chip-Scale Package Plasma Passivation

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Solution Overview

Problem

The design and implementation of chip-scale packages face challenges due to limited space for electrical circuits within plastic packages, requiring smaller silicon dies and complex manufacturing processes, which affect electrical isolation, humidity protection, and solderability.

Innovation Solution

The development of self-contained chip-scale device packages with a silicon wafer connected to a printed circuit board (PCB) via conductive contacts and an interconnect structure, featuring an electrically isolating plasma coating on sidewalls and non-active sides to mitigate current leakage, allowing for smaller gaps and non-rectangular shapes, and using plasma dicing to facilitate efficient dicing and coating application.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If plastic packages are used for chip packaging, then electrical isolation and protection are improved, but the space available for electrical circuits is reduced

Engineering Contradiction:
Improveelectrical isolationVSAvoidspace for electrical circuits
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The package is divided into functional regions: the silicon die area for electrical circuits and the plastic package body for protection and isolation. This segmentation allows each region to be optimized for its specific function, with the die occupying minimal space while the package provides comprehensive protection.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The silicon die is nested within the plastic package body, with the die being significantly smaller than the package. This nesting arrangement allows the active circuit area to be maximized while the package structure provides the necessary protection and isolation without occupying excessive space.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If lead frame and wire loop are included in plastic packages, then electrical connection is improved, but the space for silicon die is reduced

Engineering Contradiction:
Improveelectrical connectionVSAvoidspace for silicon die
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The invention extracts and eliminates the traditional lead frame and wire loop structures from the package. Instead, electrical connections are achieved through alternative means such as substrate-mounted interconnects or direct die-to-PCB bonding, removing the space-consuming intermediate structures while maintaining electrical connectivity.

Inventive Principle:
Principle #2Taking out (Extraction)

3Productivity

If dicing is performed to separate chip-scale packages, then individual device production is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveindividual device productionVSAvoidmanufacturing process complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The packages are pre-formed as complete units on the silicon wafer before dicing. All necessary components including the die, interconnects, and package structures are prepared in advance on the wafer, allowing for simple and efficient separation through dicing without requiring complex assembly operations after cutting.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of chip-scale packages with improved electrical isolation, protection against humidity and mechanical damage, and efficient manufacturing, allowing for nearly full utilization of the device size for electrical circuits while maintaining high isolation and manufacturability.

Implementation Method 1

an electrically isolating coating, such as a plasma coating, that continuously extends along, and is in contact with, one of sidewalls and the non-active side

Methodology Applied
Scientific EffectPlasma deposition: Plasma

Data Source

PatentUS8853859B2Passivation for wafer level--chip-scale package devices
Publication Date: 2014.10.07 NEXPERIA BV
  • US8853859B2 patent drawing
  • US8853859B2 patent drawing
  • US8853859B2 patent drawing

AI summary

Aspects of the disclosure are directed towards an efficient wafer level chip-scale package, and methods or producing the packages. Various aspects are directed to protecting against humidity, contamination, mechanical damage, and current leakage while maintaining isolation and manufacturability of the plastic package and a ratio of active die size to package size.