Wafer Level Semiconductor Package Dual Shielding Layers EMI Isolation

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Solution Overview

Problem

Current semiconductor packaging solutions, such as shielding or insulating films in leaded or ball grid array packages, provide only partial electromagnetic interference (EMI) isolation, which is inadequate for wafer level packages (WLP) and flip chip packages containing RF and baseband circuits, especially as these packages demand higher integration and efficiency.

Innovation Solution

A wafer level semiconductor package design featuring a substrate with a first and second shielding layer applied to opposite surfaces, mounting RF and baseband modules with solder bumps, and covering these modules with the shielding layers to substantially isolate the baseband module from EMI generated by the RF module, while also serving as a heat sink for improved thermal performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If shielding or insulating film is used in leaded or ball grid array packages, then electromagnetic interference isolation is improved, but the shielding is only partial and effectiveness is limited

Engineering Contradiction:
Improveelectromagnetic interference isolationVSAvoidshielding effectiveness
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The shielding structure is divided into multiple segments: a first shielding layer on the front surface, a second shielding layer on the back surface, and intermediate shielding structures. This segmented approach creates comprehensive EMI isolation that prevents electromagnetic interference from RF circuits from affecting baseband circuits, resolving the limitation of partial shielding in prior art.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements nested shielding layers where the first shielding layer on the front surface, the second shielding layer on the back surface, and intermediate shielding structures are positioned at different depths and levels within the package. This nested configuration creates multiple barriers against EMI, significantly enhancing shielding effectiveness compared to single-layer approaches.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Area of stationary object

If wafer level packages and flip chip packages are used for higher circuit integration, then space efficiency and electrical performance are improved, but practical EMI solutions are limited due to unique layout and structure

Engineering Contradiction:
Improvespace efficiencyVSAvoidelectromagnetic interference protection
Core Design Contradiction:
Area of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The patent applies shielding layers with specific properties at different locations within the WLP structure. The first shielding layer is positioned near RF circuits on the front surface, the second shielding layer is positioned near baseband circuits on the back surface, and intermediate shielding structures are strategically placed. This localized shielding approach provides targeted EMI protection while maintaining the compact WLP form factor.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent extends EMI protection into the vertical dimension by implementing multiple shielding layers at different depths within the package structure. The front surface shielding layer, intermediate shielding structures, and back surface shielding layer create a three-dimensional shielding network that effectively blocks EMI paths while maintaining the thin profile characteristic of WLP packages.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively isolates baseband modules from RF-generated EMI and enhances thermal performance by using shielding layers that absorb and reflect incident electromagnetic interference, providing comprehensive EMI shielding and improved circuit performance in WLP and flip chip packages.

Implementation Method 1

The first and second shielding layers substantially cover the wafer level semiconductor package to isolate the baseband module from electromagnetic interference generated by the RF module

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

The first and second shielding layers substantially cover the wafer level semiconductor package to isolate the baseband module from electromagnetic interference generated by the RF module

Methodology Applied
Scientific EffectReflection (EM radiation): Reflection

Implementation Method 3

The first and second shielding layers substantially cover the wafer level semiconductor package to isolate the baseband module from electromagnetic interference generated by the RF module, while also serving as a heat sink for improved thermal performance

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS7701040B2Semiconductor package and method of reducing electromagnetic interference between devices
Publication Date: 2010.04.20 JCET SEMICON (SHAOXING) CO LTD
  • US7701040B2 patent drawing
  • US7701040B2 patent drawing
  • US7701040B2 patent drawing

AI summary

A wafer level semiconductor package has a substrate and an RF module and baseband module coupled to the substrate with solder bumps. An underfill material is disposed under the RF module and baseband module. A first shielding layer is applied to a first surface of the substrate. A seed layer is deposited on the substrate and RF module and baseband module. A second shielding layer is plated over the seed layer, except over the contact pads on the substrate. The second shielding layer can be made from copper, gold, nickel, or aluminum. The first and second shielding layers substantially cover the wafer level semiconductor package to isolate the baseband module from electromagnetic interference generated by the RF module. The first and second shielding layers are grounded through the substrate.