Workpiece Separating Device with Movable Suction Pads
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Solution Overview
Problem
Existing workpiece-separating devices face challenges in stabilizing and accurately peeling large or thinly thinned laminated bodies with low rigidity, leading to deflection deformation, misalignment, and uneven laser irradiation, which can cause localized damage and poor peeling results.
Innovation Solution
A workpiece-separating device with a holding mechanism that includes both fixed and movable suction pads, allowing for dispersed support and elastic deformation to stabilize the laminated body, combined with a light irradiation system that adjusts for deflection and warpage, ensuring uniform laser exposure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a laminated body with large overall size or thinned thickness is used, then the adaptability of the workpiece-separating device is improved, but the overall rigidity is decreased causing deflection deformation
Solution Approach 1:
The support system is segmented into multiple supporting rods (at least three) that can be independently adjusted. Each supporting rod can be individually positioned and adjusted to accommodate different workpiece sizes and shapes, while collectively providing distributed support to maintain rigidity and prevent deflection deformation
Solution Approach 2:
The supporting rods are made movable and adjustable in position and height. The laser optical system is also movable to dynamically adjust the irradiation distance. This dynamic adjustment capability allows the system to adapt to workpieces with varying rigidity, size, and deformation characteristics, maintaining stable support and consistent laser irradiation throughout the peeling process
2Device complexity
If only three-point support is used for workpieces with warpage deformation, then the device complexity is reduced, but the stability of support is insufficient for workpieces with low overall rigidity
Solution Approach 1:
The supporting rods serve multiple functions: they provide mechanical support, accommodate warpage deformation through vertical movement, and enable stable positioning of workpieces with varying rigidity. The same support structure adapts to different workpiece types (high rigidity with warpage, low rigidity with deflection) without requiring separate support mechanisms
3Adaptability or versatility
If the distance between laser optical system and workpiece varies due to deflection deformation, then the adaptability to different workpiece shapes is improved, but the manufacturing precision of laser irradiation is decreased
Solution Approach 1:
The laser optical system is made movable to dynamically adjust the irradiation distance in real-time during the peeling process. This ensures that the laser beams maintain consistent intensity and focus on the separating layer regardless of workpiece deflection or warpage, preserving manufacturing precision while accommodating shape variations
Solution Approach 2:
The system incorporates feedback control where the position and state of the workpiece are monitored, and the laser optical system position is adjusted accordingly to maintain optimal irradiation conditions. This feedback mechanism ensures consistent laser irradiation precision despite variations in workpiece geometry
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively stabilizes laminated bodies with low rigidity, preventing localized damage and ensuring accurate peeling by reducing deflection deformation and maintaining consistent laser irradiation, resulting in improved peeling accuracy and reduced defects.
Implementation Method 1
a light irradiation part configured to perform the light irradiation on the separating layer through the other of the supporting body or the workpiece
Implementation Method 2
a movable supporting part having, on an end portion, a response suction pad movable in the projection direction and configured to elastically press against one of the workpiece or the supporting body
Data Source
AI summary
A workpiece-separating device includes a holding member configured to detachably hold one of a workpiece or a supporting body of a laminated body and a light irradiation part configured to perform light irradiation on a separating layer, the holding member including: a stage facing one of the workpiece or the supporting body, a fixed supporting part projecting from the stage toward the laminated body and including a still suction pad immovable in a projection direction, and a movable supporting part projecting from the stage toward the laminated body and including a response suction pad that is movable in a projection direction and elastically deformable, a plurality of the fixed supporting parts and a plurality of the movable supporting parts disposed in a dispersed manner, and the plurality of response suction pads project toward the laminated body further than the plurality of still suction pads.