Workpiece Spacing Compensation for Nanometer Motion Accuracy
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Solution Overview
Problem
During precise machining and measurement operations, the vertical spacing between machining and measured workpieces deviates significantly, exceeding allowed nanometer-level precision, which severely reduces measurement or machining accuracy.
Innovation Solution
An operating device comprising a control system, sensors, and a device for compensating spacing, which measures distances between workpieces in both directions, generates control signals to adjust vertical spacing, and compensates for spacing deviations to maintain precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the machining workpiece moves in the horizontal direction with high precision relative to the machined workpiece, then the positioning accuracy in the horizontal direction is improved, but the vertical spacing deviation increases to micron level which exceeds the allowed nanometer-level precision
Solution Approach 1:
The patent employs feedback control by measuring the actual vertical spacing between the machining workpiece and machined workpiece during relative movement, comparing it with the target spacing, and dynamically adjusting the vertical position to compensate for deviations. This closed-loop feedback mechanism ensures that vertical spacing precision is maintained even during high-precision horizontal movement.
Solution Approach 2:
The patent introduces dynamic adjustment capabilities by making the vertical spacing adjustable during the machining process. The system can real-time modify the vertical position of one workpiece relative to the other to compensate for spacing deviations, transforming a static spacing relationship into a dynamically adjustable one that adapts to movement-induced variations.
2Manufacturing precision
If the distance between the machining workpiece and measured workpiece in the vertical direction is maintained at nanometer-level precision, then the measurement or machining accuracy is improved, but the system complexity increases due to the need for real-time compensation mechanisms
Solution Approach 1:
The patent replaces complex mechanical adjustment mechanisms with non-contact measurement and control systems. By using sensors to measure vertical spacing and electronic control systems to actuate adjustments, the patent reduces mechanical complexity while achieving nanometer-level precision through a more integrated sensor-control-actuator system.
Data Source
AI summary
An operating device and a method for compensating a spacing between two workpieces in relative movement, and relate to the fields of measurement, control and precision machining technology are disclosed. In the operating device, a control system controls a first workpiece assembly and a second workpiece assembly to move relative to each other in a first direction and drives a first sensor to move to a target measurement position, and measures a first distance between the first workpiece assembly and the second workpiece assembly by the first sensor; the control system controls the first workpiece assembly and the second workpiece assembly to move relative to each other in a first direction and drives the second sensor to move to the target measurement position, and measures a second distance between the first workpiece assembly and the second workpiece assembly by the second sensor.