X-ray Diffraction Apparatus for Transparent Sapphire Substrates
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Solution Overview
Problem
Conventional X-ray diffraction apparatuses face challenges in accurately specifying the in-plane position of crystal defects, especially in optically transparent substances like sapphire substrates, as they rely on imprecise methods and cannot utilize reflective optical microscopes for measurement.
Innovation Solution
An X-ray diffraction apparatus that combines X-ray topography with optical image-capturing means and video synthesis to generate synthesized video data, allowing for precise specification of in-plane positions within an X-ray topograph, enabling accurate alignment and measurement of crystal defects in transparent samples.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional X-ray diffraction apparatuses are used to measure transparent samples, then the measurement can be performed, but the in-plane position of crystal defects cannot be accurately specified
Solution Approach 1:
The patent combines X-ray topography means with optical image-capturing means into a single integrated apparatus. The X-ray topography provides internal structure information of transparent samples while the optical image-capturing means captures the external appearance and position. By merging these two measurement systems, the patent enables accurate specification of in-plane positions of crystal defects in transparent samples, resolving the contradiction between measurement precision and operational complexity.
Solution Approach 2:
The patent introduces video synthesis means as an intermediary that processes and combines images from both X-ray topography and optical image-capturing means. This intermediary system correlates the internal X-ray structure with the external optical appearance, enabling accurate position specification without requiring complex manual alignment operations. The video synthesis acts as a mediator that automatically integrates the two measurement systems.
2Productivity
If trial and error method is used for alignment, then the measurement can be performed, but the measurement time is excessively long
Solution Approach 1:
The patent performs preliminary action by capturing optical images of the sample before X-ray measurement. The optical image-capturing means records the external appearance and position information in advance, which is then used to guide the X-ray measurement positioning. This preliminary capture of position information eliminates the need for time-consuming trial and error alignment during the actual measurement process.
Solution Approach 2:
The patent implements feedback by using the optical image information to guide and adjust the X-ray measurement positioning. The video synthesis means provides real-time correlation between optical appearance and X-ray internal structure, allowing operators to quickly identify and position defects without repeated trial and error attempts. The feedback loop significantly reduces alignment time and improves measurement efficiency.
3Reliability
If reflective optical microscope is used for transparent samples, then the sample can be observed, but the measurement is not feasible due to optical transparency
Solution Approach 1:
The patent creates a universal measurement system that can handle both opaque and transparent samples. The optical image-capturing means serves as a universal interface that works with reflective optical microscopes for opaque samples while also being adaptable for transparent samples when combined with X-ray topography. This multi-functional approach allows the same apparatus to measure diverse sample types reliably.
Solution Approach 2:
The patent employs a composite measurement approach combining two different measurement techniques (optical imaging and X-ray topography) to measure transparent samples. Just as composite materials combine different material properties, this composite measurement system combines the strengths of optical imaging (for position reference) and X-ray topography (for internal structure) to achieve reliable detection of crystal defects in transparent samples that neither method could achieve alone.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables quick and accurate X-ray measurements by making transparent samples visible through X-ray topography and specifying arbitrary positions within the in-plane region, overcoming the limitations of conventional methods that rely on trial and error for alignment.
Implementation Method 1
X-ray topography is a measurement method devised so that a wide area of a sample is irradiated with X-rays, and the diffracted rays exiting the sample are detected in a plane
Data Source
AI summary
There is provided an X-ray diffraction apparatus comprising an X-ray topography device for providing a spatial geometric correspondence to an X-ray exiting from a planar region of a sample to detect the X-ray as a planar X-ray topograph, and outputting the X-ray topograph as a signal; a two-dimensional imaging device for receiving a light-image of the planar region of the sample and outputting the light-image as a signal specified by planar positional information; and a video-synthesizing arithmetic control device for generating synthesized video data on the basis of an output signal from the X-ray topograph and an output signal from the imaging device.