X-ray Inspection Device Collision Prevention

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Solution Overview

Problem

X-ray inspection failures can occur due to collisions between the X-ray source and specimen, or between the specimen and detector, depending on their relative distances, and achieving broad detection of projected images on the detector is challenging.

Innovation Solution

An X-ray inspection device with a placement unit that allows for precise movement and rotation of the specimen, coupled with a detector system that calculates and adjusts the distance between the X-ray source and specimen to prevent collisions and optimize image projection, using preliminary inspection processes to determine the optimal positioning for effective back projection imaging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the distance between the X-ray source and specimen is reduced to achieve higher projection magnification, then the projection magnification is improved, but collision between the X-ray source and specimen may occur

Engineering Contradiction:
Improveprojection magnificationVSAvoidcollision risk
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The system performs preliminary inspection to acquire projection images at multiple angles before the main inspection. Based on these preliminary images, the control unit calculates the maximum distance in the radial direction from the rotation axis to the specimen surface, and determines the maximum approach distance. This preliminary calculation prevents collision by establishing safe distance limits before the actual high-magnification inspection begins.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The control unit continuously monitors the rotation angle and dynamically adjusts the distance between the X-ray source and specimen based on feedback from the preliminary inspection data. The system uses the calculated maximum approach distance to control the movement of the X-ray source, ensuring it never exceeds the safe distance limit that would cause collision with the rotating specimen.

Inventive Principle:
Principle #23Feedback

2Area of stationary object

If the distance between the specimen and detector is reduced to achieve broader detection range, then the detection range is improved, but collision between the specimen and detector may occur

Engineering Contradiction:
Improvedetection rangeVSAvoidcollision risk
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

During preliminary inspection, the system acquires projection images at multiple rotation angles and calculates the maximum distance in the radial direction from the rotation axis to the specimen surface. Based on this calculation, the control unit determines the maximum approach distance to the detector, ensuring the specimen is positioned optimally for broad detection while maintaining safe clearance to prevent collision during rotation.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If multiple projection images are acquired at different rotation angles to improve inspection accuracy, then the inspection accuracy is improved, but the inspection time and processing load increase

Engineering Contradiction:
Improveinspection accuracyVSAvoidinspection time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The control unit extracts only the necessary information from the multiple projection images acquired during preliminary inspection - specifically, the maximum distance in the radial direction from the rotation axis to the specimen surface. This extracted parameter is sufficient to calculate the maximum approach distance and optimize positioning, avoiding the need to process complete back-projection images or perform complex analyses on all acquired data.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces inspection time and processing load by allowing for accurate extraction of specimen regions without generating back projection images, preventing collisions, and achieving desired projection magnification while ensuring the specimen does not contact device components.

Implementation Method 1

An X-ray apparatus such as that disclosed in the Patent Literature mentioned below, which irradiates a specimen with X-rays and detects transmitted X-rays that have been transmitted through the specimen

Methodology Applied
Scientific EffectX-ray transmission: X-Ray

Data Source

PatentEP3287772B1X-ray inspection device, x-ray inspection method, and method for manufacturing structure
Publication Date: 2023.04.12 NIKON CORP
  • EP3287772B1 patent drawingFigure 1
  • EP3287772B1 patent drawingFigure 2
  • EP3287772B1 patent drawingFigure 3(a)~3(d)

AI summary

The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.