X-ray Spectrometer Slit and Diffraction Mechanism

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Solution Overview

Problem

Conventional X-ray spectrometers face limitations in sensitivity and wavelength resolution when analyzing samples with uniform composition, as they cannot effectively detect X-rays of different wavelengths emitted from various positions within a wide irradiation area, leading to restricted elemental analysis and inability to measure trace elements with high precision.

Innovation Solution

The X-ray spectrometer incorporates a diffraction member, a slit, and a moving mechanism to adjust the angle and distance of the diffraction member and the X-ray linear sensor, allowing for the detection of X-rays of different wavelengths from various positions and enabling adjustable wavelength resolution by changing the slit width, thereby enhancing measurement flexibility and sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If excitation rays are irradiated to a wide area to increase sensitivity, then more characteristic X-rays are generated, but X-rays of different wavelengths from different positions are reflected in the same direction by the spectroscopic crystal, making spectroscopic measurement impossible

Engineering Contradiction:
Improvenumber of characteristic X-raysVSAvoidwavelength resolution
Core Design Contradiction:
Quantity of substanceVSMeasurement precision

Solution Approach 1:

The detection system is segmented by introducing a slit that spatially separates X-rays from different positions on the irradiation area. The slit divides the wide-area emitted X-rays into position-specific beams, allowing each detection element to receive X-rays from a specific position while maintaining wavelength dispersion capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent adds a spatial dimension to the detection system by arranging multiple detection elements in a direction perpendicular to the slit's longitudinal direction. This dimensional arrangement allows simultaneous detection of X-rays from multiple positions while maintaining wavelength resolution through the spectroscopic crystal's diffraction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the spectroscopic crystal is fixed to detect X-rays from a specific position, then wavelength resolution is maintained, but the analysis area is limited and sensitivity decreases

Engineering Contradiction:
Improvewavelength resolutionVSAvoidnumber of detected X-rays
Core Design Contradiction:
Measurement precisionVSQuantity of substance

Solution Approach 1:

The detection system is segmented by introducing a slit that spatially separates X-rays from different positions on the irradiation area. The slit divides the wide-area emitted X-rays into position-specific beams, allowing each detection element to receive X-rays from a specific position while maintaining wavelength dispersion capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The spectroscopic crystal maintains its wavelength dispersion function while the system as a whole achieves multi-position detection capability. The combination of the slit, spectroscopic crystal, and linear sensor array creates a universal system that can detect X-rays from multiple positions simultaneously without sacrificing spectral resolution.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If a wavelength dispersion type method is used to achieve high resolution and accuracy, then elemental analysis precision is improved, but the device complexity increases compared to energy dispersion type

Engineering Contradiction:
Improveelemental analysis accuracyVSAvoidsystem structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces a moving mechanism that can adjust the angle and position of the spectroscopic crystal relative to the sample. This dynamic adjustment capability allows the system to optimize detection for different elements and wavelengths while maintaining the high resolution benefits of wavelength dispersion, making the complex system more adaptable and efficient.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for higher sensitivity and increased degree of freedom in measurements, enabling the detection of X-rays from various positions and wavelengths, and improving the ability to analyze samples with uniform composition and measure trace elements with higher precision.

Implementation Method 1

the characteristic X-rays are diffracted and reflected only when the wavelength of the characteristic X-rays and the incident angle to the spectroscopic crystal satisfy the condition of the Bragg reflection

Methodology Applied
Scientific EffectBragg reflection: Bragg Diffraction

Implementation Method 2

a slit provided between the irradiation area and the spectroscopic crystal and arranged parallel to the irradiation area and a prescribed crystal surface of the spectral crystal

Methodology Applied
Scientific EffectSpatial filtering: Filter (optical)

Implementation Method 3

an X-ray linear sensor provided so that a plurality of detection elements are arranged in a direction perpendicular to the longitudinal direction of the slit

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentUS11112371B2X-ray spectrometer
Publication Date: 2021.09.07 SHIMADZU CORP
  • US11112371B2 patent drawing
  • US11112371B2 patent drawing
  • US11112371B2 patent drawing

AI summary

An X-ray spectrometer is provided with: an excitation source configured to irradiate excitation rays onto an irradiation area of a sample, a diffraction member provided to face the irradiation area; a slit member provided between the irradiation area and the diffraction member, the slit member having a slit extending parallel to the irradiation area and a prescribed surface of the diffraction member; an X-ray linear sensor having a light-incident surface in which a plurality of detection elements are arranged in a direction perpendicular to a longitudinal direction of the slit; a first moving mechanism configured to change an angle between the sample surface and the prescribed surface, and/or a distance between the sample surface and the prescribed surface by moving the diffraction member within a plane perpendicular to the longitudinal direction; and a second moving mechanism configured to position the X-ray linear sensor on a path of characteristic X-rays passed through the slit and diffracted by the prescribed surface by moving the X-ray linear sensor within a plane perpendicular to the longitudinal direction.