Liquid-Cooled X-Ray Target Cartridge for Spot Stability

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Solution Overview

Problem

X-ray source spot sizes in microscopy systems are typically larger than ideal, limiting resolution due to inefficient heat removal from the x-ray target, which affects thermal stability and x-ray output regulation.

Innovation Solution

A liquid-cooled target assembly with a thermally and electrically isolated cartridge, using a triple-walled flight tube assembly to minimize thermal paths and decouple the x-ray target from magnetic lens components, allowing for precise control of x-ray production.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If thermal conduction toward cooling sink is maximized, then heat removal efficiency is improved, but thermal drift of magnetic lens components occurs causing x-ray spot position drift

Engineering Contradiction:
Improveheat removal efficiencyVSAvoidx-ray spot position stability
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

The target assembly is segmented into electrically isolated components: the target itself, the target holder, and the cooling structure. This segmentation allows thermal conduction paths to be separated from electrical conduction paths, enabling efficient heat removal while maintaining electrical isolation and preventing thermal drift of magnetic lens components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

An electrically insulating but thermally conductive intermediate structure (such as a ceramic or polymer matrix with embedded thermal pathways) is introduced between the target and cooling sink. This intermediary enables thermal conduction while blocking electrical conduction, thus improving heat removal efficiency without causing thermal drift of nearby magnetic components.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If target current measurement is implemented for x-ray output regulation, then x-ray production control is improved, but electrical isolation requirements increase system complexity

Engineering Contradiction:
Improvetarget current measurement accuracyVSAvoidelectrical isolation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

An electrically insulating but thermally conductive intermediate structure is introduced between the target and cooling sink. This intermediary enables thermal conduction while blocking electrical conduction, thus improving heat removal efficiency without causing thermal drift of nearby magnetic components.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Volume of moving object

If x-ray target is closely coupled to magnetic lens components, then system compactness is improved, but thermal stability deteriorates

Engineering Contradiction:
Improvesystem compactnessVSAvoidthermal stability
Core Design Contradiction:
Volume of moving objectVSStability of the object's composition

Solution Approach 1:

The target assembly is segmented into electrically isolated components: the target itself, the target holder, and the cooling structure. This segmentation allows thermal conduction paths to be separated from electrical conduction paths, enabling efficient heat removal while maintaining electrical isolation and preventing thermal drift of magnetic lens components.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances thermal conduction while maintaining electrical isolation, reducing thermal drift and improving x-ray source stability and resolution by bringing coolant close to the target, thus minimizing spot-size and enhancing overall performance.

Implementation Method 1

enhances thermal conduction while maintaining electrical isolation

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

A liquid-cooled target assembly with a thermally and electrically isolated cartridge

Methodology Applied
Scientific EffectLiquid cooling: Cooling

Implementation Method 3

bonded to each side of a thin, separating, diamond insulator ring

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 4

diamond insulator ring

Methodology Applied
Scientific EffectElectrical insulation: Thermal Insulation

Data Source

PatentUS12035451B2Method and system for liquid cooling isolated x-ray transmission target
Publication Date: 2024.07.09 CARL ZEISS X-RAY MICROSCOPY INC
  • US12035451B2 patent drawing
  • US12035451B2 patent drawing
  • US12035451B2 patent drawing

AI summary

An x-ray source has a target assembly including a target, an electron source for generating electrons to impact the target, and a flight tube assembly separating the target assembly from the electron source and transporting a coolant to the target assembly. The flight tube assembly includes a flight tube interface ring, a target cartridge tube, and an electrical isolation ring between the flight tube interface ring and the target cartridge tube.