Resonant Pressure Sensor Design for High Linearity
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Summary
Problems
Conventional resonant pressure sensors experience a 'balloon effect' at high static pressures, leading to degraded linearity and measurement precision due to peripheral deformation of the diaphragm, making it difficult to achieve high precision measurements under high static pressure conditions.
Innovation solutions
A resonant pressure sensor design featuring a substrate with a cantilever structure and strain-mitigating holes, where the first and second resonators made of semiconductor material with differing impurity concentrations are used to detect static pressure and temperature, providing high linearity and precision across a wide range of static pressures.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If a conventional diaphragm structure is used in resonant pressure sensors, then the sensor can detect pressure changes through resonance frequency shifts, but the peripheral portion deforms at high static pressures causing the balloon effect and degraded linearity
Why choose this principle:
The substrate is divided into a fixed portion and a separated portion that extends from the fixed portion. The resonator is disposed in the substrate-separated portion, which is separated from the housing-fixed portion by a gap filled with pressure-receiving fluid. This segmentation prevents the resonator from being directly affected by peripheral diaphragm deformation while still allowing it to detect pressure changes through strain in the substrate portion.
Principle concept:
If a conventional diaphragm structure is used in resonant pressure sensors, then the sensor can detect pressure changes through resonance frequency shifts, but the peripheral portion deforms at high static pressures causing the balloon effect and degraded linearity
Why choose this principle:
The substrate portion has different structural characteristics in different regions: the fixed portion is rigidly attached to the housing, while the separated portion is flexible and extends into the pressure-receiving fluid. This local differentiation allows the fixed portion to provide stable mounting while the separated portion responds to pressure changes without suffering from peripheral deformation effects.
Application Domain
Data Source
AI summary:
A resonant pressure sensor design featuring a substrate with a cantilever structure and strain-mitigating holes, where the first and second resonators made of semiconductor material with differing impurity concentrations are used to detect static pressure and temperature, providing high linearity and precision across a wide range of static pressures.
Abstract
A resonant pressure sensor with improved linearity includes: a substrate including a substrate-separated portion separated from a housing-fixed portion; a first resonator that: is disposed in the substrate-separated portion; and detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a second resonator that: is disposed in the substrate; detects a change of a second resonance frequency based on the strain in the substrate; and has a pressure sensitivity of the second resonance frequency; and a processor that: measures the static pressure based on the detected change of the first resonance frequency; and corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.