Pixel Design Enhancing TOF Sensor Precision and Image Quality
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Summary
Problems
Existing TOF sensors and global shutter image sensors face challenges in measurement precision and image quality due to unwanted transfers of photogenerated charges from the photoconversion zone to the charge storage zone, leading to errors in distance measurement and image quality degradation.
Innovation solutions
A pixel design featuring a photoconversion zone in a first part of a semiconductor substrate, with charge storage zones in a physically separated second part, using an insulated vertical electrode to electrically and optically insulate the zones during non-transfer phases, and applying specific polarization potentials to enhance charge storage and reading efficiency.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If charge storage zones are integrated in the same substrate as the photoconversion zone, then device complexity is reduced, but measurement precision deteriorates due to unwanted charge transfers
Why choose this principle:
The pixel is divided into two physically separated parts: a first part containing the photoconversion zone and a second part containing the charge storage zones. These parts are separated by an insulated vertical electrode, preventing unwanted charge transfers while maintaining functional integration within a single pixel structure.
Principle concept:
If charge storage zones are integrated in the same substrate as the photoconversion zone, then device complexity is reduced, but measurement precision deteriorates due to unwanted charge transfers
Why choose this principle:
An insulated vertical electrode is introduced as an intermediary element between the photoconversion zone and charge storage zones. This electrode acts as a barrier that blocks unwanted charge transfers while allowing controlled charge transfer during specific phases through potential application.
Application Domain
Data Source
AI summary:
A pixel design featuring a photoconversion zone in a first part of a semiconductor substrate, with charge storage zones in a physically separated second part, using an insulated vertical electrode to electrically and optically insulate the zones during non-transfer phases, and applying specific polarization potentials to enhance charge storage and reading efficiency.
Abstract
A pixel includes a photoconversion zone, an insulated vertical electrode and at least one charge storage zone. The photoconversion zone belongs to a first part of a semiconductor substrate and each charge storage zone belongs to a second part of the substrate physically separated from the first part of the substrate by the insulated vertical electrode.