An automated sample loading method for a side-mounted sample stage in an electron microscope

The automatic sample loading system with a side-insertion sample stage for electron microscopy solves the problems of instability and mechanical damage in transmission electron microscope sample rod loading technology, and achieves multi-model compatibility and efficient and safe automated sample loading.

CN121601534BActive Publication Date: 2026-04-03DALIAN INSTITUTE OF CHEMICAL PHYSICS CHINESE ACADEMY OF SCIENCES
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Patent Information

Application Number
CN202610133756.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2026-01-30
Publication Date
2026-04-03
Estimated Expiration
2046-01-30

AI Technical Summary

Technical Problem

Existing transmission electron microscope sample rod loading techniques suffer from problems such as operational instability due to reliance on personal experience, easy damage to mechanical structures, and vacuum fluctuations, which affect imaging quality and safety.

Method used

An automated sample loading system with a side-insertion sample stage for electron microscopy is adopted. Through a robotic arm, fixtures, mechanical sensing unit, and vacuum signal acquisition module, combined with multi-source data fusion, the system realizes automated insertion and removal control of the sample rod, advances in stages, and combines vacuum status monitoring to ensure accurate sample loading.

Benefits of technology

It has enabled automated sample introduction for multiple types of transmission electron microscopes, improving sample introduction consistency, safety and efficiency, and reducing mechanical damage and vacuum fluctuations.

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Abstract

This invention provides an automated sample loading method for a side-insertion sample stage in electron microscopy, belonging to the field of automated loading and intelligent control technology for transmission electron microscopy. After coaxially aligning the sample rod and the injection port, a first, second, and third advance are sequentially performed. When a preset first-stage limit condition is met after the first advance, the vacuum state is checked; if it is, a second advance is performed. When a preset second-stage limit condition is met after the second advance, a stable connection is determined; if stable connection is achieved, a third advance is performed. When a preset third-stage limit condition is met after the third advance, the sample loading is complete. This method decomposes the sample loading process into multi-stage advances, using axial contact force, torque, and preset target positions for each stage to determine the state, achieving step-by-step sample loading control. Simultaneously, vacuum state monitoring is used to evaluate the connectivity of the transmission channel, thereby dynamically adjusting the sample loading accuracy and significantly improving sample loading efficiency while ensuring reliability.
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