Material resistivity detection device

By designing a material resistivity testing device and using a driving and guiding mechanism to stabilize the test probe, the problem of testing errors caused by manual operation is solved, thereby improving the accuracy and efficiency of resistivity testing of semiconductor components.

CN224152563UActive Publication Date: 2026-04-21EVIC SEMICONDUCTOR TECHNOLOGY (SHANGHAI) CO LTD
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Patent Information

Application Number
CN202520869067.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-05-06
Publication Date
2026-04-21
Estimated Expiration
2035-05-06

AI Technical Summary

Technical Problem

In existing technologies, the surface resistivity detection of semiconductor component materials is easily affected by manual operation, shaking, and non-parallelism, resulting in large errors in the detection results and low efficiency.

Method used

A material resistivity testing device was designed, including a test probe, a mounting bracket, a drive mechanism, and a guide mechanism. The drive mechanism drives the mounting bracket to move vertically, and the guide mechanism achieves stable clamping and smooth movement of the test probe, reducing manual operation. A four-point probe tester is used to improve accuracy.

Benefits of technology

This improves the accuracy and efficiency of resistivity detection, avoids shaking errors caused by manual operation, and ensures the stability and accuracy of the test results.

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Abstract

The utility model relates to the technical field of semiconductor detection equipment, in particular to a material resistivity detection device, which comprises a test probe, a mounting bracket, a driving mechanism and a guide mechanism, avoids the problem of resistivity detection caused by manual handheld operation, reduces manual operation, improves the accuracy of a resistivity detection result, and improves the working efficiency. The mounting bracket is arranged, so that the test probe can be stably clamped, and detection errors caused by shaking and the like during testing are avoided; the driving mechanism is arranged to drive the mounting bracket to move in the vertical direction, so that the surface of the product is detected by the test probe; and meanwhile, the guide mechanism is arranged, so that the test probe runs more stably, and unfavorable conditions such as shaking are avoided.
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