Carboxylic acid generator, carboxylate, resist composition, and method for producing resist pattern
A carboxylic acid generator with a specific carboxylic acid salt and resin improves CD uniformity in resist patterns, enhancing the quality of resist compositions.
JP2025178233APending Publication Date: 2025-12-05SUMITOMO CHEM CO LTD
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Patent Information
- Application Number
- JP2025086883
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-05-24
- Filing Date
- 2025-05-26
- Publication Date
- 2025-12-05
AI Technical Summary
Technical Problem
Existing resist compositions using carboxylate salts do not achieve satisfactory CD uniformity in resist patterns.
Method used
A carboxylic acid generator containing a carboxylic acid salt represented by a specific formula, along with a resin having acid labile groups and optional additional acid generators, is used to form a resist composition that improves CD uniformity.
Benefits of technology
The resist composition produces resist patterns with enhanced CD uniformity, addressing the limitations of existing compositions.
✦ Generated by Eureka AI based on patent content.
Abstract
To provide a carboxylate, a carboxylic acid generator, and a resist composition which allow a resist pattern having good CD uniformity to be produced.SOLUTION: There are provided: a carboxylic acid generator containing a carboxylate represented by formula (I); and a resist composition. [In the formula, W1 represents a substituted / unsubstituted cyclic hydrocarbon group; L1 represents a single bond or a substituted / unsubstituted hydrocarbon group, L2 represents a substituted / unsubstituted hydrocarbon group, and -CH2- in the groups may be substituted with -O-, -S-, -SO2-, -NR11-, -CO- or the like; R1 and R11 each represent a hydrogen atom or an alkyl group; L3 represents a single bond or an alkanediyl group, and -CH2- in the group may be substituted with -O- or -CO-; R5 represents -X51-R10 or -X52-L11-X51-R10, X51 and X52 each represent -CO-O-, -O-CO- or the like, L11 represents a substituted / unsubstituted hydrocarbon group, and R10 represents an acid-labile group; and Z+ represents an organic cation.]SELECTED DRAWING: None
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