Vibration element and vibration device

The vibrating element addresses the issue of deteriorated performance in piezoelectric devices by routing lead wires orthogonally to the direction of thickness-shear vibration, enhancing vibration characteristics and reducing resistance.

JP7916693B2Active Publication Date: 2026-09-08SEIKO EPSON CORP
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Patent Information

Application Number
JP2022120270
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2022-07-28
Publication Date
2026-09-08
Estimated Expiration
2042-07-28

AI Technical Summary

Technical Problem

Existing piezoelectric vibrating elements suffer from deteriorated vibration characteristics due to lead-out wirings being drawn in the direction of thickness-shear vibration, which affects the lead-out wirings and degrades performance.

Method used

The vibrating element is designed with excitation electrodes on opposing main surfaces, support electrodes on a support portion, and lead wires drawn in a direction orthogonal to the direction of thickness-shear vibration, with the support portion bonded to a base via a conductive adhesive, reducing the impact of vibrations on the lead wires.

Benefits of technology

This configuration suppresses the deterioration of vibration characteristics, such as Q value and Crystal Impedance, by minimizing the effect of thickness-sliding vibrations on the lead wires, while also reducing wiring resistance and parasitic capacitance.

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Abstract

To provide a vibration element and a vibration device that can prevent a deterioration in vibration characteristics.SOLUTION: A vibration element comprises a vibration part 110, a support part 120, and a connection part 130, and also comprises: a first excitation electrode 21 that is provided on a first principal face 101; a second excitation electrode 22 that is provided on a second principal face 102 and excites thickness slip vibration displaced along an X-direction with the first excitation electrode 21; a first support electrode 23 that is provided on the support part 120 and electrically connected with the first excitation electrode 21; a second support electrode 24 that is provided on the support part 120 and electrically connected with the second excitation electrode 22; a first lead-out wire 21a that is led out from the first excitation electrode 21 along a Z-direction and electrically connects the first excitation electrode 21 and the first support electrode 23 to each other; and a second lead-out wire 22a that is led out from the second excitation electrode 22 along the Z-direction and electrically connects the second excitation electrode 22 and the second support electrode 24 to each other.SELECTED DRAWING: Figure 3
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