Electrostatic chuck

The electrostatic chuck's innovative heating element layout with varying line widths in different regions addresses temperature control challenges by ensuring precise temperature adjustment and uniformity, even with manufacturing defects, enhancing substrate processing accuracy.

WO2026062970A1 Publication Date: 2026-03-26TOTO LTD
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Patent Information

Application Number
PCT/JP2025/019427
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-09-17
Filing Date
2025-05-29
Publication Date
2026-03-26

AI Technical Summary

Technical Problem

Existing electrostatic chucks face challenges in precisely adjusting the temperature distribution, particularly in the outer peripheral portion of substrates, due to manufacturing defects that can cause irregularities in the line width of heating elements, leading to deviations in heat generation and temperature control.

Method used

The electrostatic chuck is designed with heating elements that are individually routed in non-overlapping regions, with narrower line widths in the outermost regions to increase heat-generating element density, allowing for precise temperature control by ensuring nearby elements can compensate for any abnormalities, and wider line widths in inner regions for easier formation.

Benefits of technology

This design enables precise temperature control of the substrate's outer peripheral portion by minimizing local temperature deviations and facilitating uniform temperature distribution across the substrate, even in the presence of manufacturing defects.

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Abstract

Provided is an electrostatic chuck capable of performing precise temperature adjustment by a heater. An electrostatic chuck 10 comprises a dielectric substrate 100 and a heater unit 300 that heats the dielectric substrate 100. In a top view, the heater unit 300 has heating parts 331 that are respective conductors routed individually and linearly in a plurality of regions HA divided so as not to overlap each other. The plurality of regions HA include a first region HA1 disposed at a position on the outermost peripheral side, and a second region HA2 disposed at a position on the inner peripheral side of the first region HA1. The line width of the heating part 331 routed in the first region HA1 is smaller than the line width of the heating part 331 routed in the second region HA2.
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