Detection system of large-aperture optical aspherical mirror

An aspherical mirror and detection system technology is applied in the direction of using optical devices, measuring devices, instruments, etc., to achieve the effects of short detection preparation period, taking into account performance, and simple structure

CN102997864BInactive Publication Date: 2015-06-17BEIJING INSTITUTE OF TECHNOLOGYGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2015-06-17
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a detection system of a large-aperture optical aspherical mirror. The detection system comprises an interferometer, a standard spherical transmittance lens, a one-dimensional electronic-control shift platform, a five-dimensional electric-control precision platform and a computer numerical control system. Relative positions of the interferometer and a detected aspheric surface are adjusted by controlling the one-dimensional electronic-control shift platform and the five-dimensional electric-control precision platform by a computer to detect the aspheric surface. In a detection process, comparison spherical waves emitted by the interferometer are matched with an inscribed circle corresponding to the detected aspheric surface to produce a series of identifiable sub-aperture interference fringes, and store wave-path difference data corresponding to the interference fringes; are extracted, and surface shape errors of the detected aspheric surface are reconstructed through a sub-aperture splicing algorithm after the sub-aperture wave-path difference data are preprocessed. According to the detection system, a compensator and a high-precision electronic-control shift platform are not needed to be designed and manufactured, an effective means is provided for detecting large-aperture and relative large-aperture aspheric surface, and wide application prospects are provided.
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Description

technical field

[0001] The invention relates to an optical aspheric surface detection system, in particular to a large-caliber optical aspheric surface mirror detection system, which belongs to the technical field of advanced optical manufacturing and detection. technical background

[0002] With the continuous development of advanced optical processing and detection technology, precision optical systems with aspheric surfaces as key components have been more and more widely used in many fields such as celestial observation, space remote sensing systems and powerful laser weapons. The use of aspheric elements in optical design has advantages that spherical mirrors cannot match, such as increasing the freedom of optical design, improving image quality, simplifying structure, and reducing weight. However, the core idea of ​​modern large and medium-sized optical aspheric mirror manufacturing technology is deterministic processing, which requires quantitative detection and corre...

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Embodiment Construction

[0029] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0030] Such as figure 1 It is a device of a large-aperture optical aspheric environment detection system of the present invention, including an interferometer 3, a standard spherical transmission lens 4, a one-dimensional electronically controlled translation stage 5, a five-dimensional precision electronically controlled platform 6, and a computer numerical control system 7. The measuring aspheric surface 1 is fixed on the five-dimensional precision electric control platform 6, the interferometer 3 is fixed on the one-dimensional electric control translation platform 5, the standard spherical transmission lens 4 is installed on the interferometer 3, and a computer numerical control system 7 can control a The three-dimensional electronically controlled translation stage 5 drives the interferometer 3 to move along the symmetrical axis of the m...