Digital Michelson Interferometer Automatic Measuring System and Method

A measurement system and interferometer technology, applied in the fields of electronics and sensing, precision optical instruments, and mechanical automation, can solve the problems of sensitivity to changes in light source intensity, high technical requirements, and cumbersome installation process, so as to achieve clear interference fringes and eliminate the need for Computer configuration, the effect of improving cost performance

CN105606231BInactive Publication Date: 2019-01-18黎碧莲 +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2019-01-18
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a digital display type Michelson interferometer automatic measurement system and method. The system comprises a fine tuning handwheel driving apparatus, an interference ring measurement apparatus, a control digital display host, a Michelson interferometer and an interference fringe observation screen, wherein the fine tuning handwheel driving apparatus clamps a fine tuning handwheel of the Michelson interferometer to drive the fine tuning handwheel to rotate synchroneously to enable a moving mirror of the Michelson interferometer to go forward or backward; the interference ring measurement apparatus is arranged on the interference fringe observation screen and is connected with the fine tuning handwheel driving apparatus; and the control digital display host is connected with the fine tuning handwheel driving apparatus. The system provided by the invention is exquisite and reasonable in structure and convenient to use, satisfies the requirement of a Michelson interferometer for stable operation during work, ensures measurement precision of the Michelson interferometer and also has the advantages of wider application, higher cost performance and the like compared to similar products.
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Description

technical field

[0001] The invention relates to an interferometer automatic measurement system and method, in particular to a digital display Michelson interferometer automatic measurement system and method, belonging to the fields of precision optical instruments, mechanical automation, electronics and sensing. Background technique

[0002] The traditional measurement method of the Michelson interferometer is to rotate the fine-tuning handwheel to drive the moving mirror displacement of the instrument to change the optical path difference of the interfering light, so that the circular fringes of equi-inclination interference are constantly "spitting out" from the center or "swallowing" toward the center. , by recording the number of throughput changes of the interfering circular fringes and the displacement of the corresponding moving mirror, and through complex step-by-step data processing, the measurement results can be obtained. Manual operation generally needs to count ...

Examples

Embodiment 1

[0051] Such as figure 1 As shown, the digital display Michelson interferometer automatic measurement system of this embodiment includes a fine-tuning handwheel drive device 1, an interference ring measurement device 2, a control digital display host 3, a Michelson interferometer 4, and an interference fringe observation screen 5. The interference ring measurement device 2 is set on the interference fringe observation screen 5 and connected with the fine-tuning handwheel driving device 1 , and the control digital display host 3 is connected with the fine-tuning handwheel driving device 1 .

[0052] Such as Figure 1 to Figure 5 As shown, the fine-tuning handwheel driving device 1 can realize the clockwise and counterclockwise rotation of the fine-tuning handwheel 6, and record the displacement of the moving mirror, drive the fine-tuning handwheel 6 to rotate, and the measurement accuracy of the moving mirror displacement is 0.1 μm; the fine-tuning handwheel The driving device ...