A precision cutting micro-nanomechanical testing experimental platform and method
By using a precision cutting micro-nanomechanical testing experimental platform during the cutting process, the mechanical and thermal parameters during the cutting process are detected in real time, and the problem that the existing technology cannot measure and accurately characterize the cutting state of the material is solved, achieving detailed research on the cutting process and support for high-quality surface formation.
Patent Information
- Application Number
- CN202010095256.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-02-16
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2040-02-16
AI Technical Summary
The existing research methods for characterizing material properties during cutting processing cannot achieve in-position measurement, and the mechanical performance testing methods cannot accurately characterize the actual cutting state of the material, making it difficult to meet the research needs during cutting processing.
It provides a precision cutting micro-nanomechanical testing experimental platform, including three-axis ultra-precision machine tools, three-way micro-moving tables, three-way force measuring instruments, laser displacement sensors, high-speed cameras and thermal imagers. By detecting the contact and action mechanism between the tool and the material during cutting processing, cutting formation, deformation and fracture laws, material deformation flow mechanism, and the impact of force and heat behavior on processing damage.
Real-time observation and measurement of the cutting surface formation process, chip deformation and fracture, cutting force, cutting temperature, cutting depth, cutting vibration, etc. during the cutting experiment, providing a platform and method support for the research of material removal mechanism, high-quality cutting surface formation mechanism, chip deformation and fracture laws, etc., and meeting the research needs in the cutting process.
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Figure CN111230592B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of material micromechanics testing, and in particular to a precision cutting micro-nanomechanics testing experimental platform and method. Background Art
[0002] Due to its strong adaptability and high production efficiency, it is not limited by the material, size and quality of parts, and can obtain better processing surface and processing accuracy. It is a common method in ultra-precision processing of materials. However, for hard and brittle difficult-to-process metal materials with high hardness and density such as tungsten alloy and titanium alloy, due to the problems of large cutting force, high temperature in the cutting area and severe tool wear during the processing, it is easy to cause processing defects such as pits and microcracks on the material processing surface.
[0003] In order to obtain a high-quality machined surface, it is particularly necessary to study the mechanical and thermal behavior, material removal mechanism and damage formation mechanism during ultra-precision machining, including the contact and action mechanism between the tool and the material during the cutting process, the cutting formation, deformation and fracture rules, the deformation and flow mechanism of the material, and the influence of mechanical and thermal behavior on machining damage.
[0004] The existing research methods for characterizing material properties during cutting processing mainly use residual stress analysis systems to detect residual stress on the processed surface, ultra-depth-of-field three-dimensional stereo microscopes or scanning electron microscopes to observe the microstructure of the processed surface, and roughness meters to detect surface roughness. However, the above detection methods are mainly for testing the surface after processing and cannot achieve in-situ measurement. The existing research methods for in-situ mechanical property testing of materials mainly use scanning electron microscopes, atomic force microscopes and other instruments to dynamically monitor the microscopic deformation and destruction process of the material under load during mechanical property testing such as tension and compression of the sample material at the micro-nanoscale. However, the mechanical property testing method cannot accurately characterize the actual cutting state of the material and is difficult to meet the research needs during the cutting process. Summary of the invention
[0005] The technical problem to be solved by the present invention is that the existing research methods for characterizing material properties in the cutting process mainly detect the surface after processing, such as the cutting surface roughness, and cannot achieve in-situ measurement. In addition, the mechanical properties testing method cannot accurately characterize the actual cutting state of the material, and it is difficult to meet the research needs in the cutting process.
[0006] In order to solve the above technical problems, the present invention provides a precision cutting micro-nanomechanical testing experimental platform and method, which provides a research basis for obtaining higher quality machined surfaces by online detecting the contact and action mechanism between the tool and the material during the cutting process, the cutting formation, deformation and fracture laws, the material deformation and flow mechanism, the influence of mechanical and thermal behavior on processing damage, etc.
[0007] The present invention is achieved through the following technical solutions:
[0008] The present invention provides a precision cutting micro-nanomechanics test experimental platform, comprising: a three-axis ultra-precision machine tool, a three-axis micro-motion platform, a three-axis dynamometer, a laser displacement sensor, a high-speed camera, and a thermal imager; the three-axis micro-motion platform is installed on the three-axis dynamometer, the three-axis dynamometer is fixed on the workbench of the three-axis ultra-precision machine tool, and the laser displacement sensor, the high-speed camera, and the thermal imager are focused on the cutting position;
[0009] During the cutting process, the three-axis dynamometer collects the changing process data of the cutting force, the laser displacement sensor collects the vibration data, the high-speed camera collects the chip breakage and separation data, and the thermal imager collects the changing process data of the cutting temperature.
[0010] Working principle: The precision cutting micro-nanomechanics test experimental platform provided by the present invention includes a motion system and a test system. The motion system includes a three-axis ultra-precision lathe and a three-axis micro-motion table; the test system includes a laser displacement sensor, a high-speed camera, a thermal imager, and a three-axis dynamometer. The laser displacement sensor focuses on the cutting part to collect vibration data during the tool scratching process; the high-speed camera focuses on the cutting part to obtain the chip fracture and separation during the scratching process; the thermal imager focuses on the cutting part to obtain the change process of the scratching temperature during the scratching process; the three-axis dynamometer is fixed on the workbench of the three-axis ultra-precision lathe to detect the change process of the scratching force during the scratching process. The present invention uses a three-axis ultra-precision lathe, in conjunction with a laser displacement sensor, a high-speed camera, a thermal imager and a three-axis dynamometer, to observe and measure the cutting surface formation process, chip deformation and fracture, cutting force, cutting temperature, cutting depth, cutting vibration, etc. during the cutting experiment, providing a platform and method support for the study of material removal mechanism, high-quality cutting surface formation mechanism, chip deformation and fracture law, etc.
[0011] A further preferred solution is that the three-axis ultra-precision machine tool is placed in an ultra-precision machining laboratory, the temperature of the ultra-precision machining laboratory is controlled at 20±0.1°C, the humidity is controlled at 35±5%, and the cleanliness is controlled at above Class 800. The three-axis ultra-precision machine tool includes a machine tool spindle, a machine tool X-axis, and a machine tool Z-axis. The displacements of the three-axis micro-motion table are: X-axis displacement, Y-axis displacement, and Z-axis displacement. The displacement stroke of the three-axis micro-motion table in each direction is 5mm and the resolution is 10nm. The machine tool spindle speed controls the cutting speed, and the cutting depth and scratch shape are controlled by adjusting the machine tool spindle speed, the movement speed and displacement of the machine tool X-axis and machine tool Z-axis, and the displacement of the three-axis micro-motion table. The sampling frequency range of the laser displacement sensor is 100hz-1Mhz.
[0012] Furthermore, the present invention also provides a precision cutting micro-nanomechanical testing experimental method, which specifically includes the following steps:
[0013] S1. Ensure that the working characteristics of each axis system of the three-axis ultra-precision machine tool are normal, and preheat the three-axis ultra-precision lathe until the lathe reaches thermal stability; install the tool of the ultra-precision lathe and complete the dynamic balance adjustment of the tool;
[0014] S2 installs the sample on a three-way micro-motion table, which is installed on a three-way dynamometer; the tool setting process is achieved by adjusting the three-way micro-motion table;
[0015] S3, turning on the three-axis dynamometer, laser displacement sensor, high-speed camera, and thermal imager; focusing the laser displacement sensor, high-speed camera, and thermal imager on the cutting position of the three-axis ultra-precision machine tool to monitor the cutting process;
[0016] S4, the ultra-precision lathe drives the tool to rotate, controls the feed so that the tool is aligned with the sample, and conducts cutting tests at different speeds, different cutting depths, and different scratch shapes;
[0017] S5. Collect real-time on-site measurement data during the experiment; collect force change data during the sample cutting process through a three-axis dynamometer; obtain cutting vibration signal data of the tool during the cutting process through a laser displacement sensor; obtain temperature change data during the sample cutting process through a thermal imager; and observe the sample cutting process through a high-speed camera.
[0018] A further preferred solution is that the three-axis ultra-precision machine tool includes a machine tool spindle, a machine tool X-axis, and a machine tool Z-axis. The displacements of the three-axis fine-motion stage are respectively: X-axis displacement, Y-axis displacement, and Z-axis displacement. The three-axis fine-motion stage has an X-axis displacement stroke of 5mm and a resolution of 10nm; the three-axis fine-motion stage has a Y-axis displacement stroke of 5mm and a resolution of 10nm; the three-axis fine-motion stage has an X-axis displacement stroke of 5mm and a resolution of 10nm.
[0019] A further preferred solution is that when the machine tool spindle rotates one circle, the machine tool X-axis and the machine tool Z-axis remain stationary, and an arc-shaped scratch is obtained. The cutting depth is changed by adjusting the Y-axis displacement of the three-axis micro-motion table; the machine tool spindle speed is adjusted to obtain scratches at different cutting speeds;
[0020] Every time the machine tool spindle rotates one circle, the machine tool X-axis moves a distance of L, and a wavy scratch will be obtained. The distance between the highest points of each wave is L; the scratch depth can be changed by adjusting the Y-axis displacement of the three-way micro-motion table; by adjusting the machine tool spindle speed and the machine tool X-axis movement speed, scratches under different cutting speeds can be obtained;
[0021] Every time the machine tool spindle rotates one circle, the machine tool X-axis moves L distance and the machine tool Z-axis moves m distance. After two movements, three parallel scratches can be obtained, and the distance between two adjacent parallel lines is m. The Y-axis displacement of the three-way micro-motion table can be adjusted to change the scratch depth. By adjusting the machine tool spindle speed, the machine tool X-axis movement speed, and the machine tool Z-axis movement speed, scratches under different cutting speeds can be obtained.
[0022] For those hard, brittle and difficult-to-process metal materials with high hardness and density, due to the problems of large cutting force, high temperature in the cutting area and severe tool wear during the processing, it is easy to cause processing defects such as pits and microcracks on the material processing surface.
[0023] In order to obtain a high-quality machined surface, it is particularly necessary to study the mechanical and thermal behavior, material removal mechanism and damage formation mechanism during ultra-precision machining. This includes the contact and action mechanism between the tool and the material during the cutting process, the cutting formation, deformation and fracture rules, the material deformation flow mechanism, and the influence of mechanical and thermal behavior on machining damage. The existing cutting process usually analyzes the material properties on the surface of the material after processing or conducts inspections, which is difficult to meet the requirements of analysis during the cutting process.
[0024] The precision cutting micro-nanomechanics test experimental platform provided by the present invention includes a motion system and a test system. The motion system includes a three-axis ultra-precision lathe and a three-axis micro-motion table; the three-axis ultra-precision machine tool includes a machine tool spindle, a machine tool X-axis, and a machine tool Z-axis. During the experiment, the tool is installed on the spindle through a fixture, and the tool rotates with the spindle. The sample is installed on the three-axis micro-motion table, and the height of the sample can be precisely fine-tuned through the micro-motion table. The three-axis micro-motion table is installed on a three-axis dynamometer.
[0025] The test system includes a laser displacement sensor, a high-speed camera, a thermal imager, and a three-axis dynamometer. The laser displacement sensor focuses on the cutting part to collect vibration data during the tool scratching process; the high-speed camera focuses on the cutting part to obtain the chip breakage and separation during the scratching process; the thermal imager focuses on the cutting part to obtain the change process of the scratching temperature during the scratching process; the three-axis dynamometer is fixed on the workbench of the three-axis ultra-precision lathe to detect the change process of the scratching force during the scratching process.
[0026] Through online detection of the contact and action mechanism between the tool and the material during the cutting process, the cutting formation, deformation and fracture laws, the material deformation and flow mechanism, and the influence of mechanical and thermal behavior on processing damage.
[0027] The present invention uses an ultra-precision lathe in combination with a laser displacement sensor, a high-speed camera, a thermal imager and a three-axis dynamometer to observe and measure the cutting surface formation process, chip deformation and fracture, cutting force, cutting temperature, cutting depth, cutting vibration, etc. during the cutting experiment, providing a platform and method support for the study of material removal mechanism, high-quality cutting surface formation mechanism, chip deformation and fracture law, etc.
[0028] Compared with the prior art, the present invention has the following advantages and beneficial effects:
[0029] 1. The present invention provides a precision cutting micro-nanomechanical test experimental platform and method, which can be used with laser displacement sensors, high-speed cameras, thermal imagers and three-axis dynamometers to observe and measure the cutting surface formation process, chip deformation and fracture, cutting force, cutting temperature, cutting depth, cutting vibration, etc. during the cutting experiment, providing a platform and method support for the study of material removal mechanism, high-quality cutting surface formation mechanism, chip deformation and fracture law, etc.;
[0030] 2. The present invention provides a precision cutting micro-nanomechanical testing experimental platform and method, which dynamically monitors the actual cutting state during the cutting process and can meet the research needs during the cutting process. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] The drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the drawings:
[0032] Figure 1 It is a schematic diagram of the assembly of the present invention.
[0033] Marks and corresponding parts names in the attached drawings:
[0034] 1- three-axis ultra-precision machine tool, 2- three-axis micro-motion table, 3- three-axis dynamometer, 4- laser displacement sensor, 5- high-speed camera, 6- thermal imager, 7- machine tool spindle, 8- machine tool X-axis, 9- machine tool Z-axis, 10- specimen, 11- diamond tool.
[0035] Figure 2 Schematic diagram of cutting scratch A.
[0036] 12- Cutting scratch A.
[0037] Figure 3 Schematic diagram of cutting scratch B.
[0038] 13- Cutting scratch B.
[0039] Figure 4 Schematic diagram of cutting scratch C.
[0040] 14- Cutting scratch C.
[0041] Figure 5 Schematic diagram of cutting force test during the experimental process.
[0042] Figure 6 Schematic diagram of tool vibration test during the experimental process. DETAILED DESCRIPTION
[0043] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The exemplary embodiments of the present invention and their description are only used to explain the present invention and are not intended to limit the present invention.
[0044] Example 1
[0045] A precision cutting micro-nanomechanical test experimental platform, the main device diagram is as follows Figure 1 As shown, it includes a three-axis ultra-precision machine tool 1, a three-axis micro-motion table 2, a three-axis dynamometer 3, a laser displacement sensor 4, a high-speed camera 5, and a thermal imager 6; the three-axis micro-motion table 2 is installed on the three-axis dynamometer 3, the three-axis dynamometer is fixed on the workbench of the three-axis ultra-precision machine tool 1, and the laser displacement sensor 4, the high-speed camera 5, and the thermal imager 6 are focused on the cutting position. The three-axis ultra-precision machine tool 1 includes a machine tool spindle 7, a machine tool X-axis 8, and a machine tool Z-axis 9. During the cutting process, the three-axis dynamometer 3 collects the changing process data of the cutting force, the laser displacement sensor 4 collects the vibration data, the high-speed camera 5 collects the chip fracture and separation situation, and the thermal imager 6 collects the changing process data of the cutting temperature.
[0046] The displacements of the three-axis fine-motion stage 2 are: X-axis displacement, Y-axis displacement, and Z-axis displacement of the three-axis fine-motion stage 2. The displacement stroke of each direction of the three-axis fine-motion stage is 5 mm and the resolution is 10 nm.
[0047] The cutting speed is controlled by the rotation speed of the machine tool spindle 7, and the cutting depth and scratch shape are controlled by adjusting the rotation speed of the machine tool spindle 7, the movement speed and displacement of the machine tool X-axis 8 and the machine tool Z-axis 9, and the displacement of the three-way micro-motion table 2.
[0048] like Figure 2 As shown, when the machine tool spindle 7 rotates one circle, the machine tool X-axis 8 and the machine tool Z-axis 9 do not move, and an arc-shaped scratch will be obtained. The scratch depth can be changed by adjusting the Y-direction displacement of the three-way micro-motion table 2; the spindle speed can be adjusted to obtain scratches at different cutting speeds;
[0049] like Figure 3As shown, when the machine tool spindle 7 rotates one circle, the machine tool X-axis 8 moves a distance of L, and a wavy scratch is obtained, and the distance between the highest points of each two waves is L; the scratch depth is changed by adjusting the Y-direction displacement of the three-way micro-motion table 2; and scratches under different cutting speeds are obtained by adjusting the rotation speed of the machine tool spindle 7 and the movement speed of the machine tool X-axis 8;
[0050] like Figure 4 As shown, when the machine tool spindle 7 rotates one circle, the machine tool X-axis 8 moves a distance of L and the machine tool Z-axis 9 moves a distance of m. After two movements, three parallel scratches can be obtained, and the distance between two adjacent parallel lines is m; the scratch depth can be changed by adjusting the Y-direction displacement of the three-way micro-motion table 2; and scratches under different cutting speeds can be obtained by adjusting the rotation speed of the machine tool spindle 7, the movement speed of the machine tool X-axis 8, and the movement speed of the machine tool Z-axis 9.
[0051] The sampling frequency range of the laser displacement sensor 4 is 100hz-1Mhz. The ultra-precision machine tool is placed in an ultra-precision machining laboratory, the temperature of which is controlled at 20±0.1℃, the humidity at 35±5%, and the cleanliness at 800 or above.
[0052] Example 2
[0053] The method for implementing the above-mentioned precision cutting micro-nanomechanical testing experimental platform specifically includes the following steps:
[0054] S1. Ensure that the working characteristics of each axis system of the three-axis ultra-precision machine tool are normal, and preheat the ultra-precision lathe until the lathe reaches thermal stability; install the tool of the ultra-precision lathe and complete the dynamic balance adjustment of the tool;
[0055] S2 installs the sample on a three-way micro-motion table, which is installed on a three-way dynamometer; the tool setting process is achieved by adjusting the three-way micro-motion table;
[0056] S3, turning on the three-axis dynamometer, laser displacement sensor, high-speed camera, and thermal imager; focusing the laser displacement sensor, high-speed camera, and thermal imager on the cutting position of the three-axis ultra-precision machine tool to monitor the cutting process;
[0057] S4. The ultra-precision lathe drives the tool to rotate, controls the feed so that the tool is aligned with the sample for cutting, and conducts cutting tests at different speeds, different cutting depths, and different scratch shapes;
[0058] S5. Collect real-time on-site measurement data; collect force change data during the cutting process of the sample through a three-axis dynamometer; obtain cutting vibration signal data of the tool during the cutting process through a laser displacement sensor; obtain temperature change data during the cutting process of the sample through a thermal imager; and observe the cutting process of the sample through a high-speed camera.
[0059] During the experiment, the diamond tool 11 is mounted on the spindle 3 through a fixture. The diamond tool 11 rotates with the spindle 7 of the machine tool. The sample 10 is mounted on the three-way fine-motion stage 2. The height of the sample 11 can be precisely adjusted by the three-way fine-motion stage 2. The three-way fine-motion stage 2 is mounted on the three-way dynamometer 3. The laser displacement sensor 4 is focused on the diamond tool bar to collect vibration data of the diamond tool 11 during the scratching process. The collected diamond tool vibration data is as follows: Figure 5 As shown; the high-speed camera 5 is used to obtain the chip breakage and separation during the cutting process; the thermal imager 6 can obtain the change process of the cutting temperature during the scratching process; the three-axis dynamometer 3 is fixed on the workbench of the three-axis precision lathe 1 to detect the change process of the cutting force during the cutting process, and the obtained cutting force test is as follows Figure 6 shown.
[0060] The cutting speed is controlled by the rotation speed of the machine tool spindle 7, and the cutting depth and scratch shape are controlled by adjusting the rotation speed of the machine tool spindle 7, the movement speed and displacement of the machine tool X-axis 8 and the machine tool Z-axis 9, and the displacement of the three-way micro-motion table 2.
[0061] When the machine tool spindle 7 rotates one circle, the machine tool X-axis 8 and the machine tool Z-axis 9 do not move, and an arc-shaped scratch will be obtained. The scratch depth can be changed by adjusting the Y-direction displacement of the three-way micro-motion table 2; the spindle speed can be adjusted to obtain scratches at different cutting speeds;
[0062] Each time the machine tool spindle 7 rotates one circle, the machine tool X-axis 8 moves a distance of L, and a wavy scratch is obtained, and the distance between the highest points of each two waves is L; the scratch depth can be changed by adjusting the Y-direction displacement of the three-way micro-motion table 2; by adjusting the speed of the machine tool spindle 7 and the movement speed of the machine tool X-axis 8, scratches under different cutting speeds can be obtained;
[0063] Every time the machine tool spindle 7 rotates one circle, the machine tool X-axis 8 moves a distance of L and the machine tool Z-axis 9 moves a distance of m. After two movements, three parallel scratches can be obtained, and the distance between two adjacent parallel lines is m; the scratch depth can be changed by adjusting the Y-direction displacement of the three-way micro-motion table 2; scratches under different cutting speeds can be obtained by adjusting the rotation speed of the machine tool spindle 7, the movement speed of the machine tool X-axis 8, and the movement speed of the machine tool Z-axis 9.
[0064] The three-axis micro-motion stage 2 used in this embodiment has an X / Y / Z travel of 5mm / 5mm / 5mm respectively and a resolution of 10nm; the laser displacement sensor 4 has a sampling frequency range of 100hz-1Mhz and is a non-contact capacitive principle precision measuring instrument with the advantages of high signal-to-noise ratio, high sensitivity, wide frequency response, small nonlinearity, good accuracy and stability, strong anti-electromagnetic interference ability and easy operation.
[0065] The cutting speed can be arbitrarily selected within the maximum speed of the three-axis ultra-precision machine tool spindle 7, and the scratching depth can be set by the Y-axis feed of the three-way micro-motion table 2. The accuracy of the scratching depth depends on the adjustment accuracy of the three-way micro-motion table 2.
[0066] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A precision cutting micro-nanomechanical test experimental method, based on a precision cutting micro-nanomechanical test experimental platform, specifically includes the following steps: S1. Ensure that the working characteristics of each axis system of the three-axis ultra-precision machine tool are normal, and preheat the three-axis ultra-precision lathe until the lathe reaches thermal stability; install the tool of the ultra-precision lathe and complete the dynamic balance adjustment of the tool; S2 installs the sample on a three-way micro-motion table, which is installed on a three-way dynamometer; the tool setting process is achieved by adjusting the three-way micro-motion table; S3, turning on the three-axis dynamometer, laser displacement sensor, high-speed camera, and thermal imager; focusing the laser displacement sensor, high-speed camera, and thermal imager on the cutting position of the three-axis ultra-precision machine tool to monitor the cutting process; S4, the ultra-precision lathe drives the tool to rotate, controls the feed so that the tool is aligned with the sample, and conducts cutting tests at different speeds, different cutting depths, and different scratch shapes; S5. Collect real-time on-site measurement data during the experiment; collect force change data during the cutting process of the sample through a three-axis dynamometer; obtain cutting vibration signal data of the tool during the cutting process through a laser displacement sensor; obtain temperature change data during the cutting process of the sample through a thermal imager; observe the cutting process of the sample through a high-speed camera; The precision cutting micro-nanomechanics test experimental platform includes: A three-axis ultra-precision machine tool (1), a three-axis micro-motion table (2), a three-axis dynamometer (3), a laser displacement sensor (4), a high-speed camera (5), and a thermal imager (6); the three-axis micro-motion table (2) is mounted on the three-axis dynamometer (3), the three-axis dynamometer is fixed on the workbench of the three-axis ultra-precision machine tool (1), and the laser displacement sensor (4), the high-speed camera (5), and the thermal imager (6) are focused on the cutting position; During the cutting process, the three-axis dynamometer (3) collects data on the change of cutting force, the laser displacement sensor (4) collects vibration data, the high-speed camera (5) collects the chip breakage and separation conditions, and the thermal imager (6) collects data on the change of cutting temperature; The three-axis ultra-precision machine tool includes a machine tool spindle, a machine tool X-axis, and a machine tool Z-axis; The displacements of the three-axis fine-motion stage are: X-axis displacement, Y-axis displacement, and Z-axis displacement. The displacement stroke of the three-axis fine-motion stage in the X-axis is 5mm, and the resolution is 10nm; the displacement stroke of the three-axis fine-motion stage in the Y-axis is 5mm, and the resolution is 10nm; the displacement stroke of the three-axis fine-motion stage in the Z-axis is 5mm, and the resolution is 10nm; The speed of the machine tool spindle (7) controls the cutting speed, and the cutting depth and scratch shape are controlled by adjusting the speed of the machine tool spindle (7), the movement speed and displacement of the machine tool X-axis (8) and the machine tool Z-axis (9), and the displacement of the three-way micro-motion table (2); When the machine tool spindle rotates one circle, the machine tool X-axis and machine tool Z-axis do not move, and arc-shaped scratches will be obtained. By adjusting the Y-axis displacement of the three-way micro-motion table, the cutting depth can be changed; by adjusting the machine tool spindle speed, scratches under different cutting speeds can be obtained; Every time the machine tool spindle rotates one circle, the machine tool X-axis moves a distance of L, and a wavy scratch will be obtained. The distance between the highest points of each wave is L; the scratch depth can be changed by adjusting the Y-axis displacement of the three-way micro-motion table; the machine tool spindle speed and the machine tool X-axis movement speed can be adjusted to obtain scratches at different cutting speeds; Every time the machine tool spindle rotates one circle, the machine tool X-axis moves L distance and the machine tool Z-axis moves m distance. After two movements, three parallel scratches can be obtained, and the distance between two adjacent parallel lines is m. The scratch depth can be changed by adjusting the Y-axis displacement of the three-way micro-motion table. The machine tool spindle speed, the machine tool X-axis movement speed, and the machine tool Z-axis movement speed can be adjusted to obtain scratches at different cutting speeds.
Citation Information
Patent Citations
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CN211639245U
Method of confirming machining accuracy of multiple spindle machine tool, and workpiece for confirming machining accuracy
JP2011152613A