Connector assembly, system, and lithographic apparatus

Abstract

The invention relates to a connector arrangement (200) comprising a first connector element (202), a second connector element (204) which can be plugged together with the first connector element (202) in a plugging direction (E) in order to form an electrical connection, a support element (210) which supports the first connector element (202), and an acceptor (218) in which the support element (210) is accommodated so as to be movable perpendicular to the plugging direction (E) in order to produce a tolerance compensation when the first and second connector elements (202, 204) are plugged together. The support element (210) is a circuit board.

Description

Technical Field

[0001] The present invention relates to connector devices, systems, and photolithography apparatus having such connector devices and / or such systems.

[0002] The contents of priority application DE 10 2019 214 050.5, filed on September 16, 2019, are incorporated herein in their entirety. Background Technology

[0003] Microlithography is used to fabricate microstructured components, such as integrated circuits. Microlithography processes are performed using lithography equipment equipped with an illumination system and a projection system. An image of a mask (mask master) illuminated by the illumination system is projected by the projection system onto a substrate (e.g., a silicon wafer) coated with a photosensitive layer (photoresist) and arranged in the image plane of the projection system, so as to transfer the mask structure onto the photosensitive coating of the substrate.

[0004] A lithography apparatus may include multiple actuators and sensors that make electrical contact with other assemblies within the apparatus. Due to limited space, using cables that can be handled, for example by hand, can be difficult. Furthermore, manufacturing tolerances make it challenging to connect multiple connectors on a printed circuit board to corresponding mating connectors on another printed circuit board.

[0005] To electrically connect two assemblies of a lithography device to each other, connectors that provide tolerance compensation are known to be used. In this regard, connectors exist that include spring-loaded contact pins and provide tolerance compensation in the insertion direction. Furthermore, known sockets are mounted by spring elements and provide tolerance compensation perpendicular to the insertion direction. The sockets are supported on the printed circuit board by spring elements. Summary of the Invention

[0006] In view of this background, the object of the present invention is to provide an improved connector device.

[0007] Therefore, a connector device is proposed, particularly a connector device for photolithography equipment. The connector device includes: a first connector element; a second connector element that can be mated with the first connector element in an insertion direction to form an electrical connection; a carrier element carrying the first connector element; and a receiver in which the carrier element is housed and movable perpendicular to the insertion direction to generate tolerance compensation when the first and second connector elements are mated together.

[0008] Therefore, the connector element does not necessarily have to cause tolerance compensation perpendicular to the insertion direction, because the carrier element generates tolerance compensation in the receiver. Furthermore, there is the advantage of using less complex connector elements. Alternatives to tolerance-compensated connectors can be provided in this way. Additionally, there are advantages such as the ability to generate greater tolerance compensation through a movable carrier element, because a narrower limit is set in this regard in the case of tolerance-compensated connectors.

[0009] Mobility is achieved, in particular, through a floating support. The first connector element is preferably a connector and the second connector element is preferably an associated mating connector. This forms a connector pair. The carrier element is configured to be movable in a first direction of movement perpendicular to the insertion direction. The carrier element preferably has a two-dimensional form and a thickness between 1.5 and 4 mm, particularly between 2 and 3 mm.

[0010] In particular, the first connector element is fixedly connected to the carrier element by a material bonding connection, particularly by an adhesive bonding, or by a shape-fitting connection, particularly by an insertion connection. Preferably, the carrier element is configured to be movable in a second direction of movement, which extends perpendicular to the insertion direction and perpendicular to the first direction of movement. Reception within the carrier element means that the receiver spatially at least partially surrounds the carrier element. The receiver surrounds a cavity larger than the carrier element to accommodate the carrier element therein. The carrier element and receiver are configured to provide tolerance compensation between 0.1 and 10 mm in the first direction of movement. Furthermore, an opening is formed leading to the cavity. Viewed from the opening, the cavity includes at least one cutout. The connector device preferably includes 2, 3, or 4 carrier elements housed in the receiver for mobility perpendicular to the insertion direction.

[0011] According to one embodiment, the carrying element is a printed circuit board.

[0012] A printed circuit board (PCB) may be referred to as a PCB and includes conductor tracks. Preferably, the PCB also includes fiber-reinforced plastic (FRP) forming a support structure for the conductor tracks. In particular, the PCB may include ceramic or be formed as a ceramic PCB. The PCB can be, for example, a carrier for other electrical components. Specifically, all carrier components are formed as PCBs.

[0013] According to another embodiment, the carrying element is housed in the receiver such that a gap perpendicular to the insertion direction is provided, which defines and delineates the mobility perpendicular to the insertion direction.

[0014] Specifically, this gap is an air gap. The carrier element preferably rests on a support surface of the connector assembly and is configured to move freely thereon, where it is necessary to overcome friction between the carrier element and the support surface when movement occurs. For example, the gap can be variable due to the mobility of the carrier element. Specifically, the maximum gap (i.e., when the carrier element rests on the sidewall of the receiver) is between 0.1 and 15 mm, particularly between 1 and 5 mm. Preferably, a gap is provided between the carrier elements, particularly between the upper side of the carrier element and the receiver, when viewed in the insertion direction, to ensure free movement of the carrier element within the receiver. The gap is preferably between 0.05 and 2 mm, particularly between 0.1 and 1.5 mm. This prevents the carrier element from getting stuck in the receiver.

[0015] According to another embodiment, the gap is formed as an annular gap surrounding the carrying element.

[0016] The advantage of this is that the carrier element can move in all directions within a plane. The annular gap preferably has a closed annular shape. An annular shape means that it can have a shape with angular and / or circular contours. When viewed in the insertion direction or opposite to the insertion direction, the annular gap can, for example, have a frame shape. For example, when the carrier element is centered in the receiver, the width of the annular gap is 0.05-7.5 mm, particularly 0.5 and 2.5 mm.

[0017] According to another embodiment, the connector device has a second housing element to which a first housing element providing a receiver and / or a second connector element are connected.

[0018] For example, the first and second housing elements can each be formed as housings. The second connector element is preferably connected to the second housing element by a material bonding connection (e.g., by adhesive bonding) and / or by a shape-fit connection.

[0019] According to another embodiment, the connector device has a first centering element directly or indirectly rigidly connected to a carrier element and a second centering element disposed on a second housing element, wherein the first and second centering elements interact such that the first connector element and the second connector element are precisely fitted and centered relative to each other when they are inserted together in the insertion direction.

[0020] This has the advantage that the first connector element and the second connector element reliably locate each other when the housing elements move toward each other in the insertion direction. For example, the carrier element and the first centering element are connected to each other by a material bonding connection, particularly by an adhesive bonding and / or a shape-fit connection. Alternatively, these can be formed integrally. The first centering element can be in the form of a pin. Preferably, the first centering element and / or the second centering element includes an insertion bevel and / or a tip to produce a centering effect. Pre-centering preferably occurs by means of the first and second centering elements, and final centering occurs by means of the first and second connector elements.

[0021] According to another embodiment, the first centering element is configured to be close to the first connector element, extend beyond the first connector element in the insertion direction, and be directly or indirectly rigidly connected to the first connector element, wherein the second centering element includes a receiving element configured to receive the first centering element to achieve the purpose of centering.

[0022] The first and second centering elements are preferably arranged at least partially in a rotationally symmetrical manner. This has the advantage of achieving centering in all directions within a single plane. In particular, the receiving element includes a cavity for accommodating the first centering element. For example, the first centering element may be directly connected to or configured to contact the first connector element. Alternatively, the first centering element and the first connector element may be connected to the carrying element at a distance from each other.

[0023] According to another embodiment, the connector device has: a third connector element; a fourth connector element that can be inserted with the third connector element in an insertion direction to form an electrical connection; a further carrier element that carries the third connector element; and a further receiver, wherein the further carrier element is housed therein and is movable perpendicular to the insertion direction to generate tolerance compensation when the third and fourth connector elements are inserted together, wherein the further receiver is disposed in a first housing element, and wherein the fourth connector element is connected to a second housing element.

[0024] The third and fourth connector elements are preferably formed as connectors and associated mating connectors. In particular, the third centering element is rigidly connected directly or indirectly to another carrier element. The fourth centering element is preferably disposed on the second housing element, wherein the third and fourth centering elements interact such that the third and fourth connector elements are precisely fitted and aligned relative to each other when they are inserted together in the insertion direction. The third and fourth centering elements are preferably formed in the same manner as the first and second centering elements.

[0025] This has the following advantages: when the first and second housing elements are combined, the two carrier elements independently generate tolerance compensation, thus the two connector pairs can be reliably interconnected. There can also be three, four, or more carrier elements and corresponding connector pairs, as well as centering elements that interact with the first and second housing elements. The carrier elements are preferably electrically connected to each other via flexible cables. In particular, the carrier elements are interconnected via rigid-flexible connections. For example, multiple carrier elements can be formed as a rigid-flexible-rigid printed circuit board.

[0026] According to another embodiment, one of the first connector element and the second connector element includes 10-400, particularly 80-300 pin connectors, and the other of the first connector element and the second connector element includes 10-400, particularly 80-300 pin sockets.

[0027] Preferably, the first or second connector element includes a pin with an insertion bevel adapted to interact with the opening edge of the associated socket to achieve centering.

[0028] Furthermore, a connector device, particularly for photolithography equipment, is proposed. The connector device includes: a first connector element; a second connector element that can be mated with the first connector element in an insertion direction to form an electrical connection; a first printed circuit board segment on which the first connector element is mounted; and a second printed circuit board segment therein, wherein the first printed circuit board segment is mounted and movable perpendicular to the insertion direction to provide tolerance compensation when the first and second connector elements are mated together.

[0029] Therefore, an alternative example of a tolerance-compensated connector can be provided by means of the fact that when two connector elements are mated together, the printed circuit board segment perpendicular to the insertion direction produces tolerance compensation. The first and second printed circuit board segments preferably have the same thickness. The first and second printed circuit board segments preferably form a printed circuit board. In particular, the second printed circuit board segment surrounds the first printed circuit board segment in the form of a frame. A spring element is preferably provided between the first and second printed circuit board segments. For example, a gap is formed between the first and second printed circuit board segments. In particular, the maximum movement between the first and second printed circuit board segments is between 0.1 and 15 mm, especially between 1 and 5 mm.

[0030] According to one embodiment, the first printed circuit board segment and the second printed circuit board segment are integrally formed with each other.

[0031] Specifically, the first printed circuit board segment and the second printed circuit board segment are separated from each other only by material weakening portions in the printed circuit board, such as cuts.

[0032] According to another embodiment, the connector device includes at least one flexure, wherein a first printed circuit board segment and a second printed circuit board segment are interconnected by at least one flexure.

[0033] A flexure is a component that allows relative movement between sections of a printed circuit board and, in particular, elastic deformation during this process. Two printed circuit board sections are preferably interconnected by one, two, three, four, five, or more flexures. For example, the flexures are provided integrally with the two printed circuit board sections. The flexures are formed as spring elements.

[0034] The embodiments and features described for the alternative connector device are correspondingly applied to the two alternative examples. Furthermore, the features described for the carrier element are correspondingly applied to the first printed circuit board segment, and vice versa. Additionally, the features described for elements with the same name, such as carrier element, connector element, centering element, receiver, etc., are correspondingly applied to the features of all other elements, and vice versa.

[0035] A system, particularly for lithography equipment, is also proposed. This system includes connector devices, actuators, and / or sensors as described above, electrically connected to a carrier section or a second printed circuit board section and a first connector element, wherein the first connector element specifically forms an electronic interface for the actuator and / or sensor, which can be connected to a second connector element.

[0036] The system preferably includes 2, 3, or 4 actuators, wherein a first connector element forms the electronic interface for one or all of the actuators. In particular, the system includes 2, 3, 4, 5, or more sensors, wherein a first connector element forms the electronic interface for one or all of the sensors. For example, a single connector element can be provided as the electronic interface for each sensor or actuator. The actuators are preferably connected to a first housing element, particularly via screws.

[0037] According to an embodiment, the system includes an integrated circuit electrically connected to a second connector element, wherein the second connector element specifically forms an electronic interface between the integrated circuit and the first connector element.

[0038] Integrated circuits, for example, are FPGAs (Field-Programmable Gate Arrays). Integrated circuits particularly include processors. Integrated circuits are preferably configured to perform computational operations on one or more actuators or sensors. Integrated circuits may particularly be mounted on a printed circuit board, which is specifically connected to a second housing element via screws.

[0039] The embodiments and features described for the system are correspondingly applied to the connector device, and vice versa.

[0040] In addition, a lithography apparatus has been proposed. The lithography apparatus includes the connector device as described above and / or the system as described above.

[0041] The use of "one; one" in this context should not necessarily be interpreted as limiting to exactly one element. Of course, multiple elements can be provided, such as two, three, or more. Any other numerical values ​​used herein should not be construed as a limitation on the existence of exactly the stated number of elements. Rather, upward and downward numerical deviations are possible unless otherwise indicated.

[0042] Other possible implementations of the invention include combinations of any features or embodiments not expressly mentioned in the descriptions above or below with respect to exemplary embodiments. In such cases, those skilled in the art will also add various aspects as improvements or supplements to the corresponding basic form of the invention. Attached Figure Description

[0043] Other advantageous modifications and aspects of the invention are the subject of the dependent claims and also the subject of exemplary embodiments of the invention described below. Hereinafter, the invention will be explained in more detail based on preferred embodiments with reference to the accompanying drawings.

[0044] Figure 1A A schematic view of an embodiment of an EUV lithography apparatus is shown;

[0045] Figure 1B A schematic view of an embodiment of a DUV lithography apparatus is shown;

[0046] Figure 2 A schematic view of the connector assembly is shown;

[0047] Figure 3 It shows self Figure 2 Section III-III;

[0048] Figure 4 A schematic perspective view of another embodiment of the connector device is shown;

[0049] Figure 5 It shows self Figure 4 The cross section of VV;

[0050] Figure 6 It shows self Figure 4 Another cross-sectional view of VV;

[0051] Figure 7 It shows self Figure 4 Another cross-sectional view of VV;

[0052] Figure 8 A schematic perspective sectional view of another embodiment of the connector device is shown;

[0053] Figure 9 A schematic view of another embodiment of the connector device is shown;

[0054] Figure 10 A schematic top view of a printed circuit board is shown;

[0055] Figure 11 A schematic view of an embodiment of the system is shown; and

[0056] Figure 12 Schematic views of other embodiments of the system are shown. Detailed Implementation

[0057] Unless otherwise stated, identical or functionally equivalent elements have the same reference numerals in the accompanying drawings. It should also be noted that the illustrations in the drawings are not necessarily to scale.

[0058] Figure 1A A schematic view of an EUV lithography apparatus 100A is shown, which includes a beam shaping and illumination system 102 and a projection system 104. In this case, EUV stands for "Extreme Ultraviolet" and refers to the wavelength of working light between 0.1 and 30 nm. The beam shaping and illumination system 102 and the projection system 104 are respectively provided in vacuum chambers (not shown), each of which is evacuated by means of a pumping device (not shown). The vacuum chambers are surrounded by a mechanical chamber (not shown), in which a drive device for mechanically moving or setting optical elements is provided. Furthermore, an electrical controller, etc., may also be provided in the mechanical chamber.

[0059] EUV lithography apparatus 100A includes an EUV light source 106A. For example, a plasma source (or synchrotron) can be provided as the EUV light source 106A, emitting radiation 108A in the EUV range (extreme ultraviolet range), that is, for example, in the wavelength range of 5 nm to 20 nm. In beam shaping and illumination system 102, the EUV radiation 108A is focused, and the desired operating wavelength is filtered out from the EUV radiation 108A. The EUV radiation 108A generated by the EUV light source 106A has relatively low transmittance through air, therefore the beam guiding space in beam shaping and illumination system 102 and in projection system 104 is evacuated.

[0060] Figure 1AThe beam-shaping and illumination system 102 shown in the diagram has five mirrors 110, 112, 114, 116, and 118. After passing through the beam-shaping and illumination system 102, EUV radiation 108A is guided onto a photomask (mask master) 120. The photomask 120 is also formed as a reflective optical element and can be arranged outside systems 102 and 104. Furthermore, EUV radiation 108A can be guided onto the photomask 120 by mirror 122. The photomask 120 has a structure that is imaged onto a wafer 124 or the like in a reduced manner by projection system 104.

[0061] The projection system 104 (also referred to as the projection lens) has six mirrors M1 to M6 for imaging the photomask 120 onto the wafer 124. In this case, the individual mirrors M1 to M6 of the projection system 104 can be arranged symmetrically about the optical axis 126 of the projection system 104. It should be noted that the number of mirrors M1 to M6 in the EUV lithography apparatus 100A is not limited to the number shown. More or fewer mirrors M1 to M6 may also be provided. Furthermore, for beam shaping, the mirrors M1 to M6 are typically bent on their front side.

[0062] In addition, an actuator 134 is provided, for example, configured to change the position of reflector 118. Such an actuator 134 may also be provided to other reflectors 110, 112, 114, 116 in the beam shaping and illumination system 102. Alternatively or additionally, such an actuator 134 may be provided to at least one of reflectors M1-M6. For example, a sensor 136 is provided, configured to capture the position of reflector 118. Such a sensor 136 may also be provided to other reflectors 110, 112, 114, 116 in the beam shaping and illumination system 102. Alternatively or additionally, such a sensor 136 may be provided to at least one of reflectors M1-M6. Multiple such sensors 136 may also be provided.

[0063] Figure 1B A schematic view of a DUV lithography apparatus 100B is shown, which includes a beam shaping and illumination system 102 and a projection system 104. In this case, DUV stands for "deep ultraviolet" and indicates the wavelength of working light between 30 nm and 250 nm. (See reference...) Figure 1A As already described, the beam shaping and illumination system 102 and the projection system 104 can be arranged in a vacuum housing and / or surrounded by a mechanical chamber with corresponding drive devices.

[0064] The DUV lithography apparatus 100B has a DUV light source 106B. As an example, an ArF excimer laser that emits radiation 108B in the DUV range of 193 nm can be provided as the DUV light source 106B.

[0065] exist Figure 1B The beam shaping and illumination system 102 shown in the diagram guides DUV radiation 108B onto a photomask 120. The photomask 120 is formed as a transmissive optical element and can be arranged outside of systems 102 and 104. The photomask 120 has a structure that images onto a wafer 124 or the like in a reduced manner through a projection system 104.

[0066] The projection system 104 has multiple lens elements 128 and / or mirrors 130 for imaging the photomask 120 onto the wafer 124. In this case, the individual lens elements 128 and / or mirrors 130 of the projection system 104 can be arranged symmetrically about the optical axis 126 of the projection system 104. It should be noted that the number of lens elements 128 and mirrors 130 of the DUV lithography apparatus 100B is not limited to the number shown. More or fewer lens elements 128 and / or mirrors 130 can also be provided. In addition, for beam shaping, the mirrors 130 are typically bent on their front side. An actuator 134 (see [link to actuator description]) can be provided. Figure 1A This can be used to change the position of lens element 128 and / or reflector 130. For example, a sensor 136 (see...) is provided. Figure 1A ( ), which is equipped to capture the position of the lens element 128 and / or the reflector 130.

[0067] The air gap between the last lens element 128 and the wafer 124 can be replaced with a liquid medium 132 having a refractive index > 1. The liquid medium 132 can be, for example, high-purity water. Such a setup is also known as immersion lithography and has enhanced lithographic resolution. The medium 132 can also be referred to as an immersion liquid.

[0068] Figure 2 The lithography equipment 100A and 100B are shown (see Figure 1A and 1B The connector assembly 200 includes a connector element 202 (also referred to herein as a first connector element) and a connector element 204 (also referred to herein as a second connector element), the connector element 204 being capable of mating with the connector element 202 in the insertion direction E to form an electrical connection. Preferably, the connector element 202 includes a connector 206 and the connector element 204 includes an associated socket 208.

[0069] In addition, a carrier element 210 is provided to carry the connector element 202. The carrier element 210 and the connector element 202 are rigidly connected to each other. The carrier element 210 is preferably a printed circuit board, which includes conductor tracks 212 embedded in or mounted thereon in an insulating material 214. The material 214 may include a glass fiber composite. The carrier element 210 may also carry electronic components (not shown).

[0070] The carrier element 210 preferably has a two-dimensional form and a thickness D between 1.5 and 4 mm, particularly between 2 and 3 mm. Furthermore, a wire 216, particularly a flexible cable and / or a rigid-flexible-rigid connection (indicated by the dashed line), can be connected to the carrier element 210, which connects the carrier element 210 to, for example, other carrier elements 400, 402, 404 (see...). Figure 4 ), actuator 134 (see Figure 1A Sensor 136 (see) Figure 1A ) or lithography equipment 100A, 100B (see Figure 1A and 1B Another electronic unit (not shown).

[0071] The connector assembly 200 additionally includes a receiver 218, which houses a carrier element 210 such that it is movable in a movement direction B1 perpendicular to the insertion direction E to provide tolerance compensation when connector elements 202, 204 are mated together. The receiver 218 is configured as a cavity within a housing element 220 (also referred to herein as a first housing element). The carrier element 210 is housed in the receiver 218 such that a gap S is provided in the movement direction B1, which defines and delineates the mobility in the movement direction B1.

[0072] Specifically, the maximum clearance S in the movement direction B1 (i.e., when the carrier element 210 rests on the sidewall 222 of the receiver 218) is between 0.1 and 15 mm, particularly between 1 and 5 mm. This could be referred to as a floating support, for example. The receiver 218 includes opposing sidewalls 222, 224 that define the movement of the carrier element 210 in the movement direction B1. The receiver 218 also includes walls 226, 228 that extend perpendicularly to the sidewalls 222, 224 and prevent movement of the carrier element 210 relative to the receiver 218 in the insertion direction E.

[0073] Specifically, a small gap S0 is provided between the walls 226, 228 and the carrying element 210 (particularly the top side 236 of the carrying element 210) to prevent the carrying element 210 from getting stuck in the receiver 218. The gap S0 is preferably between 0.05 and 2 mm, particularly between 0.1 and 1.5 mm. The carrying element 210 can rest on the bottom 230 of the housing element 220, particularly by friction connection. The carrying element 210 is received within the receiver 218 with a form-fitting connection.

[0074] The connector assembly 200 also includes a connector element 204, which is indirectly connected to a housing element 232 (also referred to herein as a second housing element). The connector element 204 is preferably connected to a printed circuit board 238, which is screwed onto the housing element 232. For example, the connector element 204 can also be connected solely via line 1106 (see...). Figure 11 Specifically, the flexible cable is connected to the printed circuit board 238. In particular, the connector element 204 protrudes from or away from the housing element 232. The housing element 220 includes an opening 234 leading to the receiver 218, from which the connector element 202 protrudes. For example, multiple connector elements 204 may be connected to the printed circuit board 238. The printed circuit board 238 may be formed, for example, as a rigid-flex-rigid printed circuit board or a rigid printed circuit board.

[0075] For example, connector element 202 includes 10-400, particularly 80-300, pin connectors, and connector element 204 includes 10-400, particularly 80-300 pin sockets. Connector element 202 and connector element 204 are preferably interchangeable.

[0076] Figure 3 It shows self Figure 2 The cross-section of III-III is shown. The gap S is formed as an annular gap around the carrier element 210. By way of example only, the cross-section of the carrier element 210 is shown as rectangular. The carrier element 210 can have any shape, such as L-shaped, trapezoidal, or circular. The annular shape of the gap S has the advantage that movement of the carrier element 210 in another direction of movement B2 is also possible, which is perpendicular to the insertion direction E and perpendicular to the movement direction B1, so as to produce tolerance compensation when the connector elements 202, 204 are mated together.

[0077] The receiver 218 includes sidewalls 300, 302 that define the movement of the carrier element 210 in the direction of movement B2. In particular, the maximum gap S in the direction of movement B2 (i.e., when the carrier element 210 rests on the sidewall 302 of the receiver 218) is between 0.1 and 15 mm, especially between 1 and 5 mm.

[0078] Figure 4A schematic perspective view of another embodiment of the connector device 200 is shown. The latter also includes: a connector element 406 (also referred to herein as a third connector element); a connector element 412 (also referred to herein as a fourth connector element) which can be mated with the connector element 406 in the insertion direction E to form an electrical connection; a carrier element 400 (also referred to herein as a further carrier element) carrying the connector element 406; and a receiver 414 (also referred to herein as a further receiver), in which the carrier element 400 is housed and movable perpendicular to the insertion direction E to provide tolerance compensation when the connector elements 406, 412 are mated together. The receiver 414 is disposed in the housing element 220. The connector element 412 is directly or indirectly connected to the housing element 232.

[0079] Two additional carrier elements 402 and 404, on which connector elements 408 and 410 are mounted, are housed in housing element 220. Connector elements 202, 406, 408, and 410 are arranged at a distance from each other. Carrier elements 400, 402, and 404 are similarly formed to carrier element 210 and are correspondingly movably housed in a receiver (not shown) of housing element 220.

[0080] Furthermore, connector elements (not shown) – which can be inserted into connector elements 408, 410 in the insertion direction E and thus form corresponding mating connectors – are formed on housing element 232. Alternatively, instead of four, housing element 220 may be provided with two, three, five, or six carrier elements and connector elements, and housing element 232 may be provided with a corresponding number of connector elements. For example, carrier elements 210, 400, 402, 404 are interconnected by means of cables (not shown), particularly flexible cables.

[0081] Figure 5 It shows self Figure 4 The cross-section of VV. And... Figure 2 Instead, the carrying element 210 rests on the part 518, which is in particular an electronic, mechanical, or electromechanical component and is at least partially housed within the housing element 220. The part 518 may be powered by an actuator 134 (see [link to actuator 134]). Figure 1A The connector assembly 200 comprises a centering element 500 (also referred to herein as a first centering element), which is rigidly connected directly or indirectly to the carrier element 210. Furthermore, a centering element 502 (also referred to herein as a second centering element) is mounted on the housing element 232.

[0082] Centering elements 500 and 502 interact such that connector elements 202 and 204 are precisely aligned with each other when they are inserted together in the insertion direction E. Centering element 500 is configured to be close to the first connector element 202, extends beyond connector element 202 in the insertion direction E, and is connected to connector element 202 via carrier element 210. Centering element 500 is formed, for example, as a centering pin, which is connected to the upper side 236 of carrier element 210, particularly by a material-bonded connection (e.g., by adhesive bonding). For example, centering element 500 is screwed onto carrier element 210. Alternatively, centering element 500 may be integrally formed with carrier element 210.

[0083] The centering element 502 includes a receiving element 504 configured to accommodate the centering element 500 for centering purposes. Corresponding centering elements 526, 528, and 530 may also be equipped with carrying elements 400, 402, and 404. The centering element 502 may alternatively be integrated into the housing element 232 or configured as a separate portion connected to the housing element 232.

[0084] The receiving element 504 is formed as a cavity including a truncated conical segment 506 and an adjacent cylindrical segment 508. Segment 508 is adjacent to another truncated conical segment 510, which in turn is adjacent to a cylindrical segment 512. The truncated conical segment 506 serves as an insertion ramp to center the centering element 500 relative to a centering axis Z, which is specifically formed as the rotational symmetry axis of the receiving element 504. Segment 506 tapers gradually in the insertion direction E. Segment 510 widens in the insertion direction E.

[0085] The centering element 500 includes a guide section 514, which is configured as a thickened portion and preferably forms one end of the centering element 500. The width D1 (particularly the diameter) of the section 508 is slightly larger than the width D2 (particularly the diameter) of the guide section 514, thus a loose fit exists when the guide section 514 is positioned within the section 508 (see...). Figure 6 The guide section 514 includes, for example, an insertion ramp 516 that interacts with the receiving element 504 to align the centering element 500 relative to the centering axis Z.

[0086] The centering element 502 preferably includes a tubular section 520 that projects downward from the housing element 232 opposite to the insertion direction E and includes section 506 and at least partially includes section 508. Furthermore, the connector element 202 includes a plurality of pins 522. The connector element 204 includes a plurality of sockets 524 corresponding to the pins 522.

[0087] like Figure 5As shown, the centering element 500 is located in section 506. When one of the housing elements 220 and 232 moves toward the other of the housing elements 220 and 232 in the insertion direction E, the centering element 500 first passes through this section 506. If the centering element 500 is not aligned with the centering axis Z in the center, the insertion ramp 516 presses against section 506 and the centering element 500 moves in the movement directions B1 and B2 due to the wedge effect.

[0088] Since the carrier element 210 is equipped to be movable and rigidly connected to the centering element 500, the carrier element 210 also moves together with the connector element 202 in the movement directions B1, B2. Figure 6 and Figure 7 This illustrates how the guide segment 514 is inserted further and further into the receiving element 504 until the connector elements 202, 204 are fully connected to each other.

[0089] and Figure 5 compared to, Figure 6 The guide section 514 is shown to be further guided into the receiving element 504 and positioned in section 508. A gap S1 is provided between the guide section 514 and section 508. The gap S1 is configured such that when the guide section 514 rests against the wall of section 508, the insertion bevel 600 of the connector element 202 (in particular the pin 522) corresponds in the insertion direction E to the opening edge 602 of the connector element 204 (in particular the socket 524).

[0090] Therefore, two-stage centering can be provided. In the first stage, a preliminary centering can be performed by means of centering elements 500 and 502, and in the second stage, a final centering can be performed by means of the insertion bevel 600 of connector element 522 and the opening edge 602 of connector element 204 when connector elements 202 and 204 are inserted.

[0091] As housing elements 220 and 232 are further joined together in the insertion direction E, guide segment 514 moves away from segment 508 and directly into segment 510, which has an extended width D3, specifically in diameter. Width D3 is greater than width D1 (see...). Figure 5 This ensures that guide segment 514 is no longer guided when it leaves segment 508. Simultaneously, connector elements 202 and 204 begin to engage with each other, thus achieving centering through the connector elements 202 and 204 themselves without further guidance through segment 508. This also has the advantage of avoiding overstability in the system.

[0092] and Figure 6 compared to, Figure 7The diagram shows connector elements 202 and 204 fully inserted into each other. This forms the electrical connection between connector elements 202 and 204.

[0093] Figure 8 Another embodiment of the connector assembly 200 in the inserted state of connector elements 202, 204 is shown. (Compared to...) Figures 5 to 7 Compared to the previous embodiment, the centering element 500 is directly connected to the connector element 202, integrally formed with it or at least in contact with it. Viewed from the direction of movement B1, the centering element 500 is arranged close to the connector element 500.

[0094] The centering element 500 includes a base section 800 connected to the connector element 202 and adjacent to a guide section 514, which is cylindrical and includes a tip forming an insertion bevel 516. The receiving element 504 is formed as a cavity, particularly a cylindrical cavity. In this exemplary embodiment, the gap S1 may, for example, be larger than... Figure 5 An exemplary embodiment is shown below. For example, a larger tolerance compensation can then be made up by connector elements 202, 204. This has the advantage of simplifying the centering elements 500, 502.

[0095] Figure 9 Another embodiment of the connector assembly 200 is shown. The connector assembly includes a connector element 202, a connector element 204, a printed circuit board segment 900 (also referred to herein as a first printed circuit board segment) and a printed circuit board segment 902 (also referred to herein as a second printed circuit board segment) on which the connector element 202 is mounted, wherein the printed circuit board segment 900 is attached to be movable perpendicular to the insertion direction E to provide tolerance compensation when the connector elements 202, 204 are mated together. The connector element 204 is preferably connected to a printed circuit board 238. For example, multiple connector elements may be connected to the printed circuit board 238.

[0096] Specifically, the printed circuit board 238 is formed in a manner similar to printed circuit board segments 900, 902 (i.e., movable).

[0097] For example, printed circuit board segment 902 is mounted in housing portion 220 such that it does not move when connector elements 202, 204 are mated together. Printed circuit board segment 902 can be screwed onto housing segment 232. When connector elements 202, 204 are mated together, printed circuit board segment 900 moves together with connector element 202 relative to printed circuit board segment 902 and housing segment 220 in movement directions B1, B2 to provide tolerance compensation.

[0098] Specifically, printed circuit board segment 900 and printed circuit board segment 902 are integrally formed together. The printed circuit board segments are preferably interconnected by at least one spring element 904, 906. For example, the spring elements 904, 906 are formed as flexural elements 1000, 1002, 1004, 1006, 1008 (see...). Figure 10 Printed circuit board segments 900 and 902 preferably form a printed circuit board 908, which is divided into two printed circuit board segments 900 and 902. Printed circuit board segment 902 includes a conductor track 212 electrically connected to connector element 202. For example, connector element 202 may be in direct contact with conductor track 212.

[0099] Alternatively, connector element 202 can contact a conductor track (not shown) of printed circuit board segment 900, which is then electrically connected to conductor track 212. Furthermore, conductor track 212 can extend through spring elements 904, 906 into printed circuit board segment 900 and contact connector element 202. Additionally, this exemplary embodiment can be provided with... Figures 4 to 8 The aforementioned centering element.

[0100] Figure 10 A top view of another embodiment of the printed circuit board 908 is shown. The printed circuit board 908 has a material weakening portion 1000, which is formed such that at least one flexure 1002, 1004, 1006, 1008, 1010 is formed between the printed circuit board segments 900, 902. For example, the plurality of flexures 1002, 1004, 1006, 1008, 1010 can be formed as spring elements 904, 906. These are preferably integrally formed with the printed circuit board segments 900, 902 and are therefore particularly made of the same material.

[0101] The material weakening portion 1000 can be introduced, for example, by means of a separation process, particularly laser or milling. The material weakening portion 1000 is preferably formed as a gap or cut, which preferably extends over the entire thickness of the printed circuit board sections 900, 902. For example, material weakening portions 1012, 1014 are introduced into the printed circuit board 908, causing the flexure 1002 to be formed in a U-shape. Furthermore, an additional U-shaped flexure 1004 can be provided opposite to the flexure 1002.

[0102] The other two U-shaped flexures 1006 and 1008 are preferably configured to be mirror-symmetrical to flexures 1002 and 1004. Furthermore, for example, material weakening portions 1016 and 1018 are provided as trapezoidal flexures 1010. Flexures 1002, 1004, 1006, 1008, and 1010 are configured to allow the printed circuit board segment 900 to move elastically relative to the printed circuit board segment 902. For example, flexures 1002, 1004, 1006, 1008, and 1010 can also be L-shaped, curved, W-shaped, or I-shaped.

[0103] Figure 11 The following are shown for lithography equipment 100A and 100B (see Figure 1 and 100B). Figure 2 System 1100 includes a connector assembly 200 and an actuator 134 electrically connected via multiple lines 1104 to a carrier section 210 or a printed circuit board section 902 and a connector element 202. The connector element 202 acts as an electronic interface to the actuator 134, which can be connected to the connector element 204. For example, system 1100 includes an integrated circuit 1102 electrically connected to the connector element 204 via multiple lines 1106.

[0104] Actuator 134 is preferably screwed onto housing element 220. Connector element 204 acts as an electronic interface between integrated circuit 1102 and connector element 202. This circuit may include processor 1108. Instead of actuator 134, the system may include 2, 3, 4 or more actuators that contact circuit 1102 via connector elements 202, 204, 406, 408, 410, 412 (see...). Figure 4 ).

[0105] and Figure 11 compared to, Figure 12 The system 1100 is shown to have sensors 136, 1200, and 1202 in place of actuator 134. These sensors 136, 1200, and 1202 are configured to, for example, capture the positions of mirrors 110, 112, 114, 116, 118, M1, M2, M3, M4, M5, and M6 of lithography apparatuses 100A and 100B. Needless to say, such a system 1100 may include multiple connector elements. Figure 11 Actuator 134 and Figure 12 The combination of sensors 136, 1200, and 1202.

[0106] Although the present invention has been described based on exemplary embodiments, it can still be modified in various ways.

[0107] List of reference numerals

[0108] 100AEUV lithography equipment

[0109] 100BDUV lithography equipment

[0110] 102-beam shaping and lighting system

[0111] 104 Projection System

[0112] 106AEUV light source

[0113] 106BDUV light source

[0114] 108AEUV radiation

[0115] 108 BDUV radiation

[0116] 110 reflector

[0117] 112 reflector

[0118] 114 reflectors

[0119] 116 reflector

[0120] 118 reflector

[0121] 120 photomask

[0122] 122 reflector

[0123] 124 chips

[0124] 126 optical axes

[0125] 128 lens elements

[0126] 130 reflector

[0127] 132 medium

[0128] 134 actuator

[0129] 136 sensors

[0130] 200 connector device

[0131] 202 connector components

[0132] 204 connector components

[0133] 206 connector

[0134] 208 socket

[0135] 210 Carrying Components

[0136] 212 conductor rail

[0137] 214 Materials

[0138] Route 216

[0139] 218 receiver

[0140] 220 housing element

[0141] 222 sidewall

[0142] 224 sidewall

[0143] 226 sidewalls

[0144] 228 sidewalls

[0145] 230 bottom

[0146] 232 housing element

[0147] 234 opening

[0148] 236 upper side

[0149] 238 Printed Circuit Board

[0150] 300 wall

[0151] 302 wall

[0152] 400 Carrying Components

[0153] 402 Carrying Components

[0154] 404 Carrier Components

[0155] 406 connector components

[0156] 408 connector components

[0157] 410 connector components

[0158] 412 connector components

[0159] 414 receiver

[0160] 500 centering element

[0161] 502 centering element

[0162] 504 receiver element

[0163] Section 506

[0164] Section 508

[0165] Section 510

[0166] Section 512

[0167] 514 Guide Section

[0168] 516 Insertion slant

[0169] 518 parts

[0170] 520 tubular section

[0171] 522 sales

[0172] 524 socket

[0173] 526 centering element

[0174] 528 centering element

[0175] 530 centering element

[0176] 600 Insertion Angle

[0177] 602 opening edge

[0178] 800 base section

[0179] 900 Printed Circuit Board Section

[0180] 902 Printed Circuit Board Section

[0181] 904 spring element

[0182] 906 spring element

[0183] 908 Printed Circuit Board

[0184] 1000 Material Weakening Department

[0185] 1002 Flexural component

[0186] 1004 flexural component

[0187] 1006 Flexural Components

[0188] 1008 Flexural Components

[0189] 1010 Flexural Components

[0190] 1012 Material Weakening Section

[0191] 1014 Material Weakening Section

[0192] 1100 system

[0193] 1102 circuit

[0194] Route 1104

[0195] Route 1106

[0196] 1108 processor

[0197] 1200 sensor

[0198] 1202 sensor

[0199] B1 Movement Direction

[0200] B2 Movement Direction

[0201] E Insertion direction

[0202] D thickness

[0203] D1 width

[0204] D2 width

[0205] D3 width

[0206] M1 reflector

[0207] M2 reflector

[0208] M3 Reflector

[0209] M4 Reflector

[0210] M5 Reflector

[0211] M6 reflector

[0212] S-gap

[0213] S0 gap

[0214] S1 gap

[0215] Z-fixed center axis

Claims

1. A connector device (200) comprising: First connector element (202). The second connector element (204) is capable of being inserted into the first connector element (202) in the insertion direction (E) to form an electrical connection. The first printed circuit board segment (900) on which the first connector element (202) is mounted, and A second printed circuit board segment (902) is mounted thereon and is movable perpendicular to the insertion direction (E) to provide tolerance compensation when the first and second connector elements (202, 204) are mated together. At least one flexural element (1002, 1004, 1006, 1008, 1010), wherein, The first printed circuit board segment (900) and the second printed circuit board segment (902) are interconnected by at least one flexure (1002, 1004, 1006, 1008, 1010), and the at least one flexure is made of the same material as the first printed circuit board segment (900) and the second printed circuit board segment (902).

2. The connector device according to claim 1, wherein, The first printed circuit board segment (900) and the second printed circuit board segment (902) are integrally formed together.

3. A system (1100) having: The connector device (200) according to claim 1 or 2. Actuator (134) and / or sensor (136, 1200, 1202) electrically connected to the carrying section (210) or the second printed circuit board section (902) and the first connector element (202).

4. The system according to claim 3, comprising: An integrated circuit (1102) is electrically connected to the second connector element (204).

5. A photolithography apparatus (100A, 100B) having a connector device (200) according to claim 1 or 2.

6. A photolithography apparatus (100A, 100B) having a system (1100) according to claim 3 or 4.

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