Wafer proton irradiation on-line detection device, system and method

By using online detection devices and systems, employing dose detectors and depth detectors for online wafer irradiation detection, the problem of real-time detection in existing technologies has been solved, achieving high-precision quality control and reducing detection costs.

CN114883211BActive Publication Date: 2026-07-10GUODIAN NUCLEAR POWER INNOVATION (WUXI) TECH CO LTD
View PDF 2 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
GUODIAN NUCLEAR POWER INNOVATION (WUXI) TECH CO LTD
Filing Date
2022-05-05
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

Existing wafer proton irradiation equipment cannot detect irradiation depth and dose in real time during the production process, resulting in substandard wafers flowing into the next process, causing resource waste, and traditional removal and inspection are costly.

Method used

Design an online detection device for wafer proton irradiation, including an injection section, a support section, and a detection section. Online detection is performed using a dose detector and a depth detector. A cross-shaped sliding rail moves the wafer to overlap with the detector. Data comparison is performed in conjunction with a signal transmission and control system to ensure detection accuracy.

Benefits of technology

It enables real-time monitoring of wafer irradiation quality, preventing defective products from flowing into the next process, reducing testing costs, improving testing accuracy, and avoiding errors associated with traditional dismantling and testing.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN114883211B_ABST
    Figure CN114883211B_ABST
Patent Text Reader

Abstract

The application discloses a kind of wafer proton irradiation online detection device, including: injection part, load part being arranged below injection part, and detection part being arranged below load part;Detection part includes detector rack located below load part, and dose detector and depth detector are arranged on detector rack and are arranged at intervals;Load part includes round bracket;Several through holes are opened on round bracket.The dose and depth of wafer in irradiation stage are realized by dose detector and depth detector, and process data of wafer in irradiation stage is monitored in real time, and control system can be compared according to pre-set data, and then the online detection of wafer proton irradiation is realized, the irradiation quality of wafer is ensured, process data is monitored in real time, process is accurately controlled, unqualified wafer flows into next process is avoided, unnecessary waste is caused, violent removal detection mode after wafer finished product is avoided, so as to reduce detection cost.
Need to check novelty before this filing date? Find Prior Art