A method for coaxial debugging of array lasers

Abstract

The present invention discloses a method for coaxial debugging of array lasers, and the process is as follows: a main autocollimator is arranged in front of an array laser output device, the main autocollimator is located in the designed laser beam combining output direction, and the optical axis of the main autocollimator is adjusted to be parallel to the output beam of the first laser of the array laser output device; then a reflector group is arranged between the array laser output device and the main autocollimator, and the two reflectors are adjusted to be parallel to each other and the distance between the two is a set value; a route observation component and a power detection component are arranged between the reflector group and the main autocollimator; firstly, the first laser is turned on, and the reflector group is adjusted to make the output beam coaxial with the optical axis of the main autocollimator; then, the remaining lasers are turned on one by one, and their positions are first adjusted to make their beams coaxial with the first laser beam space, and then the beams are adjusted to make the beams coherent, and the beam combining is completed in sequence. This method can accurately adjust the positional relationship of each device and realize high-precision beam combining.

Description

Technical Field

[0001] The invention belongs to the technical field of optical system installation and debugging, and in particular relates to a method for coaxial debugging of array lasers. Background Art

[0002] In the case where the laser output capacity of a single laser device or apparatus is limited, multiple laser beams are often combined to make them coaxially coherent in order to increase the laser output power. There are many ways to combine laser beams, such as grating beam combining, lens beam combining, reflection beam combining, etc. It is relatively easy to control the beam path through reflection beam combining. Patent document CN113552726A discloses a laser beam combining device and its combined step reflector and filling rate calculation method, wherein the laser beam combining device includes a two-dimensional light-emitting array and a combined step reflector, the combined step reflector is used to reflect multiple laser beams emitted by the two-dimensional light-emitting array, the combined step reflector is composed of a plurality of reflectors with the same length but gradually increasing widths stacked in sequence, wherein the center distance of the laser beam after reflection by the combined step reflector is smaller than the center distance before incidence, thereby improving the filling rate of the laser beam emitted by the two-dimensional light-emitting array. However, since a plurality of reflectors are combined to form a stepped reflector, very high requirements are placed on the processing accuracy of each reflector and the relative position adjustment accuracy between the reflectors in order to achieve a better beam combining effect. Figure 1 As shown in the figure, two plane mirrors are used to form a reflector group for beam combining. The structure of the whole system is relatively simple, but after combining multiple laser beams, the near-field of the lasers must overlap and the far-field angle must be consistent. Therefore, the position and angle relationship of each device in the whole system must be adjusted with high accuracy. How to achieve accurate adjustment of each device is a difficult problem. Summary of the invention

[0003] In view of this, an object of the present invention is to provide a method for coaxial debugging of array lasers.

[0004] The technical solution is as follows:

[0005] A method for coaxial debugging of array lasers, the key of which is to include the following steps:

[0006] S1, a main autocollimator is arranged in front of an array laser output device composed of at least two lasers arranged in a row, the main autocollimator is located in the designed laser beam output direction, and is adjusted so that the optical axis of the main autocollimator is parallel to the output beam of the first laser of the array laser output device;

[0007] S2, setting a reflector group between the array laser output device and the main autocollimator, the reflector group including two reflectors, adjusting the two reflectors so that they are parallel to each other and the distance between them is a set value, and staggering the two reflectors so that the reflector close to the array laser output device extends out of the other reflector to form a reflective output end, which corresponds to the combined beam output direction;

[0008] A route observation component and a power detection component are arranged between the reflection output end and the main autocollimator;

[0009] S3, turning on any one of the lasers in the array laser output device to direct its light beam toward the reflector group, and adjusting the angle of the reflector group as a whole so that the outgoing light beam is coaxial with the optical axis of the main autocollimator, and recording the path mark point where the outgoing light beam is directed to the route observation component at this time;

[0010] S4, turning on the second laser, using the route observation component to observe, and adjusting the position of the second laser so that the outgoing light beam from the reflector group passes through the path marking point;

[0011] S5, adjusting the position of the second laser to adjust the optical path difference between the second laser and the previous laser to the reflective output end, and determining the position of the second laser according to the maximum power value detected by the power detection component;

[0012] S6, turn on the remaining lasers in sequence, and repeat steps S4 to S5 to adjust their positions.

[0013] Preferably, the reflector assembly comprises a reflector support, a first reflector and a second reflector;

[0014] The step S2 comprises:

[0015] S21, adjustably mounting the first reflector on the reflector support seat, wherein the reflector support seat is located between the array laser output device and the main autocollimator, and the reflective surface of the first reflector faces away from the array laser output device;

[0016] The reflector support seat is provided with a translation platform, and a length meter is provided on the translation platform so as to be linearly slidable;

[0017] S22, setting up a goniometer to align the first reflector, and setting a reference point on the field of view of the goniometer;

[0018] S23, installing the second reflector so that its reflective surface faces the reflective surface of the first reflector and one end of the second reflector corresponding to the combined beam output direction is lower than the first reflector, so that the extended end of the first reflector forms the reflective output end, and using the goniometer to align its reflective surface so that the crosshair image reflected back to the goniometer by its reflective surface coincides with the reference point;

[0019] S24, adjusting the second reflector so that the distance between the second reflector and the first reflector is a set value.

[0020] Preferably, the above-mentioned step S24 is specifically as follows: first, move the translation stage until the measuring end of the length meter contacts the edge of the reflecting surface of the first reflector, and record the measurement value of the length meter at this time; then move the translation stage toward the second reflector, and the displacement distance is the set value plus the thickness of the second reflector; then move the second reflector along the normal direction until its back side contacts the measuring end of the length meter; during this process, monitor whether the crosshair image returned by the reflecting surface of the second reflector to the field of view of the goniometer coincides with the reference point; if not, adjust the displacement and angle of the second reflector until the crosshair image returned by the reflecting surface of the second reflector to the field of view of the goniometer coincides with the crosshair image returned by the reflecting surface of the first reflector, and the reading of the length meter is the same as the measurement value.

[0021] Preferably, in the above step S3, the positions of the first reflector and the second reflector on the reflector support seat are fixed, and the reflector support seat is adjusted to adjust the angle of the reflector group as a whole.

[0022] Preferably, the route observation component comprises a first beam splitter and a CCD camera, wherein the first beam splitter is arranged between the reflection output end and the main autocollimator, and reflects the outgoing light beam emitted from the reflection output end to the CCD camera.

[0023] Preferably, the power detection component comprises a second beam splitter and a power meter, wherein the second beam splitter is arranged between the reflection output end and the main autocollimator, and reflects the outgoing light beam emitted from the reflection output end to the power meter.

[0024] Preferably, the above step S1 specifically includes:

[0025] S11, two laser autocollimators are arranged in front of the array laser output device, namely the main autocollimator and the auxiliary autocollimator, which are arranged parallel to the arrangement direction of the lasers, and the auxiliary autocollimator is used to collimate the first laser, so that the optical axis of the auxiliary autocollimator is coaxial with the emission light beam of the laser, and a calibration reference point is set in the field of view of the auxiliary autocollimator;

[0026] S12, arranging a standard mirror between the laser autocollimator and the array laser output device, so that the collimated light reflected back to the auxiliary autocollimator by the standard mirror toward one side of the auxiliary autocollimator coincides with the calibration reference point;

[0027] S13, adjusting the posture of the main autocollimator so that the collimated light reflected by the standard mirror toward one side of the main autocollimator coincides with the autocollimation reference point of the main autocollimator, and then removing the standard mirror.

[0028] Preferably, in the above step S4, the position of the second laser is adjusted in a plane perpendicular to the output light beam of the laser.

[0029] Preferably, in the above step S5, the position of the second laser is adjusted in the direction of the laser output light beam.

[0030] Compared with the prior art, the present invention has the following beneficial effects:

[0031] (1) Using a laser autocollimator and a standard mirror to achieve parallelism between the incident laser and the outgoing laser;

[0032] (2) Using a combination of a length meter and a goniometer to monitor, the reflector 1 and the reflector 2 are parallel, and the displacement of the normal direction of the reflector 1 and the reflector 2 is precisely controlled;

[0033] (3) Using a laser autocollimator, power meter, and CCD monitoring to assist in laser adjustment, so that the far-field angle is consistent, the near-field displacement overlaps, and the interference is generated after the array laser beam is combined, thereby increasing the laser output power;

[0034] (4) The adjustment mechanism of the relevant modules can be designed as an electric mechanism, and an image processing algorithm can be added and integrated to establish communication between the modules and closed-loop control to achieve automatic adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of the principle of the beam combining method of the present invention;

[0036] Figure 2 It is a schematic diagram of the position arrangement of each device of the present invention;

[0037] Figure 3 is a schematic diagram of the structure of a reflector assembly, in which a translation stage is not shown;

[0038] Figure 4 is a structural schematic diagram of the frame assembly from a first viewing angle;

[0039] Figure 5 This is a schematic structural diagram of the frame assembly from a second perspective. DETAILED DESCRIPTION

[0040] The present invention is further described below in conjunction with embodiments and drawings.

[0041] A method for coaxial debugging of array lasers, comprising the following steps:

[0042] S1, a main autocollimator 6 is arranged in front of an array laser output device composed of at least two lasers 1 arranged in a row, the main autocollimator 6 is located in the designed laser beam output direction, and is adjusted so that the optical axis of the main autocollimator 6 is parallel to the output light beam of the first laser 1 of the array laser output device;

[0043] S2, such as Figure 2 , a reflector group 2 is arranged between the array laser output device and the main autocollimator 6, the reflector group 2 includes two reflectors, the two reflectors are adjusted to be parallel to each other and the distance between them is a set value, and the two reflectors are staggered to make the reflector close to the array laser output device extend out of the other reflector to form a reflective output end, and the reflective output end corresponds to the combined beam output direction;

[0044] A route observation component 5 and a power detection component 4 are arranged between the reflection output end and the main autocollimator 6;

[0045] S3, turning on any one of the lasers 1 in the array laser output device, so that its light beam is directed toward the reflector group 2, and adjusting the angle of the reflector group 2 as a whole so that the outgoing light beam is coaxial with the optical axis of the main autocollimator 6, and recording the path mark point where the outgoing light beam is led out to the route observation component 5 at this time;

[0046] S4, turning on the second laser 1, using the route observation component 5 to observe, and adjusting the position of the second laser 1 so that the outgoing light beam from the reflector group 2 passes through the path marking point;

[0047] S5, adjusting the position of the second laser 1 to adjust the optical path difference between the second laser 1 and the previous laser 1 to the reflective output end, and determining the position of the second laser 1 according to the maximum power value detected by the power detection component 4;

[0048] S6, turn on the remaining lasers 1 in sequence, and repeat steps S4 to S5 to adjust their positions to achieve beam combining of all lasers 1.

[0049] In order to accurately and reliably adjust the optical axis angle of the main autocollimator 6, an auxiliary calibration method is adopted. Step S1 specifically includes:

[0050] S11, two laser autocollimators are arranged in front of the array laser output device, namely the main autocollimator 6 and the auxiliary autocollimator 7, which are arranged parallel to the arrangement direction of the laser 1 and correspond to the two ends of the arrangement direction of the laser 1 respectively, and the auxiliary autocollimator 7 is used to collimate the first laser 1, so that the optical axis of the auxiliary autocollimator 7 is coaxial with the emission light beam of the laser 1, and a calibration reference point is set in the field of view of the auxiliary autocollimator 7;

[0051] S12, setting a standard mirror 9 between the laser autocollimator and the array laser output device, so that the collimated light reflected back to the auxiliary autocollimator 7 from one side of the standard mirror 9 toward the auxiliary autocollimator 7 coincides with the calibration reference point, that is, the optical axis of the auxiliary autocollimator 7 is consistent with the normal direction of the standard mirror 9;

[0052] S13, adjust the posture of the main autocollimator 6 so that the collimated light reflected back by the standard mirror 9 toward one side of the main autocollimator 6 coincides with the autocollimation reference point of the main autocollimator 6, that is, the optical axis of the main autocollimator 6 is also consistent with the normal direction of the standard mirror 9, and then remove the standard mirror 9.

[0053] In order to avoid mutual interference between the two sides of the standard mirror 9, the standard mirror 9 is a single-sided high-reflectivity reflector, the side facing the auxiliary autocollimator 7 is a reflective surface, and the back side surface, that is, the surface facing the laser 1, is a frosted surface.

[0054] In this way, the determination of the optical axis angle of the main autocollimator 6 is completed.

[0055] The reflector assembly 2 comprises a reflector support seat 2c, a first reflector 2a and a second reflector 2b. The reflector support seat 2c is provided with a translation stage 3, and a length gauge 3a is provided on the translation stage 3 so as to be linearly slidable. The specific process of step S2 is as follows:

[0056] S21, the first reflector 2a is adjustably mounted on the reflector support 2c, the reflector support 2c is located between the array laser output device and the main autocollimator 6, the reflective surface of the first reflector 2a (i.e. Figure 2 The middle left side) faces away from the array laser output device;

[0057] S22, setting up a goniometer 8 to align the first reflector 2a, and setting a reference point on the field of view of the goniometer 8;

[0058] S23, install the second reflector 2b so that its reflecting surface (i.e. Figure 2The reflective surface of the first reflector 2a is directed toward the right side of the center, and one end thereof corresponding to the combined beam output direction is lower than the first reflector 2a, so that the extended end of the first reflector 2a forms the reflective output end, and the reflective surface is collimated by the goniometer 8, so that the crosshair image reflected by the reflective surface back to the goniometer 8 coincides with the reference point;

[0059] S24, adjusting the second reflector 2b so that the distance between the second reflector 2b and the first reflector 2a is a set value.

[0060] In order to make the distance between the two reflectors equal to the set value, specifically, first move the translation stage 3 until the measuring end of the length meter 3a contacts the edge of the reflective surface of the first reflector 2a, and record the measured value of the length meter 3a at this time, then move the translation stage 3 toward the second reflector 2b, the displacement distance is the set value plus the thickness of the second reflector 2b, then move the second reflector 2b along the normal direction until its back surface contacts the measuring end of the length meter 3a, in this process, monitor whether the crosshair image on the field of view of the goniometer 8 returned by the reflective surface of the second reflector 2b coincides with the reference point, if not, adjust the displacement and angle of the second reflector 2b, and iterate the adjustment repeatedly until the crosshair image on the field of view of the goniometer 8 returned by the reflective surface of the second reflector 2b coincides with the crosshair image returned by the reflective surface of the first reflector 2a, and the reading of the length meter 3a is the same as the measured value. In this way, the parallelism of the two reflectors and the distance between them are guaranteed.

[0061] After the relative position adjustment between the two reflectors is completed, in step S3, the positions of the first reflector 2a and the second reflector 2b on the reflector support seat 2c are fixed, and the reflector support seat 2c is adjusted to adjust the angle of the reflector group 2 as a whole.

[0062] like Figures 3 to 5As shown, a mounting structure of a reflector is as follows: a reflector support seat 2c includes a base 2c1, a support plate 2c2 is horizontally rotatably arranged on the base 2c1, two linear sliding mechanisms 2d arranged along the same straight line direction are arranged on the support plate 2c2, a mirror frame assembly 2e is arranged above the linear sliding mechanism 2d, and the mirror frame assembly 2e includes a vertically arranged frame-shaped back support plate 2e1, a second frame 2e2 and a first frame 2e3 are arranged on one side of the back support plate 2e1 in sequence, and the reflector is fixedly arranged on the first frame 2e3. A horizontal rotation adjustment mechanism and a pitch adjustment mechanism are arranged between the first frame 2e3, the second frame 2e2 and the back support plate 2e1. The linear sliding mechanism is used to adjust the position of the reflector along the normal direction of the reflector, the horizontal rotation mechanism is used to rotate and adjust the reflector in the horizontal direction, and the pitch adjustment mechanism is used to adjust the pitch angle of the reflector. In step S22, the first reflector 2a is aligned by adjusting the horizontal rotation mechanism and the pitch adjustment mechanism. In step S23, the second reflector 2b is aligned by adjusting the horizontal rotation mechanism and the pitch adjustment mechanism. In step S24, the position of the second reflector 2b is adjusted by the linear sliding mechanism, and its posture is adjusted by adjusting the horizontal rotation mechanism and the pitch adjustment mechanism, so that its distance from the first reflector 2a is a set value.

[0063] In step S3, the linear sliding mechanism, the horizontal rotation mechanism and the pitch adjustment mechanism are all kept in a locked state, and the support plate 2c2 is horizontally rotated to adjust the angle of the reflector assembly 2 as a whole. The support plate 2c2 is arranged on the base 2c1 through a vertical rotation axis, and a worm gear mechanism can be arranged between the support plate 2c2 and the base 2c1. The worm gear is fixedly sleeved on the vertical rotation axis, and the rotation adjustment of the support plate 2c2 on the base 2c1 is achieved by rotating the worm gear.

[0064] Specifically, the linear sliding mechanism 2d can be a slide rail assembly, including a lower slide rail 2d1 and an upper slide rail 2d2, wherein the upper surface of the lower slide rail 2d1 is provided with a dovetail slide groove, and the upper slide rail 2d2 is provided with a dovetail slider, and the two cooperate with each other. The side wall of the lower slide rail 2d1 is provided with a locking screw hole 2d3, and a locking bolt is inserted into the locking screw hole 2d3 to lock and position the upper slide rail 2d2.

[0065] Specifically, the back support plate 2e1, the second frame 2e2 and the first frame 2e3 are arranged at intervals, the edge of the lower frame bar of the second frame 2e2 is connected to the back support plate 2e1 through the second connecting bar, and the upper frame bar of the second frame 2e2 is provided with a pitch adjustment screw hole 2e4, and a pitch adjustment bolt is inserted into the pitch adjustment screw hole 2e4, and the screw end of the pitch adjustment bolt abuts against the back support plate 2e1, thereby forming a pitch adjustment mechanism. The back support plate 2e1 and the second frame 2e2 form an elastic connection structure at the second connecting bar, so by adjusting the pitch adjustment bolt, the pitch angle of the reflector can be changed by a small angle to meet the requirements of fine adjustment.

[0066] Similarly, the frame bars on the same side of the second frame body 2e2 and the first frame body 2e3 are connected by the first connecting bar, and the frame bars on the opposite side of the first frame body 2e3 opposite to the first connecting bar are provided with horizontal rotation adjustment screw holes 2e5, and the horizontal rotation adjustment screw holes 2e5 are penetrated with horizontal adjustment bolts, and the screw ends of the horizontal adjustment bolts abut against the second frame body 2e2, thereby forming a horizontal rotation adjustment mechanism. By adjusting the horizontal adjustment bolts, the reflector can be horizontally rotated at a small angle to meet the requirements of fine adjustment.

[0067] The screw ends of the pitch adjustment bolt and the horizontal adjustment bolt are both round heads, which are not shown in the figure.

[0068] The translation stage 3 is arranged on the support plate 2c2 through a slide rail mechanism.

[0069] In this embodiment, the route observation component 5 includes a first beam splitter 5a and a CCD camera 5b, wherein the first beam splitter 5a is disposed between the reflection output end and the main autocollimator 6, and reflects the outgoing light beam emitted from the reflection output end to the CCD camera 5b. The path marking point is disposed on the field of view of the CCD camera 5b.

[0070] In step S4, when adjusting the positions of the remaining lasers 1, the positions of the light beams reflected by the first beam splitter 5a to the field of view of the CCD camera are always observed in the CCD camera.

[0071] In step S4, in a plane perpendicular to the light beam emitted by the laser 1 ( Figure 2 The position of the second laser 1 is adjusted (in the vertical direction and perpendicular to the paper surface) to achieve spatial beam combination of the light beams of the laser 1 and the first laser 1.

[0072] The power detection assembly 4 includes a second beam splitter 4a and a power meter 4b. The second beam splitter 4a is arranged between the reflection output end and the main autocollimator 6, and reflects the outgoing light beam emitted from the reflection output end to the power meter 4b. When the power reading of the power meter 4b is the maximum, the light beam is coherent.

[0073] In the step S5, the position of the second laser 1 is adjusted in the direction of the light beam emitted by the laser 1 (ie, the left-right direction), so as to adjust the wavelength difference between the light beams.

[0074] During the debugging process, high-precision equipment should be selected as much as possible, such as the accuracy of the goniometer 8 is better than 0.3″, the accuracy of the laser autocollimator is better than 1″, the accuracy of the length meter 3a is better than 0.5μm, the accuracy of the translation stage 3 is better than 10μm, and the standard mirror 9 is a high-precision lens with a reflected wavefront better than 1 / 5λ, λ=632.8nm.

[0075] In this embodiment, Figure 2 As shown, first turn on the laser 1 numbered ① for calibration, determine the position and optical axis of the main autocollimator 6, and record the path mark points of the light beam ① emitted by the laser 1 numbered ① on the field of view of the CCD camera 5b and the reading of the power meter 4b. Then turn on the laser numbered ② and adjust it. For the laser 1 numbered ②, adjust until the far field of the light beam ② coincides with the autocollimation reference point in the field of view of the main autocollimator 6, the near field coincides with the path mark point on the field of view of the CCD camera 5b, and the power meter 4b reading is the largest, that is, the light beam ② and the light beam ① are coaxial and coherent, and the beam combination is completed. Then turn on the remaining lasers numbered ② to ④ from bottom to top and adjust them. All array beams are combined coaxially, interference enhancement is generated, and the output power is enhanced.

[0076] Finally, it should be noted that the above description is only a preferred embodiment of the present invention. Under the guidance of the present invention, ordinary technicians in this field can make various similar expressions without violating the purpose and claims of the present invention, and such changes all fall within the scope of protection of the present invention.

Claims

1. A method for coaxial debugging of array lasers, characterized in that The following steps are involved: S1, a main autocollimator (6) is arranged in front of an array laser output device composed of at least two lasers (1) arranged in a row, the main autocollimator (6) is located in the designed laser beam output direction, and is adjusted so that the optical axis of the main autocollimator (6) is parallel to the output light beam of the first laser (1) of the array laser output device; S2, arranging a reflector group (2) between the array laser output device and the main autocollimator (6), the reflector group (2) comprising two reflectors, adjusting the two reflectors so that they are parallel to each other and the distance between them is a set value, and staggering the two reflectors so that the reflector close to the array laser output device extends out of the other reflector to form a reflective output end, the reflective output end corresponding to the combined beam output direction; A route observation component (5) and a power detection component (4) are arranged between the reflection output end and the main autocollimator (6); S3, turning on any one of the lasers (1) in the array laser output device so that its light beam is directed toward the reflector group (2), and adjusting the angle of the reflector group (2) as a whole so that the outgoing light beam is coaxial with the optical axis of the main autocollimator (6), and recording the path mark point where the outgoing light beam is directed to the route observation component (5); S4, turning on the second laser (1), using the route observation component (5) to perform observation, and adjusting the position of the second laser (1) so that the light beam emitted from the reflector group (2) passes through the path marking point; S5, adjusting the position of the second laser (1) to adjust the optical path difference between the second laser (1) and the previous laser (1) to the reflective output end, and determining the position of the second laser (1) according to the maximum power value detected by the power detection component (4); S6, turn on the remaining lasers (1) in sequence, and repeat steps S4 to S5 to adjust their positions.

2. A method for coaxial debugging of array lasers according to claim 1, characterized in that: The reflector group (2) comprises a reflector support seat (2c), a first reflector (2a) and a second reflector (2b); The step S2 comprises: S21, the first reflector (2a) is adjustably mounted on the reflector support seat (2c), the reflector support seat (2c) is located between the array laser output device and the main autocollimator (6), and the reflective surface of the first reflector (2a) faces away from the array laser output device; The reflector support seat (2c) is provided with a translation platform (3), and a length meter (3a) is provided on the translation platform (3) in a linearly slidable manner; S22, setting up a goniometer (8) to align the first reflector (2a), and setting a reference point on the field of view of the goniometer (8); S23, installing the second reflector (2b) so that its reflective surface faces the reflective surface of the first reflector (2a), and its end corresponding to the combined beam output direction is lower than the first reflector (2a), so that the protruding end of the first reflector (2a) forms the reflective output end, and using the goniometer (8) to align its reflective surface so that the crosshair image reflected back to the goniometer (8) by its reflective surface coincides with the reference point; S24, adjusting the second reflector (2b) so that the distance between the second reflector (2b) and the first reflector (2a) is a set value.

3. A method for coaxial debugging of array lasers according to claim 2, characterized in that The step S24 specifically comprises: firstly, moving the translation stage (3) until the measuring end of the length meter (3a) contacts the edge of the reflecting surface of the first reflecting mirror (2a), and recording the measured value of the length meter (3a) at this time; then, moving the translation stage (3) toward the second reflecting mirror (2b), the displacement distance being the set value plus the thickness of the second reflecting mirror (2b); then, moving the second reflecting mirror (2b) along the normal direction until its back side contacts the measuring end of the length meter (3a); during this process, monitoring whether the crosshair image returned by the reflecting surface of the second reflecting mirror (2b) to the field of view of the goniometer (8) coincides with the reference point; if not, adjusting the displacement and angle of the second reflecting mirror (2b) until the crosshair image returned by the reflecting surface of the second reflecting mirror (2b) to the field of view of the goniometer (8) coincides with the crosshair image returned by the reflecting surface of the first reflecting mirror (2a), and the reading of the length meter (3a) is the same as the measured value.

4. The method for coaxial debugging of array lasers according to claim 2, characterized in that: In the step S3, the positions of the first reflector (2a) and the second reflector (2b) on the reflector support seat (2c) are fixed, and the reflector support seat (2c) is adjusted to adjust the angle of the reflector group (2) as a whole.

5. The method for coaxial debugging of array lasers according to claim 2, characterized in that: The route observation component (5) comprises a first beam splitter (5a) and a CCD camera (5b); the first beam splitter (5a) is arranged between the reflection output end and the main autocollimator (6) and reflects an outgoing light beam emitted from the reflection output end to the CCD camera (5b).

6. The method for coaxial debugging of array lasers according to claim 2, characterized in that: The power detection component (4) comprises a second beam splitter (4a) and a power meter (4b); the second beam splitter (4a) is arranged between the reflection output end and the main autocollimator (6) and reflects the outgoing light beam emitted from the reflection output end to the power meter (4b).

7. A method for coaxial debugging of array lasers according to claim 2, characterized in that Step S1 specifically includes: S11, two laser autocollimators are arranged in front of the array laser output device, namely the main autocollimator (6) and the auxiliary autocollimator (7), both of which are arranged parallel to the arrangement direction of the lasers (1), and the auxiliary autocollimator (7) is used to collimate the first laser (1) so that the optical axis of the auxiliary autocollimator (7) is coaxial with the emission light beam of the laser (1), and a calibration reference point is set within the field of view of the auxiliary autocollimator (7); S12, arranging a standard mirror (9) between the laser autocollimator and the array laser output device, so that the collimated light reflected back to the auxiliary autocollimator (7) from a side of the standard mirror (9) facing the auxiliary autocollimator (7) coincides with the calibration reference point; S13, adjusting the posture of the main autocollimator (6) so that the collimated light reflected back by the standard mirror (9) toward one side of the main autocollimator (6) coincides with the autocollimation reference point of the main autocollimator (6), and then removing the standard mirror (9).

8. The method for coaxial debugging of array lasers according to claim 1, characterized in that: In the step S4, the position of the second laser (1) is adjusted in a plane perpendicular to the light beam emitted by the laser (1).

9. The method for coaxial debugging of array lasers according to claim 8, characterized in that: In the step S5, the position of the second laser (1) is adjusted in the direction of the light beam emitted by the laser (1).

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