Electroplating growth of nanowires

Abstract

The invention relates to a method of providing a plurality of nanowires (14) on a surface (15), comprising: a) providing an electrolyte dispenser (1); b) providing a foil (16) having a plurality of continuous holes (17); c) arranging the foil (16) between the surface (15) and an outlet side (4) of the electrolyte dispenser (1); d) introducing a liquid electrolyte into the electrolyte dispenser (1) such that the liquid electrolyte is deposited onto the foil (16) at the outlet side (4) of the electrolyte dispenser (1); and e) applying a voltage between the liquid electrolyte and the surface (15) such that the nanowires (14) grow from the liquid electrolyte in the holes (17) of the foil (16) onto the surface (15).

Description

[0001] This invention relates to the electroplating growth of nanowires. In particular, this invention relates to a method and apparatus for providing multiple nanowires on a surface.

[0002] Methods and apparatus for fabricating nanowires are known. For example, nanowires can be fabricated via electroplating or methods known from thin-film technology. Many known methods share the common fact that they require complex machinery, and therefore are generally only applicable in laboratories and cleanrooms. In particular, most known methods are not suitable for industrial applications.

[0003] Similarly, many known apparatuses and methods suffer from the drawback that the obtained nanowires vary greatly in their properties, particularly in their quality. Often, even when using similar or identical machines, raw materials, and / or formulations, nanowires from different growth processes differ considerably in some degree. Generally, the quality of nanowires tends to be related to the skill of the user of the corresponding apparatus, the skill of the user of the corresponding method, environmental influences, and / or sheer chance. In some cases, the fact that nanowires even possess structures that cannot be seen through an optical microscope exacerbates these conditions. Therefore, arduous testing may be required to detect these properties (especially property variations) in a timely manner.

[0004] In particular, due to the aforementioned quality variations, known methods and apparatus often cannot cover fairly large surfaces with nanowires. Therefore, the properties of nanowires in different regions of the covered surface are likely to differ. This can be detrimental to many applications.

[0005] In view of this, the object of the present invention is to solve or at least reduce the technical problems discussed in the prior art. In particular, the objective is to provide a method and apparatus for providing multiple nanowires in a particularly reliable manner over a particularly large area.

[0006] The stated objective can be achieved through the features described in the independent claims. Advantageous improvements are specifically described in the formulated dependent claims. Features individually described in the claims can be combined with each other in any suitable technical manner and can be supplemented by the explanatory facts of further design variations highlighted in the specification.

[0007] According to the present invention, a method for providing multiple nanowires on a surface is proposed. The method includes:

[0008] a) Provide an electrolyte dispenser;

[0009] b) Provide a foil with multiple consecutive holes;

[0010] c) Arrange the foil between the surface and the outlet side of the electrolyte dispenser;

[0011] d) Introducing a liquid electrolyte into the electrolyte distributor, such that the liquid electrolyte is deposited onto the foil on the outlet side of the electrolyte distributor; and

[0012] e) Apply a voltage between the liquid electrolyte and the surface, causing nanowires to grow from the liquid electrolyte onto the surface within the pores of the foil.

[0013] Steps a) through c) are preferably performed before steps d) and e). Steps a) and b) can be performed in any desired order, or simultaneously, especially even simultaneously with step c). Steps d) and e) can be performed in any desired order, or simultaneously.

[0014] Nanowires can be manufactured using the method described above. Nanowires are understood herein to be any material substrate having a linear form and dimensions ranging from a few nanometers to a few micrometers. Nanowires can have, for example, circular, elliptical, or polygonal base surfaces. In particular, nanowires can have hexagonal base surfaces. All nanowires are preferably made of the same material.

[0015] The nanowires are preferably in the length range of 100 nm to 100 μm, particularly in the range of 500 nm to 30 μm. Furthermore, the nanowires are preferably in the diameter range of 10 nm to 10 μm, particularly in the range of 30 nm to 2 μm. Here, the term "diameter" is used in relation to a circular base, and a similar definition of diameter should be considered when the base deviates from this shape. It is particularly preferred that all nanowires used have the same length and the same diameter.

[0016] The method can be applied to a variety of different nanowire materials. Conductive materials are preferred nanowire materials, especially metals such as copper, silver, gold, nickel, tin, and platinum. However, non-conductive materials such as metal oxides are also preferred.

[0017] The surface on which the nanowires are to be grown is preferably conductive. If the surface is a portion of a non-conductive material (e.g., a substrate), conductivity can be achieved by means such as metallization. Thus, for example, a thin metal layer can be applied to a non-conductive substrate. In particular, an electrode layer can be formed by metallization. Depending on the materials of the surface and / or the electrode layer, it may be advantageous to provide an adhesive layer between the surface and the electrode layer, which can promote adhesion between the surface and the electrode layer.

[0018] Due to its conductivity, this surface can be used as an electrode for nanowire electroplating growth. The substrate can be, in particular, a silicon substrate. This surface can be, in particular, the surface of a body equipped with a conductive structure. It can be, in particular, a silicon wafer or a so-called printed circuit board (PCB).

[0019] By the method described, nanowires can be electroplated onto the surface within the pores of a foil. For this purpose, an electrolyte is used. If the electrolyte is distributed on the foil in a particularly uniform manner, nanowires can be supplied over a particularly large area and in a particularly reliable manner. In the method, uniform distribution of the electrolyte on the foil can be achieved by an electrolyte distributor, which is provided in step a).

[0020] The electrolyte distributor preferably has at least one inlet and multiple outlets on the outlet side. Therefore, the purpose and configuration of the electrolyte distributor is to distribute liquid electrolyte from at least one inlet to the outlet. Due to the fact that the electrolyte distributor has multiple outlets, the electrolyte can be distributed in a particularly uniform manner on the outlet side. Multiple outlets can be understood as having at least three outlets. The electrolyte distributor preferably has 100 to 1000 outlets. The diameter of each outlet is preferably in the range of 0.1 to 2 mm.

[0021] The outlet is located on the outlet side of the electrolyte distributor. The inlet of the electrolyte distributor is preferably located on the inlet side, i.e., opposite to the outlet side. The outlet is preferably configured perpendicular to the outlet side. This means that the flow direction of the electrolyte through the outlet is perpendicular to the outlet side. Therefore, the electrolyte can be deposited on the outlet side in a particularly uniform manner.

[0022] The outlets are preferably arranged in a regular pattern on the outlet side. Therefore, the electrolyte can be deposited uniformly on the outlet side. For example, the outlets can be configured in a grid, wherein all rows of the grid are preferably equal in size in each case, all columns of the grid are preferably equal in size in each case, and / or all rows in the grid have the same size as all columns. For example, the electrolyte dispenser may have 400 outlets arranged in 20 rows and 20 columns.

[0023] In step b), a foil with multiple consecutive holes is provided.

[0024] The foil is preferably made of a plastic material, particularly a polymer. Specifically, the foil is preferably attached to the surface in a non-slip manner. This may reduce the quality of the grown nanowires.

[0025] The formation of holes extending through the foil is preferably achieved by forming a continuous channel from the top side to the bottom side of the foil. In particular, the holes are preferably cylindrical. However, the holes can also be formed into channels with curved profiles. For example, the holes can have circular, elliptical, or polygonal bases. In particular, the holes can have hexagonal bases. The holes preferably have a uniform design (that is, the size, shape, arrangement, and / or spacing of the holes with adjacent holes are preferably indistinguishable).

[0026] When nanowires are grown in step c), the pores are preferably (especially completely) filled with the electroplated deposition material. In this case, the nanowires exhibit the size, shape, and arrangement of the pores. Therefore, the properties of the nanowires to be grown can be set or influenced by the choice of the foil or the pores therein. Thus, the foil can also be referred to as a "template," "template foil," or "pattern."

[0027] In step c), the foil is preferably placed between the surface and the electrolyte dispenser with the foil resting against the surface. The foil is preferably applied to the electrolyte dispenser in such a way that a liquid electrolyte can be deposited onto the foil. For example, the foil can be applied to both the surface and the outlet side of the electrolyte dispenser. Alternatively, one or more electrolyte-permeable intermediate layers can be disposed between the foil and the outlet side of the electrolyte dispenser. For example, a sponge can be applied to both the foil and the outlet side of the electrolyte dispenser.

[0028] In step d), the liquid electrolyte is preferably introduced from the inlet of the electrolyte distributor, or at least one inlet. As a result, the liquid electrolyte is discharged from the outlet and deposited on the foil.

[0029] In step e), a voltage is applied between the liquid electrolyte and the surface, causing nanowires to grow onto the surface through the pores of the foil. This voltage is preferably applied between the electrode and the surface. The electrode is preferably connected to the electrolyte in such a way that a continuous conductive path is created from the electrode to the surface by the electrolyte. As a result, the nanowires can be electroplated and grown on the surface.

[0030] When the nanowires are made of copper, this method is preferably carried out at room temperature. The applied voltage is preferably from 0.01V to 2V, particularly 0.2V. When the electrolyte for the nanowires is made of copper, a mixture of CuSO4 (copper sulfate), H2SO4 (sulfuric acid), and H2O (water) is particularly preferred. Under these conditions, to obtain copper nanowires with, for example, a diameter of 100 nm and a length of 10 μm, a voltage of 1.5 mA / cm is preferably applied during a 20-minute growth time. 2 A current density of [mA per square centimeter] (direct current). To obtain copper nanowires, for example, with a diameter of 1 μm and a length of 10 μm, a current density of 0.5 to 2 mA / cm² is preferably applied during a 40-minute growth period. 2 Current density of [milliamperes per square centimeter] (direct current).

[0031] The method described above, particularly using the preferred parameters, yields exceptionally high-quality nanowires. Furthermore, these nanowires can be grown uniformly over exceptionally large areas in terms of length, diameter, structure, and density (i.e., the spacing between adjacent nanowires). The method is not limited to laboratory use, as it eliminates the need for micro-assembly processing. For example, heavy ion bombardment methods are limited by research facilities, as ion accelerators are large, stationary devices.

[0032] Another aspect of the present invention is a device for providing a plurality of nanowires on a surface. The device includes:

[0033] - An electrolyte dispenser, comprising:

[0034] - Multiple outlets on the outlet side of the electrolyte dispenser; and

[0035] -At least one entry point;

[0036] - A foil having multiple continuous holes is applied to the electrolyte distributor, allowing liquid electrolyte to be deposited onto the foil through the distributor; and

[0037] - An electrode for applying a voltage between the liquid electrolyte and the surface, such that when the foil is applied to the surface, the nanowire can be grown onto the surface by the liquid electrolyte within the pores of the foil.

[0038] The particular advantages and design features of the methods further described above can be applied to and transferred to the apparatus, and vice versa. The method is preferably implemented via the apparatus. Preferably, the apparatus is intended and configured to implement the method.

[0039] The surface is not part of the device. The device can contact the surface to allow nanowires to grow onto it.

[0040] The foil is applied to the electrolyte dispenser in such a way that the liquid electrolyte can be deposited onto the foil. For this purpose, the foil can be applied directly to the outlet side of the electrolyte dispenser. Alternatively, if an electrolyte-permeable intermediate layer is arranged between the foil and the outlet side of the electrolyte dispenser, the foil is applied onto the intermediate layer. For example, if the electrolyte dispenser has a sponge as the intermediate layer, and the sponge is applied to the outlet of the electrolyte dispenser, the foil is preferably applied onto the sponge and then further applied to the electrolyte dispenser.

[0041] When the electrolyte is deposited onto the foil via an electrolyte distributor, the electrode is preferably arranged in a manner that allows the electrolyte to create a continuous conductive path from the electrode to the surface. The electrode may also be part of the electrolyte distributor.

[0042] In a preferred embodiment of the device, the electrolyte dispenser includes at least two inlets, each inlet being connected to a corresponding set of outlets, and the sets of outlets being different from one another.

[0043] Each entrance is connected to a corresponding exit group, and the exit groups are different from each other.

[0044] An outlet group contains at least two outlets and at most all outlets. Groups may overlap. An outlet may belong to one, multiple, or all groups. An electrolyte may also have an outlet that does not belong to any group; however, such outlets are irrelevant to the function of the electrolyte dispenser and are therefore not considered further. No two groups can be exactly the same. Each inlet corresponds to only one group. Therefore, the number of groups is the same as the number of inlets.

[0045] If the electrolyte dispenser has two inlets and four outlets, for example, the following sets can be provided:

[0046] Example 1: Inlet 1 is connected to outlets 1 and 2 (group 1);

[0047] Inlet 2 is connected to outlets 3 and 4 (group 2).

[0048] Example 2: Inlet 1 is connected to outlets 1, 2 and 3 (group 1);

[0049] Inlet 2 is connected to outlets 1, 2 and 4 (group 2).

[0050] Example 3: Inlet 1 is connected to outlets 1, 2, 3 and 4 (group 1);

[0051] Inlet 2 is connected to outlets 1, 2 and 3 (group 2).

[0052] These embodiments are specifically used to illustrate the definition of a group. The electrolyte dispenser preferably has more than four outlets.

[0053] Arranging the outlets in groups allows for the deposition of electrolytes in a partitioned manner on the outlet side. Depending on the inlet where the electrolyte is introduced, it can be deposited on corresponding different regions on the outlet side of the electrolyte dispenser. Therefore, by this method, nanowire growth can cover regions of different sizes and / or morphologies on the surface. For example, if the goal is to cover a region of the surface by nanowire growth, i.e., a region smaller than the outlet side of the electrolyte dispenser, then the deposition of the electrolyte can be limited to the corresponding partition on the outlet side of the electrolyte dispenser. This is possible based on the grouping of the outlets, which preferably corresponds to the portion of the surface to be covered by growth. Alternatively, the electrolyte is preferably deposited using other large partitions on the outlet side of the electrolyte dispenser, covering the entire surface to be covered by growth.

[0054] The configuration of the electrolyte distributor allows for the deposition of electrolytes in a specific manner. As a result, on the one hand, electrolyte consumption can be reduced because electrolyte is not deposited in unwanted areas. However, it has been shown that the configuration of the electrolyte distributor can also help improve the quality of nanowires. In particular, it has been shown that particularly uniform nanowires can be produced by configuring the electrolyte distributor. This is because the amount of electrolyte deposited on the foil has an impact on the properties of the manufactured nanowires. If the electrolyte is provided in an area larger than the surface to be covered by growth, the edge regions of the surface to be covered will receive more electrolyte for nanowire growth than the central regions. This can lead to differences in nanowires between the edge and central regions. The configuration of the electrolyte distributor can prevent this from happening.

[0055] The electrolyte can be supplied separately to each inlet to be used. For this purpose, the inlets are preferably connected to the main inlet separately via inlet distributors. The inlet distributors preferably have separate valves for each inlet. Thus, the electrolyte can enter the electrolyte distributor through the main inlet and be distributed by the inlet distributor to the inlets with open valves. One or more sets of outlets for depositing electrolyte can be determined by opening and closing the individual valves of the inlet distributors.

[0056] According to a further preferred embodiment of the device, the outlet side of the electrolyte distributor has a planar structure.

[0057] Electrolyte distributors are particularly suitable for the electroplating growth of nanowires. The nanowires are preferably grown on a planar surface. Accordingly, it is advantageous that the outlet side of the electrolyte distributor has a planar structure.

[0058] If the goal is to cover the curved surface with the growth of nanowires, it is preferable to place a sponge between the surface and the outlet side of the electrolyte dispenser. The sponge can counteract the curvature of the surface.

[0059] According to a further preferred embodiment of the device, the electrolyte distributor includes a dispensing element having a dispensing portion for each outlet group, wherein each inlet is connected to a corresponding outlet group via a corresponding dispensing portion.

[0060] The dispensing element is preferably configured as a dispensing plate. The dispensing portion is preferably configured as an internal cavity of the dispensing element. Each dispensing portion is preferably directly or indirectly connected to a corresponding inlet. Indirect connection exists if other elements are provided between the connecting portion and the corresponding inlet to allow electrolyte to flow from that inlet to the dispensing portion. Each dispensing portion is preferably directly or indirectly connected to a corresponding outlet. Each dispensing portion is preferably directly connected to the corresponding outlet, such that the outlet is configured as an opening in the dispensing element, extending between the corresponding dispensing portion of the dispensing element and its surroundings.

[0061] According to a further preferred embodiment of the device, the electrolyte distributor includes a pre-distribution element, through which each inlet is connected to a corresponding distribution portion of the distribution element.

[0062] In this embodiment, the dispensing element is indirectly connected to the inlet via a pre-dispensing element. The pre-dispensing element allows electrolyte to be conducted from the inlet to the corresponding dispensing portion of the dispensing element. Compared to a direct connection between the inlet and the dispensing portion, the electrolyte can be deposited more uniformly on the outlet side by the pre-dispensing element. This is because the electrolyte can be deposited more uniformly in the dispensing portion via the pre-dispensing element rather than directly through the inlet. As a result, the electrolyte flow rate within the dispensing element is more uniform.

[0063] The electrolyte distributor is preferably constructed in layers: the first layer consists of pre-distribution elements, and the second layer consists of distribution elements.

[0064] According to a further preferred embodiment of the device, the outlet of the electrolyte distributor is formed in the cover layer of the electrolyte distributor.

[0065] The electrolyte distributor is preferably constructed in layers: the first layer consists of a pre-distribution element, the second layer consists of a distribution element, and the third layer consists of a cover layer. On one hand, the distribution element rests against the pre-distribution element, and on the other hand, it rests against the cover layer.

[0066] An outlet is formed within the cover layer. The dispensing element preferably has multiple pores designed and configured to correspond to the outlets. Thus, electrolyte can be discharged from the dispensing element through the pores and can pass through the cover layer through the corresponding outlets.

[0067] The material on the outlet side can also affect the growth of nanowires. Depending on the electrolyte used and / or the material of the nanowires to be grown, an alternative material on the outlet side may be advantageous. The capping layer can be replaced more easily than the dispensing element. Because of the capping layer, the electrolyte dispenser can therefore be used in a particularly flexible manner. In the event of damage or contamination, the capping layer can be replaced more easily than the dispensing element.

[0068] According to a further preferred embodiment of the device, the outlet side of the electrolyte distributor is configured in the form of an electrode.

[0069] In this embodiment, the electrolyte distributor is particularly suitable for the electroplating growth of nanowires. Therefore, a voltage can be applied between the outlet side and the surface to be covered by nanowire growth. No additional electrodes are required, which reduces construction costs.

[0070] In particular, in this embodiment, the outlet is preferably formed within the cover layer of the electrolyte dispenser. The cover layer is preferably made of metal and can be used as an electrode. During nanowire electroplating growth, deposits can be formed on the cover layer. The cover layer can be removed from the dispensing element for cleaning. The cover layer can also be replaced in a simpler manner compared to, for example, the dispensing element. This is advantageous, and another reason is that the electrode material can affect nanowire growth.

[0071] According to a further preferred embodiment of the device, the electrolyte dispenser includes a guiding device to guide the electrolyte dispenser to move vertically relative to the outlet side.

[0072] In this embodiment, the electrolyte dispenser is particularly suitable for the electroplating growth of nanowires. Therefore, the substrate to be covered by nanowire growth can be positioned under the electrolyte dispenser, a foil can be applied to the surface of the substrate to be covered by growth, and the electrolyte dispenser can be guided by a guiding device to apply the foil.

[0073] The guiding device is preferably designed to interact, for example, with a counterpart arranged within a housing, in which the electrolyte dispenser can be used. The housing is not part of the electrolyte dispenser. For example, the guiding device may consist of one or more guide rods that can act as a counterpart in a corresponding slot for guidance.

[0074] According to a further preferred embodiment of the device, the electrolyte dispenser includes a sponge resting against the outlet side of the electrolyte dispenser.

[0075] The sponge can receive electrolyte from the outlet side of the electrolyte distributor on its first side, and on its second side, opposite the first side, it is specifically used to re-deposit the electrolyte onto the foil for the electroplating growth of nanowires. Thanks to the sponge, the electrolyte deposition can be further homogenized.

[0076] The invention and technical field are discussed in more detail below with reference to the accompanying drawings. These drawings illustrate particularly preferred embodiments; however, the invention is not limited thereto. It should be particularly noted that these drawings, and especially the scale of the illustrations, are merely schematic. In these drawings, each case is schematically described as follows:

[0077] Figure 1 A cross-sectional view of the electrolyte distributor of the device of the present invention is shown;

[0078] Figure 2 A cross-sectional view of the device of the present invention is shown, which includes Figure 1 Multiple nanowires are provided on the surface of the electrolyte dispenser; and

[0079] Figure 3 A flowchart of the method of the present invention is shown, which uses a... Figure 1 electrolyte distributor Figure 2 The device provides multiple nanowires on the surface.

[0080] Figure 1 An electrolyte distributor 1 with two inlets 2a and 2b and multiple outlets 3 is shown. The outlets 3 are arranged on the outlet side 4 of the electrolyte distributor 1. The outlet side 4 is a planar structure.

[0081] The first inlet 2a is connected to the first group 5a of the outlet 3. The second inlet 2b is connected to the second group 5b of the outlet 3. Groups 5a and 5b are different from each other.

[0082] Electrolyte distributor 1 has a distribution element 6 and a pre-distribution element 8. The distribution element 6 has distribution portions 7a and 7b for the groups 5a and 5b of the outlets 3, respectively. The inlets 2a and 2b are connected to the corresponding distribution portions 7a and 7b in the distribution element 6 via the pre-distribution element 8, and are connected to the corresponding groups 5a and 5b of the corresponding outlets 3 via the distribution portions 7a and 7b in the distribution element 6.

[0083] exist Figure 1 In the cross-sectional view, the second distribution portion 7b is shown partially to the right of the first distribution portion 7a and partially to its left. This is due to the cross-sectional view illustration. The two shown portions of the second distribution portion 7b are connected to each other outside the cross-sectional view. The same applies accordingly to the pre-distribution element 8: the electrolyte from the second outlet 2b, as indicated by the arrows, can enter the left-hand portion of the second distribution portion 7b on one hand and the right-hand portion on the other.

[0084] An outlet is formed in the cover layer 9 of the electrolyte distributor 1. The cover layer 9 is configured in the form of an electrode 10, resulting in the outlet side 4 being configured in the form of an electrode 10.

[0085] In addition, the electrolyte dispenser 1 includes a guiding device 11 for guiding the electrolyte dispenser 1 to move vertically relative to the outlet side 4.

[0086] Figure 2 A device 12 is shown with a plurality of nanowires 14 provided on surface 15. A body 19 having surface 15 is depicted. Neither body 19 nor surface 15 is part of device 12.

[0087] Device 12 includes an electrolyte distributor 1, which, as Figure 1 It is configured and also includes a sponge 13, which rests against the outlet side 4 of the electrolyte distributor 1. The electrolyte distributor 1 is in Figure 2 The diagram is shown in a simplified form. Only the electrode 10, guide device 11, and sponge 13, which are the various parts of the electrolyte distributor 1, are shown.

[0088] Furthermore, the device 12 includes a foil 16 having a plurality of continuous holes 17. The foil 16 is applied to the electrolyte dispenser 1 in such a way that a liquid electrolyte can be deposited onto the foil 16. For this purpose, as shown in this embodiment, the foil 16 is applied to the sponge 13 of the electrolyte dispenser 1.

[0089] Electrode 10 is adapted to apply a voltage between the liquid electrolyte and surface 15, allowing nanowires 14 to grow from the liquid electrolyte into the surface 15 within the pores 17 of foil 16. The voltage can be applied by a current and a voltage source 18.

[0090] The electrolyte dispenser 1 is movable so as to be guided vertically relative to the outlet side 4 by the guide device 11. It has been shown that the electrolyte dispenser 1 may have a groove 23 that interacts with the guide device 11. The electrolyte dispenser 1 may be pressurized to the foil 16 by a spring 22 at a predetermined pressure.

[0091] The growth of nanowires 14 can be locally restricted so that the entire surface 15 is not covered by growth. For this purpose, surface 15 can provide a structural layer 20 in which nanowires cannot grow. As a result, the growth of nanowires 14 can be restricted to openings 21 within this structural layer 20. For example, openings 21 can be obtained by photolithography.

[0092] Figure 3 A flowchart showing a method for providing multiple nanowires 14 on surface 15 is presented. This method is based on... Figure 1 and Figure 2 The method is described using the reference numerals in the accompanying drawings. The method includes:

[0093] a) Provide Figure 1 Electrolyte dispenser;

[0094] b) Provide a foil 16 having a plurality of continuous holes 17;

[0095] c) Arrange the foil 16 between the surface 15 and the outlet side 4 of the electrolyte distributor 1;

[0096] d) Introducing a liquid electrolyte into at least one of the inlets 2a and 2b of the electrolyte distributor 1, such that the liquid electrolyte is deposited onto the foil 16 through the electrolyte distributor 1; and

[0097] e) Apply a voltage between the liquid electrolyte and the surface 15, such that the nanowires 14 are grown from the liquid electrolyte onto the surface 15 within the holes 17 of the foil 16.

[0098] This method is particularly suitable for use by Figure 2 The device is implemented.

[0099] Appendix Label Table

[0100] 1 Electrolyte Distributor

[0101] 2a First Entrance

[0102] 2b Second Entrance

[0103] 3. Exports

[0104] 4. Export side

[0105] 5a Group 1

[0106] 5b Group 2

[0107] 6. Distribution elements

[0108] 7a First allocation part

[0109] 7b Second Allocation Part

[0110] 8 Pre-assigned components

[0111] 9. Covering layer

[0112] 10 electrodes

[0113] 11 Guiding Device

[0114] 12 devices

[0115] 13 Sponges

[0116] 14 nanowires

[0117] 15 Surface

[0118] 16 foil

[0119] 17 holes

[0120] 18 Voltage and Current Sources

[0121] 19 Main Body

[0122] 20 structural layers

[0123] 21 Opening

[0124] 22 Springs

[0125] 23 slots

Claims

1. A method for providing a plurality of nanowires (14) on a surface (15), comprising: a) Provide an electrolyte dispenser (1); b) Provide a foil (16) having multiple consecutive holes (17); c) The foil (16) is arranged between the surface (15) and the outlet side (4) of the electrolyte distributor (1), wherein the sponge (13) is applied to the foil (16) on one side and to the outlet side (4) of the electrolyte distributor (1) on the other side. d) Introducing a liquid electrolyte into the electrolyte distributor (1) such that the liquid electrolyte is deposited onto the foil (16) at the outlet side (4) of the electrolyte distributor (1); and e) Apply a voltage between the liquid electrolyte and the surface (15) such that the nanowire (14) is grown from the liquid electrolyte onto the surface (15) in the pores (17) of the foil (16).

2. A device (12) for providing a plurality of nanowires (14) on a surface (15), comprising: - Electrolyte dispenser (1), the electrolyte dispenser (1) comprising: - Multiple outlets (3) on the outlet side (4) of the electrolyte dispenser (1); and - At least one entry point (2a, 2b); - The sponge (13) rests against the outlet side (4) of the electrolyte dispenser (1); - A foil (16) having multiple continuous holes (17) is applied to the sponge (13) so that a liquid electrolyte can be deposited on the foil (16) through the electrolyte dispenser (1); and - An electrode (10) for applying a voltage between the liquid electrolyte and the surface (15) such that when the foil (16) is applied to the surface (15), the nanowire (14) can be grown from the liquid electrolyte onto the surface (15) in the pores (17) of the foil (16).

3. The apparatus (12) according to claim 2, wherein, The electrolyte dispenser (1) includes at least two inlets (2a, 2b), each inlet (2a, 2b) being connected to a group (5a, 5b) of a respective outlet (3), wherein the group (5a, 5b) of the outlet (3) is different from each other.

4. The apparatus (12) according to claim 2, wherein, The outlet side (4) of the electrolyte distributor (1) is a planar structure.

5. The apparatus (12) according to claim 3 or 4, comprising a distributing element (6) having a distributing portion (7a, 7b) for each group (5a, 5b) of the outlet (3), wherein each inlet (2a, 2b) is connected to the corresponding group (5a, 5b) of the outlet (3) via the corresponding distributing portion (7a, 7b).

6. The apparatus (12) according to claim 5, comprising a pre-distribution element (8), wherein each inlet (2a, 2b) is connected via the pre-distribution element (8) to a corresponding distribution portion (7a, 7b) of the distribution element (6).

7. The apparatus (12) according to any one of claims 2 to 4, wherein, The outlet (3) of the electrolyte distributor (1) is formed in the covering layer (9) of the electrolyte distributor (1).

8. The apparatus (12) according to any one of claims 2 to 4, wherein, The outlet side (4) of the electrolyte distributor (1) is configured as an electrode (10).

9. The device (12) according to any one of claims 2 to 4, comprising a guide device (11) for guiding the electrolyte dispenser (1) to move vertically relative to the outlet side (4).

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