Substrate processing apparatus including bowl assembly

Abstract

The present invention relates to a substrate processing apparatus including a bowl assembly, according to which the interval of a passage formed between the bowls can be appropriately adjusted according to the situation, and when a fluid such as a chemical liquid or gas supplied to a substrate enters the passage formed by the plurality of bowls by centrifugal force, the passage can be formed along the movement path of the fluid, so that droplets do not bounce but naturally move downward.

Description

Technical Field

[0001] The present invention relates to a substrate processing apparatus including a bowl assembly, and more specifically, to a substrate processing apparatus including a bowl assembly comprising two or more bowls that can be moved individually. Background Technology

[0002] Semiconductor devices are typically manufactured by depositing various materials in thin film form on a substrate and then carbonizing them. This process involves several steps, including deposition, photolithography, etching, cleaning, and drying.

[0003] The cleaning and drying processes are processes that remove foreign objects or particles from the substrate and then dry it. This is done by rotating the substrate at high speed while it is supported on a rotating head (clamp base) and supplying a processing liquid to the surface or back of the substrate.

[0004] like Figure 1 As shown, the substrate processing apparatus 300 typically includes a fluid supply unit 380, a bowl assembly 320, a lifting unit 360, and a substrate support device 340 with a rotating head 342.

[0005] The fluid supply unit 380 supplies liquid or gas for processing the substrate W.

[0006] Furthermore, during the process, the substrate support device 340 performs the function of rotating the substrate W while supporting the substrate W.

[0007] Furthermore, the bowl assembly 320 is a structural element that contains the liquid medicine used in the process and the fumes generated during the process. Preferably, it is constructed in a stacked manner, so that different liquid medicines and fumes can flow in separately according to the passage relative to the substrate.

[0008] The aforementioned lifting unit 360 causes the substrate support device 340 or the bowl assembly 320 to move up and down, and changes the relative height between the bowl assembly 320 and the substrate support device 340 within the bowl assembly 320.

[0009] On the other hand, the existing bowl assembly 320 is formed by multiple bowls including an inner bowl, a middle bowl and an outer bowl. The multiple bowls are separated from each other at a predetermined interval to form a passage in a whole. Therefore, there is a disadvantage that the above intervals cannot be adjusted as needed.

[0010] Furthermore, since the passage spacing of the bowl assembly 320 cannot be adjusted, there is a possibility that when the rotation speed of the substrate support device 340 changes, the liquid medicine or gas flowing into the passage will bounce off the surface of the bowl and some of it will flow back and contaminate the substrate W.

[0011] Existing technical documents

[0012] Patent documents

[0013] Patent Document 1: Korean Patent Publication No. 10-2017-0003026 (January 9, 2017) Summary of the Invention

[0014] The present invention addresses the problems of the prior art described above. The object of the present invention is to provide a substrate processing apparatus including a bowl assembly, wherein the passage spacing and specific shape of the multiple bowls constituting the bowl assembly can be adjusted, thereby preventing liquid medicine or gas from rebounding and flowing back to the substrate side.

[0015] To achieve the above objectives, the substrate processing apparatus of the present invention is characterized by comprising: a substrate support device including a rotating head for setting a substrate; a fluid supply unit for supplying fluid to the substrate; a bowl assembly including a plurality of bowls surrounding the substrate support device and arranged overlappingly along the radial direction; and a lifting unit for lifting the bowl assembly, wherein the plurality of bowls constituting the bowl assembly can be lifted and lowered individually.

[0016] The present invention is characterized in that the plurality of bowls respectively include: a lower bowl; an upper bowl, which is inclined inward toward the radial direction of the substrate support device; and a connecting bowl, which connects the upper end of the lower bowl and the lower end of the upper bowl, and has a curved surface with a circular longitudinal cross-sectional shape on its inner surface.

[0017] The present invention is characterized in that, when the bowl assembly is in the waiting position, the height at which the curved surface begins to form in the connecting bowl gradually decreases from the inner bowl toward the outer bowl.

[0018] The invention is characterized in that, in the passage between the plurality of bowls, a horizontal passage is formed in a portion of the radially outer side starting from the inner circumferential surface of the upper bowl.

[0019] The invention is characterized in that, in the passage between the plurality of bowls, the spacing of the inclined passages of the plurality of upper bowls gradually increases toward the connecting bowl side.

[0020] The invention is characterized in that, when viewed in a longitudinal section, the thickness of the inclined portions of the plurality of upper bowls gradually increases toward the connecting bowl side.

[0021] The present invention is characterized in that, when viewed in longitudinal section, the inner and outer shapes of the upper bowl constituting the bowl are elliptical, and the inner shape of the connecting bowl is arc-shaped.

[0022] The invention is characterized in that, when viewed in longitudinal section, a wave-shaped protrusion is formed on the inner side of each of the above-mentioned upper bowls, and a recessed guide groove is formed on both sides with the protrusion as the center.

[0023] The present invention is characterized in that the connecting bowl includes a buffer groove that is recessed further outward than the inner surface of the lower bowl.

[0024] The invention is characterized in that the lower bowl and the connecting bowl are detachably mounted.

[0025] The invention is characterized in that an adapter made of resin with added carbon is formed between the lower bowl and the connecting bowl.

[0026] The present invention is characterized in that the adapter made of resin is composed of a fluororesin containing a carbon-based component selected from carbon nanotubes, graphene, and carbon black.

[0027] The present invention is characterized in that the adapter and the upper end of the lower bowl are fixed by a fixing pin made of resin.

[0028] The present invention is characterized in that a first engaging groove and a first engaging protrusion are formed at the lower end of the connecting bowl and the upper end of the lower bowl, respectively, and a second engaging protrusion and a second engaging groove for engaging with the first engaging groove and the first engaging protrusion are formed at the upper end and the lower end of the adapter, respectively.

[0029] The present invention is characterized in that the bowl disposed on the innermost side includes a first passage and a second passage, the first passage allowing fluid to flow in from the substrate, the second passage being disposed with the first passage separated by a partition, and a discharge hole being formed through the partition and disposed on the upper side of the bottom of the first passage, the discharge hole being formed at an upward inclination from its inlet toward its outlet.

[0030] According to the present invention, a substrate processing apparatus including a bowl assembly having the above-described structure, the present invention includes: a substrate support device including a rotating head for setting a substrate; a fluid supply unit for supplying fluid to the substrate; a bowl assembly including a plurality of bowls surrounding the substrate support device and arranged overlapping outward along the radial direction; and a lifting unit for lifting the bowl assembly, wherein the plurality of bowls constituting the bowl assembly can be lifted and lowered individually, and therefore the spacing of the passage formed between the bowls can be appropriately adjusted as needed.

[0031] Furthermore, according to the present invention, the plurality of bowls respectively include: a lower bowl; an upper bowl, which is inclined inward toward the radial direction of the substrate support device; and a connecting bowl, which connects the upper end of the lower bowl and the lower end of the upper bowl, and has a curved surface with a circular longitudinal cross-section on its inner surface. Therefore, the fluid rebounding into the passage of the bowl itself or the passage between the bowls by the centrifugal force of the substrate can be limited to the greatest extent and reversed back to the substrate side.

[0032] Furthermore, according to the present invention, when the bowl assembly is in the waiting position, the height at which the curved surface begins to form in the connecting bowl gradually decreases from the inner bowl toward the outer bowl. Therefore, when a liquid medicine or gas supplied to the substrate enters the passage through multiple bowls, a passage can be formed along the movement path of the fluid, so the droplets will not bounce back, but will naturally move downwards.

[0033] Furthermore, according to the present invention, in the passage between the plurality of bowls, a horizontal passage can be formed in a portion of the radially outer side starting from the inner circumferential surface of the upper bowl, that is, a horizontal passage is formed in the section closest to the substrate, so that fluid flowing in from the substrate can easily enter without colliding with the passage.

[0034] Furthermore, according to the present invention, in the passage between the plurality of bowls, the interval between the inclined passages of the plurality of upper bowls gradually increases toward the connecting bowl side, thereby allowing the fluid entering through the horizontal passage to move directly downward along the curved surface of the connecting bowl without colliding with the middle passage as much as possible.

[0035] Furthermore, in this case, when viewed from a longitudinal sectional view, the thickness of the inclined portions of the multiple upper bowls gradually increases toward the connecting bowl side. Even if the inclination of each of the upper bowls is not significantly different, the spacing of the passageway in the middle can gradually increase toward the bottom. As a result, the diameter difference of the lower bowls is not significant. Therefore, the area occupied in the top view is greatly reduced, and the structure becomes more compact.

[0036] Furthermore, according to the present invention, the connecting bowl may include a buffer groove that is recessed further outward than the inner side of the lower bowl, thereby having the following effect: due to the centrifugal force of the substrate, the droplet reaches the outer side of the inner wall of the lower bowl and stays there temporarily before naturally sliding downward, further preventing backflow caused by rebound.

[0037] Furthermore, according to the present invention, when viewed from a longitudinal section, the inner and outer shapes of the upper bowl constituting the bowl are elliptical, and the inner shape of the connecting bowl is arc-shaped, thereby increasing the buffering effect of the internal airflow. As a result, droplets entering the passage of the bowl can slide naturally through the passage and move downward without rebounding.

[0038] Furthermore, according to the present invention, when viewed from a longitudinal section, one or more wavy protrusions can be formed on the inner surface of the upper bowl. With the wavy protrusions as the center, recessed guide grooves are formed on both sides. Thus, when the fluid flowing into the passage generates a clockwise vortex, the wavy protrusions and guide grooves generate a counterclockwise airflow, so that the two vortices cancel each other out, thereby preventing the backflow of droplets caused by the vortex.

[0039] Furthermore, according to the present invention, the present invention has the following advantages: the lower bowl and the connecting bowl are detachably arranged, the lower bowl is arranged with the same structure, and the upper bowl and the connecting bowl can be replaced. Thus, the bowl structure can be freely selected according to conditions and circumstances, thereby greatly improving productivity.

[0040] Furthermore, according to the present invention, an adapter made of resin with added carbon is formed between the lower bowl and the connecting bowl. The bowl will become charged by static electricity, thereby preventing adverse effects on the cleaning of the substrate. Attached Figure Description

[0041] Figure 1 This is a structural diagram illustrating a prior art substrate processing apparatus.

[0042] Figure 2 This is a structural diagram illustrating the substrate processing apparatus of the present invention.

[0043] Figure 3 A longitudinal sectional view showing the structure of a bowl assembly according to an embodiment of the present invention.

[0044] Figure 4 for Figure 3 The exploded diagram.

[0045] Figure 5 A longitudinal sectional view illustrating a working example of a bowl assembly according to an embodiment of the present invention.

[0046] Figure 6 To show Figure 3 A longitudinal sectional view of the structure of the upper bowl in the middle.

[0047] Figure 7 A longitudinal sectional view showing the structure of the upper bowl of a bowl assembly according to another embodiment of the present invention.

[0048] Figure 8 This is a longitudinal sectional view illustrating the structure of the upper bowl of a bowl assembly according to another embodiment of the present invention. Detailed Implementation

[0049] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0050] like Figure 2As shown, the substrate processing apparatus 1000 of the present invention includes: a substrate support device 100, including a rotating head 110 for setting a substrate W; a fluid supply unit 200 for supplying a fluid such as a liquid medicine or gas to the substrate W; a bowl assembly 300, including a plurality of bowls 310, 320, and 330 surrounding the substrate support device 100 and overlapping along the radial direction; and a lifting unit 400 for lifting the bowl assembly 300.

[0051] In particular, such as Figure 3 and Figure 4 As shown, the multiple bowls 310, 320, and 330 constituting the bowl assembly 300 can be moved up and down individually. Therefore, the interval between the intermediate passage 352 and the outer passage 353 formed between the bowls can be adjusted appropriately as needed.

[0052] In the figure, the bowl assembly 300 can be formed by three bowls 310, 320 and 330, but depending on the situation and purpose, it can be composed of two or more bowls.

[0053] The plurality of bowls 310, 320, and 330 respectively include: lower bowls 311, 321, and 331; upper bowls 312, 322, and 332, which are inclined inward toward the base plate support device 100 in the radial direction; and connecting bowls 313, 323, and 333, which connect the upper ends of the lower bowls 311, 321, and 331 with the lower ends of the upper bowls 312, 322, and 332, and have a curved surface with a circular longitudinal cross-section on the inner surface.

[0054] Therefore, the rebound of fluid entering the channels of bowls 310, 320, and 330 or the channels between bowls 310, 320, and 330 through the centrifugal force of the substrate W can be suppressed to the greatest extent and the fluid can be reversed back to the substrate W side.

[0055] The upper bowls 312, 322, 332, lower bowls 311, 321, 331 and connecting bowls 313, 323, 333 can be formed as one piece, while the lower bowls 311, 321, 331 and connecting bowls 313, 323, 333 can be separated and set in a detachable manner.

[0056] On the other hand, such as Figure 4 As shown, preferably, when the bowl assembly 300 is in the waiting position, the height of the curved surface that begins to form in the connecting bowls 313, 323, and 333 gradually decreases from the inner bowl 313 toward the outer bowl 333.

[0057] The waiting position of the bowl assembly 300 refers to the position at the top when the substrate W is supported by the substrate support device 100, with multiple bowls 310, 320, and 330 clustered together adjacently.

[0058] In this case, the aforementioned bowl assembly 300 is a structure that is stacked from the inside to the outside, with the inner bowl surrounded by the outer bowl in layers.

[0059] Thus, an inner passage 351, a middle passage 352, and an outer passage 353 can be formed along the movement path of the fluid based on centrifugal force. The collision positions of the droplets are mostly concentrated on the curved surfaces connecting the bowls 313, 323, and 333. Therefore, when the fluid enters the passages 351, 352, and 353 formed by multiple bowls 310, 320, and 330, the droplets will not bounce back but can move downwards naturally.

[0060] More specifically, when viewed from the front, the fluid emanating from the rotating substrate W moves radially and gradually downwards by its own weight, its path roughly forming a parabolic or other curved shape.

[0061] That is, the further away from the center of the substrate W, the lower the position of the fluid along the above curve. If the path of the passage within the bowl assembly 300 is formed along the above curve, the rebound phenomenon caused by the initial collision can be minimized.

[0062] When the bowl assembly 300 is in the waiting position, the height of the curved surface formed in the connecting bowls 313, 323, and 333 gradually decreases from the inner bowl 313 toward the outer bowl 333, so that a passage can be formed along the curved path of the fluid to the greatest extent. Therefore, backflow caused by fluid rebound can be prevented.

[0063] like Figure 5 As shown in part (a), the waiting positions of bowls 310, 320, and 330 are all in the lowest waiting position. In order to replace the substrate W, the upper end of the substrate support device 100 is located at a position higher than the upper ends of bowls 310, 320, and 330.

[0064] When using the actual bowl assembly 300, each bowl is moved a specified height from the aforementioned waiting position relative to the substrate W to ensure the required passage.

[0065] In embodiments of the present invention, such as Figure 5 As shown in section (b), when using the first passage configured on the outside, only the outer bowl 330 needs to be raised, as... Figure 5 As shown in section (c), when using the second middle passage, only the middle bowl 320 and the outer bowl 330 need to be raised simultaneously, as... Figure 5 As shown in section (d), when using the inner fourth passage, all three bowls are raised to ensure passage.

[0066] On the other hand, such as Figure 6As shown, preferably, in the passages 352 and 353 between the plurality of bowls 310, 320, and 330, a horizontal passage 352a and 353a are formed in a portion of the radial direction outside the inner circumferential surface of the upper bowls 312, 322, and 332, that is, in the section closest to the substrate W, so that fluid flowing from the substrate W can easily enter without colliding with the passage.

[0067] Preferably, in the passage between the plurality of bowls 310, 320, 330, the inclined passages 352b, 353b of the plurality of upper bowls 312, 322, 332 can be spaced gradually toward the connecting bowls 313, 323, 333. Thus, the fluid entering through the horizontal passages 352a, 353a moves directly downward along the curved surface of the connecting bowls 313, 323, 333 without colliding with the inclined passages 352b, 353b as little as possible.

[0068] In particular, when viewed from a longitudinal section, the thickness of the inclined portions of the multiple upper bowls 312, 322, and 332 can gradually increase toward the connecting bowls 313, 323, and 333. Even if the inclination of each of the upper bowls 312, 322, and 332 is not significantly different, the spacing of the inclined passages 352b and 353b can gradually increase toward the lower part. This has the advantage that the diameter difference of the lower bowls 311, 321, and 331 is not significant, thus greatly reducing the area occupied in the top view, making the structure more compact, and increasing the structural strength at the lower end.

[0069] And, as Figure 7 and Figure 8 As shown, preferably, the connecting bowls 313, 323, and 333 include buffer grooves 313a, 323a, and 333a that are recessed outwards from the inner side of the lower bowls 311, 321, and 331. Thus, by means of the centrifugal force of the substrate W, the droplets reach the outer side of the inner wall of the lower bowls 311, 321, and 331 in the inner wall of the bowl and stay there temporarily before naturally sliding downwards. This can further and more effectively prevent backflow caused by rebound.

[0070] In this case, such as Figure 7 As shown, when viewed from a longitudinal section, the upper bowls 312, 322, and 332 constituting the bowls 310, 320, and 330 may have elliptical inner and outer shapes, and the connecting bowls 313, 323, and 333 may have arc-shaped inner shapes. This can increase the buffering effect (temporary dwelling effect) of the internal airflow, and droplets entering the passage of the bowl can slide naturally through the passage and move downwards without rebounding.

[0071] In this case, preferably, when the bowl assembly 300 is in the waiting position, the height of the curved surface (arc-shaped cross section) that begins to form in the connecting bowls 313, 323, and 333 gradually decreases from the inner bowl 313 toward the outer bowl 333.

[0072] And, as Figure 8 As shown, when viewed from a longitudinal section, one or more wavy protrusions 312c, 322c, and 332c can be formed on the inner surfaces of the upper bowls 312, 322, and 332, respectively. Centered on the wavy protrusions 312c, 322c, and 332c, recessed guide grooves 312d, 322d, and 332d are formed on both sides. Thus, when the fluid flowing into the passages 351, 352, and 353 generates a clockwise vortex, the wavy protrusions 312c, 322c, and 332c and the guide grooves 312d, 322d, and 332d generate a counterclockwise airflow, so that the two vortices cancel each other out, thereby preventing the backflow of droplets caused by the vortex.

[0073] In this case, preferably, when the bowl assembly 300 is in the waiting position, the height of the curved surface that begins to form in the connecting bowls 313, 323, and 333 gradually decreases from the inner bowl 313 toward the outer bowl 333.

[0074] On the other hand, preferably, such as Figure 3 and Figure 4 As shown, the bowl 310 disposed on the innermost side includes: a first passage 351e, which allows fluid to flow in from the substrate W; and a second passage 351f, which is disposed with respect to the first passage 351e via a partition 317, through which a discharge hole 318 is formed above the bottom of the first passage 351e, and the discharge hole 318 is formed at an angle from its inlet 318a toward its outlet 318b.

[0075] Thus, the liquid component of the fluid can flow in through the first passage 351e and the gas component can be discharged through the discharge hole 318 and the second passage 351f. When a portion of the liquid is mixed with the gas passing through the discharge hole 318, the liquid component forms a droplet at the sharp upper end of the discharge hole 318 and then falls downwards before being discharged into the first passage 351e.

[0076] On the other hand, preferably, the lower bowls 311, 321, 331 and the connecting bowls 313, 323, 333 are detachably mounted. Thus, the lower bowls 311, 321, 331 are mounted with the same structure, and the upper bowls 312, 322, 332 and the connecting bowls 313, 323, 333 can be replaced. Therefore, the bowl structure can be freely selected according to conditions and circumstances.

[0077] In this case, preferably, an adapter 370 made of carbon-added resin is formed between the lower bowls 311, 321, 331 and the connecting bowls 313, 323, 333 to obtain a buffering effect. At the same time, the bowls will become charged by static electricity, thereby preventing adverse effects on the cleaning of the substrate W.

[0078] The adapter 370 of the aforementioned resin agent may be made of a fluororesin containing carbon-based components such as carbon nanotubes, graphene, and carbon black.

[0079] The upper ends of the adapter 370 and the lower bowls 311, 321, and 331 are fixed by a fixing pin (not shown) made of resin. The fixing pin may be made of the same material as the adapter 370 or of fluororesin or chemical-resistant plastic.

[0080] Preferably, first engagement grooves 313e, 323e, 333e and first engagement protrusions 311e, 321e, 331e are formed at the lower ends of the connecting bowls 313, 323, 333 and the upper ends of the lower bowls 311, 321, 331, respectively. Second engagement protrusions 371 and second engagement grooves 372 are formed at the upper and lower ends of the adapter 370 for engaging with the first engagement grooves 313e, 323e, 333e and the first engagement protrusions 311e, 321e, 331e, respectively.

[0081] The embodiments of the present invention are merely illustrative examples. Anyone skilled in the art to which this invention pertains can make various modifications and other equivalent embodiments within the scope of the claims.

Claims

1. A substrate processing apparatus, characterized in that, include: A substrate support device, including a rotating head for setting the substrate; A fluid supply unit is used to supply fluid to the aforementioned substrate; The bowl assembly includes a plurality of bowls surrounding the aforementioned substrate support device and arranged overlapping outwards along the radial direction; and The lifting unit is used to raise and lower the aforementioned bowl assembly. The aforementioned bowls include: The lower part of the bowl; The upper bowl is inclined inward toward the radial direction of the aforementioned substrate support device; and The connecting bowl, located between the upper end of the lower bowl and the lower end of the upper bowl, includes a curved surface with a circular longitudinal cross-section on its internal surface. An adapter made of resin is formed between the lower bowl and the connecting bowl to prevent the bowl from becoming charged due to static electricity. The adapter is made of a fluororesin material containing one of the carbon-based components of carbon nanotubes, graphene, and carbon black. A first engaging groove and a first engaging protrusion are formed at the lower end of the connecting bowl and the upper end of the lower bowl, respectively. A second engaging protrusion and a second engaging groove are formed at the upper end and the lower end of the adapter, respectively, for engaging with the first engaging groove and the first engaging protrusion. The innermost bowl includes a first passage and a second passage. The first passage allows fluid to flow in from the substrate. The second passage is separated from the first passage by a partition. A discharge hole is formed through the partition and located on the upper bottom side of the first passage. The discharge hole is formed by tilting upward from its inlet toward its outlet.

2. The substrate processing apparatus according to claim 1, characterized in that, When viewed in longitudinal section, wavy protrusions are formed on the inner surface of each of the aforementioned upper bowls, and recessed guide grooves are formed on both sides with the protrusions as the center.

3. The substrate processing apparatus according to claim 1, characterized in that, The adapter and the upper part of the lower bowl are secured by a fixing pin made of resin.

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