A rotating device for magnetron sputtering coating equipment
By designing a rotary sealing mechanism and a hot and cold conversion mechanism in the magnetron sputtering coating equipment, and using incomplete gears and the second motor to achieve rapid switching of heating and cooling devices, the complex and time-consuming operation in the prior art is solved, and the efficiency and flexibility of the equipment are improved.
CN116240514BActive Publication Date: 2025-03-28SHENZHEN TIANCHENG VACUUM TECH CO LTD
1 Cites 0 Cited by
Patent Information
- Application Number
- CN202310086066.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-01-16
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2043-01-16
AI Technical Summary
Technical Problem
In existing magnetron sputtering coating equipment, the switching operations of heating and cooling devices are complex and time-consuming, and it is impossible to quickly switch the heating and cooling functions.
Method used
A rotating device including a rotary sealing mechanism and a hot and cold conversion mechanism is designed, and through the cooperation of incomplete gears and the second motor, the heating assembly and cooling assembly can be quickly switched without disassembly and installation.
Benefits of technology
It realizes rapid switching of heating and cooling devices, simplifies operating procedures, and improves equipment efficiency and flexibility.
✦ Generated by Eureka AI based on patent content.
Abstract
The present invention relates to the technical field of magnetron sputtering coating equipment, in particular to a rotating device for magnetron sputtering coating equipment, comprising a mounting plate, a rotating sealing mechanism is mounted on the top of the mounting plate, the rotating sealing mechanism comprises a bearing seat, a water storage cylinder, a hollow shaft and a water inlet assembly; the bearing seat is fixedly mounted on the top of the mounting plate, the water storage cylinder is fixedly mounted on the top of the bearing seat, the bottom end of the hollow shaft is rotatably connected to the water storage cylinder and connected to the inside of the water storage cylinder, and the water inlet assembly is fixedly mounted on the top of the hollow shaft; a hot and cold conversion mechanism is mounted on the bottom of the mounting plate to heat and cool the supply water. The present invention can quickly realize the switching of the heating assembly and the cooling assembly, without the need to disassemble and assemble the heating assembly and the cooling assembly, and the operation process is simple.
Need to check novelty before this filing date? Find Prior Art