A focal plane microcavity switch array beam scanning device

Abstract

The application discloses a focal plane microcavity switch array light beam scanning device, which comprises an optical coupler, a connecting waveguide, a 1*N microcavity optical switch array comprising N microcavity optical switch units, and an N*M microcavity optical switch emission matrix composed of N rows of 1*M microcavity optical switch emission line arrays comprising M microcavity optical switch units and emission units. The output port of the optical coupler is connected with the input port of the connecting waveguide; the connecting waveguide is connected with the input port of the optical switch array; the input port of the microcavity optical switch array is composed of N microcavity optical switch units connected in a head-to-tail mode; the N output ports of the microcavity optical switch array are respectively connected with the respective input ports of the N rows of microcavity optical switch emission line arrays; the microcavity optical switch emission line is composed of M microcavity optical switch units and an emission antenna, and the microcavity optical switch units are connected in a head-to-tail mode. The application has the advantages of low loss, low power consumption, large field of view, high resolution and easy expansion and regulation and control when the light beam is scanned by selecting the working states of two microcavities.

Description

Technical Field

[0001] This invention relates to beam scanning devices, free-space optical communication and wavelength division multiplexing technology, and in particular to a focal plane microcavity switch array beam scanning device. Background Technology

[0002] In the field of fiber optic communication, with the development of internet technology and the arrival of the big data era, the rise of technologies such as cloud computing, cloud storage, and artificial intelligence, the demand for communication capacity from all sectors of society is increasing, leading to the development of wavelength division multiplexing (WDM) technology. Its characteristic is that it uses multiplexers to allow different wavelengths of light to carry different information on a single chip, expanding communication capacity by tens or even hundreds of times, improving the efficiency of light carrying information, and greatly expanding communication capacity.

[0003] In intelligent sensing, LiDAR technology can accurately perceive the three-dimensional spatial information of objects and is widely used in fields such as metrology, environmental monitoring, archaeology, and robotics, especially in the field of autonomous driving. The challenge lies in achieving high-resolution, low-power, high-speed beam scanning over a large field of view. Free-space optical communication systems also require high-speed beam scanning to enable communication network reconfiguration. However, traditional beam scanning devices use mechanical rotators for beam scanning, which have significant limitations in terms of reliability, size, and cost. Therefore, more compact solid-state beam scanning devices are considered the ultimate solution.

[0004] Currently, the most promising all-solid-state beam scanning device architectures mainly include two types: optical phased arrays and focal plane arrays. Optical phased arrays enable flexible beam scanning, but require precise amplitude and phase control of all optical antennas in the array, making scalability extremely challenging. In contrast, focal plane arrays use a camera-like optical system, mapping each angle within the field of view to a pixel on the focal plane behind the imaging lens. The optical switch network in a focal plane array allows all pixels to share one (or more) beam scanning devices, without requiring each pixel to integrate a ranging unit.

[0005] Reported focal plane arrays typically employ thermally tunable Mach-Zehnder interferometer (MZI) switches (Opt.Express). 27,32970-32983,2019. Currently, small-scale focal plane switching arrays containing tens of pixels have been realized, but limitations such as complex structure, high loss, high power consumption, and difficult calibration hinder their large-scale expansion. Meanwhile, focal plane MEMS switching arrays (Nature, 603,253–258,2022. It has advantages such as low power consumption and easy expansion, but its process is difficult, the driving voltage is high and there are problems such as not being completely solid-state. Summary of the Invention

[0006] To address the problems existing in the background art, the present invention aims to provide a focal plane microcavity switch array beam scanning device that meets application requirements such as low loss, low power consumption, large field of view, high resolution, easy expansion, and easy control.

[0007] The technical solution adopted in this invention is:

[0008] The present invention includes a first optical coupler, a first connecting waveguide, a 1×N microcavity optical switch array containing N microcavity optical switch units, and an N×M microcavity optical switch emission matrix consisting of N rows of 1×M microcavity optical switch emission linear arrays containing M microcavity optical switches and emission units. The light source enters the first connecting waveguide through the first optical coupler. The first connecting waveguide is connected to the input port of the 1×N microcavity optical switch array. The N output ports of the 1×N microcavity optical switch array are sequentially connected to the input ports of the N rows of 1×M microcavity optical switch emission linear arrays, wherein the nth output port of the 1×N microcavity optical switch array is connected to the input port of the nth row of the 1×M microcavity optical switch emission linear array, where n = 1, ..., N.

[0009] The first optical coupler is a waveguide grating coupler or an end-face coupler.

[0010] The 1×N microcavity optical switch array comprises N 1×2 or 2×2 microcavity optical switch units connected end to end in sequence; the input port of the nth microcavity optical switch unit 3n is connected to the through output port of the (n-1)th microcavity optical switch unit 3(n-1), and the through output port of the nth microcavity optical switch unit 3n is connected to the input port of the (n+1)th microcavity optical switch unit 3(n+1).

[0011] The 1×2 or 2×2 microcavity optical switch unit includes at least one input port, one through output port, and one download output port. Its structure includes, but is not limited to, microrings, FP microcavities, photonic crystal cavities, microdisks, cascaded microrings, cascaded FP microcavities, cascaded photonic crystal cavities, and cascaded microdisks.

[0012] The aforementioned N×M microcavity optical switch emission matrix comprises N rows of 1×M microcavity optical switch emission linear arrays; wherein, the nth row of the 1×M microcavity optical switch emission linear array contains M microcavity optical switch emission units connected end-to-end in sequence. The input port of the mth microcavity optical switch emission unit in the nth row (4nm) is connected to the direct output port of the (m-1)th microcavity optical switch emission unit in the nth row (4n(m-1)), and the direct output port of the mth microcavity optical switch unit in the nth row (4nm) is connected to the input port of the (m+1)th microcavity optical switch unit in the nth row (4n(m+1)).

[0013] The aforementioned 4nm microcavity optical switch transmitting unit consists of a microcavity optical switch and an optical waveguide transmitting antenna. The 1×2 or 2×2 microcavity optical switch unit includes at least one input port, one through output port, and one download output port. Its structure includes, but is not limited to, microrings, FP microcavities, photonic crystal cavities, microdisks, cascaded microrings, cascaded FP microcavities, cascaded photonic crystal cavities, and cascaded microdisks.

[0014] The optical waveguide transmitting antenna described herein has a structure of a waveguide mirror or a waveguide grating, including but not limited to a one-dimensional waveguide grating, a two-dimensional waveguide grating, and employing a uniform grating or a chirped grating; the optical waveguide transmitting antennas in the N×M microcavity optical switch transmitting matrix may be the same or different.

[0015] The microcavity optical switch is based on, but is not limited to, thermo-optical effects, electro-optical effects, acousto-optical effects, and micro-optomechanics.

[0016] Each of the aforementioned microcavity optical switches is equipped with a corresponding control electrode, which is positioned to the side or above the waveguide of the microcavity optical switch.

[0017] The initial resonant wavelengths of the microcavity optical switches in the 1×N microcavity optical switch array and the N×M microcavity optical switch emission matrix are the same or similar, but are not the same as the input light wavelength. However, they can coincide with the input wavelength through the switching function.

[0018] The innovation of this invention lies in the invention of a novel architecture based on a microcavity optical switch array, which has outstanding advantages such as low loss, low power consumption, large field of view, high resolution, easy expansion and easy processing, paving the way for the application of high-performance all-solid-state on-chip beam scanning devices.

[0019] The beneficial effects of this invention are:

[0020] In this invention, only the operating states of two microcavities need to be selected during beam scanning, thus exhibiting characteristics such as low loss, simple structure, high integration, small size, and easy expansion. Compared to MEMS switched beam scanning devices, this invention overcomes problems such as complex manufacturing processes and vibration sensitivity, and also has the advantage of smaller size; while compared to MZI switched beam scanning devices, this invention overcomes problems such as high system loss, large device size, complex wiring, high control complexity, and difficulty in scaling up.

[0021] This invention has advantages such as low loss, low power consumption, large field of view, high resolution, and easy expansion, paving the way for the realization of on-chip large-scale beam scanning device systems. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the focal plane microcavity switch array beam scanning device proposed in this invention;

[0023] Figure 2 This is a schematic diagram of the structure of the microcavity optical switch unit in the 1×N microcavity optical switch array and the N×M microcavity optical switch emission matrix proposed in this invention;

[0024] Figure 3 This is a schematic diagram of the structure of the first optical coupler proposed in this invention;

[0025] Figure 4 This is a schematic diagram of the structure of the optical waveguide transmitting antenna proposed in this invention;

[0026] Figure 5 This is a structural layout of the focal plane microcavity switch array beam scanning device according to an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the distance measurement test system structure according to an embodiment of the present invention;

[0028] Figure 7 This is a schematic diagram of another embodiment of the present invention;

[0029] In the figure: 1. First optical coupler; 2. First connecting waveguide; 3. 1×N microcavity optical switch array containing N microcavity optical switch units; 4. N×M microcavity optical switch transmission matrix composed of N rows of 1×M microcavity optical switch transmission linear arrays containing M microcavity optical switches and transmission units; 31~3N, microcavity optical switch units in the 1×N microcavity optical switch array; 31c~3Nc, N output ports of the 1×N microcavity optical switch array; 41~4N, N rows of 1×M microcavity optical switch transmission linear arrays; 41a~4Na, input ports of each of the N rows of 1×M microcavity optical switch transmission linear arrays; 411~4NM, microcavity optical switch transmission units in the N×M microcavity optical switch transmission matrix; 411a~4NMa, waveguide transmitting antennas in the N×M microcavity optical switch transmission matrix. Detailed Implementation

[0030] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0031] like Figure 1As shown, the specific implementation includes a first optical coupler 1, a first connecting waveguide 2, a 1×N microcavity optical switch array 3 containing N microcavity optical switch units, and an N×M microcavity optical switch emission matrix 4 composed of N rows of 1×M microcavity optical switch emission linear arrays containing M microcavity optical switches and emission units. The light source enters the first connecting waveguide 2 through the first optical coupler. The first connecting waveguide 2 is connected to the input port of the 1×N microcavity optical switch array 3. The N output ports 31c, 32c, ..., 3Nc of the 1×N microcavity optical switch array 3 are sequentially connected to the input ports 41a, 42a, 43a, ..., 4Na of the N rows of 1×M microcavity optical switch emission linear arrays 41, 42, 43, ..., 4N, respectively. The nth output port 3nc of the 1×N microcavity optical switch array 3 is connected to the input port 4na of the nth row of 1×M microcavity optical switch emission linear arrays 4n, where n = 1, ..., N.

[0032] The 1×N microcavity optical switch array 3 includes N 1×2 or 2×2 microcavity optical switch units 31, 32, 33, ..., 3N connected end to end in sequence; the input port of the nth microcavity optical switch unit 3n is connected to the through output port of the (n-1)th microcavity optical switch unit 3(n-1), and the through output port of the nth microcavity optical switch unit 3n is connected to the input port of the (n+1)th microcavity optical switch unit 3(n+1).

[0033] The N×M microcavity optical switch emission matrix 4 comprises N rows of 1×M microcavity optical switch emission linear arrays 41, 42, 43, ..., 4N; wherein, the nth row of the 1×M microcavity optical switch emission linear array 4n contains M microcavity optical switch emission units 4n1, 4n2, ..., 4nm, ..., 4nM connected end-to-end, n = 1, ..., N. The input port of the mth microcavity optical switch emission unit 4nm in the nth row is connected to the direct output port of the (m-1)th microcavity optical switch emission unit 4n(m-1) in the nth row, and the direct output port of the mth microcavity optical switch unit 4nm in the nth row is connected to the input port of the (m+1)th microcavity optical switch unit 4n(m+1) in the nth row.

[0034] Figure 2 The present invention proposes a 1×2 or 2×2 microcavity optical switch unit 4n1, 4n2, ..., 4nm, ..., 4nM that includes at least one input port, one through output port, and one download output port. Its structure includes, but is not limited to, microring, FP microcavity, photonic crystal cavity, micro disk, cascaded microring, cascaded FP microcavity, cascaded photonic crystal cavity, and cascaded micro disk.

[0035] like Figure 3 The diagram shown is a structural schematic of the first optical coupler proposed in this invention. The first optical coupler includes a waveguide grating coupler or an end face coupler.

[0036] like Figure 4The diagram shown is a schematic diagram of the optical waveguide transmitting antenna proposed in this invention. Its structure is a waveguide mirror or a waveguide grating, including but not limited to a one-dimensional waveguide grating, a two-dimensional waveguide grating, and a uniform grating or a chirped grating.

[0037] like Figure 5 The diagram shown is a structural layout of a focal plane microcavity switch array beam scanning device with N=16 and M=16 according to an embodiment of the present invention, including an optical coupler, a connecting waveguide, a 1×16 microcavity optical switch array, and a 16×16 micro-ring optical switch emission matrix.

[0038] like Figure 6 The diagram shown is a schematic of the system structure of an embodiment of the present invention, including a laser isolator, an amplifier, a beam splitter, a loop reflector, a beam scanning device designed in this invention, a focusing lens, and a test object. A linear frequency modulated continuous wave laser signal is split into a measurement beam and a local oscillator beam after passing through the isolator, amplifier, and beam splitter. The measurement beam enters the chip of the beam scanning device designed in this invention. The local oscillator beam returns through the loop reflector. The measurement beam passes through a micro-ring alignment and is illuminated by tuning the microcavity optical switch to light the optical waveguide transmitting antenna. The beam exits perpendicularly, is collimated by the focusing lens, and is emitted to the test object in space. The reflected light passes through the focusing lens again and is collected by the optical waveguide transmitting antenna onto the chip. The local oscillator beam and the measurement beam are mixed and processed by a detector to obtain the target object information.

[0039] like Figure 7 The diagram shown is a schematic of another embodiment of the present invention, including a laser, a beam scanning device chip, and a detector. The laser emits a working beam with N×M wavelengths. By adjusting the microcavity optical switch units in the 1×N microcavity optical switch array 3 and the N×M microcavity optical switch emission matrix 4, the working beam with N×M wavelengths is emitted from different positions and finally detected by the detector.

[0040] The working process of this invention is as follows:

[0041] The input light can be single-wavelength or multi-wavelength. The input light wave passes through the first optical coupler 1 and enters the first connecting waveguide 2, then propagates in a 1×N microcavity optical switch array 3. The N output ports 31c, 32c, ..., 3Nc of the 1×N microcavity optical switch array 3 are sequentially connected to the input ports 41a, 42a, 43a, ..., 4Na of the N rows of 1×M microcavity optical switch emitting linear arrays 41, 42, 43, ..., 4N, respectively. The nth output port 3nc is connected to the input port 4na of the nth row 1×M microcavity optical switch transmitter array 4n. The 1×N microcavity optical switch array contains N 1×2 or 2×2 microcavity optical switch units connected end to end. The light wave passes through the nth microcavity optical switch unit 3n without modulation, exits from the direct output port of the nth microcavity optical switch unit 3n, and then enters the input port of the (n+1)th microcavity optical switch unit 3(n+1). When the light wave passes through… The light wave passes through the nth microcavity optical switch unit 3n, which performs the switching, and outputs from the download output port of the nth microcavity optical switch unit 3n. It is then input into the nth row of the 1×M microcavity optical switch transmitter array 4n. The nth row of the 1×M microcavity optical switch transmitter array 4n contains M microcavity optical switch transmitter units 4n1, 4n2, ..., 4nm, ..., 4nM connected end-to-end, where n = 1, ..., N. The light wave passes sequentially through the mth microcavity optical switch transmitter unit in the nth row without modulation. The light beam, at a wavelength of 4nm, is output from the direct output port of the 4nm microcavity optical switch unit in the nth row and mth unit, and then enters the input port of the (m+1)th microcavity optical switch unit in the nth row and mth unit. When the light wave passes through the 4nm microcavity optical switch transmitting unit in the nth row and mth unit (which is switched), it is output from the download output port of the 4nm microcavity optical switch unit in the nth row and mth unit, and input into the optical waveguide transmitting antenna in the nth row and mth unit. The light then exits from the optical waveguide transmitting antenna 4nm. Therefore, this invention achieves beam scanning or wave decomposition multiplexing by changing the operating state of the microcavity optical switch units in the 1×N microcavity optical switch array 3 and the N-row 1×M microcavity optical switch transmitting linear array, allowing the light beam to exit from different positions at different angles.

[0042] The following is a specific embodiment, which uses a silicon nanowire optical waveguide based on silicon insulator (SOI) material: the core material is silicon with a thickness of 220 nm; the upper and lower cladding materials are both silicon dioxide, with the lower cladding thickness of 2 μm and the upper cladding thickness of 1.2 μm. The thermo-optic effect is adopted, and its control electrode is located directly above the waveguide. Taking TE polarization as an example, the switching unit is a 2×2 micro-ring optical switch, N=16, M=16, and the light source is 1550 nm.

[0043] like Figure 5As shown, in a specific embodiment, it includes a first optical coupler 1, a first connecting waveguide 2, a 1×16 microcavity optical switch array 3 containing N microcavity optical switch units, and a 16×16 microcavity optical switch emission matrix 4 composed of 16 rows of 1×16 microcavity optical switch emission linear arrays containing 16 microcavity optical switches and emission units. The first optical coupler 1 employs a high-efficiency, width-gradient end-face coupler; the first connecting waveguide 2 has a width of 2μm, effectively reducing transmission loss; the 1×16 microcavity optical switch array 3, consisting of 16 microcavity optical switch units, uses 2×2 micro-ring optical switch units based on the thermo-optical effect; the microcavity optical switch units of the 16×16 microcavity optical switch transmitting matrix 4 are 2×2 micro-ring optical switches based on the thermo-optical effect; the waveguide transmitting antenna uses a high-efficiency, non-uniform grating with the following parameters: 3 grating periods, each period being 522nm, and duty cycles of 0.535, 0.423, and 0.3, respectively. The x-axis spacing and y-axis spacing between the microcavity optical switch transmitting units of the 16×16 microcavity optical switch transmitting matrix 4 are both 20μm.

[0044] like Figure 5 As shown, the 2×2 micro-ring optical switch unit based on thermo-optical effect in the focal plane 16×16 microcavity switch array beam scanning device has the following parameters: the input waveguide 4nma has a width of 400nm, the elliptical ring waveguide 4nmb has a width that gradually changes from 450nm to 650nm, the long side bending radius of the elliptical ring is 4μm, the short side bending radius is 3.5μm, the download waveguide 4nmc has a width of 450nm, the slit spacing between the input waveguide 4nma and the ring waveguide 4nmb is 220nm, the slit spacing between the download waveguide 4nmc and the ring waveguide 4nmb is 220nm, its resonant wavelength deviates from 1550nm, the heating control electrode is located directly above the elliptical ring, titanium is used as the heating control electrode with a width of 2μm, and gold is used as the connecting electrode with a width >10μm. The 16 micro-ring optical switch units in the 1×16 microcavity optical switch array 3 have independent control electrodes, and they share a ground electrode. The 16×16 microcavity optical switch emission matrix 4 consists of 16 rows of 1×16 microcavity optical switch emission linear arrays. The 16 micro-ring optical switch units in the 1×16 microcavity optical switch emission linear array have independent control electrodes. The control electrodes of the micro-ring optical switch units in one column of the 16×16 microcavity optical switch emission matrix are divided into upper and lower parts and connected in series, that is, 8 control electrodes are connected in series, which effectively reduces the number of electrodes and makes the device arrangement more compact.

[0045] like Figure 6As shown, the system structure of the embodiment proposed in this invention includes a laser, an isolator, an amplifier, a beam splitter, a beam scanning device, and a focusing lens. First, a linearly frequency-modulated continuous wave laser signal is generated. After passing through the isolator, amplifier, and beam splitter, it is split into a measurement beam and a local oscillator beam. The measurement beam enters the beam scanning device chip designed in this invention, while the local oscillator beam returns via a loop reflector. The measurement beam is switched to a specific row by a 1×16 microcavity optical switch array 3, and then switched to a specific waveguide transmitting antenna position by a 16×16 microcavity optical switch matrix, exiting at a certain angle to the focusing lens. After being collimated by the focusing lens, the measurement beam is emitted onto the object to be measured in space. The reflected light passes through the focusing lens again and is collected by the transmitting antenna matrix of the beam scanning device chip, entering the beam scanning device chip. The local oscillator beam and the measurement beam are mixed and processed by a detector to obtain target object information, including distance and velocity. When the focal length of the focusing lens is selected as f = 1 mm, its field of view is expressed as FOV = 2tan(2πf / 2πf). -1 (L / 2f), where L is the overall size of the microcavity optical switch matrix, i.e., 15×20=300μm, thus its field of view is 17°×17°; the addressing resolution is expressed as tan -1 (p / f), where p is the period of the microcavity optical switch matrix (20 μm), then its addressing resolution is 1.14° × 1.14°; the beam divergence angle is expressed as tan -1 (x / f), where x is the spot size of the waveguide transmitting antenna, 2μm×2μm, then its beam divergence angle is 0.11°×0.11°; similarly, when the focal length of the focusing lens is selected as 5mm, its field of view is 3.4°×3.4°, the addressing resolution is 0.228°×0.228°, and the beam divergence angle is 0.022°×0.022°.

[0046] Another specific embodiment is given below, specifically a micro-ring wavelength division multiplexing beam scanning device. The laser's emitted light includes a working beam of up to 16×16 wavelengths. This beam enters the beam scanning device chip through a first optical coupler and a first connecting waveguide. By controlling the microcavity optical switch units in the 1×16 microcavity optical switch array 3 and the 16×16 microcavity optical switch emission matrix 4, the 16×16 wavelength working beams are emitted from different optical waveguide transmitting antennas, received by optical fibers, and finally detected by the detector. The heating and control electrode is located directly above the elliptical ring, using titanium as the heating and control electrode with a width of 2μm, and gold as the connecting electrode with a width >10μm. The 16 micro-ring optical switch units in the 1×16 microcavity optical switch array 3 have independent control electrodes, but they share a common ground electrode. The 16×16 microcavity optical switch emission matrix 4 consists of 16 rows of 1×16 microcavity optical switch emission linear arrays, and each microcavity optical switch unit has an independent control electrode, but they share a common ground electrode.

[0047] The above embodiments are used to explain and illustrate the present invention, but not to limit the present invention. Any modifications and changes made to the present invention within the spirit and scope of the claims shall fall within the protection scope of the present invention.

Claims

1. A focal plane microcavity switch array beam scanning device, characterized in that: The device includes a first optical coupler (1), a first connecting waveguide (2), a 1×N microcavity optical switch array (3) containing N microcavity optical switch units, and an N×M microcavity optical switch emission matrix (4) consisting of N rows of 1×M microcavity optical switch emission linear arrays containing M microcavity optical switches and emission units. The light source enters the first connecting waveguide (2) through the first optical coupler (1). The first connecting waveguide (2) is connected to the input port of the 1×N microcavity optical switch array (3). The N output ports of the 1×N microcavity optical switch array (3) are connected to the input ports of the N rows of 1×M microcavity optical switch transmitting arrays respectively. The nth output port of the 1×N microcavity optical switch array (3) is connected to the input port of the nth row of 1×M microcavity optical switch transmitting array. The 1×N microcavity optical switch array (3) comprises N 1×2 or 2×2 microcavity optical switch units connected end to end in sequence; the input port of the nth microcavity optical switch unit is connected to the through output port of the (n-1)th microcavity optical switch unit (n-1), the through output port of the nth microcavity optical switch unit is connected to the input port of the (n+1)th microcavity optical switch unit (n+1), and the download output port of the nth microcavity optical switch unit is connected to the nth output port of the 1×N microcavity optical switch array (3); The N×M microcavity optical switch emission matrix (4) comprises N rows of 1×M microcavity optical switch emission linear arrays; wherein, the nth row of the 1×M microcavity optical switch emission linear array contains M microcavity optical switch emission units connected end to end in sequence, n=1,…,N; the input port of the mth microcavity optical switch emission unit in the nth row is connected to the direct output port of the (m-1)th microcavity optical switch emission unit in the nth row, and the direct output port of the mth microcavity optical switch unit in the nth row is connected to the input port of the (m+1)th microcavity optical switch unit in the nth row. The light wave, without modulation, passes through the nth microcavity optical switch unit 3n and exits from its direct output port, then enters the input port of the (n+1)th microcavity optical switch unit 3(n+1). When the light wave passes through the nth microcavity optical switch unit 3n that performs switching, it exits from its download output port and is then input into the nth row of the 1×M microcavity optical switch emission array. The nth row of the 1×M microcavity optical switch emission array 4n contains M microcavity optical switch emission units 4n1, 4n2, ..., 4nm connected end-to-end. …、4nM, n=1,…,N; The light wave passes sequentially through the m-th microcavity optical switch transmitting unit 4nm in the nth row without modulation, and is output from the direct output port of the m-th microcavity optical switch unit 4nm in the nth row, and then enters the input port of the (m+1)-th microcavity optical switch unit 4n(m+1) in the nth row; When the light wave passes through the m-th microcavity optical switch transmitting unit 4nm in the nth row, which is switched, it is output from the download output port of the m-th microcavity optical switch unit 4nm in the nth row, and input into the m-th optical waveguide transmitting antenna in the nth row, and the light is emitted from the optical waveguide transmitting antenna 4nma.

2. The focal plane microcavity switch array beam scanning device according to claim 1, characterized in that: The first optical coupler (1) is a waveguide grating coupler or an end face coupler.

3. The focal plane microcavity switch array beam scanning device according to claim 2, characterized in that: The 1×2 or 2×2 microcavity optical switch unit includes at least one input port, one through output port, and one download output port. Its structure includes, but is not limited to, microrings, FP microcavities, photonic crystal cavities, microdisks, cascaded microrings, cascaded FP microcavities, cascaded photonic crystal cavities, and cascaded microdisks.

4. The focal plane microcavity switch array beam scanning device according to claim 3, characterized in that: The microcavity optical switch transmitting unit consists of a microcavity optical switch and an optical waveguide transmitting antenna. The 1×2 or 2×2 microcavity optical switch unit includes at least one input port, one through output port, and one download output port. Its structure includes, but is not limited to, microrings, FP microcavities, photonic crystal cavities, microdisks, cascaded microrings, cascaded FP microcavities, cascaded photonic crystal cavities, and cascaded microdisks.

5. The focal plane microcavity switch array beam scanning device according to claim 4, characterized in that: The optical waveguide transmitting antenna has a structure of waveguide mirror or waveguide grating, including but not limited to one-dimensional waveguide grating, two-dimensional waveguide grating, uniform grating or chirped grating; the optical waveguide transmitting antennas in the N×M microcavity optical switch transmitting matrix (4) can be the same or different.

6. The focal plane microcavity switch array beam scanning device according to claim 1, characterized in that: The microcavity optical switch includes, but is not limited to, thermo-optical effect, electro-optical effect, acousto-optical effect, and micro-optomechanical effect.

7. The focal plane microcavity switch array beam scanning device according to claim 6, characterized in that: Each of the aforementioned microcavity optical switches is equipped with a corresponding control electrode, which is positioned to the side or above the waveguide of the microcavity optical switch.

8. The focal plane microcavity switch array beam scanning device according to claim 1, characterized in that: The initial resonant wavelengths of the microcavity optical switches in the 1×N microcavity optical switch array and the N×M microcavity optical switch emission matrix are the same or similar, but are not the same as the input light wavelength. However, they can coincide with the input wavelength through the switching function.

Images