A deterministic reshaping method based on controllable time-varying removal function

Abstract

The application discloses a kind of certainty modification processing methods based on controllable time-varying removal function, and the method obtains the position of several processing points of the surface of optical element to be processed according to surface error and processing path;Establish the removal function library corresponding to the certainty modification processing mode;The maximum feed speed value of polishing tool, the maximum feed acceleration value of polishing tool and the removal function modification ability in the process of certainty modification are preset;Based on the removal function library, the ideal removal function size value of each processing point position is calculated according to the maximum feed speed value, the maximum feed acceleration value and the removal function modification ability;According to the ideal removal function size value, the residence time value of each processing point position is calculated;The surface of optical element to be processed is subjected to certainty modification processing using removal function size value and residence time value.The application can improve the modification ability of certainty modification processing, improve processing efficiency, and reduce the requirement of polishing on machine tool dynamic performance.

Description

Technical Field

[0001] This invention relates to the field of optical processing technology, and in particular to a deterministic reshaping processing method based on a controllable time-varying removal function. Background Technology

[0002] Traditional time-invariant removal function machining relies heavily on the machine tool's dynamic performance, primarily on its feed rate and acceleration. Typically, machining points with low surface error values ​​require shorter dwell times, resulting in higher machine feed rates. Conversely, locations with significant differences in error values ​​between adjacent machining points lead to larger feed accelerations due to variations in the machine feed rate gradient. When the actual speed and acceleration provided by the machine tool fail to meet the theoretical requirements, the dwell time at the corresponding machining point exceeds the theoretically required dwell time, resulting in excessive material removal from the workpiece surface and deteriorating the workpiece's surface shape.

[0003] Different shaping processes have different shaping capabilities. Generally, the smaller the removal function size, the stronger the shaping capability; however, a smaller removal function size means a larger dwell time distribution, which reduces processing efficiency. Current technology has not calculated a suitable removal function size, therefore, the processing efficiency is not high. Summary of the Invention

[0004] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a deterministic shaping machining method based on a controllable time-varying removal function, which can improve the shaping capability of deterministic shaping machining, increase machining efficiency, and reduce the requirements of polishing on the dynamic performance of machine tools.

[0005] In a first aspect, embodiments of the present invention provide a deterministic shaping process based on a controllable time-varying removal function, the deterministic shaping process based on a controllable time-varying removal function comprising:

[0006] Identify surface shape errors on the surface of the optical element to be processed;

[0007] Establish a processing path for deterministic reshaping;

[0008] Based on the surface shape error and the processing path, the positions of several processing points on the surface of the optical element to be processed are obtained;

[0009] Establish a function library for removal methods corresponding to deterministic reshaping techniques;

[0010] The maximum feed rate of the polishing tool, the maximum feed acceleration of the polishing tool, and the removal function shaping capability are preset during the deterministic shaping process.

[0011] Based on the removal function library, the ideal removal function size value for each processing point position is calculated according to the maximum feed rate value, the maximum feed acceleration value, and the removal function shaping capability.

[0012] Based on the ideal removal function size value, the dwell time value at each processing point position is calculated;

[0013] The surface of the optical element to be processed is subjected to deterministic reshaping using the removal function size value and the dwell time value.

[0014] Compared with the prior art, the first aspect of the present invention has the following beneficial effects:

[0015] This method, by pre-setting the maximum feed rate, maximum feed acceleration, and removal function shaping capability of the polishing tool during deterministic reshaping, calculates the ideal removal function size at each machining point based on a removal function library, using the maximum feed rate, maximum feed acceleration, and removal function shaping capability. By considering the maximum feed rate and maximum feed acceleration, it overcomes the shortcomings of traditional time-invariant removal function machining methods that place high demands on the inherent dynamic performance of the machine tool, reducing dependence on the dynamic performance of the machine tool and thus lowering the requirements of polishing on the dynamic performance of the machine tool. Based on the ideal removal function size, the dwell time at each machining point is calculated. Using the removal function size and dwell time values ​​for deterministic reshaping of the optical component surface to be machined can improve the shaping capability of deterministic reshaping, increase machining efficiency, and avoid deterioration of the workpiece surface shape.

[0016] According to some embodiments of the present invention, the maximum feed rate value of the polishing tool and the maximum feed acceleration value of the polishing tool during the preset deterministic shaping process include:

[0017] Obtain the machine tool's limit feed rate and limit feed acceleration values;

[0018] During the deterministic shaping process, the preset maximum feed rate of the polishing tool is less than or equal to the limit feed rate of the machine tool;

[0019] During deterministic shaping, the preset maximum feed acceleration value of the polishing tool is less than or equal to the limit feed acceleration value of the machine tool.

[0020] According to some embodiments of the present invention, the step of calculating the ideal removal function size value for each machining point position based on the removal function library, according to the maximum feed rate value, the maximum feed acceleration value, and the removal function shaping capability, includes:

[0021] Based on the maximum feed rate value, calculate the speed fitness value of each removal function in the removal function library at each processing point position;

[0022] Based on the maximum feed acceleration value, calculate the acceleration fitness value of each removal function in the removal function library at each processing point position;

[0023] Based on the shaping ability of the removal function, calculate the shaping ability fitness value of each removal function in the removal function library at each processing point position;

[0024] Based on the speed fitness value, the acceleration fitness value, and the shaping capability fitness value, calculate the total fitness value of each removal function at each processing point location;

[0025] Select the removal function with the maximum total fitness value corresponding to each processing point position as the ideal removal function, and obtain the ideal removal function size value corresponding to the ideal removal function.

[0026] According to some embodiments of the present invention, the velocity fitness value of each removal function in the removal function library at each processing point position is calculated in the following manner:

[0027]

[0028]

[0029] Among them, H i E represents the error value at the i-th processing point on the surface of the optical element to be processed. a r represents the thickness value of the additional material removal layer. j This represents the j-th removal function in the removal function library, v ij This represents the speed value of the polishing tool at the i-th processing point when processing the surface of the optical element using the j-th removal function from the removal function library. max This indicates the maximum feed rate value set for the polishing tool, SYD. vij x1 represents the speed fitness value of the j-th removal function in the removal function library at the i-th processing point, x2 represents the x-value in the workpiece coordinate system, and x3 represents the x-value in the removal function coordinate system.

[0030] According to some embodiments of the present invention, the acceleration fitness value of each removal function in the removal function library at each processing point position is calculated in the following manner:

[0031]

[0032]

[0033] Among them, a ij SYD represents the feed acceleration value during the process of the j-th removal function in the removal function library moving from the (i-1)-th processing point position to the ith processing point position. aij a represents the acceleration fitness value of the j-th removal function in the removal function library at the i-th processing point. max Δx1 represents the maximum feed acceleration value, and Δx1 represents the distance traveled from the (i-1)th machining point to the ith machining point.

[0034] According to some embodiments of the present invention, the shape-repairing capability fitness value of each removal function in the removal function library at each processing point position is calculated in the following manner:

[0035]

[0036]

[0037] SYD xij =b1×η j,k +b2×η j,k ′

[0038] Where, d j λ represents the width value of the j-th removal function in the removal function library. k η represents the wavelength value of the k-th wavelength segment of the surface shape error of the optical element to be processed. j,k η represents the material removal efficiency of the j-th removal function in the removal function library at the k-th wavelength. j,k ' represents the processing efficiency of the j-th removal function in the removal function library at the k-th wavelength band, and b1 and b2 represent the weight values ​​of the material removal efficiency and processing efficiency, respectively. SYD xij x1 represents the fit value of the shape-correcting capability of the j-th removal function in the removal function library at the i-th processing point, and x2 represents the x-value of the workpiece coordinate system and x1 represents the x-value of the removal function coordinate system.

[0039] According to some embodiments of the present invention, the total fitness value of each removal function at each processing point location is calculated in the following manner:

[0040] SYD i,j =q1×SYD vij +q2×SYD aij +q3×SYD xij

[0041] Among them, SYD i,jSYD represents the total fitness value of the j-th removal function in the removal function library at the i-th processing point. q1, q2, and q3 represent the weight values ​​required for velocity fitness, acceleration fitness, and shaping capability fitness during the deterministic reshaping process of the optical element surface to be processed. vij SYD represents the velocity fitness value of the j-th removal function in the removal function library at the i-th processing point. aij SYD represents the acceleration fitness value of the j-th removal function in the removal function library at the i-th processing point. xij This represents the fitness value of the reshaping capability of the j-th removal function in the removal function library at the i-th processing point.

[0042] Secondly, embodiments of the present invention also provide a deterministic reshaping system based on a controllable time-varying removal function, the deterministic reshaping system based on the controllable time-varying removal function comprising:

[0043] A surface shape recognition unit is used to identify surface shape errors on the surface of the optical element to be processed;

[0044] The path creation unit is used to create the processing path for deterministic shaping processes;

[0045] The position acquisition unit is used to obtain the positions of several processing points on the surface of the optical element to be processed based on the surface shape error and the processing path.

[0046] The function library creation unit is used to create a removal function library corresponding to deterministic shaping processing methods.

[0047] The data preset unit is used to preset the maximum feed speed value of the polishing tool, the maximum feed acceleration value of the polishing tool, and the removal function shaping capability during the deterministic shaping process;

[0048] The first calculation unit is used to calculate the ideal removal function size value for each processing point position based on the removal function library, according to the maximum feed speed value, the maximum feed acceleration value, and the removal function shaping capability;

[0049] The second calculation unit is used to calculate the dwell time value at each processing point position based on the ideal removal function size value;

[0050] The refining processing unit is used to perform deterministic reshaping processing on the surface of the optical element to be processed using the removal function size value and the dwell time value.

[0051] Thirdly, embodiments of the present invention also provide an electronic device, comprising:

[0052] At least one memory;

[0053] At least one processor;

[0054] At least one computer program;

[0055] The at least one computer program is stored in the at least one memory, and the at least one processor executes the at least one computer program to implement the deterministic reshaping method based on a controllable time-varying removal function as described in the first aspect above.

[0056] Fourthly, embodiments of the present invention also provide a storage medium, which is a computer-readable storage medium storing a computer program. The computer program is used to cause a computer to execute the deterministic reshaping method based on a controllable time-varying removal function described in the first aspect above.

[0057] It is understood that the beneficial effects of the second to fourth aspects compared with the related technologies are the same as the beneficial effects of the first aspect compared with the related technologies. Please refer to the relevant description in the first aspect above, which will not be repeated here. Attached Figure Description

[0058] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0059] Figure 1 This is a flowchart of a deterministic reshaping process based on a controllable time-varying removal function according to an embodiment of the present invention;

[0060] Figure 2 This is a schematic diagram of the initial surface shape error according to an embodiment of the present invention;

[0061] Figure 3 This is a flowchart of a deterministic reshaping process based on a controllable time-varying removal function, according to another embodiment of the present invention.

[0062] Figure 4 This is a schematic diagram of the theoretical removal function size distribution according to an embodiment of the present invention;

[0063] Figure 5 This is a schematic diagram of the theoretical residence time distribution according to an embodiment of the present invention;

[0064] Figure 6 This is a schematic diagram of the theoretical polishing tool feed rate distribution according to an embodiment of the present invention;

[0065] Figure 7 This is a schematic diagram of the theoretical polishing tool feed acceleration distribution according to an embodiment of the present invention;

[0066] Figure 8This is a structural diagram of a deterministic reshaping system based on a controllable time-varying removal function according to an embodiment of the present invention;

[0067] Figure 9 This is a schematic diagram of the hardware structure of an electronic device according to an embodiment of the present invention. Detailed Implementation

[0068] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0069] In the description of this invention, the use of terms such as "first," "second," etc., is for the purpose of distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features indicated, or implicitly indicating the order of the technical features indicated.

[0070] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0071] In the description of this invention, it should be noted that, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0072] Traditional time-invariant removal function machining relies heavily on the machine tool's dynamic performance, primarily on its feed rate and acceleration. Typically, machining points with low surface error values ​​require shorter dwell times, resulting in higher machine feed rates. Conversely, locations with significant differences in error values ​​between adjacent machining points lead to larger feed accelerations due to variations in the machine feed rate gradient. When the actual speed and acceleration provided by the machine tool fail to meet the theoretical requirements, the dwell time at the corresponding machining point exceeds the theoretically required dwell time, resulting in excessive material removal from the workpiece surface and deteriorating the workpiece's surface shape.

[0073] Different shaping processes have different shaping capabilities. Generally, the smaller the removal function size, the stronger the shaping capability; however, a smaller removal function size means a larger dwell time distribution, which reduces processing efficiency. Current technology has not calculated a suitable removal function size, therefore, the processing efficiency is not high.

[0074] To address the aforementioned issues, this invention pre-sets the maximum feed rate, maximum feed acceleration, and removal function shaping capability of the polishing tool during deterministic reshaping. Based on a removal function library, it calculates the ideal removal function dimension for each machining point according to the maximum feed rate, maximum feed acceleration, and removal function shaping capability. By considering the maximum feed rate and maximum feed acceleration, it overcomes the shortcomings of traditional time-invariant removal function machining methods that place high demands on the inherent dynamic performance of the machine tool, reducing dependence on the dynamic performance of the machine tool and thus lowering the requirements of polishing on the dynamic performance of the machine tool. Based on the ideal removal function dimension, it calculates the dwell time for each machining point. Using the removal function dimension and dwell time values ​​for deterministic reshaping of the optical element surface to be machined improves the shaping capability of deterministic reshaping, increases machining efficiency, and avoids deterioration of the workpiece surface shape.

[0075] Reference Figure 1 This invention provides a deterministic reshaping method based on a controllable time-varying removal function. This deterministic reshaping method includes, but is not limited to, steps S100 to S800, wherein:

[0076] Step S100: Identify the surface shape error of the optical element to be processed;

[0077] Step S200: Establish the machining path for deterministic reshaping.

[0078] Step S300: Based on the surface shape error and processing path, obtain the positions of several processing points on the surface of the optical element to be processed;

[0079] Step S400: Establish a removal function library corresponding to the deterministic reshaping processing method;

[0080] Step S500: Preset the maximum feed rate value of the polishing tool, the maximum feed acceleration value of the polishing tool, and the removal function shaping capability during the deterministic shaping process;

[0081] Step S600: Based on the removal function library, calculate the ideal removal function size value for each machining point position according to the maximum feed rate value, the maximum feed acceleration value, and the removal function shaping capability;

[0082] Step S700: Calculate the dwell time value at each processing point position based on the ideal removal function size value;

[0083] Step S800: Perform deterministic reshaping of the surface of the optical element to be processed using the removal function size value and the dwell time value.

[0084] In steps S100 to S800 of some embodiments, in order to overcome the shortcomings of traditional time-invariant removal function machining methods that have high requirements for the inherent dynamic performance of machine tools and reduce dependence on the dynamic performance of machine tools, this embodiment identifies the surface shape error of the optical element to be processed, establishes a machining path for deterministic shaping machining, obtains the positions of several machining points on the surface of the optical element to be processed based on the surface shape error and machining path, establishes a removal function library corresponding to the deterministic shaping machining method, presets the maximum feed speed value, the maximum feed acceleration value, and the removal function shaping capability of the polishing tool during the deterministic shaping machining process, and calculates the ideal removal function size value for each machining point position based on the removal function library, the maximum feed speed value, the maximum feed acceleration value, and the removal function shaping capability; in order to improve machining efficiency and avoid deterioration of the workpiece surface shape, this embodiment calculates the dwell time value for each machining point position based on the ideal removal function size value, and uses the removal function size value and dwell time value to perform deterministic shaping machining on the surface of the optical element to be processed.

[0085] It should be noted that the dwell time value is calculated using existing technology (deconvolution). However, this embodiment uses the ideal removal function size value instead of the removal function in the existing technology to calculate the dwell time value. Therefore, the dwell time value calculation method is not described in detail in this embodiment.

[0086] In some embodiments, the preset maximum feed rate value and maximum feed acceleration value of the polishing tool during deterministic shaping include:

[0087] Obtain the machine tool's limit feed rate and limit feed acceleration values;

[0088] In deterministic shaping processes, the preset maximum feed rate of the polishing tool is less than or equal to the machine tool's limit feed rate.

[0089] In deterministic shaping processes, the preset maximum feed acceleration value of the polishing tool is less than or equal to the machine tool's limit feed acceleration value.

[0090] In this embodiment, by considering the maximum feed rate and maximum feed acceleration, the shortcomings of traditional time-invariant removal function machining methods, which have high requirements for the inherent dynamic performance of the machine tool, are overcome, and the dependence on the dynamic performance of the machine tool is reduced.

[0091] In some embodiments, based on the removal function library, the ideal removal function size value for each machining point is calculated according to the maximum feed rate value, the maximum feed acceleration value, and the removal function's shaping capability, including:

[0092] Based on the maximum feed rate value, calculate the speed fitness value of each removal function in the removal function library at each processing point position;

[0093] Based on the maximum feed acceleration value, calculate the acceleration fitness value of each removal function in the removal function library at each processing point position;

[0094] Based on the reshaping capabilities of the removing functions, calculate the fitness value of the reshaping capability of each removing function in the removing function library at each processing point.

[0095] Based on the velocity fitness value, acceleration fitness value, and shaping capability fitness value, calculate the total fitness value of each removal function at each processing point location;

[0096] Select the removal function with the maximum total fitness value corresponding to each processing point as the ideal removal function, and obtain the ideal removal function size value corresponding to the ideal removal function.

[0097] In this embodiment, the ideal removal function is calculated based on the speed fitness value, acceleration fitness value, and shape-repairing capability fitness value, thereby obtaining the ideal removal function size. This can improve the shape-repairing capability of deterministic shape-repairing and improve processing efficiency, while avoiding deterioration of the workpiece surface shape.

[0098] In some embodiments, the velocity fitness value of each removal function in the removal function library at each processing point is calculated as follows:

[0099]

[0100]

[0101] Among them, H i E represents the error value at the i-th processing point on the surface of the optical element to be processed. a r represents the thickness value of the additional material removal layer. j This represents the j-th removal function in the removal function library, v ij This represents the speed value of the polishing tool at the i-th processing point when processing the surface of the optical element using the j-th removal function from the removal function library. max This indicates the maximum feed rate value set for the polishing tool, SYD. vij x1 represents the speed fitness value of the j-th removal function in the removal function library at the i-th processing point, x2 represents the x-value in the workpiece coordinate system, and x3 represents the x-value in the removal function coordinate system.

[0102] In some embodiments, the acceleration fitness value for each removal function in the removal function library at each processing point is calculated as follows:

[0103]

[0104]

[0105] Among them, a ij SYD represents the feed acceleration value during the process of the j-th removal function in the removal function library moving from the (i-1)-th processing point position to the ith processing point position. aij a represents the acceleration fitness value of the j-th removal function in the removal function library at the i-th processing point. max Δx1 represents the maximum feed acceleration value, and Δx1 represents the distance traveled from the (i-1)th machining point to the ith machining point.

[0106] In some embodiments, the fitness value of the reshaping capability of each removal function in the removal function library at each processing point is calculated as follows:

[0107]

[0108]

[0109] SYD xij =b1×η j,k +b2×η j,k ′

[0110] Where, d j λ represents the width value of the j-th removal function in the removal function library. k η represents the wavelength value of the k-th wavelength segment of the surface shape error of the optical element to be processed. j,k η represents the material removal efficiency of the j-th removal function in the removal function library at the k-th wavelength. j,k ' represents the processing efficiency of the j-th removal function in the removal function library at the k-th wavelength band, and b1 and b2 represent the weight values ​​of the material removal efficiency and processing efficiency, respectively. SYD xij x1 represents the fit value of the shape-correcting capability of the j-th removal function in the removal function library at the i-th processing point, and x2 represents the x-value of the workpiece coordinate system and x1 represents the x-value of the removal function coordinate system.

[0111] In some embodiments, the total fitness value of each removal function at each processing point is calculated as follows:

[0112] SYD i,j =q1×SYD vij +q2×SYD aij +q3×SYD xij

[0113] Among them, SYD i,jSYD represents the total fitness value of the j-th removal function in the removal function library at the i-th processing point. q1, q2, and q3 represent the weight values ​​required for velocity fitness, acceleration fitness, and shaping capability fitness during the deterministic reshaping process of the optical element surface to be processed. vij SYD represents the velocity fitness value of the j-th removal function in the removal function library at the i-th processing point. aij SYD represents the acceleration fitness value of the j-th removal function in the removal function library at the i-th processing point. xij This represents the fitness value of the reshaping capability of the j-th removal function in the removal function library at the i-th processing point.

[0114] To facilitate understanding by those skilled in the art, a set of preferred embodiments is provided below:

[0115] This embodiment uses a variable-angle rotating oblique-incidence abrasive waterjet machining method as an implementation method, and the change in functional dimensions is eliminated by adjusting the nozzle tilt angle. To make this embodiment clearer and easier to understand, this embodiment is described from the perspective of one-dimensional surface shaping; however, in actual machining processes, the method of this embodiment can be used, but is not limited to, machining one-dimensional surfaces. Specifically:

[0116] The surface to be corrected is a one-dimensional cross-section of an optical mirror with a width of 198 mm, and its surface distribution is as follows. Figure 2 As shown, X / mm represents the width of the one-dimensional cross-section of the optical mirror. The removal function library offers removal functions with sizes ranging from 5 to 15 mm. The maximum feed rate of the machine tool must not exceed 2 mm / min, and the maximum feed acceleration must not exceed 0.8 mm / min. 2 .

[0117] Reference Figure 3 The method steps in this embodiment include:

[0118] (1) Identify the surface shape error of the optical element to be processed and establish a deterministic shaping process path.

[0119] The surface shape error of the one-dimensional cross-section of the optical mirror to be processed, measured by an interferometer, is as follows: Figure 2 As shown, the machining process uses a uniform grid with a spacing of 0.5mm, and the polishing tool feeds along the X direction. Specifically:

[0120] The surface shape error of the optical element to be processed is detected, identified and output by optical measurement equipment. A processing path for deterministic reshaping is established, and the location of the polishing tool on the corresponding processing point on the surface of the optical element to be processed is reasonably allocated according to the surface shape error distribution and processing path.

[0121] It should be noted that the method for establishing the processing path of the deterministic shaping process in this embodiment adopts existing technology, and will not be described in detail in this embodiment.

[0122] (2) Establish a corresponding removal function library based on the deterministic shaping processing method used.

[0123] The processing method used in this embodiment is a variable-angle rotating oblique incident abrasive water jet polishing method. This method can generate a Gaussian-shaped removal function, and the size of the removal function can be controlled in real time by changing the tilt angle and eccentricity of the nozzle during the processing. The size of the removal function varies from 5mm to 15mm.

[0124] It should be noted that the deterministic shaping processing method used in this embodiment refers to all processing methods that can achieve real-time controllable changes in the removal function size during the processing, including but not limited to variable angle rotating oblique incidence abrasive water jet polishing, variable beam diameter focused ion beam polishing, etc.; establishing a corresponding removal function library refers to a set consisting of all different removal function sizes that can be obtained under the corresponding processing method; removal function size refers to the size corresponding to the removal function in the length, width, and depth directions that can be obtained under the corresponding processing method.

[0125] (3) Calculate the ideal removal function size value at each processing point based on the dynamic performance limit of the machine tool and the set requirements for machine tool speed, acceleration and removal function shaping capability during the deterministic shaping process of the optical element surface to be processed.

[0126] The limits of machine tool dynamic performance refer to the maximum feed rate and maximum feed acceleration values ​​that the machine tool can achieve during operation. The requirements for machine tool speed and acceleration in the deterministic shaping process of the surface of the optical element to be processed refer to the maximum feed rate and feed acceleration values ​​of the polishing tool in the ideal state during the processing of the surface of the optical element to be processed. The maximum feed rate and feed acceleration values ​​in the ideal state should be less than or equal to the maximum feed rate and feed acceleration values ​​that the machine tool can achieve.

[0127] The requirement for the removal function's reshaping capability during the deterministic reshaping process of the optical element to be processed is that the smaller the size of the removal function, the higher the material removal efficiency and the lower the material removal efficiency, and vice versa. Therefore, when there is a requirement for the removal function's reshaping capability according to the set deterministic reshaping process, both the material removal efficiency and the material removal capacity of the removal function should be taken into account.

[0128] In this embodiment, the maximum feed rate of the machine tool is set not to exceed 2 mm / min, and the maximum feed acceleration is set not to exceed 0.8 mm / min.2 The theoretical removal function size distribution, polishing tool feed rate distribution, feed acceleration distribution, and dwell time distribution were compared for the speed fitness value, acceleration fitness value, and shaping ability fitness value under three different weighting ratios. The weighting ratios for the three fitness values ​​are as follows:

[0129] Group 1: q1 = 0.6, q2 = 0.2, q3 = 0.2, b1 = 0.5, b2 = 0.5;

[0130] Group 2: q1 = 0.2, q2 = 0.6, q3 = 0.2, b1 = 0.5, b2 = 0.5;

[0131] Group 3: q1 = 0.2, q2 = 0.2, q3 = 0.6, b1 = 0.5, b2 = 0.5;

[0132] Based on the surface error distribution and the size distribution of removal functions in the removal function library, the fitness value of each removal function at each processing point is calculated, specifically as follows:

[0133] The velocity fitness value of the j-th removal function in the removal function library at the i-th processing point is calculated using the following formula, where i = 1, 2, ..., n, j = 1, 2, ..., m, n represents the total number of processing points, and m represents the total number of removal functions in the removal function library:

[0134]

[0135]

[0136] Among them, H i E represents the error value at the i-th processing point on the surface of the optical element to be processed. a r represents the thickness value of the additional material removal layer. j This represents the j-th removal function in the removal function library, v ij This represents the speed value of the polishing tool at the i-th processing point when processing the surface of the optical element using the j-th removal function from the removal function library. max This indicates the maximum feed rate value set for the polishing tool, SYD. vij x1 represents the speed fitness value of the j-th removal function in the removal function library at the i-th processing point, x2 represents the x-value in the workpiece coordinate system, and x3 represents the x-value in the removal function coordinate system.

[0137] The acceleration fitness value of the j-th removal function in the removal function library at the i-th processing point is calculated using the following formula:

[0138]

[0139]

[0140] Among them, a ij SYD represents the feed acceleration value during the process of the j-th removal function in the removal function library moving from the (i-1)-th processing point position to the ith processing point position. aij a represents the acceleration fitness value of the j-th removal function in the removal function library at the i-th processing point. max Δx1 represents the maximum feed acceleration value, and Δx1 represents the distance traveled from the (i-1)th machining point to the ith machining point.

[0141] The following formula is used to calculate the shape-correcting fitness value of the j-th removal function in the removal function library at the i-th processing point:

[0142]

[0143]

[0144] SYD xij =b1×η j,k +b2×η j,k ′

[0145] Where, d j λ represents the width value of the j-th removal function in the removal function library. k η represents the wavelength value of the k-th wavelength segment of the surface shape error of the optical element to be processed. j,k η represents the material removal efficiency of the j-th removal function in the removal function library at the k-th wavelength. j,k ' represents the processing efficiency of the j-th removal function in the removal function library at the k-th wavelength band, and b1 and b2 represent the weight values ​​of the material removal efficiency and processing efficiency, respectively. SYD xij x1 represents the fit value of the shape-correcting capability of the j-th removal function in the removal function library at the i-th processing point, and x2 represents the x-value of the workpiece coordinate system and x1 represents the x-value of the removal function coordinate system.

[0146] The total fitness value of each removal function at each processing point is calculated as follows:

[0147] SYD i,j =q1×SYD vij +q2×SYD aij +q3×SYD xij

[0148] Among them, SYD i,jq1 represents the total fitness value of the j-th removal function in the removal function library at the i-th processing point, and q2 and q3 represent the weight values ​​required for the velocity fitness value, acceleration fitness value, and shaping capability fitness value during the deterministic shaping process of the optical element surface to be processed.

[0149] The fitness value refers to the ability of a removal function of a certain size to meet the requirements of the polishing tool feed rate, feed acceleration, and the shaping capability of the corresponding removal function at a certain processing point.

[0150] Based on the three sets of fitness value weighting ratios required above, the theoretical removal function size distribution at each processing point location under the three sets of different weighting ratios can be calculated as follows: Figure 4 As shown, d / mm represents the removal function dimension, and the theoretical residence time distribution of the polishing tool is as follows: Figure 5 As shown, t / min represents the dwell time. The theoretical feed rate and feed acceleration distribution of the polishing tool are respectively as follows: Figure 6 and Figure 7 As shown, v(mm·min) -1 ) represents the feed rate, a (mm·min) -2 () represents the feed acceleration. (From) Figure 4 It can be seen that the values ​​of the removal function dimensions at each processing point are significantly correlated with the surface error distribution and processing condition requirements (fitness value weighting). Under different processing requirements, the distribution of the removal function dimensions calculated at each processing point varies significantly. Figure 5 As can be seen from the solid line, the residence time distribution no longer exhibits the same strong similarity to the initial surface error distribution as traditional time-invariant removal function processing. This processing characteristic effectively distinguishes controllable time-varying removal function processing from time-invariant removal function processing. This indicates that controllable time-varying removal function processing is not merely a supplementary step to traditional time-invariant removal function processing, but rather a novel processing method distinct from traditional time-invariant removal function processing. Figure 6 and Figure 7 As can be seen, by reasonably allocating the fitness values ​​of different factors, the theoretical feed rate and feed acceleration values ​​during the polishing process can be effectively limited to the required maximum feed rate and feed acceleration values ​​of the machine tool.

[0151] The advantages of this invention compared to existing time-invariant function removal methods are:

[0152] (1) The method of using controllable time-varying removal function is not constrained by the inherent dynamic performance of the machine tool. While reducing the dependence on the dynamic performance of the machine tool, it can also improve the shaping ability of the polishing process and improve the processing efficiency.

[0153] (2) This method can output an optimal global removal function size distribution based on arbitrary surface distribution and processing requirements. The processing is not constrained by surface conditions, which facilitates the improvement of surface convergence efficiency.

[0154] (3) This method can be used for all processing methods that can achieve real-time controllable changes in the size of the removal function during the processing, including but not limited to variable angle rotating oblique incident abrasive water jet polishing, variable beam diameter focused ion beam polishing, etc., and has a wide range of applications.

[0155] Reference Figure 8 This invention also provides a deterministic reshaping system based on a controllable time-varying removal function. This system includes a surface recognition unit 100, a path establishment unit 200, a position acquisition unit 300, a function library establishment unit 400, a data preset unit 500, a first calculation unit 600, a second calculation unit 700, and a reshaping unit 800, wherein:

[0156] The surface shape recognition unit 100 is used to identify surface shape errors on the surface of the optical element to be processed;

[0157] The path establishment unit 200 is used to establish the processing path for deterministic shaping processing;

[0158] The position acquisition unit 300 is used to obtain the positions of several processing points on the surface of the optical element to be processed based on the surface shape error and the processing path.

[0159] Function library creation unit 400 is used to create a removal function library corresponding to deterministic shaping processing methods;

[0160] The data preset unit 500 is used to preset the maximum feed speed value of the polishing tool, the maximum feed acceleration value of the polishing tool, and the removal function shaping capability during the deterministic shaping process.

[0161] The first calculation unit 600 is used to calculate the ideal removal function size value for each machining point position based on the removal function library, the maximum feed speed value, the maximum feed acceleration value, and the removal function shaping capability.

[0162] The second calculation unit 700 is used to calculate the dwell time value at each processing point position based on the ideal removal function size value;

[0163] The refining processing unit 800 is used to perform deterministic refining processing on the surface of the optical element to be processed using removal function size values ​​and dwell time values.

[0164] It should be noted that since the deterministic shaping processing system based on a controllable time-varying removal function in this embodiment and the deterministic shaping processing method based on a controllable time-varying removal function described above are based on the same inventive concept, the corresponding content in the method embodiment is also applicable to this system embodiment, and will not be described in detail here.

[0165] This application also provides an electronic device, comprising: at least one memory, at least one processor, and at least one computer program. The at least one computer program is stored in the at least one memory, and the at least one processor executes the at least one computer program to implement any of the deterministic shaping processing methods based on a controllable time-varying removal function described in the above embodiments. This electronic device can be any smart terminal, including tablet computers, in-vehicle computers, etc.

[0166] Reference Figure 9 , Figure 9 This illustration shows the hardware structure of an electronic device according to another embodiment, the electronic device comprising:

[0167] The processor 810 can be implemented using a general-purpose CPU (Central Processing Unit), microprocessor, application-specific integrated circuit (ASIC), or one or more integrated circuits, and is used to execute relevant programs to implement the technical solutions provided in the embodiments of this application.

[0168] The memory 820 can be implemented as a read-only memory (ROM), static storage device, dynamic storage device, or random access memory (RAM). The memory 820 can store the operating system and other application programs. When the technical solutions provided in the embodiments of this specification are implemented through software or firmware, the relevant program code is stored in the memory 820 and is called and executed by the processor 810 according to an embodiment of this application of a deterministic shaping processing method based on a controllable time-varying removal function.

[0169] The input / output interface 830 is used to implement information input and output;

[0170] The communication interface 840 is used to enable communication and interaction between this device and other devices. Communication can be achieved through wired means (such as USB, Ethernet cable, etc.) or wireless means (such as mobile network, WIFI, Bluetooth, etc.).

[0171] Bus 850 transmits information between various components of the device (e.g., processor 810, memory 820, input / output interface 830, and communication interface 840);

[0172] The processor 810, memory 820, input / output interface 830 and communication interface 840 are connected to each other within the device via bus 850.

[0173] This application also provides a storage medium, which is a computer-readable storage medium storing a computer program. The computer program is used to cause a computer to execute any of the deterministic shaping processing methods based on a controllable time-varying removal function in the above embodiments.

[0174] Memory, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs and non-transitory computer-executable programs. Furthermore, memory may include high-speed random access memory, and may also include non-transitory memory, such as at least one disk storage, flash memory, or other non-transitory solid-state storage. In some embodiments, memory may optionally include memory remotely located relative to the processor, which can be connected to the processor via a network. Examples of such networks include, but are not limited to, the Internet, intranets, local area networks, mobile communication networks, and combinations thereof.

[0175] The embodiments described in this application are for the purpose of more clearly illustrating the technical solutions of the embodiments of this application, and do not constitute a limitation on the technical solutions provided by the embodiments of this application. As those skilled in the art will know, with the evolution of technology and the emergence of new application scenarios, the technical solutions provided by the embodiments of this application are also applicable to similar technical problems.

[0176] It will be understood by those skilled in the art that Figure 1 The technical solutions shown do not constitute a limitation on the embodiments of this application, and may include more or fewer steps than shown, or combine certain steps, or different steps.

[0177] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs.

[0178] Those skilled in the art will understand that all or some of the steps in the methods disclosed above, as well as the functional modules / units in the systems and devices, can be implemented as software, firmware, hardware, or appropriate combinations thereof.

[0179] The terms “first,” “second,” “third,” “fourth,” etc. (if present) in the specification and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0180] It should be understood that in this application, "at least one (item)" means one or more, and "more than" means two or more. "And / or" is used to describe the relationship between related objects, indicating that three relationships can exist. For example, "A and / or B" can represent three cases: only A exists, only B exists, and both A and B exist simultaneously, where A and B can be singular or plural. The character " / " generally indicates that the preceding and following related objects are in an "or" relationship. "At least one (item) of the following" or similar expressions refer to any combination of these items, including any combination of single or plural items. For example, at least one (item) of a, b, or c can represent: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", where a, b, and c can be single or multiple.

[0181] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of the units described above is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between apparatuses or units may be electrical, mechanical, or other forms.

[0182] The units described above as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0183] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0184] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes multiple instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of the various embodiments of this application. The aforementioned storage medium includes various media capable of storing programs, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0185] The preferred embodiments of the present application have been described above with reference to the accompanying drawings, but this does not limit the scope of the claims of the present application. Any modifications, equivalent substitutions, and improvements made by those skilled in the art without departing from the scope and substance of the embodiments of the present application shall be within the scope of the claims of the present application.

Claims

1. A deterministic reshaping method based on a controllable time-varying removal function, characterized in that, The deterministic reshaping method based on a controllable time-varying removal function includes: Identify surface shape errors on the surface of the optical element to be processed; Establish a processing path for deterministic reshaping; Based on the surface shape error and the processing path, the positions of several processing points on the surface of the optical element to be processed are obtained; Establish a function library for removal methods corresponding to deterministic reshaping techniques; The maximum feed rate of the polishing tool, the maximum feed acceleration of the polishing tool, and the removal function shaping capability are preset during the deterministic shaping process. Based on the removal function library, and according to the maximum feed rate value, the maximum feed acceleration value, and the removal function shaping capability, the ideal removal function size value for each machining point position is calculated, including: Based on the maximum feed rate value, calculate the speed fitness value of each removal function in the removal function library at each processing point position, including: in, The first part represents the surface of the optical element to be processed. Error value at each processing point location This indicates the thickness value of the additional material removal layer. This indicates removing the first element from the function library. A removal function, This indicates that the function in the function library is used to remove the first... When the removal function processes the surface of the optical element to be processed, the first... The speed value of the polishing tool at each processing point location. This indicates the maximum feed rate value set for the polishing tool. This indicates removing the first element from the function library. The removal function at the th ... Speed ​​fitness value at each processing point location Representing the workpiece coordinate system value, This indicates the removal of the function coordinate system. value; Based on the maximum feed acceleration value, calculate the acceleration fitness value of each removal function in the removal function library at each processing point position, including: in, This indicates removing the first element from the function library. The removal function from the th The processing point position moves to the first... The feed acceleration value during the process at each machining point location. This indicates that the function in the function library is used to remove the first... When the removal function processes the surface of the optical element to be processed, the first... The speed value of the polishing tool at each processing point location. This indicates removing the first element from the function library. The removal function at the th ... The acceleration fitness value at each processing point location This represents the maximum feed acceleration value. Indicates from the first The processing point position moves to the first... The distance between each processing point; Based on the reshaping capability of the removing function, calculate the fitness value of the reshaping capability of each removing function in the removing function library at each processing point position, including: in, This indicates removing the first element from the function library. The width value of the removal function. The surface shape error of the optical element to be processed is represented by the first... Wavelength values ​​for each wavelength band, This indicates removing the first element from the function library. The removal function at the th ... Material removal efficiency at various wavelengths This indicates removing the first element from the function library. The removal function at the th ... Processing efficiency in each wavelength band. These represent the weighted values ​​for material removal efficiency and processing efficiency, respectively. This indicates removing the first element from the function library. The removal function at the th ... The adaptability value of the shaping capability at each processing point location. Representing the workpiece coordinate system value, This indicates the removal of the function coordinate system. value; Based on the speed fitness value, the acceleration fitness value, and the shaping capability fitness value, calculate the total fitness value of each removal function at each processing point location; Select the removal function with the maximum total fitness value corresponding to each processing point position as the ideal removal function, and obtain the ideal removal function size value corresponding to the ideal removal function; Based on the ideal removal function size value, the dwell time value at each processing point position is calculated; The surface of the optical element to be processed is subjected to deterministic reshaping using the removal function size value and the dwell time value.

2. The deterministic reshaping method based on a controllable time-varying removal function according to claim 1, characterized in that, The maximum feed rate value and the maximum feed acceleration value of the polishing tool during the preset deterministic shaping process include: Obtain the machine tool's limit feed rate and limit feed acceleration values; During the deterministic shaping process, the preset maximum feed rate of the polishing tool is less than or equal to the limit feed rate of the machine tool; During deterministic shaping, the preset maximum feed acceleration value of the polishing tool is less than or equal to the limit feed acceleration value of the machine tool.

3. The deterministic reshaping method based on a controllable time-varying removal function according to claim 1, characterized in that, The total fitness value of each removal function at each processing point is calculated as follows: in, This indicates removing the first element from the function library. The removal function at the th ... The total fitness value at each processing point location, These represent the weight values ​​required for velocity fitness, acceleration fitness, and shaping capability fitness during the deterministic shaping process of the optical element surface to be processed. This indicates removing the first element from the function library. The removal function at the th ... Speed ​​fitness value at each processing point location This indicates removing the first element from the function library. The removal function at the th ... The acceleration fitness value at each processing point location This indicates removing the first element from the function library. The removal function at the th ... The adaptability value of the shaping capability at each processing point location.

4. A deterministic reshaping system based on a controllable time-varying removal function, characterized in that, The deterministic reshaping process based on a controllable time-varying removal function, according to any one of claims 1 to 3, comprises the following system: A surface shape recognition unit is used to identify surface shape errors on the surface of the optical element to be processed; The path creation unit is used to create the processing path for deterministic shaping processes; The position acquisition unit is used to obtain the positions of several processing points on the surface of the optical element to be processed based on the surface shape error and the processing path. The function library creation unit is used to create a removal function library corresponding to deterministic shaping processing methods. The data preset unit is used to preset the maximum feed speed value of the polishing tool, the maximum feed acceleration value of the polishing tool, and the removal function shaping capability during the deterministic shaping process; The first calculation unit is used to calculate the ideal removal function size value for each machining point position based on the removal function library, according to the maximum feed rate value, the maximum feed acceleration value, and the removal function shaping capability, including: Based on the maximum feed rate value, calculate the speed fitness value of each removal function in the removal function library at each processing point position; Based on the maximum feed acceleration value, calculate the acceleration fitness value of each removal function in the removal function library at each processing point position; Based on the shaping ability of the removal function, calculate the shaping ability fitness value of each removal function in the removal function library at each processing point position; Based on the speed fitness value, the acceleration fitness value, and the shaping capability fitness value, calculate the total fitness value of each removal function at each processing point location; Select the removal function with the maximum total fitness value corresponding to each processing point position as the ideal removal function, and obtain the ideal removal function size value corresponding to the ideal removal function; The second calculation unit is used to calculate the dwell time value at each processing point position based on the ideal removal function size value; The refining processing unit is used to perform deterministic reshaping processing on the surface of the optical element to be processed using the removal function size value and the dwell time value.

5. An electronic device, characterized in that, include: At least one memory; At least one processor; At least one computer program; The at least one computer program is stored in the at least one memory, and the at least one processor executes the at least one computer program to perform: A deterministic reshaping process based on a controllable time-varying removal function as described in any one of claims 1 to 3.

6. A storage medium, said storage medium being a computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that is used to cause the computer to execute: A deterministic reshaping process based on a controllable time-varying removal function as described in any one of claims 1 to 3.

Images