A substrate transfer method and apparatus

Abstract

This application relates to the field of substrate transport technology, specifically to a substrate transport method and apparatus, comprising: acquiring the current motion state of the substrate and the speed change of the substrate in the current motion state; acquiring the tilt angle corresponding to the speed change of the substrate in the current motion state according to the proportional relationship between the tilt angle of the substrate and the speed change of the substrate, and controlling the substrate to be transported at the tilt angle; the proportional relationship is that when the speed change is larger, the tilt angle is larger; when the speed change is smaller, the tilt angle is smaller; the above scheme establishes a proportional relationship between the tilt angle of the substrate and the speed change of the substrate according to the speed change of the substrate in various motion states, and achieves rapid transport of the substrate by adjusting the tilt angle of the substrate, thereby improving the transport efficiency.

Description

Technical Field

[0001] This application relates to the field of substrate transfer technology, specifically to a substrate transfer method and apparatus. Background Technology

[0002] In integrated circuit manufacturing, substrates are typically transferred between different workstations within the equipment. Often, to maintain substrate moisture or for other reasons, it is necessary to transfer substrates with a liquid film on their surface from one workstation to the next.

[0003] Due to the presence of the liquid film, liquid spillage must be avoided during substrate transfer. If spillage occurs, the substrate surface will be exposed to air, leading to processing defects such as oxidation. Between the liquid film and the substrate, adhesion exists, creating a certain viscosity. Simultaneously, surface tension keeps the liquid film as a unified whole. Therefore, when the substrate and liquid film begin to move, adhesion and surface tension work together to provide a forward force for the liquid film, preventing it from detaching from the substrate. When the acceleration is low, the adhesion and surface tension between the liquid and substrate provide sufficient acceleration for the liquid film, preventing spillage. However, when the acceleration is high, the adhesion and surface tension are insufficient to hold the liquid film in place, causing it to spill. Therefore, when transferring a substrate with a liquid film on its surface, the speed during the transfer process should not be too fast in order to avoid spillage of the liquid film. The acceleration and deceleration processes should be gentle, otherwise the liquid film is easy to spill. However, in order to avoid spillage of the liquid film, the acceleration and deceleration processes during substrate transfer should be carried out at a low speed and with low acceleration and deceleration, which will result in a long substrate transfer time and low equipment processing efficiency.

[0004] Therefore, there is an urgent need for a rapid transfer method for liquid film substrates to effectively avoid liquid film spillage and improve substrate transfer efficiency. Summary of the Invention

[0005] In view of this, embodiments of this application provide a substrate conveying method and apparatus, which can achieve rapid substrate conveying by adjusting the tilt angle of the substrate.

[0006] In a first aspect, embodiments of this application provide a substrate transfer method, the method comprising:

[0007] The current motion state of the substrate and the speed change of the substrate in the current motion state are obtained; the surface of the substrate is coated with a liquid film;

[0008] Based on the proportional relationship between the tilt angle of the substrate and the speed change of the substrate, the tilt angle corresponding to the speed change of the substrate in the current motion state is obtained, and the substrate is controlled to be conveyed at the tilt angle; the proportional relationship is that when the speed change is greater, the tilt angle is greater; when the speed change is smaller, the tilt angle is smaller.

[0009] Based on the above technical means, the embodiments of this application establish a proportional relationship between the tilt angle of the substrate and the speed change of the substrate in various motion states. When the speed change is large, the tilt angle is large, and when the speed change is small, the tilt angle is small. By utilizing this relationship, the acceleration and deceleration time of the substrate is reduced by changing the angle of the substrate during the acceleration and deceleration phases, thereby improving the transmission efficiency.

[0010] In conjunction with the first aspect, in one embodiment, the motion state of the substrate includes an acceleration phase and a deceleration phase; when the current motion state of the substrate is the acceleration phase, the acceleration of the substrate in the current acceleration phase is obtained.

[0011] When the current motion state of the substrate is in the deceleration stage, the deceleration of the substrate in the current deceleration stage is obtained.

[0012] Based on the above technical means, in the embodiments of this application, the acceleration and deceleration time of the substrate is reduced by changing the angle of the substrate during the acceleration and deceleration stages, thereby improving the transmission efficiency.

[0013] In conjunction with the first aspect, in one embodiment, when the current motion state of the substrate is an acceleration phase or a deceleration phase, a first relationship is obtained between the supporting force of the substrate on the liquid film, the tilt angle of the substrate, and the gravity of the liquid film.

[0014] Obtain the component force in the forward direction of the substrate, and a second relationship between the speed change of the substrate and the component force;

[0015] Based on the first relationship, the component force, and the second relationship, the proportional relationship between the tilt angle of the substrate and the speed change of the substrate is obtained;

[0016] Based on the aforementioned proportional relationship, the tilt angle corresponding to the speed change of the substrate in the current motion state is obtained; the tilt angle corresponding to the speed change of the substrate in the acceleration phase is opposite to the tilt angle corresponding to the speed change in the deceleration phase, and the two angles are equal in magnitude.

[0017] In conjunction with the first aspect, in one embodiment, when the current motion state of the substrate is the start of the acceleration phase, the initial acceleration of the substrate is obtained, and the substrate is simultaneously controlled to be transported at a tilt angle corresponding to the initial acceleration.

[0018] Gradually increase the acceleration of the substrate, and simultaneously control the substrate to be transported at a tilt angle corresponding to the increased acceleration;

[0019] When the difference between the speed of the substrate and the target transmission speed is less than the differential threshold, the acceleration of the substrate is gradually reduced, and the substrate is simultaneously controlled to transmit at the tilt angle corresponding to the reduced acceleration, until the speed of the substrate reaches the target transmission speed, at which point the tilt angle of the substrate is controlled to return to horizontal.

[0020] According to the above technical means, in the acceleration phase, the present application embodiment adjusts the angle change of the substrate during the transfer process, so that part of the gravity of the liquid film and the supporting force of the substrate on the liquid film are converted into a horizontal thrust (i.e. the above component force), so that the liquid film accelerates forward, thereby increasing the acceleration of the substrate transfer.

[0021] In conjunction with the first aspect, in one embodiment, when the current motion state of the substrate is the beginning of the deceleration phase, the initial deceleration of the substrate is obtained, and the substrate is simultaneously controlled to be transported at a tilt angle corresponding to the initial deceleration.

[0022] Gradually increase the deceleration of the substrate, and simultaneously control the substrate to be transported at a tilt angle corresponding to the increased deceleration.

[0023] When the difference between the speed of the substrate and zero speed is less than the differential speed threshold, the deceleration of the substrate is gradually reduced, and the substrate is simultaneously controlled to be conveyed at the tilt angle corresponding to the reduced deceleration, until the speed of the substrate is zero and the conveying stops.

[0024] According to the above technical means, in the deceleration stage of this application embodiment, the substrate tilts in the opposite direction to its movement direction, and part of the gravity of the liquid film and the supporting force of the substrate on the liquid film are converted into horizontal resistance (i.e. the above-mentioned component force), which decelerates the liquid film and thereby increases the deceleration of the substrate transport.

[0025] In conjunction with the first aspect, in one embodiment, the motion speed state of the substrate further includes a constant speed stage; when the current motion state of the substrate is a constant speed stage and the motion speed is lower than a speed threshold, the substrate is controlled to be conveyed in a horizontal conveying manner.

[0026] When the current motion state of the substrate is in a constant speed stage and the motion speed is higher than the speed threshold, the substrate is controlled to be transported in a variable angle manner.

[0027] Based on the above technical means, the embodiments of this application divide the uniform speed stage into two transmission methods, and determine whether to tilt the substrate according to the movement speed, so as to achieve the purpose of transmitting the substrate at a higher speed.

[0028] In conjunction with the first aspect, in one embodiment, a target drag coefficient is obtained, and a relationship curve between the tilt angle of the substrate and the movement speed of the substrate is constructed based on the target drag coefficient.

[0029] Based on the relationship curve, the tilt angle corresponding to the motion speed of the substrate in the current uniform speed stage is obtained, and the substrate is controlled to be transported at the tilt angle.

[0030] According to the above technical means, in the uniform speed stage of the substrate of this application embodiment, when the speed of movement is higher than the speed threshold, the substrate tilts at different angles at different conveying speeds, and the liquid film tilts in the direction of movement. The thrust generated by the tilt angle of the substrate is used to counteract the influence of the wind force, thereby achieving the purpose of conveying the substrate at a higher speed.

[0031] Secondly, embodiments of this application provide a substrate transfer apparatus, the apparatus comprising:

[0032] A speed acquisition module is used to acquire the current motion state of the substrate and the speed change of the substrate in the current motion state; the surface of the substrate is coated with a liquid film;

[0033] The tilt angle acquisition module is used to acquire the tilt angle corresponding to the speed change of the substrate in the current motion state based on the proportional relationship between the tilt angle of the substrate and the speed change of the substrate, and control the substrate to be conveyed at the tilt angle; the proportional relationship is that when the speed change is larger, the tilt angle is larger; when the speed change is smaller, the tilt angle is smaller.

[0034] Thirdly, embodiments of this application provide a computer device, the computer device including a processor and a memory, the memory storing at least one instruction, the at least one instruction being loaded and executed by the processor to implement the above-described substrate transfer method.

[0035] Fourthly, embodiments of this application provide a computer-readable storage medium storing at least one instruction, which is loaded and executed by a processor to implement the aforementioned substrate transfer method.

[0036] The technical solution provided in this application may include the following beneficial effects:

[0037] This application embodiment establishes a proportional relationship between the tilt angle of the substrate and its speed change in various motion states. When the speed change is large, the tilt angle is large; when the speed change is small, the tilt angle is small. Utilizing this relationship, the acceleration and deceleration time of the substrate is reduced by changing the substrate's angle during the acceleration and deceleration phases, thereby improving the conveying efficiency. Specifically, during the acceleration phase, by adjusting the angle change of the substrate during the conveying process, a portion of the gravity of the liquid film and the supporting force of the substrate on the liquid film is converted into a horizontal thrust (i.e., the aforementioned component force), causing the liquid film to accelerate forward, thereby improving... The acceleration of substrate transport; during the deceleration phase, the substrate tilts in the opposite direction to its movement direction, and part of the gravity of the liquid film and the supporting force of the substrate on the liquid film are converted into horizontal resistance (i.e., the aforementioned component force), causing the liquid film to decelerate, thereby increasing the deceleration of substrate transport; during the uniform speed phase, the embodiments of this application determine whether to tilt the substrate according to the movement speed. When the movement speed is higher than the speed threshold, the substrate tilts at different angles at different transport speeds, and the liquid film tilts in the direction of movement. The thrust generated by the tilt angle of the substrate is used to counteract the influence of the wind force, thereby achieving the purpose of transporting the substrate at a higher speed. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0039] Figure 1 This diagram illustrates the force relationship between the liquid film and the substrate when the substrate and the liquid film are horizontal, according to an embodiment of this application.

[0040] Figure 2 This is a schematic diagram illustrating the decomposition of the support force and the thrust from gravity when the substrate is tilted during the acceleration phase, according to an exemplary embodiment.

[0041] Figure 3 This is a schematic diagram illustrating the resistance derived from the decomposition of the supporting force and gravity when the substrate is tilted during the deceleration phase, according to an exemplary embodiment.

[0042] Figure 4 This is a flowchart illustrating a substrate transfer method according to an exemplary embodiment.

[0043] Figure 5 This is a flowchart illustrating a substrate transfer method according to an exemplary embodiment.

[0044] Figure 6This is a schematic diagram illustrating the change in substrate tilt angle during the acceleration phase according to an exemplary embodiment.

[0045] Figure 7 This is a schematic diagram illustrating the relationship between the supporting force and the gravity of the liquid film during the acceleration phase, according to an exemplary embodiment.

[0046] Figure 8 This is a schematic diagram illustrating the change in the tilt angle of the substrate during the deceleration phase, according to an exemplary embodiment.

[0047] Figure 9 This is a schematic diagram illustrating the relationship between the tilt angle of the substrate and the movement speed of the substrate according to an exemplary embodiment.

[0048] Figure 10 This is a schematic diagram of the forces acting on the liquid film after it reverses a certain angle during the uniform velocity phase, according to an exemplary embodiment.

[0049] Figure 11 This is a schematic diagram showing the speed, acceleration, and angle curves of a substrate during a horizontal transport method according to an exemplary embodiment.

[0050] Figure 12 This is a schematic diagram showing the speed, acceleration, and angle curves of a substrate during a substrate variable angle transmission method according to an exemplary embodiment.

[0051] Figure 13 This is a structural block diagram of a substrate transfer device according to an exemplary embodiment.

[0052] Figure 14 A structural block diagram of a computer device illustrated in an exemplary embodiment of this application is shown. Detailed Implementation

[0053] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0054] It should be understood that the term "instruction" mentioned in the embodiments of this application can be a direct instruction, an indirect instruction, or an indication of a relationship. For example, A instructing B can mean that A directly instructs B, such as B being able to obtain information through A; it can also mean that A indirectly instructs B, such as A instructing C, so B can obtain information through C; or it can mean that there is a relationship between A and B.

[0055] In the description of the embodiments of this application, the term "correspondence" may indicate that there is a direct or indirect correspondence between two things, or that there is an association between two things, or that there is a relationship of instruction and being instructed, configuration and being configured, etc.

[0056] In the embodiments of this application, "predefined" can be achieved by pre-storing corresponding codes, tables or other means that can be used to indicate relevant information in the device (e.g., including terminal devices and network devices). This application does not limit the specific implementation method.

[0057] Figure 1 This is a schematic diagram illustrating the force relationship between the liquid film and the substrate when the substrate and the liquid film are horizontal, as described in the embodiments of this application; Figure 1 As shown, in addition to the adhesion between the liquid film and the substrate and the tension of the liquid film, there are also the gravity of the liquid film and the supporting force of the substrate on the liquid film. When the substrate and the liquid film are horizontal, these two forces are perpendicular to the direction of horizontal movement, and therefore cannot provide a component force for horizontal movement.

[0058] Please refer to Figure 2 The diagram shows the decomposition of the supporting force and the thrust from gravity when the substrate is tilted during the acceleration phase. In this embodiment, by adjusting the tilt angle of the substrate during the transfer process, a portion of the gravity of the liquid film and the supporting force of the substrate on the liquid film are converted into a horizontal thrust. Figure 2 The substrate moves to the right. When accelerating, the substrate tilts in the direction of its movement, causing the liquid film to accelerate forward, thereby increasing the acceleration of substrate transport.

[0059] During the deceleration phase, please refer to Figure 3 The diagram illustrates the decomposition of the supporting force and the resistance from gravity when the substrate is tilted during the deceleration phase. The substrate tilts in the opposite direction of its movement, and a portion of the gravity of the liquid film and the supporting force of the substrate on the liquid film is converted into horizontal resistance. Figure 3 The substrate moves to the right, which slows down the liquid film and thus increases the deceleration of substrate transport.

[0060] In this embodiment, a proportional relationship is established between the tilt angle of the substrate and the speed change of the substrate (which is acceleration or deceleration). When the speed change is large, the tilt angle is large, and when the speed change is small, the tilt angle is small. By utilizing this relationship, the acceleration and deceleration time of the substrate is reduced by changing the substrate angle during the acceleration and deceleration phases, thereby improving the transmission efficiency.

[0061] Figure 4 This is a flowchart illustrating a substrate transfer method according to an exemplary embodiment. This method can be applied to the controller of a substrate transfer system; such as... Figure 4 As shown, the method may include the following steps:

[0062] Step S401: Obtain the current motion state of the substrate and the speed change of the substrate in the current motion state; the surface of the substrate is covered with a liquid film.

[0063] In one possible implementation, since the substrate with a liquid film on its surface needs to be accelerated and decelerated gently, otherwise the liquid film is prone to spillage. However, running at low acceleration / deceleration and low speed will result in long substrate transfer time and low equipment processing efficiency. Therefore, while improving the substrate transfer efficiency, it is also necessary to effectively prevent liquid film spillage, thus achieving both improved substrate transfer efficiency and prevention of liquid film spillage.

[0064] At this point, in addition to the adhesion between the liquid film and the substrate and the tension of the liquid film, there are also the gravity of the liquid film and the supporting force of the substrate on the liquid film. Therefore, the gravity of the liquid film and the supporting force of the substrate on the liquid film can be utilized. However, when the substrate and the liquid film are horizontal, these two forces are perpendicular to the direction of horizontal movement and cannot provide a component force for horizontal movement. Therefore, it is necessary to tilt the substrate in a targeted manner. Based on the supporting force and gravity of the substrate when tilted, the thrust or resistance can be decomposed to assist the adhesion between the liquid film and the substrate and the tension of the liquid film, thus preventing the liquid film from spilling.

[0065] Step S402: Based on the proportional relationship between the tilt angle of the substrate and the speed change of the substrate, obtain the tilt angle corresponding to the speed change of the substrate in the current motion state, and control the substrate to be conveyed at the tilt angle; the proportional relationship is that when the speed change is greater, the tilt angle is greater; when the speed change is smaller, the tilt angle is smaller.

[0066] In one possible implementation, the tilting direction and tilting angle of the substrate will differ depending on its different motion states. For example, when the current motion state of the substrate is in the acceleration phase, its tilting direction is consistent with the motion direction of the substrate; when the current motion state of the substrate is in the deceleration phase, its tilting direction is opposite to the motion direction of the substrate. Different speed changes will also result in different tilting angles. When the speed change is greater, the tilting angle is greater; when the speed change is smaller, the tilting angle is smaller. Therefore, when obtaining the speed change of the substrate in its current motion state, the tilting angle of the substrate can be determined based on the proportional relationship between the tilting angle of the substrate and the speed change of the substrate. The substrate can be transported at this tilting angle without reducing the speed change of the substrate, which can improve the transfer efficiency of the substrate and effectively prevent liquid film spillage.

[0067] In summary, the embodiments of this application establish a proportional relationship between the tilt angle of the substrate and the speed change of the substrate under various motion states. When the speed change is large, the tilt angle is large, and when the speed change is small, the tilt angle is small. Utilizing this relationship, the acceleration and deceleration time of the substrate is reduced by changing the angle of the substrate during the acceleration and deceleration phases, thereby improving the transmission efficiency. Specifically, during the acceleration phase, by adjusting the angle change of the substrate during transmission, a portion of the gravity of the liquid film and the supporting force of the substrate on the liquid film is converted into a horizontal thrust (i.e., the aforementioned component force), causing the liquid film to accelerate forward, thereby increasing the acceleration of substrate transmission. During the deceleration phase, the substrate tilts in the opposite direction to its direction of motion, and a portion of the gravity of the liquid film and the supporting force of the substrate on the liquid film is converted into a horizontal resistance (i.e., the aforementioned component force), causing the liquid film to decelerate, thereby increasing the deceleration of substrate transmission.

[0068] Figure 5 This is a flowchart illustrating a substrate transfer method according to an exemplary embodiment. This method can be applied to the controller of a substrate transfer system; such as... Figure 5 As shown, the method may include the following steps:

[0069] Step S501: Obtain the current motion state of the substrate and the speed change of the substrate in the current motion state; the surface of the substrate is covered with a liquid film.

[0070] In one possible implementation, the motion state of the substrate includes an acceleration phase and a deceleration phase; step S501 includes:

[0071] When the current motion state of the substrate is in the acceleration phase, obtain the acceleration of the substrate in the current acceleration phase;

[0072] When the current motion state of the substrate is in the deceleration stage, the deceleration of the substrate in the current deceleration stage is obtained.

[0073] Step S502: When the current motion state of the substrate is in the acceleration phase or deceleration phase, obtain the first relationship between the supporting force of the substrate on the liquid film, the tilt angle of the substrate, and the gravity of the liquid film.

[0074] Step S503: Obtain the component force in the forward direction of the substrate, and the second relationship between the speed change of the substrate and the component force.

[0075] Step S504: Based on the first relationship, the component force, and the second relationship, obtain the proportional relationship between the tilt angle of the substrate and the speed change of the substrate; the proportional relationship is that when the speed change is greater, the tilt angle is greater; when the speed change is smaller, the tilt angle is smaller.

[0076] Step S505: Based on the proportional relationship, obtain the tilt angle corresponding to the speed change of the substrate in the current motion state, and control the substrate to be conveyed at the tilt angle; the tilt angle corresponding to the speed change of the substrate in the acceleration phase is opposite to the tilt angle corresponding to the speed change in the deceleration phase, and the two angles are equal in magnitude.

[0077] In one possible implementation, the step of controlling the substrate to be transported at the tilt angle includes:

[0078] When the current motion state of the substrate is the start of the acceleration phase, the initial acceleration of the substrate is obtained, and the substrate is simultaneously controlled to be transported at the tilt angle corresponding to the initial acceleration.

[0079] Gradually increase the acceleration of the substrate, and simultaneously control the substrate to be transported at a tilt angle corresponding to the increased acceleration;

[0080] When the difference between the speed of the substrate and the target transmission speed is less than the differential threshold (the differential threshold can be set according to the application requirements, and when setting it, it is necessary to ensure that the speed of the substrate is close to the target transmission speed), the acceleration of the substrate is gradually reduced, and at the same time the substrate is controlled to transmit at the tilt angle corresponding to the reduced acceleration, until the speed of the substrate reaches the target transmission speed, the tilt angle of the substrate is controlled to return to horizontal.

[0081] When the current motion state of the substrate is the beginning of the deceleration phase, the initial deceleration of the substrate is obtained, and the substrate is simultaneously controlled to be transported at the tilt angle corresponding to the initial deceleration.

[0082] Gradually increase the deceleration of the substrate, and simultaneously control the substrate to be transported at a tilt angle corresponding to the increased deceleration.

[0083] When the difference between the speed of the substrate and zero speed is less than the differential speed threshold (the differential speed threshold can be set according to the application requirements, and when setting it, it is necessary to ensure that the speed of the substrate is close to stopping), the deceleration of the substrate is gradually reduced, and at the same time the substrate is controlled to be conveyed at the tilt angle corresponding to the reduced deceleration, until the speed of the substrate is zero and the conveying stops.

[0084] Furthermore, the substrate is in a horizontal state before being transferred, and the transfer process includes an acceleration phase, a deceleration phase, and a constant speed phase.

[0085] At the start of the acceleration phase, a small acceleration is applied to the substrate (i.e., the initial acceleration mentioned above), and the substrate angle is tilted by a small angle proportionally in the direction of motion. At this time, both the liquid film and the substrate are tilted in the direction of motion. Subsequently, the acceleration is increased, and the tilt angle of the substrate is also increased. When the substrate transfer speed (i.e., the target transfer speed mentioned above) is approached, the acceleration is gradually reduced, and the substrate angle decreases. When the substrate transfer speed is reached, the substrate returns to a horizontal position (at this time, a small angle can also be retained to meet high-speed transmission requirements), and the acceleration phase ends. A schematic diagram of the substrate tilt angle change during the acceleration phase is shown below. Figure 6 As shown, its direction of motion is to the right; from left to right, the sequence is before acceleration, acceleration begins, greater acceleration, lesser acceleration, and constant speed, with the arrow pointing in the direction of the substrate's movement.

[0086] Let the acceleration be *a*, the weight of the liquid film be *m*, the gravity of the liquid film be *G* = *mg*, and the supporting force of the substrate on the liquid film be *f*. Then, we can obtain the schematic diagram showing the relationship between the supporting force and the gravity of the liquid film during the acceleration phase when the tilt angle is θ and the liquid film remains in equilibrium, as shown below. Figure 7 As shown, the relationship between the supporting force f, the tilt angle θ, and the gravity G (i.e., the first relationship mentioned above) is as follows:

[0087] f×cos(θ)=G;

[0088] Its component force fa in the direction of forward motion is:

[0089] f a =G×tan(θ);

[0090] To keep the liquid film in equilibrium, the relationship between accelerations a and fa (i.e., the second relationship mentioned above) needs to be maintained as follows:

[0091]

[0092] From the above three formulas, the relationship between the tilt angle θ and the acceleration a (i.e., the proportional relationship mentioned above) can be obtained as follows:

[0093]

[0094] At the start of the deceleration phase, a small deceleration is applied to the substrate (i.e., the initial deceleration mentioned above), while the substrate angle is proportionally tilted in the opposite direction of motion. At this time, the liquid film tilts in the opposite direction of motion. Subsequently, the deceleration is increased, and the substrate tilt angle is increased simultaneously. When the substrate velocity approaches zero, the deceleration is gradually decreased, and the substrate angle decreases. When the substrate velocity becomes zero, the substrate returns to a horizontal state. A schematic diagram of the substrate tilt angle change during the deceleration phase is shown below. Figure 8 As shown, its direction of motion is to the right; from left to right, the sequence is constant speed, deceleration start, greater deceleration, lesser deceleration, and stop, with the arrow pointing in the direction of the substrate's movement.

[0095] Acceleration and deceleration are symmetrical motions, only the tilt angles are opposite. Therefore, the tilt angle during deceleration is opposite to the deceleration rate. The tilt angle during deceleration is obtained using the following formula:

[0096]

[0097] In one possible implementation, the speed state of the substrate movement also includes a constant speed phase;

[0098] Step S506: When the current motion state of the substrate is in the uniform speed stage and the motion speed is lower than the speed threshold, control the substrate to be transported in a horizontal transport mode.

[0099] Step S507: When the current motion state of the substrate is in the uniform speed stage and the motion speed is higher than the speed threshold, control the substrate to be transported in a variable angle manner.

[0100] Furthermore, this speed threshold can be designed according to the actual application requirements.

[0101] In one possible implementation, step S507 includes:

[0102] Obtain the target drag coefficient, and construct a curve showing the relationship between the tilt angle of the substrate and the speed of movement of the substrate based on the target drag coefficient;

[0103] Based on the relationship curve, the tilt angle corresponding to the motion speed of the substrate in the current uniform speed stage is obtained, and the substrate is controlled to be transported at the tilt angle.

[0104] Furthermore, during the uniform speed phase, if the speed is not high, the substrate can be in a horizontal state (i.e., transported in a horizontal manner as described above). However, when the substrate is transported at high speed, the surrounding air creates resistance to the liquid film, causing the liquid film to converge in the opposite direction of movement, easily resulting in the liquid film spilling off in the opposite direction. To counteract the influence of wind speed during the transport process, embodiments of this application establish a system as follows... Figure 9 The diagram illustrates the relationship between the substrate's tilt angle and its movement speed. The substrate tilts at different angles at different speeds, causing the liquid film to tilt in the direction of movement (i.e., the tilt direction is consistent with the movement direction of both the liquid film and the substrate). At this point, the thrust generated by the substrate's tilt angle counteracts the wind force, enabling the substrate to be transported at a higher speed. During the uniform speed phase, a force diagram showing the liquid film after reversing a certain angle is shown below. Figure 10 As shown.

[0105] During the constant velocity phase, in this embodiment of the application, the drag coefficient is defined as k, and the velocity is v. The relationship between the angle and the velocity is then:

[0106] θ = k × v;

[0107] Where k can be a fixed coefficient or a value that varies with speed, etc. Based on the above formula, the relationship curve between the tilt angle of the substrate and the speed of the substrate can be obtained.

[0108] Figure 11 A schematic diagram showing the velocity, acceleration, and angle curves of the substrate during horizontal transport is provided. Figure 12 A schematic diagram showing the velocity, acceleration, and angle curves of the substrate during variable-angle transmission is presented. Figure 11 and Figure 12 The comparison of the two sets of curves shows that in the horizontal conveying method, the substrate angle remains constant at zero, and the acceleration and speed it withstands are relatively small; while in the variable angle conveying method, the substrate angle is adjusted with acceleration, deceleration and speed, which effectively increases the maximum acceleration, deceleration and speed that the liquid film can withstand. Therefore, this application can complete the conveying process with higher acceleration, deceleration and speed, effectively reducing the conveying time and improving the conveying efficiency. Figure 11 and Figure 12 In the figure, vt is the velocity-time curve, at is the acceleration-deceleration-time curve, and θt is the angle-time curve.

[0109] In summary, this application establishes a proportional relationship between the tilt angle of the substrate and its speed change in various motion states. When the speed change is large, the tilt angle is large; when the speed change is small, the tilt angle is small. Utilizing this relationship, the acceleration and deceleration time of the substrate is reduced by changing the substrate's angle during the acceleration and deceleration phases, thereby improving the transfer efficiency. Specifically, during the acceleration phase, by adjusting the angle change of the substrate during transfer, a portion of the gravity of the liquid film and the supporting force of the substrate on the liquid film is converted into a horizontal thrust (i.e., the aforementioned component force), causing the liquid film to accelerate forward, thereby... The acceleration of substrate transport is increased. During the deceleration phase, the substrate tilts in the opposite direction of its movement. The gravity of the liquid film and part of the supporting force of the substrate on the liquid film are converted into horizontal resistance (i.e., the aforementioned component force), which decelerates the liquid film and thus increases the deceleration of substrate transport. During the uniform speed phase, the embodiments of this application determine whether to tilt the substrate according to the movement speed. When the movement speed is higher than the speed threshold, the substrate tilts at different angles at different transport speeds, and the liquid film tilts in the direction of movement. The thrust generated by the tilt angle of the substrate is used to counteract the influence of the wind force, thereby achieving the purpose of transporting the substrate at a higher speed.

[0110] Figure 13 This is a structural block diagram of a substrate transfer apparatus according to an exemplary embodiment. The apparatus includes:

[0111] Speed ​​acquisition module 1301 is used to acquire the current motion state of the substrate and the speed change of the substrate in the current motion state; the surface of the substrate is coated with a liquid film.

[0112] The tilt angle acquisition module 1302 is used to acquire the tilt angle corresponding to the speed change of the substrate in the current motion state according to the proportional relationship between the tilt angle of the substrate and the speed change of the substrate, and control the substrate to be conveyed at the tilt angle; the proportional relationship is that when the speed change is larger, the tilt angle is larger; when the speed change is smaller, the tilt angle is smaller.

[0113] In one possible implementation, the motion state of the substrate includes an acceleration phase and a deceleration phase;

[0114] The speed acquisition module 1301 is also used for:

[0115] When the current motion state of the substrate is in the acceleration phase, obtain the acceleration of the substrate in the current acceleration phase;

[0116] When the current motion state of the substrate is in the deceleration stage, the deceleration of the substrate in the current deceleration stage is obtained.

[0117] In one possible implementation, the tilt angle acquisition module 1302 is further configured to:

[0118] When the current motion state of the substrate is in the acceleration phase or the deceleration phase, obtain the first relationship between the supporting force of the substrate on the liquid film, the tilt angle of the substrate, and the gravity of the liquid film.

[0119] Obtain the component force in the forward direction of the substrate, and the second relationship between the speed change of the substrate and the component force;

[0120] Based on the first relationship, the component force, and the second relationship, the proportional relationship between the tilt angle of the substrate and the speed change of the substrate is obtained;

[0121] Based on this proportional relationship, the tilt angle corresponding to the speed change of the substrate in the current motion state is obtained; the tilt angle corresponding to the speed change of the substrate in the acceleration phase is opposite to the tilt angle corresponding to the speed change in the deceleration phase, and the two angles are equal in magnitude.

[0122] In one possible implementation, the tilt angle acquisition module 1302 is further configured to:

[0123] When the current motion state of the substrate is the start of the acceleration phase, the initial acceleration of the substrate is obtained, and the substrate is simultaneously controlled to be transported at the tilt angle corresponding to the initial acceleration.

[0124] Gradually increase the acceleration of the substrate, and simultaneously control the substrate to be transported at a tilt angle corresponding to the increased acceleration;

[0125] When the difference between the speed of the substrate and the target transmission speed is less than the differential threshold, the acceleration of the substrate is gradually reduced, and the substrate is simultaneously controlled to transmit at the tilt angle corresponding to the reduced acceleration, until the speed of the substrate reaches the target transmission speed, at which point the tilt angle of the substrate is controlled to return to horizontal.

[0126] In one possible implementation, the tilt angle acquisition module 1302 is further configured to:

[0127] When the current motion state of the substrate is the beginning of the deceleration phase, the initial deceleration of the substrate is obtained, and the substrate is simultaneously controlled to be transported at the tilt angle corresponding to the initial deceleration.

[0128] Gradually increase the deceleration of the substrate, and simultaneously control the substrate to be transported at a tilt angle corresponding to the increased deceleration.

[0129] When the difference between the speed of the substrate and zero speed is less than the differential speed threshold, the deceleration of the substrate is gradually reduced, and the substrate is simultaneously controlled to be transported at the tilt angle corresponding to the reduced deceleration, until the speed of the substrate is zero and the transport stops.

[0130] In one possible implementation, the motion speed state of the substrate further includes a uniform speed phase; the device is also used for:

[0131] When the current motion state of the substrate is in the uniform speed stage and the motion speed is lower than the speed threshold, the substrate is controlled to be transported in a horizontal transport mode.

[0132] When the current motion state of the substrate is in the uniform speed stage and the speed is higher than the speed threshold, the substrate is controlled to be transported in a variable angle manner.

[0133] In one possible implementation, a target drag coefficient is obtained, and a curve showing the relationship between the tilt angle of the substrate and the speed of movement of the substrate is constructed based on the target drag coefficient.

[0134] Based on the relationship curve, the tilt angle corresponding to the motion speed of the substrate in the current uniform speed stage is obtained, and the substrate is controlled to be transported at the tilt angle.

[0135] In summary, this application establishes a proportional relationship between the tilt angle of the substrate and its speed change in various motion states. When the speed change is large, the tilt angle is large; when the speed change is small, the tilt angle is small. Utilizing this relationship, the acceleration and deceleration time of the substrate is reduced by changing the substrate's angle during the acceleration and deceleration phases, thereby improving the transfer efficiency. Specifically, during the acceleration phase, by adjusting the angle change of the substrate during transfer, a portion of the gravity of the liquid film and the supporting force of the substrate on the liquid film is converted into a horizontal thrust (i.e., the aforementioned component force), causing the liquid film to accelerate forward, thereby... The acceleration of substrate transport is increased. During the deceleration phase, the substrate tilts in the opposite direction of its movement. The gravity of the liquid film and part of the supporting force of the substrate on the liquid film are converted into horizontal resistance (i.e., the aforementioned component force), which decelerates the liquid film and thus increases the deceleration of substrate transport. During the uniform speed phase, the embodiments of this application determine whether to tilt the substrate according to the movement speed. When the movement speed is higher than the speed threshold, the substrate tilts at different angles at different transport speeds, and the liquid film tilts in the direction of movement. The thrust generated by the tilt angle of the substrate is used to counteract the influence of the wind force, thereby achieving the purpose of transporting the substrate at a higher speed.

[0136] Please see Figure 14 This is a schematic diagram of a computer device provided according to an exemplary embodiment of the present application. The computer device includes a memory and a processor. The memory is used to store a computer program. When the computer program is executed by the processor, it implements the above-described substrate transfer method.

[0137] The processor can be a central processing unit (CPU). It can also be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or combinations thereof.

[0138] Memory, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, such as the program instructions / modules corresponding to the methods in the embodiments of this application. The processor executes various functional applications and data processing by running the non-transitory software programs, instructions, and modules stored in the memory, thereby implementing the methods in the above-described embodiments.

[0139] The memory may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created by the processor, etc. Furthermore, the memory may include high-speed random access memory and non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some embodiments, the memory may optionally include memory remotely located relative to the processor, which can be connected to the processor via a network. Examples of such networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0140] In one exemplary embodiment, a computer-readable storage medium is also provided for storing at least one computer program, which is loaded and executed by a processor to implement all or part of the steps in the above-described method. For example, the computer-readable storage medium may be a read-only memory (ROM), a random access memory (RAM), a compact disc read-only memory (CD-ROM), magnetic tape, floppy disk, or optical data storage device, etc.

[0141] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the following claims.

[0142] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A substrate transfer method, characterized in that, The method includes: The current motion state of the substrate and the speed change of the substrate in the current motion state are obtained; the surface of the substrate is coated with a liquid film; The motion state of the substrate includes an acceleration phase and a deceleration phase; The acquisition of the current motion state of the substrate and the speed change of the substrate in the current motion state includes: When the current motion state of the substrate is in the acceleration phase, the acceleration of the substrate in the current acceleration phase is obtained; When the current motion state of the substrate is in the deceleration stage, the deceleration of the substrate in the current deceleration stage is obtained; Based on the proportional relationship between the tilt angle of the substrate and the speed change of the substrate, the tilt angle corresponding to the speed change of the substrate in the current motion state is obtained, and the substrate is controlled to be conveyed at the tilt angle; the proportional relationship is that when the speed change is greater, the tilt angle is greater; when the speed change is smaller, the tilt angle is smaller. The step of obtaining the tilt angle corresponding to the speed change of the substrate in the current motion state based on the proportional relationship between the tilt angle of the substrate and the speed change of the substrate includes: When the current motion state of the substrate is in the acceleration phase or the deceleration phase, a first relationship is obtained between the supporting force of the substrate on the liquid film, the tilt angle of the substrate, and the gravity of the liquid film. Obtain the component force in the forward direction of the substrate, and a second relationship between the speed change of the substrate and the component force; Based on the first relationship, the component force, and the second relationship, the proportional relationship between the tilt angle of the substrate and the speed change of the substrate is obtained; Based on the aforementioned proportional relationship, the tilt angle corresponding to the speed change of the substrate in the current motion state is obtained; the tilt angle corresponding to the speed change of the substrate in the acceleration phase is opposite to the tilt angle corresponding to the speed change in the deceleration phase, and the two angles are equal in magnitude.

2. The method according to claim 1, characterized in that, The control of the substrate to be transported at the tilt angle includes: When the current motion state of the substrate is the start of the acceleration phase, the initial acceleration of the substrate is obtained, and the substrate is simultaneously controlled to be transported at the tilt angle corresponding to the initial acceleration. Gradually increase the acceleration of the substrate, and simultaneously control the substrate to be transported at a tilt angle corresponding to the increased acceleration; When the difference between the speed of the substrate and the target transmission speed is less than the differential threshold, the acceleration of the substrate is gradually reduced, and the substrate is simultaneously controlled to transmit at the tilt angle corresponding to the reduced acceleration, until the speed of the substrate reaches the target transmission speed, at which point the tilt angle of the substrate is controlled to return to horizontal.

3. The method according to claim 1, characterized in that, The control of the substrate to be transported at the tilt angle includes: When the current motion state of the substrate is the beginning of the deceleration phase, the initial deceleration of the substrate is obtained, and the substrate is simultaneously controlled to be conveyed at the tilt angle corresponding to the initial deceleration. Gradually increase the deceleration of the substrate, and simultaneously control the substrate to be transported at a tilt angle corresponding to the increased deceleration. When the difference between the speed of the substrate and zero speed is less than the differential speed threshold, the deceleration of the substrate is gradually reduced, and the substrate is simultaneously controlled to be conveyed at the tilt angle corresponding to the reduced deceleration, until the speed of the substrate is zero and the conveying stops.

4. The method according to any one of claims 1 to 3, characterized in that, The motion speed state of the substrate further includes a uniform speed phase; the method further includes: When the current motion state of the substrate is in a constant speed stage and the motion speed is lower than the speed threshold, the substrate is controlled to be transported in a horizontal transport mode. When the current motion state of the substrate is in a constant speed stage and the motion speed is higher than the speed threshold, the substrate is controlled to be transported in a variable angle manner.

5. The method according to claim 4, characterized in that, The control of the substrate to be transported in a variable angle manner includes: Obtain the target drag coefficient, and construct a curve relating the tilt angle of the substrate to the speed of movement of the substrate based on the target drag coefficient; Based on the relationship curve, the tilt angle corresponding to the motion speed of the substrate in the current uniform speed stage is obtained, and the substrate is controlled to be transported at the tilt angle.

6. A substrate conveying device, characterized in that, The device includes: A speed acquisition module is used to acquire the current motion state of the substrate and the speed change of the substrate in the current motion state; the surface of the substrate is coated with a liquid film; The motion state of the substrate includes an acceleration phase and a deceleration phase; The speed acquisition module is also used for: When the current motion state of the substrate is in the acceleration phase, the acceleration of the substrate in the current acceleration phase is obtained; When the current motion state of the substrate is in the deceleration stage, the deceleration of the substrate in the current deceleration stage is obtained; The tilt angle acquisition module is used to acquire the tilt angle corresponding to the speed change of the substrate in the current motion state based on the proportional relationship between the tilt angle of the substrate and the speed change of the substrate, and control the substrate to be conveyed at the tilt angle; the proportional relationship is that when the speed change is larger, the tilt angle is larger; when the speed change is smaller, the tilt angle is smaller. The tilt angle acquisition module is also used for: When the current motion state of the substrate is in the acceleration phase or the deceleration phase, a first relationship is obtained between the supporting force of the substrate on the liquid film, the tilt angle of the substrate, and the gravity of the liquid film. Obtain the component force in the forward direction of the substrate, and a second relationship between the speed change of the substrate and the component force; Based on the first relationship, the component force, and the second relationship, the proportional relationship between the tilt angle of the substrate and the speed change of the substrate is obtained; Based on the aforementioned proportional relationship, the tilt angle corresponding to the speed change of the substrate in the current motion state is obtained; the tilt angle corresponding to the speed change of the substrate in the acceleration phase is opposite to the tilt angle corresponding to the speed change in the deceleration phase, and the two angles are equal in magnitude.

7. A computer device, characterized in that, The computer device includes a processor and a memory, the memory storing at least one instruction, which is loaded and executed by the processor to implement the substrate transfer method as described in any one of claims 1 to 6.

8. A computer-readable storage medium, characterized in that, The storage medium stores at least one instruction, which is loaded and executed by a processor to implement the substrate transfer method as described in any one of claims 1 to 6.

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