Transport robot and robot system

Abstract

A transfer robot and a robot system achieve miniaturization of an arm. The transfer robot has a plurality of hands, a plurality of hand drive motors, and one arm. The plurality of hands can hold objects to be transferred and rotate on one rotation axis, respectively. The plurality of hand drive motors are arranged in a manner that motor shafts are concentric with the rotation axis in a direction along the rotation axis, directly drive the plurality of hands, respectively, and the motor shafts are connected to the plurality of hands, respectively. The one arm houses the plurality of hand drive motors.

Description

Technical Field

[0001] The disclosed implementations relate to handling robots and robot systems. Background Technology

[0002] Previously, there were known handling robots, such as horizontal multi-joint robots, which moved objects by moving the hand that held the object being handled.

[0003] In addition, a handling robot with an integrated arm and a built-in motor has been proposed to reduce the size of the handling robot's arm (for example, see Patent Document 1).

[0004] Patent Document 1: Japanese Patent Application Publication No. 2020-11303

[0005] However, in the aforementioned prior art, the motor and the belt that transmits the motor's driving force to the hand are built into the arm that supports the hand, which, from the viewpoint of arm miniaturization, has room for improvement. Summary of the Invention

[0006] One approach to implementation aims to provide a handling robot and robot system capable of miniaturizing the arm.

[0007] One embodiment of the transport robot includes multiple hands, multiple hand drive motors, and one arm. The multiple hands are capable of holding the object being transported and rotate independently on a single axis of rotation. The multiple hand drive motors are arranged concentrically with respect to the axis of rotation, and each directly drives one of the multiple hands; the motor shafts are connected to each of the multiple hands. The multiple hand drive motors are integrated into the arm.

[0008] One embodiment of the robot system includes the aforementioned transport robot and control device. The control device controls the movements of the transport robot.

[0009] According to one embodiment, a handling robot and robot system capable of miniaturizing the arm can be provided. Attached Figure Description

[0010] Figure 1 This is a schematic diagram showing the outline of the transport robot.

[0011] Figure 2 It is a 3D diagram of a transport robot.

[0012] Figure 3 This is a side view diagram of the first arm, the second arm, and the hand.

[0013] Figure 4A This is a side view diagram showing the combination of multiple hand-driven motors.

[0014] Figure 4B This is a top-view diagram showing the combination of multiple hand-driven motors.

[0015] Figure 5A This is a side view schematic diagram showing the sub-frame with the motor built in.

[0016] Figure 5B This is a side view schematic diagram showing the assembled arm.

[0017] Figure 6 This is a three-dimensional schematic diagram showing the subframe without a built-in motor.

[0018] Figure 7 This is an exploded 3D view of the first motor unit.

[0019] Figure 8 This is an exploded 3D view of the second motor unit.

[0020] Figure 9 This is a schematic side sectional view of the assembled second arm.

[0021] Figure 10 This is a block diagram of the robot system.

[0022] Explanation of reference numerals in the attached figures

[0023] 1: Robot system; 10: Handling robot; 11: First arm; 12: Second arm; 12B: Base frame; 12S: Sub-frame; 13: Hand; 15: Main body; 16: Lifting unit; 20: Control device; 21: Control unit; 21a: Motion control unit; 22: Storage unit; 22a: Teaching data; 100: First motor unit; 101: First motor; 110: Stator; 120: Rotor; 121: Hollow shaft; 122: Bushing; 130: Encoder; 131: Disc; 132: Detection unit; 133: Support unit; 140: Bearing; 141: Bearing pressing component; 200: Second motor unit; 201: Second motor; 210: Stator; 220: Rotor; 221: Hollow shaft; 230: Encoder; 231: Disc; 232: Detection unit; 233: Support unit; 240: Bearing; 241: Outer circumferential pressing component; 242: Inner circumferential pressing component; A0: Lifting shaft;

[0024] A1: Axis 1; A2: Axis 2; AH: Motor shaft; M: Manual drive motor; ME: Encoder; MS: Hollow shaft. Detailed Implementation

[0025] The handling robot and robot system disclosed in this application will now be described in detail with reference to the accompanying drawings. However, this invention is not limited to the embodiments shown below.

[0026] Furthermore, in the embodiments shown below, expressions such as "parallel," "vertical," "symmetrical," "circle," "semicircle," and "identical" are sometimes used, but these states do not need to be strictly satisfied. That is, the above expressions are set to allow deviations in manufacturing accuracy, setting accuracy, processing accuracy, inspection accuracy, etc.

[0027] First, use Figure 1 The outline of the transport robot 10 of the embodiment will be described. Figure 1 This is a schematic diagram showing the outline of the handling robot 10. Additionally, Figure 1 A perspective view of the handling robot 10, viewed from an oblique top, is shown, along with a perspective side view of the second arm 12 (see reference). Figure 1 S1).

[0028] In addition, Figure 1 For ease of explanation, a 3D orthogonal coordinate system is shown, with the Z-axis pointing vertically upwards, the X-axis pointing along the extension direction of the arm supporting the hand towards the front end of the hand, and the Y-axis orthogonal to both the X-axis and Z-axis. This orthogonal coordinate system is also shown in other figures used in the following explanation. Furthermore, "orthogonal" means mutually "perpendicular" and "intersecting".

[0029] like Figure 1 As shown, the handling robot 10 includes: a main body 15, which is disposed on the ground or the like; and a lifting unit 16, which moves up and down relative to the main body 15. The lifting unit 16 causes a first arm 11 and a second arm 12, which are horizontal linkage arms, to move up and down. Furthermore, a plurality of hands 13 are provided on the front end side of the second arm 12. Specifically, the second arm 12, which is an arm that supports the plurality of hands 13, supports two hands 13 on the upper surface of its front end side.

[0030] Multiple hands 13 are capable of holding the transported object, such as a semiconductor substrate, and rotating coaxially around the motor shaft AH. That is, multiple hands 13 rotate on one rotation axis. Here, in distinguishing multiple hands 13, starting from the hand 13 closest to the second arm 12, uppercase letters are added to the end of the label in the order of A and B.

[0031] In addition, Figure 1 The image shows two hands 13, but it is also possible to have three or more hands 13. Furthermore, in... Figure 1 In the example, two arms (arm 11 and arm 22) are shown as horizontal linkage arms, but one horizontal linkage arm can also be used, or more than three arms can be used.

[0032] like Figure 1As shown in S1, the second arm 12 is configured with two hand drive motors M that directly drive the two hands 13, arranged concentrically with the motor shaft AH in the direction along the motor shaft AH. That is, the two hand drive motors M are arranged concentrically with the motor shaft AH, which is connected to the hand 13, in the direction along the rotation axis of the hand 13. Furthermore, each hand drive motor M directly drives the connected hand 13. In cases where multiple hand drive motors M are distinguished, numbers are added to the end of the designation, such as M1 and M2.

[0033] Thus, the hand-drive motors M are so-called direct-drive motors, directly driving each hand 13. Furthermore, by housing multiple hand-drive motors M within the arm in a configuration where they are concentrically arranged along the motor shaft AH, the storage space required for the motors can be reduced. Additionally, by making the hand-drive motors M direct-drive motors, the drive belt can be eliminated. This allows for the miniaturization of the arm.

[0034] In addition, such as Figure 1 As shown in S1, each hand drive motor M has an encoder ME and a hollow shaft MS. Here, each hand drive motor M is a so-called hollow motor with a hollow portion extending along the motor shaft AH. The encoder ME is provided on one side (one-side end face) in the direction along the motor shaft AH.

[0035] Furthermore, the hollow shaft MS is connected to the rotor of the hand-driven motor M, extends along the motor shaft AH, and rotates around the motor shaft AH. Additionally, the hollow portion of the hand-driven motor M communicates with the hollow portion of the hollow shaft MS, and the encoder ME is positioned to avoid the hollow portion.

[0036] exist Figure 1 In the example shown, the hollow shaft MS2 of the hand drive motor M2 passes through the hand drive motor M1 and the hollow shaft MS1. Furthermore, the second arm 12 protrudes towards its upper surface with the hollow shafts MS1 and MS2, and houses the hand drive motors M1 and M2. Additionally, hand 13A is connected to the hollow shaft MS1, and hand 13B is connected to the hollow shaft MS2. The hollow shaft MS2, being the inner hollow shaft MS, rotates hand 13B, which is the upper hand of the hollow arm 13, while the hollow shaft MS1, being the outer hollow shaft MS, rotates hand 13A, which is the lower hand of the hollow arm 13. That is, the hollow shaft MS1 rotates hand 13A, and the hollow shaft MS2, which is inner than the hollow shaft MS1, rotates hand 13B, which is upper than hand 13A. That is, it can also be said that the hand drive motor M2, which is the lower hand drive motor M, causes the hand 13B, which is the upper hand 13, to rotate, and the hand drive motor M1, which is the upper hand motor M, causes the hand 13A, which is the lower hand 13, to rotate.

[0037] That is, the hand drive motor M1 directly drives the hand 13A without passing through a mechanism that transmits driving force, and the hand drive motor M2 directly drives the hand 13B without passing through a mechanism that transmits driving force. In addition, when there are three or more hands 13, the same number of hand drive motors M as the hands 13 are built into the second arm 12 with the motor shaft AH as the center.

[0038] Here, the hand-driven motor M can be either a radial clearance motor or an axial clearance motor. A radial clearance motor is one in which the rotor is opposite the stator in the radial direction of the motor shaft AH. An axial clearance motor is one in which the rotor is opposite the stator in the direction along the motor shaft AH. Furthermore, compared to a radial clearance motor, an axial clearance motor allows for a thinner motor, i.e., it enables a slimmer motor design; therefore, it is preferred for achieving a slimmer design of the second arm 12.

[0039] Furthermore, when the hand drive motor M is a radial clearance type internal motor, the motor stator is typically heat-mounted to the arm. On the other hand, if the hand drive motor M is an axial clearance type internal motor, the motor stator can be fixed to the arm using bolts or the like along the motor shaft AH. Therefore, from the viewpoint of reducing assembly time, it is also preferable to make the hand drive motor M an axial clearance motor.

[0040] In addition, the hand-driven motor M can be a motor with a housing covering the rotor and stator, or it can be a so-called built-in motor that is directly mounted on the frame of the second arm 12 without a housing.

[0041] In addition, such as Figure 1 As shown in S1, the second arm 12 houses multiple hand-driven motors M with encoders ME facing each other. That is, each hand-driven motor M has an encoder ME on one side along the motor shaft AH, and these encoders ME are housed within one arm with their faces facing each other. By arranging the multiple hand-driven motors M with their encoders ME facing each other on their end faces, the wiring of the encoders ME can be concentrated nearby. Furthermore, the space required for wiring can be reduced. Therefore, arm miniaturization is possible.

[0042] Furthermore, the second arm 12 houses multiple hand-drive motors M in an orientation in which the hollow shaft MS of any one hand-drive motor M is inserted into the hollow shaft MS of another hand-drive motor M. That is, the multiple hand-drive motors M, each containing a hollow shaft MS connected to the rotor and extending along the motor shaft AH, are housed within one arm in an orientation in which the hollow shaft MS of any one hand-drive motor M is inserted into the hollow shaft MS of another.

[0043] By nesting the hollow shafts MS of multiple hand-driven motors M, the storage space required for the hand-driven motors M can be reduced. This allows for the miniaturization of the arm.

[0044] Additionally, using Figures 7-9 The case where the hand-driven motor M is set as an axial clearance motor will be described later.

[0045] Next, use Figure 2 The structure of the handling robot 10 will be further explained. Figure 2 This is a perspective view of the handling robot 10. As shown in the figure, the handling robot 10 has a main body 15, a lifting part 16, a first arm 11, a second arm 12, and multiple hands 13.

[0046] In addition, Figure 2 The figure illustrates a handling robot 10 with two hands 13A and 13B, but the number of hands 13 can be arbitrary. Furthermore, the lifting axis A0, the first axis A1, the second axis A2, and the motor axis AH shown in the figure are preferably parallel.

[0047] The main body 15 has a built-in mechanism for raising and lowering the lifting unit 16. The lifting unit 16 moves up and down along the lifting axis A0 shown in the figure, and supports the base end of the first arm 11 in a manner that allows it to rotate about the first axis A1. Alternatively, the lifting unit 16 itself can also rotate about the first axis A1.

[0048] The first arm 11 supports the base end of the second arm 12 at its front end, allowing it to rotate about the second axis A2. The second arm 12 supports the base ends of hands 13A and 13B at its front end, respectively, allowing it to rotate about the motor axis AH. Hands 13A and 13B have a base 13a and a fork 13b.

[0049] Thus, the handling robot 10 is a three-link horizontal articulated robot consisting of a first arm 11, a second arm 12, and a hand 13. Furthermore, as described above, the handling robot 10 has a lifting mechanism, enabling it to approach and handle objects such as substrates positioned at different heights. Alternatively, the first arm 11 can be omitted, and it can be configured as a two-link horizontal articulated robot consisting of a second arm 12 and a hand 13.

[0050] Next, use Figure 3 The appearance of the first arm 11, the second arm 12, and the hand 13 is described. Figure 3 This is a side view diagram of the first arm 11, the second arm 12, and the hand 13. Additionally, in Figure 3 The image shows the first arm 11, the second arm 12, and the hand 13 in a folded posture.

[0051] Furthermore, in this figure, for reference only, Figure 2The first axis A1, the second axis A2, and the motor axis AH are shown. In addition, the "folding posture" is the posture in which the front end of the second arm 12 faces the base end of the first arm 11, and the front end of the hand 13 faces the base end of the second arm 12.

[0052] like Figure 3 As shown, the bottom surface of the first arm 11 is generally flat. On the other hand, the upper surface is stepped, with the upper surface of the end on the second shaft A2 side being higher than the upper surface of the end on the first shaft A1 side. Thus, the upper surface of the end on the second shaft A2 side protrudes towards the second arm 12 so that the motor driving the second arm 12 can be built into the first arm 11.

[0053] In addition, such as Figure 3 As shown, the upper surface of the second arm 12 is generally flat. On the other hand, the bottom surface is stepped, with the lower surface of the end on the second axis A2 side being higher than the bottom surface of the other end. This shape, where the bottom surface of the end on the second axis A2 side is recessed compared to the bottom surface of the other end, is to avoid the protruding shape described in the first arm 11.

[0054] Thus, regarding the second arm 12, when viewed from the side, the thickness of the other end side is greater than the thickness of the end side corresponding to the second axis A2, and it has a shape that protrudes towards the first arm 11. Therefore, it is possible to increase the volume of the thicker part, making it easier to ensure the proper functioning of the hand drive motor M (refer to) of the drive hand 13. Figure 1 The space is arranged along the motor shaft AH.

[0055] Furthermore, a hand 13 is provided on the upper surface of the end opposite to the end on the second shaft A2 side of the second arm 12. In addition, when viewed from the second arm 12, two hands 13 are provided along the motor shaft AH in the order of hand 13A and hand 13B.

[0056] Additionally, the second arm 12 can be disassembled and can be constructed by mounting multiple separate sub-frames onto the base frame. Regarding this, [the following is a description of a specific component / structure]. Figure 5A and Figure 5B This will be discussed later.

[0057] Next, use Figure 4A and Figure 4B The case where the encoder ME of each hand-driven motor M is set to a shape that converges within a semi-circular plate shape will be explained. Figure 4A This is a side view diagram showing the combination of multiple hand-driven motors M. Figure 4B This is also a top-down view diagram.

[0058] Here, in Figure 4A and Figure 4B In, with Figure 1The difference in the encoder ME shown is that each encoder ME is set to a shape that converges within a semi-circular plate shape and is configured to have the same height in the direction along the motor shaft AH.

[0059] Furthermore, the encoder ME includes: a disc-shaped portion fixed to the end face of the rotor of the hand-driven motor M; and a detection portion, which has a shape convergent within a semi-circular shape obtained by equally dividing the disc portion. Additionally, for the sake of simplicity, in Figure 4A and Figure 4B In the diagram, the disc section is omitted; only the detection section is shown. The shape of the disc section is the same as the shape of the end face of each hand-driven motor M.

[0060] like Figure 4A As shown, the encoder ME1 of the hand-driven motor M1 and the encoder ME2 of the hand-driven motor M2 are configured to overlap at least partially in the direction along the motor shaft AH. Furthermore, setting encoder ME1 and encoder ME2 to approximately the same height is more preferable from a thinner profile perspective. Figure 4A and Figure 4B The example illustrates the case where encoder ME1 is positioned further along the positive Y-axis than the motor shaft AH, and encoder ME2 is positioned along the negative Y-axis. However, this is not a limitation; encoders ME1 and ME2 can also be positioned after rotating around the motor shaft AH by any angle.

[0061] like Figure 4B As shown, the encoder ME1 of the hand-driven motor M1 and the encoder ME2 of the hand-driven motor M2 are positioned so that their sides face each other across the motor shaft AH. That is, the encoder ME of each of the multiple hand-driven motors M is integrated into one arm with the end faces of the discs facing each other across the detection section and the sides of the detection sections facing each other across the motor shaft AH (see reference). Figure 1 Furthermore, regarding the shape of each encoder ME, as long as it can be configured in an area corresponding to a semicircle, it can also be set to any shape such as a fan shape or an irregular shape.

[0062] By designing the encoder ME to converge within a semi-circular shape and positioning it relative to the motor shaft AH, the combined multiple hand-driven motors M can be made thinner as a whole. Therefore, a thinner arm can be achieved.

[0063] Next, use Figure 5A and Figure 5B right Figure 3 The structure of the second arm 12 shown in the figure will be explained. Figure 5A This is a side view schematic diagram showing the sub-block 12S with the built-in motor. Figure 5B This is a side view schematic diagram showing the assembled arm.

[0064] like Figure 5A As shown, sub-frame 12S1, one of the sub-frames 12S, houses a manual drive motor M1. Furthermore, sub-frame 12S2 houses a manual drive motor M2. Moreover, the hollow shaft MS1 of the manual drive motor M1 protrudes from sub-frame 12S1 along the motor shaft AH. Similarly, the hollow shaft MS2 of the manual drive motor M2 protrudes from sub-frame 12S2 along the motor shaft AH.

[0065] Here, for example, by moving the sub-frame 12S1 in the direction S31, the hollow shaft MS2 of the hand drive motor M2 can be inserted into the hollow part of the hand drive motor M1. Furthermore, by fixing the sub-frame 12S1 and the sub-frame 12S2 together with their bottom surface in contact, the sub-frames 12S1 and 12S2 can be assembled. Additionally, in the assembled state, the front end of the hollow shaft MS2 protrudes from the front end of the hollow shaft MS1.

[0066] That is, the second arm 12 (refer to) Figure 3 The support of multiple hands 13 on one side can be separated into multiple sub-frames 12S along the motor shaft AH. Figure 5A Each of the sub-frames 12S shown is fixed with one hand drive motor M. That is, the second arm 12 has multiple sub-frames 12S that can be disassembled along the motor shaft AH on the sides of multiple hands 13. Moreover, each sub-frame 12S houses one of the multiple hand drive motors M. In this way, the hand drive motors M are housed in separate sub-frames 12S, thereby making it easy to assemble the arm.

[0067] In addition, such as Figure 5B As shown, the sub-frames 12S1 and 12S2 in the assembled state are moved toward the bottom frame 12B of the second arm 12 (referencing direction S32), thereby assembling the sub-frame 12S with the motor inside onto the bottom frame 12B.

[0068] Furthermore, the sub-frame 12S3 is assembled from top to bottom frame 12B (refer to direction S33), thus completing the second arm 12. Additionally, the sub-frame 12S3 is a unit without a built-in hand-drive motor M. Regarding the structure of the sub-frame 12S3, [the following is a description of its structure]. Figure 6 To be described later.

[0069] Here, the multiple sub-frames 12S are shapes whose respective shapes form part of the outer shape of the second arm 12. That is, the multiple sub-frames 12S each have an outer surface that forms the outer shape of the second arm 12. Furthermore, when the sub-frames 12S1 and 12S2 with built-in hand drive motors M are overlapped in such a way that the motor shafts AH of each hand drive motor M are concentric, the support hand 13 of the second arm 12 (see reference) is formed. Figure 3 The shape of one side of the )

[0070] In this way, by setting the shape of each sub-frame 12S to be part of the shape of the second arm 12 during assembly, the number of parts of the second arm 12 can be reduced, and the second arm 12 can be miniaturized.

[0071] Next, use Figure 6 right Figure 5B The structure of the sub-frame 12S3 shown will be explained. Figure 6 This is a perspective view showing the sub-frame 12S without a built-in motor. Additionally, in Figure 6 In order to show the internal structure of the sub-frame 12S, the cover of the upper surface is shown with the top surface removed.

[0072] like Figure 6 As shown, sub-frame 12S3 is for storing and holding 13B (see reference). Figure 3 The unit of the connected cable C13B. When the hand 13B rotates, the cable C13B is wound around the rotation axis of the hand 13B. Here, the cable C13B of sufficient length is stored in the sub-frame 12S in such a way that the hand 13B has a sufficient rotation angle.

[0073] For example, such as Figure 6 As shown, the cable C13B is stored in the sub-frame 12S in an S-shape or inverted S-shape when viewed from above, thereby ensuring sufficient length.

[0074] Here, as Figure 5B As shown, the hand-driven motor M is a so-called direct-drive motor, therefore, there is no need to install a mechanism such as a belt to transmit driving force to the second arm 12. Therefore, compared with the belt-driven case, the volume of the sub-frame 12S can be increased, and the length of the retractable cable C13B can be increased.

[0075] Therefore, it helps hand 13B (refer to) Figure 3 The range of rotation angles of the second arm 12 is expanded. Furthermore, by replacing the hand-driven motor M with a belt-driven motor instead of a direct-drive motor, design changes to alter the arm length of the second arm 12 are easily achieved.

[0076] Next, use Figures 7-9 To the general Figure 1 The case where the hand-driven motor M is set as an axial clearance motor will be explained. Figure 7 This is an exploded perspective view of the first motor unit 100. Figure 8 This is an exploded perspective view of the second motor unit 200. Furthermore, Figure 9 This is a schematic side sectional view of the assembled second arm 12.

[0077] like Figure 7 As shown, the first motor unit 100 has a corresponding Figure 1 The first motor 101 of the hand-driven motor M1 shown in the figure, and Figure 5A The sub-frame 12S1 is shown in the figure. In addition, the upper and lower surfaces of the sub-frame 12S1 are open, but a removable cover is provided on the upper surface.

[0078] In addition, it can be used with the bottom frame 12B (refer to) Figure 5B A connecting hole is appropriately provided on the side of the subframe 12S1 on the connected side. Furthermore, in Figure 7 The description of the inner walls of the components that are located inside the subframe 12S1 and on which the first motor 101 is installed is omitted.

[0079] The first motor 101 has a stator 110 and a rotor 120 corresponding to the stator and rotor of an axial clearance motor, respectively. Furthermore, the first motor 101 has a stator 110 and a rotor 120 corresponding to the stator and rotor of an axial clearance motor, respectively. Figure 1 The hollow shaft MS1 shown includes a hollow shaft 121, a bushing 122, a bearing 140, and a bearing pressing member 141.

[0080] Furthermore, the first motor 101 has an equivalent to Figure 1 The encoder 130 of the encoder ME1 shown above. The encoder 130 has a disk portion 131, a detection portion 132 and a support portion 133.

[0081] The stator 110 is a circular plate with a hollow portion along the motor shaft AH, and has teeth and windings wound around the teeth on its end face on the rotor 120 side. Furthermore, the stator 110 is molded after the windings are wound around the teeth. The rotor 120 has a hollow portion, the end face of which faces the end face of the stator 110 and communicates with the hollow portion of the stator 110.

[0082] In addition, a plurality of magnets are provided circumferentially on the end face of the stator 110 side of the rotor 120. Furthermore, the disk portion 131 of the encoder 130 is fixed on another end face of the rotor 120. In addition, a hollow portion communicating with the hollow portion of the rotor 120 is also provided in the disk portion 131.

[0083] like Figure 7 As shown, the hollow shaft 121 is fixed to the upper surface of the rotor 120. Furthermore, the stator 110 is configured such that its inner circumference is separate from the outer circumference of the hollow shaft 121. The bearing 140 is a so-called crossed roller bearing. By making the bearing 140 a crossed roller bearing, both high rigidity and miniaturization can be achieved.

[0084] For example, the inner circumferential side of bearing 140 is fixed to the outer circumference of hollow shaft 121, and the outer circumferential side of bearing 140 is fixed to sub-frame 12S1 by means of bearing pressing member 141. Additionally, in Figure 7 The description of the inner wall of the sub-frame 12S1 that fixes the bearing 140 is omitted. In addition, the bushing 122 is fixed to the upper surface of the hollow shaft 121 in such a way that its hollow part communicates with the hollow part of the hollow shaft 121.

[0085] The detection section 132 of the encoder 130 is configured such that its end face faces the end face of the disk section 131 provided on the end face of the rotor 120. The support section 133 supports the other end face side of the detection section 132 and is fixed to the sub-frame 12S1. Alternatively, the support section 133 may be configured to be fixed to the stator 110.

[0086] Thus, the first motor 101 has: a stator 110, which is in the shape of a circular plate and has a hollow portion along the motor shaft AH; and a rotor 120, which is in the shape of a circular plate, with its end face facing the end face of the stator 110 and having a hollow portion.

[0087] Furthermore, the first motor 101 has a hollow shaft 121 and a bushing 122 that are connected to the rotor 120 in a manner communicating with the hollow portion of the rotor 120 and extend along the motor shaft AH. In addition, the hollow shaft 121 of the first motor 101 is provided on the stator 110 side in the rotor 120, and extends along the motor shaft AH through the hollow portion of the stator 110.

[0088] like Figure 7 As shown, the stator 110, rotor 120, hollow shaft 121 and bushing 122 are hollow, thereby enabling the motor shaft to be configured with wiring or other units within the hollow space, thus achieving miniaturization of the arm.

[0089] like Figure 8 As shown, the second motor unit 200 has an equivalent to Figure 1 The second motor 201 of the hand-driven motor M2 shown in the figure, and Figure 5A The sub-frame 12S2 is shown in the figure. Furthermore, the upper surface of the sub-frame 12S2 is open. Alternatively, a removable cover may be provided on the upper surface.

[0090] In addition, it can be used with the bottom frame 12B (refer to) Figure 5B A connecting hole is appropriately provided on the side of the subframe 12S2 on the connected side. Furthermore, in Figure 8 The description of the inner walls of the components that are located inside the subframe 12S2 and on which the second motor 201 is installed is omitted.

[0091] The second motor 201 has a stator 210 and a rotor 220 that correspond to the stator and rotor of an axial clearance motor, respectively. Furthermore, the second motor 201 has a stator 210 and a rotor 220 that correspond to the stator and rotor of an axial clearance motor, respectively. Figure 1 The hollow shaft MS2 shown includes a hollow shaft 221, a bearing 240, an outer peripheral pressing member 241, and an inner peripheral pressing member 242. The outer peripheral pressing member 241 is a component that presses the outer periphery of the bearing 240, and the inner peripheral pressing member 242 is a component that presses the inner periphery of the bearing 240.

[0092] In addition, the second motor 201 has equivalent to Figure 1The encoder 230 of the encoder ME2 shown above. The encoder 230 has a disk portion 231, a detection portion 232 and a support portion 233.

[0093] The stator 210 is a circular plate with a hollow portion along the motor shaft AH, and has teeth and windings wound around the teeth on its end face on the rotor 220 side. Furthermore, the stator 210 is molded after the windings are wound around the teeth. The end face of the rotor 220 is opposite to the end face of the stator 210, and the rotor 220 has a hollow portion communicating with the hollow portion of the stator 210.

[0094] Furthermore, a plurality of magnets are provided circumferentially on the end face of the stator 210 side of the rotor 220. Additionally, the disk portion 231 of the encoder 230 is fixed to another end face of the rotor 220. Furthermore, a hollow portion for the hollow shaft 221 to pass through is provided in the disk portion 231.

[0095] like Figure 8 As shown, the hollow shaft 221 is fixed to the upper surface of the rotor 220. The bearing 240 is a so-called crossed roller bearing. By making the bearing 240 a crossed roller bearing, both high rigidity and miniaturization can be achieved. For example, the inner circumferential side of the bearing 240 is fixed to the outer circumference of the hollow shaft 221 by means of the inner circumferential pressing member 242, and the outer circumferential side of the bearing 240 is fixed to the sub-frame 12S2 by means of the outer circumferential pressing member 241.

[0096] The detection section 232 of the encoder 230 is configured such that its end face faces the end face of the disk section 231, which is disposed on the end face of the rotor 220. The support section 233 supports the other end face side of the detection section 232 and is fixed to the sub-frame 12S2. Alternatively, the support section 233 may be configured to be fixed to the stator 210.

[0097] Thus, the second motor 201 has: a stator 210, which is in the shape of a circular plate and has a hollow portion along the motor shaft AH; and a rotor 220, which is in the shape of a circular plate, with its end face facing the end face of the stator 210 and having a hollow portion.

[0098] Furthermore, the second motor 201 has a hollow shaft 221, which is connected to the rotor 220 in a manner communicating with the hollow portion of the rotor 220 and extends along the motor shaft AH. In addition, the hollow shaft 221 of the second motor 201 is fixed to the end face of the rotor 220 on the side opposite to the stator 210 and extends along the motor shaft AH in a direction away from the stator 210.

[0099] like Figure 8 As shown, by making the stator 210, rotor 220 and hollow shaft 221 hollow, the shaft of the motor in which wiring or other units can be arranged can be arranged, thus enabling the miniaturization of the arm.

[0100] Next, use Figure 9 To the general Figure 7 The first motor unit 100 shown and Figure 8 The second arm 12 will be described in the state of the second motor unit 200 assembled as shown. Figure 9 This is a schematic side sectional view of the assembled second arm 12. Additionally, Figure 9 This is equivalent to a sectional view taken at the position of the motor shaft AH, cut with a plane parallel to the YZ plane, when viewed from the front end side of the second arm 12 at the base end side. Furthermore, in the following description, for... Figure 7 and Figure 8 The structure described herein is omitted where appropriate.

[0101] like Figure 9 As shown, the first motor unit 100 and the second motor unit 200 are symmetrical about the motor shaft AH, except for encoders ME1 and ME2. Furthermore, encoders ME1 and ME2 are positioned opposite each other relative to the motor shaft AH. Figure 9 The description of the inner walls of the sub-frames 12S1 and 12S2 that respectively fix encoder ME1 and encoder ME2 is omitted.

[0102] The bushing 122 of the first motor unit 100 protrudes toward the upper surface of the second arm 12. In addition, the hollow shaft 221 of the second motor unit 200 passes through the hollow portion of the first motor unit 100 and protrudes toward the upper surface of the second arm 12.

[0103] Here, along the motor shaft AH, from the lower surface of the second arm 12 to the upper surface, the components are arranged in the order of stator 210 of the second motor 201, rotor 220, rotor 120 of the first motor 101, and stator 110.

[0104] Furthermore, the encoder ME1 of the first motor unit 100 is positioned in the first motor unit 100 opposite to the lower surface of the rotor 120, and the encoder ME2 of the second motor unit 200 is positioned in the second motor unit 200 opposite to the upper surface of the rotor 220. Additionally, as... Figure 9 As shown, encoders ME1 and ME2 are configured at approximately the same height along the direction of the motor shaft AH.

[0105] Thus, the hollow shaft 121 and bushing 122 of the first motor 101, which is one of the manual drive motors M, extend through the hollow portion of the stator 110 in the first motor 101. In addition, the hollow shaft 221 of the second motor 201, which is one of the manual drive motors M, extends in a direction away from the stator 210 in the second motor 201.

[0106] Furthermore, the second arm 12 houses the first motor 101 and the second motor 201 respectively, with the hollow shaft 221 extending in a direction away from the stator 210 and penetrating through the hollow shaft 121 and the bushing 122. The hollow shaft 121 extends through the hollow portion of the stator 110. That is, the hollow shaft 221 extending in a direction away from the stator 210 is housed in one arm, and the hollow shaft 121 extends through the hollow portion of the stator 110.

[0107] In this way, the first motor 101 and the second motor 201 are arranged such that the hollow shaft 221 extending in a direction away from the stator 210 passes through the hollow portion of the stator 110. As a result, the second arm 12, which houses these motors, can be made thinner.

[0108] In addition, such as Figure 9 As shown, the first motor 101 and the second motor 201 have hollow portions extending along the motor shaft AH from the lower surface side to the upper surface side of the second arm 12. Within these hollow portions, for example, a hand 13B (see reference) connected to the hollow shaft 221 of the second motor unit 200 can be configured. Figure 3 The cable used.

[0109] in addition, Figure 9 The diagram illustrates a nested configuration of two motors with their hollow shafts, but in the case of three or more motors coaxially configured, at least one should be included. Figure 9 The nested configuration shown can be used to configure each motor.

[0110] Next, use Figure 10 The robot system 1, which includes a transport robot 10 and a control device 20 for controlling the motion of the transport robot 10, will be described. Figure 10 This is a block diagram of robot system 1. Furthermore, the structure of the handling robot 10 has already been explained; therefore, the following mainly describes the structure of the control device 20. Additionally, in... Figure 10 The so-called teaching pendant and other input terminal devices connected to the control device 20 are omitted.

[0111] like Figure 10 As shown, the control device 20 includes a control unit 21 and a storage unit 22. The control unit 21 includes an action control unit 21a. Furthermore, the storage unit 22 stores teaching data 22a. Additionally, the control device 20 is connected to the transport robot 10.

[0112] Here, the control device 20 includes, for example, a computer with a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), HDD (Hard Disk Drive), input / output ports, and various circuits. The computer's CPU, for example, reads and executes the program stored in the ROM, and functions as the operation control unit 21a of the control unit 21.

[0113] In addition, the motion control unit 21a of the control unit 21 can be constructed from hardware such as ASIC (Application Specific Integrated Circuit) and FPGA (Field Programmable Gate Array).

[0114] Furthermore, the storage unit 22 corresponds to, for example, RAM or HDD. RAM or HDD can store teaching data 22a. In addition, the control device 20 can also obtain the above-mentioned programs and various information via other computers or portable recording media connected through wired or wireless networks.

[0115] The control unit 21 of the control device 20 controls the movement of the transport robot 10 based on the teaching data 22a. Furthermore, it performs processing to suppress the movement of the transport robot 10 if an error occurs during its movement.

[0116] The motion control unit 21a controls the motion of the transport robot 10 based on the teaching data 22a. Specifically, the motion control unit 21a instructs the motors corresponding to each axis of the transport robot 10 based on the teaching data 22a stored in the storage unit 22, thereby enabling the transport robot 10 to transport objects such as substrates. Furthermore, the motion control unit 21a uses encoder values ​​in the motors for feedback control, thereby improving the motion accuracy of the transport robot 10.

[0117] Teaching data 22a is generated during the teaching phase of teaching actions to the handling robot 10, and includes specifications for hand 13 (refer to...). Figure 1 The information on the "task" of the handling robot 10, represented by its movement trajectory, is stored in the storage unit 22. Additionally, the storage unit 22 can store teaching data 22a generated by other computers connected via wired or wireless networks.

[0118] As described above, the handling robot 10 of this embodiment has multiple hands 13 and a second arm 12. The multiple hands 13 are capable of holding the object being handled and rotating coaxially. The second arm 12 supports the multiple hands 13. The second arm 12 supports the multiple hands 13 on its upper surface at its front end and has multiple hand drive motors M built into it, arranged concentrically along the direction of the motor axis AH, to directly drive the multiple hands 13 respectively.

[0119] In this way, by incorporating multiple hand drive motors M that directly drive the hand 13 into the arm in an arrangement with the motor shaft AH as concentric along the direction of the motor shaft AH, the storage space for the hand drive motors M can be minimized. Therefore, the arm can be miniaturized.

[0120] Further effects and modifications can be readily derived by those skilled in the art. Therefore, the invention is not limited to the specific details and representative embodiments shown and described above. Thus, various modifications can be made without departing from the spirit and scope of the invention as defined by the claims and their equivalents.

Claims

1. A transport robot, characterized in that, It has the following characteristics: Multiple arms, each capable of holding the object being transported, rotate independently on a single axis of rotation; Multiple hand-driven motors are arranged concentrically with respect to the rotation axis along the direction of rotation, and each motor shaft is directly connected to the multiple hands. as well as One arm, which has built-in multiple hand-driven motors, The plurality of hand-driven motors each have an encoder on one side along the direction of the motor axis, and are built into the arm in an orientation where the encoders face each other. The encoder includes: The disc portion, which is circular in shape, is fixed to the end face of the rotor of the hand-driven motor; and The detection unit is fixed to the stator of the hand-driven motor or the arm, with its end face facing the end face of the disk portion. The detection unit has a shape that converges to the semi-circular shape obtained by equally dividing the circular disk portion. The plurality of hand-driven motors are housed in the arm in the following manner: for each of the plurality of hand-driven motors, the end faces of the disks are opposite each other across the detection section, and the sides of the detection sections are opposite each other across the motor shaft.

2. The handling robot according to claim 1, characterized in that, The arm has multiple sub-frames that can be disassembled along the motor shaft on the multiple hand sides. Each of the plurality of sub-frames contains one of the plurality of hand-driven motors.

3. The handling robot according to claim 1, characterized in that, The plurality of hand-driven motors each include a hollow shaft connected to the rotor and extending along the motor shaft, and are housed in the arm in such an orientation that the hollow shaft of any one of the hand-driven motors is inserted into the hollow shaft of the other hand-driven motors.

4. The handling robot according to claim 3, characterized in that, In the plurality of hollow shafts, the first hollow shaft causes the first hand in the plurality of hands to rotate, and the second hollow shaft, which is located inside the first hollow shaft, causes the second hand, which is located above the first hand, to rotate.

5. The handling robot according to any one of claims 1 to 4, characterized in that, The hand-driven motor is an axial clearance type motor.

6. The handling robot according to claim 5, characterized in that, The hand-driven motor has: The stator is a circular plate with a hollow portion along the motor shaft; The rotor is a circular plate with its end face facing the end face of the stator and has the hollow portion. as well as A hollow shaft, which is connected to the rotor in communication with the hollow portion of the rotor, extends along the motor shaft.

7. The handling robot according to claim 6, characterized in that, The hollow shaft of at least one of the plurality of hand-operated motors extends through the hollow portion of the stator of the hand-operated motor. At least one of the other hand-driven motors is built into the arm in such a manner that the hollow shaft extends in a direction away from the stator of the hand-driven motor, and the hollow shaft extending in a direction away from the stator passes through the hollow portion of the stator.

8. A robot system, characterized in that, It has the following characteristics: The transport robot of claim 1; and A control device that controls the movements of the transport robot.

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