A coupled bionic acceleration sensor and a preparation method thereof
By incorporating the biomimetic spider web structure design of the accelerometer, and combining elastic deformation and viscoelastic properties, the problem of sensors struggling to balance high sensitivity and large range has been solved, achieving self-powered operation and efficient measurement.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JILIN UNIVERSITY
- Filing Date
- 2023-09-14
- Publication Date
- 2026-07-24
AI Technical Summary
Existing accelerometers struggle to achieve both high sensitivity and a large range simultaneously. In the prior art, to achieve high sensitivity, sensors typically require more sensitive structures or materials, but this may limit the maximum acceleration range they can withstand.
A coupled biomimetic accelerometer is designed using a spider web-based viscoelastic material and stable structure. By utilizing the elastic deformation and viscoelastic properties of the spider web-like structure, combined with the contact method of the triboelectric layer, the sensitivity is improved in the small acceleration range, and the impact energy is absorbed in the large acceleration range, avoiding violent impacts on the triboelectric layer and achieving self-powered operation.
It achieves a balance between high sensitivity and large range, improving the sensor's sensitivity and range. At the same time, it achieves self-powered operation through electrostatic induction and triboelectric generation, overcoming the shortcomings of existing technologies.
Smart Images
Figure CN117538562B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of acceleration sensor technology, and in particular to a highly sensitive, large-range coupled biomimetic acceleration sensor and its fabrication method. Background Technology
[0002] Accelerometers are commonly used to monitor and measure the acceleration of objects and are widely used in many fields, including industry, automotive, aerospace and consumer electronics.
[0003] Traditional accelerometers typically require an external power source, such as a battery or a power cord. However, for some applications, such as long-term monitoring or installation in locations without access to power, these externally powered sensors are no longer suitable. Therefore, self-powered accelerometers have emerged.
[0004] Self-powered accelerometers utilize mechanical vibration energy conversion technology to convert environmental vibration energy into electrical energy to power the sensor. This vibration energy can originate from the vibration, motion, or other mechanical energy sources of objects. When the sensor is subjected to vibration, its internal mechanical structure or materials undergo minute deformations or displacements, generating minute electrical charges. These charges can be stored using specialized circuitry and capacitors and used to power the sensor and its electronic components.
[0005] While self-powered accelerometers offer the advantage of requiring no external power source, achieving both high sensitivity and a large range presents challenges and trade-offs. This is because high sensitivity necessitates the sensor's ability to detect extremely small vibrations or acceleration signals, while a large range requires the sensor to measure a wide range of accelerations. In existing technologies, the contradiction lies in the fact that achieving high sensitivity typically requires the use of more sensitive structures or materials, which may limit the maximum acceleration range it can withstand. In other words, existing accelerometers suffer from a difficulty in simultaneously achieving high sensitivity and a large range.
[0006] Therefore, existing technologies still need further improvement and development. Summary of the Invention
[0007] To address the challenge of balancing high sensitivity and large range, this invention aims to provide a coupled biomimetic accelerometer and its fabrication method. Based on the unique viscoelastic material and stable structure of spider webs, this invention proposes a highly sensitive, large-range, self-powered coupled biomimetic accelerometer and its fabrication method.
[0008] The technical solution of the present invention is as follows:
[0009] A coupled biomimetic accelerometer, comprising:
[0010] The sensor housing has an internal cavity for receiving the sensor.
[0011] A spider web functional layer is disposed within the receiving cavity, and the outer wall of the spider web functional layer is connected to the receiving cavity. A boss protrudes downward from the center of the spider web functional layer, and the spider web functional layer adopts a spider web-like structure.
[0012] A mass block is positioned above the center of the spider web functional layer and is attached to the upper surface of the protrusion. Under inertia, the mass block can move relative to the outer shell through the spider web functional layer.
[0013] The first electrode is attached to the lower surface of the boss;
[0014] The first triboelectric layer is attached to the lower surface of the first electrode;
[0015] A second triboelectric layer is disposed at the bottom center of the accommodating cavity, corresponding to the position of the first triboelectric layer, and a second electrode is disposed below the second triboelectric layer. The second triboelectric layer is disposed at the bottom center of the accommodating cavity through the second electrode.
[0016] The aforementioned coupled biomimetic accelerometer sensor, wherein,
[0017] When measuring the first acceleration range, the inertial force of the mass block causes the spider web-like structure of the spider web functional layer to undergo elastic deformation, and the first triboelectric layer and the second triboelectric layer are in full contact.
[0018] When measuring the second acceleration range, the inertial force of the mass block drives the viscoelastic properties of the spider web-like structure of the spider web functional layer to absorb impact energy and avoid violent collision between the first triboelectric layer and the second triboelectric layer.
[0019] The first acceleration range is smaller than the second acceleration range.
[0020] The coupled biomimetic accelerometer sensor, wherein the mass block is cylindrical with a diameter of 10 mm.
[0021] The coupled biomimetic accelerometer, wherein the spider web functional layer is made of one or more of polyethylene, polypropylene, polyurethane, polylactic acid, polyvinyl alcohol, polymethyl methacrylate, polylactic acid-co-polylactic acid, polycaprolactone, and polydimethylsiloxane.
[0022] In the aforementioned coupled biomimetic accelerometer, the first electrode and the second electrode are made of copper, aluminum, or silver.
[0023] In the aforementioned coupled biomimetic accelerometer, the first triboelectric layer is made of a hybrid material of flexible polymer and conductive material.
[0024] The coupled biomimetic accelerometer sensor, wherein the flexible polymer material of the first triboelectric layer is one or more of epoxy resin, polyethylene, polyvinylidene fluoride, polypropylene, polystyrene, polysulfone ether, polyimide, polyamide, thermoplastic polyurethane, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, natural rubber, nitrile rubber, polydimethylsiloxane, styrene-based thermoplastic elastomers, and thermoplastic vulcanized rubber;
[0025] The conductive material of the first triboelectric layer is one or more of graphene, graphyne, carbon nanotubes, carbon black, MXene, and carbon fiber.
[0026] The aforementioned coupled biomimetic accelerometer sensor, wherein,
[0027] The second triboelectric layer is a polytetrafluoroethylene film.
[0028] In the aforementioned coupled biomimetic accelerometer, the outer edges of the first electrode, the first triboelectric layer, the second electrode, and the second triboelectric layer are all circular, and the outer surface of the sensor housing is also circular.
[0029] A method for fabricating a coupled biomimetic accelerometer as described in any one of the claims, comprising the steps of:
[0030] Design and fabricate a circular sensor housing, and provide an accommodating cavity inside the sensor housing;
[0031] The spiderweb functional layer is prepared using either laser processing or engraving machine processing.
[0032] Prepare a cylindrical mass block and assemble the mass block onto the center upper surface of the spider web functional layer;
[0033] Prepare a first electrode and a second electrode, and assemble the first electrode to the lower center of the spider web functional layer, and assemble the second electrode to the bottom center of the receiving cavity of the sensor housing;
[0034] Preparation of the first triboelectric layer: S1, cut fresh leaves into rectangles, select flat leaves, wash with deionized water, and dry at room temperature. Fix the dried leaves to a glass substrate with double-sided tape. S2, Preparation of the first triboelectric layer: Mix polydimethylsiloxane material and curing agent at a weight ratio of 10:1, mechanically stir for at least 10 minutes, remove air bubbles by vacuum, pour onto the treated leaves, remove air bubbles by vacuum again, and cure at room temperature for 20 hours. After peeling off the leaves, a negative-shaped polydimethylsiloxane mold for the leaves is obtained. Mix flexible polymer material and conductive material in proportion, stir for 15 minutes, remove air bubbles by vacuum, pour onto the negative-shaped polydimethylsiloxane mold, degas again to promote the wetting of the polydimethylsiloxane mold, and cure in an 80°C drying oven for 2 hours. Peel the first triboelectric layer from the polydimethylsiloxane mold; and attach the first triboelectric layer to the lower surface of the first electrode; and install the spider web functional layer in the middle of the receiving cavity of the sensor housing.
[0035] A second triboelectric layer is prepared using a polytetrafluoroethylene film, and the second triboelectric layer is attached and disposed above the second electrode, corresponding to the position of the first triboelectric layer, to obtain the coupled biomimetic accelerometer.
[0036] Beneficial Effects: This invention provides a novel coupled biomimetic accelerometer and its fabrication method. The coupled biomimetic accelerometer comprises a sensor housing, a mass block, a spider web functional layer, a first electrode, a first triboelectric layer, a second electrode, and a second triboelectric layer. This invention employs a secondary biological template method to replicate the micro-complex structures on the surface of a leaf. These micro- and nano-structures increase the self-contact surface area of the triboelectric layer, thereby enhancing the sensor's sensitivity. The energy absorption characteristics of the spider web-like viscoelastic material and the stability of the spider web structure are utilized to increase the sensor's measurement range. When measuring small acceleration ranges, the spider web-like structure primarily undergoes elastic deformation, ensuring full contact between the first and second triboelectric layers. When measuring large acceleration ranges, the viscoelastic properties of the spider web-like structure absorb most of the impact energy, reducing impact and preventing violent collisions between the first and second triboelectric layers that could lead to sensor malfunction, thus increasing the measurement range. The purpose of this invention is to overcome the problem of existing accelerometers failing to simultaneously achieve high sensitivity and a large measurement range, while also utilizing electrostatic induction and triboelectric generation effects to achieve self-powered operation of the sensor. Attached Figure Description
[0037] Figure 1 This is a cross-sectional schematic diagram of a coupled biomimetic acceleration sensor according to an embodiment of the present invention.
[0038] Figure 2 This is a schematic diagram of the lower surface structure of the spider web functional layer of a coupled biomimetic accelerometer according to an embodiment of the present invention.
[0039] Figure 3 This is a cross-sectional structural diagram of a coupled biomimetic acceleration sensor according to an embodiment of the present invention.
[0040] The components are: 1. Sensor housing; 2. Mass block; 3. Spider web functional layer; 4. First electrode; 5. First triboelectric layer; 6. Second electrode; 7. Second triboelectric layer. Detailed Implementation
[0041] This invention provides a coupled biomimetic accelerometer and its fabrication method. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention is further described in detail below. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.
[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of this invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
[0043] Spiders have many silken threads inside their abdomens, and tiny openings at the tip of their tails. When spinning a web, the spider sprays out this silken thread. Upon contact with air, the silken thread solidifies into a sticky substance, making it impossible for any flying insect to escape once it hits the web. Spiders also secrete an oily substance on their bodies and legs, but this oil does not adhere to the silk. Since most flying insects lack this oily substance, the spider web can firmly trap insects but not the spider itself.
[0044] To address the challenge of balancing high sensitivity and long range in existing accelerometers, the inventors of this application have studied biological systems and structures in nature, drawing upon their excellent properties and mechanisms to design and improve artificial systems. Based on the unique viscoelastic material and stable structure of spider webs, a highly sensitive, long-range, self-powered coupled biomimetic accelerometer and its fabrication method are proposed.
[0045] Compared to other existing accelerometers, the coupled biomimetic accelerometer of this invention employs a secondary biological template method to replicate the tiny, complex structures on the surface of a blade. These micro- and nano-structures are used to increase the self-contact surface area of the triboelectric layer, thereby enhancing the sensor's sensitivity. Furthermore, the energy absorption characteristics of the spiderweb-like viscoelastic material and the stability of the spiderweb structure are utilized to improve the sensor's measurement range.
[0046] like Figure 1 , Figure 2 and Figure 3As shown, an embodiment of the present invention provides a coupled biomimetic accelerometer, which includes: a sensor housing 1, a mass block 2, a spider web functional layer 3, a first electrode 4, a first triboelectric layer 5, a second electrode 6, and a second triboelectric layer 7.
[0047] The sensor housing 1 has a cavity 11 inside.
[0048] The spider web functional layer 3 is disposed within the receiving cavity 11, and the outer wall of the spider web functional layer 3 is connected to the receiving cavity 11. A boss 31 is provided with a downward protrusion at the center of the spider web functional layer 3. The spider web functional layer 3 adopts a spider web-like structure. The present invention utilizes the energy absorption characteristics of the spider web-like viscoelastic material and the stability of the spider web structure to improve the range of the sensor.
[0049] The mass block 2 is positioned above the center of the spider web functional layer 3 and is attached to the upper surface of the boss 31. Under inertia, the mass block 2 can move relative to the outer shell through the spider web functional layer 3.
[0050] The first electrode 4 is attached to the lower surface of the protrusion 31 on which the spider web functional layer 3 is disposed.
[0051] The first triboelectric layer 5 is bonded to the lower surface of the first electrode 4;
[0052] The second triboelectric layer 7 is disposed at the bottom center of the accommodating cavity 11, corresponding to the position of the first triboelectric layer 5, and a second electrode is disposed below the second triboelectric layer 7. The second triboelectric layer 7 is disposed at the bottom center of the accommodating cavity 11 through the second electrode 6.
[0053] In this embodiment of the invention, when measuring the first acceleration range, the inertial force of the mass block 2 causes the spiderweb-like structure of the spiderweb functional layer 3 to undergo primarily elastic deformation, ensuring full contact between the first triboelectric layer 5 and the second triboelectric layer 7. When measuring the second acceleration range, the inertial force of the mass block 2 activates the viscoelastic properties of the spiderweb-like structure of the spiderweb functional layer 3, absorbing impact energy and preventing violent collisions between the first triboelectric layer 5 and the second triboelectric layer 7. The first acceleration range is smaller than the second acceleration range. Preferably, in this embodiment of the invention, the first acceleration range is less than 300g, and the second acceleration range is greater than 300g. The g in gravitational acceleration g and G = mg is actually the same physical quantity, but different physical units are used in practice, i.e., g = 9.8 m / s². 2 .
[0054] This invention addresses the issue that, when measuring small acceleration ranges (e.g., less than 300g), the spiderweb-like structure primarily exhibits elastic deformation, with the first triboelectric layer 5 and the second triboelectric layer 7 in full contact. When measuring large acceleration ranges (e.g., greater than 300g), the viscoelastic properties of the spiderweb-like structure in the spiderweb functional layer 3 absorb most of the impact energy, reducing the impact and preventing violent collisions between the first and second friction layers that could lead to sensor malfunction, thereby increasing the measurement range. The purpose of this invention is to overcome the problem of existing accelerometers struggling to simultaneously achieve high sensitivity and a large measurement range, while also utilizing electrostatic induction and triboelectric generation effects to achieve self-powered operation. This invention leverages the energy absorption characteristics of the spiderweb-like viscoelastic material and the stability of the spiderweb structure to improve the sensor's measurement range.
[0055] In a further embodiment of the present invention, preferably, a micro / nano structure is disposed on the lower surface of the first triboelectric layer 5, and a micro / nano structure is also disposed on the upper surface of the second triboelectric layer 7. These micro / nano structures can increase the self-contact surface area of the triboelectric layer, thereby improving the sensitivity of the sensor. The micro / nano structure mentioned in this embodiment refers to a microstructure designed, manufactured, and perfected at the atomic scale using correct atomic-level components (typically from microelectronic devices and biological systems) combined with precisely controlled mechanical techniques, and realized using structures constructed at the micrometer scale. Micro / nano structures refer to structures at the micrometer to nanometer scale, and are a product of the combination of micrometer and nanotechnology.
[0056] Optionally, in the coupled biomimetic accelerometer, the mass block 2 is cylindrical with a diameter of 10 mm. This is so that when the acceleration changes, the mass block, due to its inertia, moves relative to the other end with the support of the spiderweb functional layer 3, causing the upper and lower friction layers to contact and generating an electrical signal proportional to the acceleration.
[0057] Optionally, in the coupled biomimetic accelerometer described in this embodiment, preferably, the material of the spider web functional layer 3 is one or more of polyethylene, polypropylene, polyurethane, polylactic acid, polyvinyl alcohol, polymethyl methacrylate, polylactic acid-co-polylactic acid, polycaprolactone, and polydimethylsiloxane. Thus, the material of the spider web functional layer 3 is readily available, low in cost, and flexible, similar to the material of a spider web.
[0058] In the coupled biomimetic accelerometer described in this embodiment, preferably, the first electrode 4 and the second electrode 6 are made of copper, aluminum, or silver, which have good electrical conductivity.
[0059] In the coupled biomimetic accelerometer described in this embodiment, preferably, the first triboelectric layer 5 is a mixture of a flexible polymer and a conductive material. The flexible polymer material of the first triboelectric layer 5 is one or more of the following: epoxy resin, polyethylene, polyvinylidene fluoride, polypropylene, polystyrene, polysulfone ether, polyimide, polyamide, thermoplastic polyurethane, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, natural rubber, nitrile rubber, polydimethylsiloxane, styrene-based thermoplastic elastomers, and thermoplastic vulcanized rubber. Thus, the material of the first triboelectric layer of this invention is readily available and low in cost.
[0060] The conductive material of the first triboelectric layer 5 is one or more of graphene, graphyne, carbon nanotubes, carbon black, MXene, and carbon fiber. It is worth noting that in this embodiment of the invention, the addition of a conductive material—one or more of graphene, graphyne, carbon nanotubes, carbon black, MXene, and carbon fiber—to the first triboelectric layer allows for further improvement in sensor sensitivity from a materials perspective.
[0061] Furthermore, in the coupled biomimetic accelerometer, the second triboelectric layer 7 is a polytetrafluoroethylene (PTFE) film. Thus, the material of the second triboelectric layer in this invention is readily available, low in cost, and is a common triboelectric layer material.
[0062] Optionally, the coupled biomimetic accelerometer, such as Figure 1 As shown, the outer edges of the first electrode 4, the first triboelectric layer 5, the second electrode 6, and the second triboelectric layer 7 are all circular, although other shapes are also possible. The outer surface of the sensor housing 1 is also circular. The circular shape of the first electrode 4, the first triboelectric layer 5, the second electrode 6, the second triboelectric layer 7, and the outer surface of the sensor housing 1 facilitates manufacturing.
[0063] It is worth noting that when measuring small acceleration ranges, the spiderweb-like functional layer 3, with its spiderweb-like structure, primarily undergoes elastic deformation, with the first triboelectric layer 5 and the second triboelectric layer 7 in full contact. When measuring large acceleration ranges, the viscoelastic properties of the spiderweb-like functional layer 3 absorb most of the impact energy, reducing the impact and preventing violent collisions between the first and second triboelectric layers 5 and 7 that could lead to sensor malfunction, thereby increasing the measurement range. The viscoelasticity of the spiderweb functional layer can be adjusted by its thickness, beam width, etc.
[0064] Based on the above embodiment of a coupled biomimetic accelerometer, this invention also provides a method for fabricating a coupled biomimetic accelerometer, comprising the following steps:
[0065] like Figure 1 , Figure 2 and Figure 3As shown, a circular sensor housing 1 is designed and fabricated, and a receiving cavity 11 is provided inside the sensor housing 1;
[0066] The spider web functional layer 3 is prepared by either laser processing or engraving machine processing.
[0067] Prepare a cylindrical mass block 2 and assemble the mass block 2 onto the center upper surface of the spider web functional layer 3;
[0068] Prepare a first electrode 4 and a second electrode 6, and assemble the first electrode 4 to the lower center of the spider web functional layer 3, and assemble the second electrode 6 to the bottom center of the receiving cavity of the sensor housing 1.
[0069] Preparation of the first triboelectric layer 5: S1, cut fresh leaves into rectangles, select flat leaves, wash with deionized water, and dry at room temperature. Fix the dried leaves onto a glass substrate with double-sided tape; S2, preparation of the first triboelectric layer: mix polydimethylsiloxane material and curing agent at a weight ratio of 10:1, mechanically stir for at least 10 minutes, remove air bubbles by vacuum, pour onto the treated leaves, remove air bubbles by vacuum again, and cure at room temperature for 20 hours. After the leaves are peeled off, a negative-shaped polydimethylsiloxane mold for the leaves is obtained. Mix flexible polymer material and conductive material in proportion, stir for 15 minutes, remove air bubbles by vacuum, pour onto the negative-shaped polydimethylsiloxane mold, degas again to promote the wetting of the polydimethylsiloxane mold, and place in an 80°C drying oven for 2 hours to cure. Peel the first triboelectric layer 5 from the polydimethylsiloxane mold; and attach the first triboelectric layer 5 to the lower surface of the first electrode 4; and install the spider web functional layer 3 in the middle of the receiving cavity of the sensor housing 1;
[0070] The second triboelectric layer 7 is prepared by using a polytetrafluoroethylene film, and the second triboelectric layer 7 is attached and disposed above the second electrode 6, corresponding to the position of the first triboelectric layer 5, to obtain the coupled biomimetic acceleration sensor.
[0071] In summary, this invention provides a novel coupled biomimetic accelerometer and its fabrication method. The coupled biomimetic accelerometer comprises a sensor housing, a mass block, a spider web functional layer, a first electrode, a first triboelectric layer, a second electrode, and a second triboelectric layer. This invention employs a secondary biological template method to replicate the micro-complex structures on the surface of a blade. These micro- and nano-structures increase the self-contact surface area of the triboelectric layer, thereby enhancing the sensor's sensitivity. The energy absorption characteristics of the spider web-like viscoelastic material and the stability of the spider web structure are utilized to increase the sensor's measurement range. When measuring small acceleration ranges, the spider web-like structure primarily undergoes elastic deformation, ensuring full contact between the first and second triboelectric layers. When measuring large acceleration ranges, the viscoelastic properties of the spider web-like structure absorb most of the impact energy, reducing impact and preventing violent collisions between the first and second triboelectric layers that could lead to sensor malfunction, thus increasing the measurement range. The purpose of this invention is to overcome the problem of existing accelerometers failing to simultaneously achieve high sensitivity and a large measurement range, while also utilizing electrostatic induction and triboelectric generation effects to achieve self-powered operation of the sensor.
[0072] It should be understood that the application of the present invention is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.
Claims
1. A coupled biomimetic accelerometer, characterized in that, include: The sensor housing has an internal cavity for receiving it. A spider web functional layer is disposed within the receiving cavity, and the outer wall of the spider web functional layer is connected to the receiving cavity. A boss protrudes downward from the center of the spider web functional layer, and the spider web functional layer adopts a spider web-like structure. A mass block is positioned above the center of the spider web functional layer and is attached to the upper surface of the protrusion. Under inertia, the mass block can move relative to the outer shell through the spider web functional layer. The first electrode is attached to the lower surface of the boss; The first triboelectric layer is attached to the lower surface of the first electrode; A second triboelectric layer is disposed at the bottom center of the accommodating cavity, corresponding to the position of the first triboelectric layer, and a second electrode is disposed below the second triboelectric layer. The second triboelectric layer is disposed at the bottom center of the accommodating cavity through the second electrode. When measuring the first acceleration range, the inertial force of the mass block causes the spider web-like structure of the spider web functional layer to undergo elastic deformation, and the first triboelectric layer and the second triboelectric layer are in full contact. When measuring the second acceleration range, the inertial force of the mass block drives the viscoelastic properties of the spider web-like structure of the spider web functional layer to absorb impact energy and avoid violent collision between the first triboelectric layer and the second triboelectric layer. The first acceleration range is smaller than the second acceleration range; A method for fabricating the aforementioned coupled biomimetic accelerometer includes the following steps: Design and fabricate a circular sensor housing, and provide an accommodating cavity inside the sensor housing; The spiderweb functional layer is prepared using either laser processing or engraving machine processing. Prepare a cylindrical mass block and assemble the mass block onto the center upper surface of the spider web functional layer; Prepare a first electrode and a second electrode, and assemble the first electrode to the lower center of the spider web functional layer, and assemble the second electrode to the bottom center of the receiving cavity of the sensor housing; Preparation of the first triboelectric layer: S1, cut fresh leaves into rectangles, select flat leaves, wash with deionized water, and dry at room temperature. Fix the dried leaves to a glass substrate with double-sided tape. S2, Preparation of the first triboelectric layer: Mix polydimethylsiloxane material and curing agent at a weight ratio of 10:1, mechanically stir for at least 10 minutes, remove air bubbles by vacuum, pour onto the treated leaves, remove air bubbles by vacuum again, and cure at room temperature for 20 hours. After peeling off the leaves, a negative-shaped polydimethylsiloxane mold for the leaves is obtained. Mix flexible polymer material and conductive material in proportion, stir for 15 minutes, remove air bubbles by vacuum, pour onto the negative-shaped polydimethylsiloxane mold, degas again to promote the wetting of the polydimethylsiloxane mold, and cure in an 80°C drying oven for 2 hours. Peel the first triboelectric layer from the polydimethylsiloxane mold; and attach the first triboelectric layer to the lower surface of the first electrode; and install the spider web functional layer in the middle of the receiving cavity of the sensor housing. A second triboelectric layer is prepared using a polytetrafluoroethylene film, and the second triboelectric layer is attached and disposed above the second electrode, corresponding to the position of the first triboelectric layer, to obtain the coupled biomimetic accelerometer.
2. The coupled biomimetic accelerometer sensor according to claim 1, characterized in that, The mass block is cylindrical with a diameter of 10 mm.
3. The coupled biomimetic accelerometer sensor according to claim 1, characterized in that, The material of the spider web functional layer is one or more of polyethylene, polypropylene, polyurethane, polylactic acid, polyvinyl alcohol, polymethyl methacrylate, polylactic acid-co-polylactic acid, polycaprolactone, and polydimethylsiloxane.
4. The coupled biomimetic accelerometer sensor according to claim 1, characterized in that, The first electrode and the second electrode are made of copper, aluminum or silver.
5. The coupled biomimetic accelerometer sensor according to claim 1, characterized in that, The first triboelectric layer is made of a mixture of flexible polymer and conductive material.
6. The coupled biomimetic accelerometer sensor according to claim 5, characterized in that, The flexible polymer material of the first triboelectric layer is one or more of the following: epoxy resin, polyethylene, polyvinylidene fluoride, polypropylene, polystyrene, polysulfone ether, polyimide, polyamide, thermoplastic polyurethane, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, natural rubber, nitrile rubber, polydimethylsiloxane, styrene-based thermoplastic elastomers, and thermoplastic vulcanized rubber. The conductive material of the first triboelectric layer is one or more of graphene, graphyne, carbon nanotubes, carbon black, MXene, and carbon fiber.
7. The coupled biomimetic accelerometer sensor according to claim 1, characterized in that, The second triboelectric layer is a polytetrafluoroethylene film.
8. The coupled biomimetic accelerometer sensor according to claim 1, characterized in that, The outer edges of the first electrode, the first triboelectric layer, the second electrode, and the second triboelectric layer are all circular, and the outer surface of the sensor housing is also circular.