A mold cleaning air knife mechanism

Abstract

This invention relates to the field of cleaning equipment technology and discloses an air knife mechanism for mold cleaning, including an air inlet, an air outlet detachably connected to the output end of the air inlet, a negative pressure detection mechanism on the air outlet, a sealing component inside the air outlet, a gas driving component on the air inlet, a liquid pumping component on the air inlet, and a liquid circulation component inside the air outlet. By incorporating a negative pressure detection mechanism on the air outlet, this invention can detect changes in negative pressure within the air outlet duct in real time. When there is no negative pressure or the negative pressure is low, the gas driving component drives the sealing component to seal the air inlet and outlet of the air outlet duct, thus forming a sealed chamber. Then, the liquid pumping component and the liquid circulation component drive the cleaning fluid to circulate within this sealed chamber and clean the inner wall of the air outlet duct, thereby achieving a good self-cleaning effect. It eliminates the need for manual cleaning and does not affect the external environment.

Description

Technical Field

[0001] This invention relates to the field of cleaning equipment technology, and more specifically, to an air knife mechanism for mold cleaning. Background Technology

[0002] In semiconductor packaging equipment, cleaning the packaging mold has always been a key focus. During semiconductor packaging production, the material used to package the semiconductor is highly viscous, and after packaging, some EMC adhesive residue remains on the mold. If this residue is not cleaned promptly, it can lead to poor packaging of subsequent products and make the entire machine very dirty and unsightly. Furthermore, simple cleaning mechanisms cannot effectively remove the adhesive residue. Therefore, a mechanism with high impact force and a wide coverage area is needed to remove stubborn adhesive residue, and an air knife mechanism is well-suited for this situation.

[0003] Conventional air knife mechanisms are mostly designed based on Bernoulli's principle. During long-term use, some sticky impurities that cannot be blown off by the wind will adhere to the inner wall of the air outlet channel. This will cause changes in the ventilation area of ​​the air duct, or cause turbulence due to the accumulation and protrusion of impurities, thus affecting the final airflow strength and resulting in poor cleaning effect. Summary of the Invention

[0004] The purpose of this invention is to provide an air knife mechanism for mold cleaning in order to solve the above-mentioned problems.

[0005] This invention provides an air knife mechanism for mold cleaning, comprising an air inlet, an air outlet detachably connected to the output end of the air inlet, a negative pressure detection mechanism disposed on the air outlet, a sealing component disposed inside the air outlet, a gas driving component disposed on the air inlet, a liquid pumping component disposed on the air inlet, and a liquid circulation component disposed inside the air outlet. The air outlet has an air outlet channel communicating with the air inlet. The sealing component is disposed on the side wall of the air outlet channel. The gas driving component is used to drive the sealing component to block the air inlet and outlet of the air outlet channel. The negative pressure detection mechanism is connected to the air outlet channel. When the sealing component blocks the inlet and outlet of the air outlet channel, a sealed chamber is formed between the sealing component and the inner wall of the air outlet channel. The liquid pumping component is connected to the sealed chamber through the liquid circulation component.

[0006] As a further optimization of the present invention, the air intake is provided with a plurality of first air intake holes and an air intake channel. The plurality of first air intake holes are all connected to the air intake channel. The air inlets of the plurality of first air intake holes are detachably connected to first air intake pipes. The air inlet of the air outlet channel is connected to the air outlet of the air intake channel. The cross-sectional area of ​​the air intake channel is larger than the cross-sectional area of ​​the air outlet channel.

[0007] As a further optimization of the present invention, the sealing assembly includes two receiving grooves respectively disposed on the side wall of the air outlet channel near the air inlet and the air outlet, a sealing block slidably disposed in the receiving groove, and a sealing telescopic assembly connected between the sealing block and the receiving groove. The output end of the gas driving assembly is connected to the sealing telescopic assembly. The length of the sealing block is the same as the length of the air outlet channel, and the width of the sealing block is greater than the width of the air outlet channel. When the sealing block blocks the air outlet channel, the outer wall of the sealing block is in close contact with the inner wall of the air outlet channel without gaps, and the outer wall of the sealing block is in close contact with the inner wall of the receiving groove without gaps.

[0008] As a further optimization of the present invention, the sealed telescopic assembly includes a telescopic bellows and a spring connected between the sealing block and the receiving groove. The spring is sleeved on the outside of the telescopic bellows. The two ends of the telescopic bellows are fixedly connected to the outer wall of the sealing block and the inner wall of the receiving groove, respectively. The output end of the gas drive assembly is connected to the internal space of the telescopic bellows.

[0009] As a further optimization of the present invention, the gas drive assembly includes a plurality of second air inlets on the air inlet, a plurality of gas diversion channels inside the air outlet, and a second air inlet pipe connected to the air inlet of the second air inlet. The input ends of the plurality of gas diversion channels are respectively connected to the corresponding second air inlets, and the output ends of the gas diversion channels are connected to the internal space of the telescopic bellows.

[0010] As a further optimization of the present invention, the liquid pumping assembly includes a liquid inlet and a liquid outlet provided on the air inlet, a liquid inlet pipe connected to the input end of the liquid inlet, and a liquid outlet pipe connected to the output end of the liquid outlet. The output end of the liquid inlet is connected to the input end of the liquid circulation assembly, and the input end of the liquid outlet is connected to the output end of the liquid circulation assembly.

[0011] As a further optimization of the present invention, the liquid circulation assembly includes an inlet channel and an outlet channel disposed inside the air outlet section. The output end of the inlet channel and the input end of the outlet channel are both connected to the air outlet chamber. The input end of the inlet channel is connected to the output end of the inlet hole, and the output end of the outlet channel is connected to the input end of the outlet hole.

[0012] As a further optimization of the present invention, the upper vertex of the output end of the liquid inlet channel is flush with the lower end face of the sealing block located at the air inlet of the air outlet channel, and the lower vertex of the input end of the liquid outlet channel is flush with the upper end face of the sealing block located at the air outlet of the air outlet channel.

[0013] As a further optimization of the present invention, the negative pressure detection mechanism includes a through hole on the air outlet, two thin film components connected to the inner wall of the through hole, a detection circuit assembly, and a conductive component connected to one of the thin film components. The detection circuit assembly is located between the two thin film components, and the detection circuit assembly and the conductive component are configured to cooperate with each other, forming a sealed cavity between the two thin film components.

[0014] The beneficial effects of this invention are as follows: By setting a negative pressure detection mechanism on the air outlet, the invention can detect the negative pressure change in the air outlet duct in real time. When there is no negative pressure or the negative pressure is small, it indicates that there are too many impurities adhering to the inner wall of the air outlet duct. At this time, the gas-driven component can drive the sealing component to seal the air inlet and outlet of the air outlet duct, thereby forming a sealed chamber. Then, the liquid pumping component and the liquid circulation component drive the cleaning liquid to circulate in the sealed chamber and clean the inner wall of the air outlet duct, thereby forming a good self-cleaning effect. There is no need to disassemble and clean manually, and it will not affect the outside world. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0016] Figure 2 This is the present invention. Figure 1 A partial structural diagram;

[0017] Figure 3 This is the present invention. Figure 2 Sectional view at point AA;

[0018] Figure 4 This is the present invention. Figure 2 Sectional view at point BB;

[0019] Figure 5 This is the present invention. Figure 2 Sectional view at CC;

[0020] Figure 6 This is the present invention. Figure 3 A magnified view at point D;

[0021] Figure 7 This is the present invention. Figure 4 A magnified view at point E in the middle;

[0022] Figure 8 This is the present invention. Figure 4 A magnified view at point F in the middle.

[0023] In the diagram: 1. Air inlet; 101. First air inlet; 102. Air inlet channel; 2. Air outlet; 201. Air outlet cavity; 3. First air inlet pipe; 401. Second air inlet pipe; 402. Second air inlet; 403. Gas diversion channel; 404. Receiving tank; 405. Sealing block; 406. Sealed telescopic assembly; 4060. Telescopic bellows; 4061. Spring; 501. Liquid inlet pipe; 502. Liquid outlet pipe; 503. Liquid inlet hole; 504. Liquid inlet channel; 505. Liquid outlet hole; 506. Liquid outlet channel; 601. Through hole; 602. Thin film component; 603. Detection circuit assembly; 604. Conductive component. Detailed Implementation

[0024] The subject matter described herein will now be discussed with reference to exemplary embodiments. It should be understood that these embodiments are discussed merely to enable those skilled in the art to better understand and implement the subject matter described herein. Furthermore, features described in some examples may be combined in other examples.

[0025] like Figures 1-8 As shown, a mold cleaning air knife mechanism includes an air inlet 1, an air outlet 2 detachably connected to the output end of the air inlet 1, a negative pressure detection mechanism disposed on the air outlet 2, a sealing component disposed inside the air outlet 2, a gas driving component disposed on the air inlet 1, a liquid pumping component disposed on the air inlet 1, and a liquid circulation component disposed inside the air outlet 2. The air outlet 2 is provided with an air outlet channel 201 communicating with the air inlet 1. The sealing component is disposed on the side wall of the air outlet channel 201. The gas driving component is used to drive the sealing component to block the air inlet and outlet of the air outlet channel 201. The negative pressure detection mechanism is connected to the air outlet channel 201. When the sealing component blocks the inlet and outlet of the air outlet channel 201, a sealed chamber is formed between the sealing component and the inner wall of the air outlet channel 201. The liquid pumping component is connected to the sealed chamber through the liquid circulation component.

[0026] The air intake 1 is provided with a plurality of first air intake holes 101 and an air intake channel 102. The plurality of first air intake holes 101 are all connected to the air intake channel 102. The air intake ports of the plurality of first air intake holes 101 are detachably connected to first air intake pipes 3. The air intake port of the air outlet 201 is connected to the air outlet port of the air intake channel 102. The cross-sectional area of ​​the air intake channel 102 is larger than the cross-sectional area of ​​the air outlet 201.

[0027] It should be noted that during the cleaning of the equipment, gas with set parameters is simultaneously supplied into the air intake channel 102 through several first air intake pipes 3. After flowing through the air intake channel 102, the gas enters the air outlet channel 201 and is ejected at a set flow rate after passing through the air outlet channel 201, thus blowing away impurities on the equipment. Because the airflow velocity increases when flowing through the air outlet channel 201, a negative pressure is formed in the air outlet channel 201. At this time, the negative pressure detection mechanism can detect whether the air pressure in the air outlet channel 201 is within the normal range. If it is not within the normal range, it indicates that a large amount of impurities have adhered to the inner wall of the air outlet channel 201. A large amount of impurities can block the connection between the negative pressure detection mechanism and the outlet chamber 201. At this time, the gas-driven component can drive the sealing component to seal both the inlet and outlet of the outlet chamber 201, thus forming a sealed chamber inside the outlet chamber 201. Then, the liquid pumping component and the liquid circulation component can be used to input cleaning fluid into the sealed chamber formed inside the outlet chamber 201 and circulate it at high speed in the sealed chamber, thereby performing self-cleaning treatment on the inner wall of the outlet chamber 201. This can effectively dissolve and wash away the impurities attached to the inner wall of the outlet chamber 201, thus achieving a self-cleaning effect.

[0028] The sealing assembly includes two receiving grooves 404 respectively located on the side wall of the air outlet channel 201 near the air inlet and air outlet, a sealing block 405 slidably disposed in the receiving groove 404, and a sealing telescopic assembly 406 connecting the sealing block 405 and the receiving groove 404. The output end of the gas drive assembly is connected to the sealing telescopic assembly 406. The length of the sealing block 405 is the same as the length of the air outlet channel 201, and the width of the sealing block 405 is greater than the width of the air outlet channel 201. When the sealing block 405 blocks the air outlet channel 201, the outer wall of the sealing block 405 is in close contact with the inner wall of the air outlet channel 201 without gaps, and the outer wall of the sealing block 405 is in close contact with the inner wall of the receiving groove 404 without gaps.

[0029] The sealed telescopic assembly 406 includes a telescopic bellows 4060 and a spring 4061 connected between the sealing block 405 and the receiving groove 404. The spring 4061 is sleeved on the outside of the telescopic bellows 4060. The two ends of the telescopic bellows 4060 are fixedly connected to the outer wall of the sealing block 405 and the inner wall of the receiving groove 404, respectively. The output end of the gas drive assembly is connected to the internal space of the telescopic bellows 4060.

[0030] The gas-driven assembly includes a plurality of second air inlets 402 disposed on the air inlet 1, a plurality of gas diversion channels 403 disposed inside the air outlet 2, and a second air inlet pipe 401 connected to the air inlet of the second air inlets 402. The input ends of the plurality of gas diversion channels 403 are respectively connected to the corresponding second air inlets 402, and the output ends of the gas diversion channels 403 are connected to the internal space of the telescopic bellows 4060.

[0031] It should be noted that, as mentioned above, when the gas-driven component drives the sealing component to seal the air inlet and outlet of the air outlet 201, gas with a set pressure and set pressure is input into the second air inlet 402 through the second air inlet pipe 401. The gas flows through the gas diversion channel 403 and then enters the telescopic bellows 4060. At this time, the spring 4061 is not deformed. However, as the gas in the telescopic bellows 4060 gradually increases, the telescopic bellows 4060 begins to extend and pushes the sealing block 405 out of the receiving groove 404 until the sealing block 405 tightly seals the air inlet and outlet of the air outlet 201. At this time, the area of ​​the air outlet 201 between the two sealing blocks 405 is the sealed chamber, which is also the area where the main impurities adhere. It is also the area where the negative pressure detection mechanism is connected to the air outlet 201. It needs to be self-cleaned by cleaning fluid to solve the problem of the impact of the attached impurities on the cleaning effect of the air knife.

[0032] When self-cleaning is not performed, the sealing block 405 is retracted into the receiving groove 404, and one end of it is flush with the inner wall of the air outlet chamber. The negative pressure generated when the gas flows in the air outlet chamber is less than the pulling force generated by the spring 4061, so it cannot pull the sealing block 405 out of the receiving groove 404, and therefore will not affect the gas flow.

[0033] The liquid pumping assembly includes an inlet hole 503 and an outlet hole 505 on the air inlet 1, an inlet pipe 501 connected to the input end of the inlet hole 503, and an outlet pipe 502 connected to the output end of the outlet hole 505. The output end of the inlet hole 503 is connected to the input end of the liquid circulation assembly, and the input end of the outlet hole 505 is connected to the output end of the liquid circulation assembly.

[0034] The liquid circulation assembly includes an inlet channel 504 and an outlet channel 506 located inside the air outlet section 2. The output end of the inlet channel 504 and the input end of the outlet channel 506 are both connected to the air outlet chamber 201. The input end of the inlet channel 504 is connected to the output end of the inlet hole 503, and the output end of the outlet channel 506 is connected to the input end of the outlet hole 505.

[0035] The upper vertex of the output end of the liquid inlet channel 504 is flush with the lower end face of the blocking block 405 located at the air inlet of the air outlet channel 201, and the lower vertex of the input end of the liquid outlet channel 506 is flush with the upper end face of the blocking block 405 located at the air outlet of the air outlet channel 201.

[0036] It should be noted that, as mentioned above, when it is necessary to clean the inner wall of the air outlet channel 201, after the sealing block 405 blocks the air inlet and outlet of the air outlet channel 201, cleaning fluid is introduced into the liquid inlet hole 503 through the liquid inlet pipe 501. The cleaning fluid flows through the liquid inlet channel 504 and enters the sealed chamber. When the amount of liquid in the sealed chamber reaches the set amount, it begins to flow into the liquid storage channel and then flows through the liquid outlet hole 505 and into the liquid outlet pipe 502. The liquid inlet pipe 501 is connected to an external liquid pump, which allows the liquid to flow into the liquid inlet hole 503 at a set flow rate. This allows the cleaning fluid to flow in the sealed chamber at a set flow rate, thereby efficiently flushing the inner wall of the air outlet channel 201. The cleaning fluid can be heated or its composition can be changed to accommodate the flushing and dissolution of different impurities.

[0037] The negative pressure detection mechanism includes a through hole 601 on the air outlet 2, two thin film components 602 connected to the inner wall of the through hole 601, a detection circuit assembly 603, and a conductive component 604 connected to one of the thin film components 602. The detection circuit assembly 603 is located between the two thin film components 602, and the detection circuit assembly 603 and the conductive component 604 are configured to cooperate with each other. The two thin film components 602 form a sealed cavity.

[0038] It should be noted that, as mentioned above, when the negative pressure generated in the air outlet channel 201 is detected by the negative pressure detection mechanism, that is, when the gas flows in the air outlet channel 201, negative pressure is generated. After the negative pressure is generated, it is transmitted to the diaphragm 602 in the through hole 601 that is close to the air outlet channel 201, causing the diaphragm 602 to deform towards the inside of the air outlet channel 201. After the diaphragm 602 deforms, the pressure in the chamber between the two diaphragm 602 changes, thereby affecting the other diaphragm 602, causing the other diaphragm 602 to also deform towards the inside of the air outlet channel 201. The conductive part 604 connected to it is inserted into the detection circuit assembly 603, thereby closing the circuit in the detection circuit assembly 603 and detecting the presence of negative pressure. When the circuit of the detection circuit assembly 603 is disconnected, it indicates that the negative pressure has disappeared. Moreover, during cleaning, the diaphragm 602 can protect the detection circuit assembly 603, effectively preventing the cleaning fluid from contacting the detection circuit assembly 603.

[0039] The above description of this embodiment is not limited to the specific implementation described above. The specific implementation described above is merely illustrative and not restrictive. Those skilled in the art can make many other forms based on the guidance of this embodiment, all of which are within the protection scope of this embodiment.

Claims

1. A mold cleaning air knife mechanism, characterized in that, The system includes an air inlet (1), an air outlet (2) detachably connected to the output end of the air inlet (1), a negative pressure detection mechanism on the air outlet (2), a sealing assembly inside the air outlet (2), a gas drive assembly on the air inlet (1), a liquid pumping assembly on the air inlet (1), and a liquid circulation assembly inside the air outlet (2). The air outlet (2) has an air outlet channel (201) communicating with the air inlet (1). The sealing assembly is located on the side wall of the air outlet channel (201). The gas drive assembly is used to drive the sealing assembly to block the air inlet and outlet of the air outlet channel (201). The negative pressure detection mechanism is connected to the air outlet channel (201). The air passage (201) is connected. When the sealing component blocks the inlet and outlet of the air passage (201), a sealed chamber is formed between the sealing component and the inner wall of the air passage (201). The liquid pumping component is connected to the sealed chamber through the liquid circulation component. The sealing component includes two receiving grooves (404) respectively located on the side wall of the air passage (201) near the inlet and outlet, a sealing block (405) slidably located in the receiving groove (404), and a sealed telescopic component (406) connected between the sealing block (405) and the receiving groove (404). The output end of the gas driving component is connected to the sealed telescopic component (406).

2. The air knife mechanism for mold cleaning according to claim 1, characterized in that, The air intake (1) is provided with a plurality of first air intake holes (101) and an air intake channel (102). The plurality of first air intake holes (101) are connected to the air intake channel (102). The air inlets of the plurality of first air intake holes (101) are detachably connected to first air intake pipes (3). The air inlet of the air outlet channel (201) is connected to the air outlet of the air intake channel (102). The cross-sectional area of ​​the air intake channel (102) is larger than the cross-sectional area of ​​the air outlet channel (201).

3. The air knife mechanism for mold cleaning according to claim 2, characterized in that, The length of the blocking block (405) is the same as the length of the air outlet channel (201), and the width of the blocking block (405) is greater than the width of the air outlet channel (201). When the blocking block (405) blocks the air outlet channel (201), the outer wall of the blocking block (405) is in close contact with the inner wall of the air outlet channel (201) without any gap, and the outer wall of the blocking block (405) is in close contact with the inner wall of the receiving groove (404) without any gap.

4. The air knife mechanism for mold cleaning according to claim 3, characterized in that, The sealed telescopic assembly (406) includes a telescopic bellows (4060) and a spring (4061) connected between the sealing block (405) and the receiving groove (404). The spring (4061) is sleeved on the outside of the telescopic bellows (4060). The two ends of the telescopic bellows (4060) are fixedly connected to the outer wall of the sealing block (405) and the inner wall of the receiving groove (404), respectively. The output end of the gas drive assembly is connected to the internal space of the telescopic bellows (4060).

5. The air knife mechanism for mold cleaning according to claim 4, characterized in that, The gas drive assembly includes a plurality of second air inlets (402) on the air inlet (1), a plurality of gas diversion channels (403) inside the air outlet (2), and a second air inlet pipe (401) connected to the air inlet of the second air inlet (402). The input ends of the plurality of gas diversion channels (403) are respectively connected to the corresponding second air inlets (402), and the output ends of the gas diversion channels (403) are connected to the internal space of the telescopic bellows (4060).

6. The air knife mechanism for mold cleaning according to claim 5, characterized in that, The liquid pumping assembly includes an inlet hole (503) and an outlet hole (505) provided on the air inlet (1), an inlet pipe (501) connected to the input end of the inlet hole (503), and an outlet pipe (502) connected to the output end of the outlet hole (505). The output end of the inlet hole (503) is connected to the input end of the liquid circulation assembly, and the input end of the outlet hole (505) is connected to the output end of the liquid circulation assembly.

7. The air knife mechanism for mold cleaning according to claim 6, characterized in that, The liquid circulation assembly includes an inlet channel (504) and an outlet channel (506) located inside the air outlet (2). The output end of the inlet channel (504) and the input end of the outlet channel (506) are both connected to the air outlet chamber (201). The input end of the inlet channel (504) is connected to the output end of the inlet hole (503), and the output end of the outlet channel (506) is connected to the input end of the outlet hole (505).

8. The air knife mechanism for mold cleaning according to claim 7, characterized in that, The upper vertex of the output end of the liquid inlet channel (504) is flush with the lower end face of the sealing block (405) located at the air inlet of the air outlet channel (201), and the lower vertex of the input end of the liquid outlet channel (506) is flush with the upper end face of the sealing block (405) located at the air outlet of the air outlet channel (201).

9. The air knife mechanism for mold cleaning according to claim 8, characterized in that, The negative pressure detection mechanism includes a through hole (601) on the air outlet (2), two thin film components (602) connected to the inner wall of the through hole (601), a detection circuit assembly (603), and a conductive component (604) connected to one of the thin film components (602). The detection circuit assembly (603) is located between the two thin film components (602), and the detection circuit assembly (603) and the conductive component (604) are configured to cooperate with each other. The two thin film components (602) form a sealed cavity.

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