Stage adjustment device

Abstract

This invention belongs to the field of platform adjustment technology and discloses a platform adjustment device, including a plate assembly, two first deformable blocks arranged alternately on the periphery of the plate assembly along a first connecting line, and two second deformable blocks arranged along a second connecting line. The plate assembly includes an upper plate and a lower plate arranged at intervals, with the platform passing through the upper plate and connected to the lower plate. The first deformable blocks include a first inner part and a first outer part that are interconnected and can only move relative to each other in the horizontal direction. The first inner part abuts against and is connected to the lower plate, and the first outer part abuts against and is connected to the upper plate. The second deformable blocks include a second inner part and a second outer part that are interconnected and can only move relative to each other in the horizontal direction. The upper plate and the lower plate are spaced apart from the second inner part, and the second outer part abuts against and is connected to the upper plate. The second outer part is spaced apart from the lower plate. A lifting actuator is located on the lower plate and extends out of the upper plate. The moving end of the lifting actuator abuts against the top block assembly, which is suitable for adjusting large-size, high-load platforms.

Description

Technical Field

[0001] This invention relates to the field of stage adjustment technology, and more particularly to a stage adjustment device. Background Technology

[0002] In precision optical inspection equipment such as laser interferometers, the stage typically has a high-precision adjustment device for leveling the stage. Currently, there are two main types of leveling devices: one uses a two-axis / three-axis tilting platform as the stage adjustment device; however, this type is generally only suitable for adjusting small-sized, low-load stages. The other type uses a three-point lifting structure installed at the bottom of the stage as the stage adjustment device. This type can be used for adjusting large-sized, high-load stages, where the lifting actuator directly bears the weight of the stage itself and the load on it. However, the adjustment accuracy of the lifting actuator is inversely proportional to the load it can withstand, limiting the leveling adjustment of large-sized, high-load stages. Summary of the Invention

[0003] The purpose of this invention is to provide a platform adjustment device suitable for the horizontal adjustment of large-size, high-load platforms.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A stage adjustment device, comprising:

[0006] A plate assembly includes an upper plate and a lower plate spaced apart, with a stage passing through the upper plate and connected to the lower plate;

[0007] Two first deformable blocks, each first deformable block comprising a first inner portion and a first outer portion connected to each other and capable of moving relative to each other only in the horizontal direction, the first inner portion abutting against and connected to the lower plate, the first outer portion abutting against and connected to the upper plate, the two first deformable blocks being located on a first connecting line;

[0008] Two second deformable blocks, each second deformable block comprising a second inner portion and a second outer portion that are connected to each other and can only move relative to each other in the horizontal direction, the second inner portion being connected to an external structure, and the upper plate and the lower plate being spaced apart from the second inner portion, the second outer portion abutting against and connected to the upper plate, and the second outer portion being spaced apart from the lower plate, the two first deformable blocks and the two second deformable blocks being alternately and spaced apart on the periphery of the plate assembly, the two second deformable blocks being located on a second connecting line;

[0009] A lifting actuator is provided on the lower plate, the lifting actuator is located between the first connecting line and / or the second connecting line and / or the first connecting line and the second connecting line, and the moving end of the lifting actuator passes through and extends out of the upper plate;

[0010] The top block assembly is fixed to the external structure and located on the side of the upper plate opposite to the lower plate, and the moving end of the lifting actuator can abut against the top block assembly.

[0011] In some possible implementations, the first deformable block further includes a first connecting portion connecting the first inner portion and the first outer portion, wherein a first gap is provided between the first inner portion and the first outer portion and the first connecting portion;

[0012] The second deformable block further includes a second connecting portion connecting the second inner portion and the second outer portion, and a second gap is provided between the second inner portion and the second outer portion and the second connecting portion.

[0013] In some possible implementations, the width of the first gap and the second gap is 1mm-2mm, and the width of the first connecting portion and the second connecting portion is 0.5mm-1.5mm.

[0014] In some possible implementations, the first outer portion is provided with a first groove, and the first connecting portion and the first inner portion are both provided in the first groove. The first groove is a trapezoidal groove, a rectangular groove or an arc groove, and the shapes of the first connecting portion and the first inner portion are adapted to the shape of the first groove.

[0015] The second outer part is provided with a second groove, and the second connecting part and the second inner part are both provided in the second groove. The second groove is a trapezoidal groove, a rectangular groove or an arc groove, and the shapes of the second connecting part and the second inner part are adapted to the shape of the second groove.

[0016] In some possible implementations, a third gap is formed between the lower plate and the second inner side, the width of the third gap being 1mm-5mm.

[0017] In some possible implementations, the upper plate has a protrusion relative to the lower plate, the protrusion facing the second deformable block, so that the lower plate and the second deformable block are spaced apart, and the protrusion has a clearance groove to be spaced apart from the second inner side.

[0018] In some possible implementations, the upper plate, the lower plate, and the first deformable block are an integral structure or separate structures; and / or, the upper plate and the second outer side are an integral structure or separate structures, and the second inner side is connected to the external structure by fasteners.

[0019] In some possible implementations, the plate assembly has a rectangular cross-section, with two first deformable blocks disposed on both sides of one diagonal direction of the plate assembly, and two second deformable blocks disposed on both sides of the other diagonal direction of the plate assembly.

[0020] In some possible implementations, there are three lifting actuators arranged in a triangular pattern and surrounding the platform.

[0021] In some possible implementations, the lifting actuator is an actuator.

[0022] In some possible implementations, the upper plate and the lower plate are spaced apart, with a distance of 2mm-5mm between them; and / or

[0023] It also includes a fixing plate, which is located on the side of the lower plate away from the upper plate. The second inner side is connected to the fixing plate. The fixing plate and the lower plate are spaced apart, with a distance of 2mm-5mm between them.

[0024] The beneficial effects of this invention are:

[0025] This invention provides a platform adjustment device, in which a first deformable block and a second deformable block are respectively connected to an upper plate and a lower plate, and both the first and second deformable blocks can deform in the horizontal direction without relative oscillation in the vertical direction. The moving end of the lifting actuator moves and abuts against the top block assembly, and the top block assembly exerts a downward reaction force on the lifting actuator to push the lower plate. Because the force of the lifting actuator is relatively small, the downward reaction force exerted by the top block assembly on the lifting actuator is also relatively small. When the lower plate is pushed, the lower plate only moves downward on the side closest to the lifting actuator. For example, the deformable block closest to the lifting actuator is the first deformable block. The force transmission process is as follows: through the connection between the first inner and first outer parts of the first deformable block, the upper plate and the second outer parts of the two second deformable blocks deform. The movements of the upper plate, the lower plate, and the first deformable block occur simultaneously. Since the second first deformable block remains in its initial position without deformation, the second outer portion of the two second deformable blocks moves horizontally relative to the second inner portion towards the lifting actuator near the lower right corner. This allows the lower plate to rotate relative to the upper plate around the second line connecting the two second deformable blocks, meaning the platform rotates with the lower plate, achieving leveling. Compared to existing lifting structures used as platform adjustment devices, in this design, the moving end of the lifting actuator does not need to bear the weight of the platform itself or the load on the platform, thus protecting the lifting actuator from overload. The adjustment accuracy of the lifting actuator is unaffected by the load, making it suitable for adjusting large-size, high-load platforms. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the platform adjustment device provided in a specific embodiment of the present invention;

[0027] Figure 2 This is an exploded view of the platform adjustment device provided in a specific embodiment of the present invention;

[0028] Figure 3 This is a side view of the platform adjustment device provided in a specific embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the first deformable block provided in a specific embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the first deformable block under deformed state provided in a specific embodiment of the present invention;

[0031] Figure 6 This is a schematic diagram of the second deformable block under deformed state provided in a specific embodiment of the present invention.

[0032] In the picture:

[0033] 1. Plate assembly; 11. Upper plate; 111. Clearance hole; 112. Protrusion; 113. Clearance groove; 12. Lower plate; 2. First deformable block; 21. First inner part; 22. First outer part; 221. First groove; 2a. First first deformable block; 2b. Second first deformable block; 23. First connecting part; 3. Lifting actuator; 31. Moving end; 4. Top block assembly; 5. Platform; 6. Second deformable block; 6a. First second deformable block; 6b. Second second deformable block; M. Width of the first gap; N. Width of the third gap; P. Width of the first connecting part. Detailed Implementation

[0034] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0036] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0037] like Figures 1-6As shown, this embodiment provides a platform adjustment device, including a plate assembly 1, two first deformable blocks 2, two second deformable blocks 6, a lifting actuator 3, and a top block assembly 4. The plate assembly 1 includes an upper plate 11 and a lower plate 12 spaced apart. The platform 5 passes through the upper plate 11 and is connected to the lower plate 12. The first deformable blocks 2 include a first inner portion 21 and a first outer portion 22 that are connected to each other and can only move relative to each other in the horizontal direction, but will not swing relative to each other in the vertical direction or can only swing relative to each other in the vertical direction by a very small and negligible amount. The first inner portion 21 abuts against and is connected to the lower plate 12, and the first outer portion 22 abuts against and is connected to the upper plate 11. The second deformable block 6 includes a second inner part and a second outer part that are interconnected and can only move relative to each other in the horizontal direction, but will not swing relative to each other in the vertical direction or can only swing relative to each other in the vertical direction by a very small and negligible amount. The second inner part is connected to the external structure, and the upper plate 11 and the lower plate 12 are spaced apart from the second inner part. The second outer part abuts against and is connected to the upper plate 11, and is spaced apart from the lower plate 12 to prevent structural interference. Two first deformable blocks 2 and two second deformable blocks 6 are alternately and spaced apart on the periphery of the plate assembly 1. The two first deformable blocks 2 are located on the first connecting line, and the two second deformable blocks 6 are located on the second connecting line. The lifting actuator 3 is located on the lower plate 12, and the lifting actuator 3 is located between the first connecting line and / or the second connecting line and / or the first connecting line and the second connecting line. The moving end 31 of the lifting actuator 3 passes through and extends out of the upper plate 11. The top block assembly 4 is fixed to the external structure and located on the side of the upper plate 11 away from the lower plate 12. The moving end 31 of the lifting actuator 3 can abut against the top block assembly 4.

[0038] The moving end 31 of the lifting actuator 3 moves vertically and abuts against the top block assembly 4. The top block assembly 4 exerts a downward reaction force on the lifting actuator 3 to push the lower plate 12. The lower plate 12 moves downward only on the side closest to the lifting actuator 3.

[0039] The specific work process is as follows:

[0040] In the first case, when the lifting actuator 3 is located on the first connection line, i.e. Figure 1The lifting actuator 3 (hereinafter referred to as the lifting actuator 3 in the lower right corner) shown in the diagram is positioned between the platform 5 and the first first deformable block 2a. When the lifting actuator 3 is located in the lower right corner, its moving end 31 moves vertically and abuts against the top block assembly 4. The force transmission process is as follows: the top block assembly 4 exerts a downward reaction force on the lifting actuator 3, pushing the lower plate 12. The side of the lower plate 12 closest to the lifting actuator 3 moves downward. Since the upper plate 11 and the lower plate 12 are connected through the first first deformable block 2a, the upper plate 11 is connected to the second outer side, and the second inner side does not contact the lower plate 12. The force passes sequentially through the lifting actuator 3, the side of the top block assembly 4 closest to the lifting actuator 3, the side of the lower plate 12 closest to the lifting actuator 3, the first first deformable block 2a close to the lifting actuator 3, the upper plate 11, and the second outer sides of the two second deformable blocks 6. Since only the first deformation block 2a of the lifting actuator 3 near the lower right corner, the upper plate 11, and the second outer parts of the two second deformation blocks 6 deform, while the second deformation block 2b remains in its initial position, the second outer parts of the two second deformation blocks 6 move relative to the second inner parts in the horizontal direction toward the lifting actuator 3 near the lower right corner. This allows the lower plate 12 to rotate relative to the upper plate 11 around the second connecting line, that is, the platform 5 rotates with the lower plate 12 around the second connecting line, thus achieving leveling.

[0041] In the second case, when the lifting actuator 3 is located on the second connection line, i.e. Figure 1 The lifting actuator 3 located in the lower left corner (hereinafter referred to as the lower left corner lifting actuator 3) is positioned between the platform 5 and the first second deformable block 6a. Its moving end 31 moves vertically and abuts against the top block assembly 4. The top block assembly 4 exerts a downward reaction force on the lifting actuator 3, pushing the lower plate 12. The side of the lower plate 12 closest to the lifting actuator 3 moves downward. Since the lower plate 12 and the second inner part do not contact each other, and the second inner part is fixedly connected to the external structure, while the second outer part is fixed by the upper plate 11, the force passes sequentially through the lower left corner lifting actuator 3, the side of the top block assembly 4 closest to the lifting actuator 3, the side of the lower plate 12 closest to the lifting actuator 3, and the first inner part 21 of the two first deformable blocks 2. Since the second second deformable block 6b maintains its initial position, the first inner part 21 and the first outer part 22 of the two first deformable blocks 2 will move relative to each other in the horizontal direction to the side away from the lifting actuator 3 at the lower left corner, thereby realizing the rotation of the lower plate 12 relative to the upper plate 11 around the first connecting line, that is, the platform 5 rotates with the lower plate 12 around the first connecting line, thus realizing leveling.

[0042] In the third case, when the lifting actuator 3 is positioned between the first and second connecting lines, i.e. Figure 1The lifting actuator 3 shown above can simultaneously enable the lower plate 12 to rotate around the first and second connecting lines relative to the upper plate 11. That is, the platform 5 rotates around the first and second connecting lines along with the lower plate 12, thus achieving leveling. The specific force transmission and working principle are the same as those in the two cases mentioned above, and will not be repeated here.

[0043] In the fourth scenario, when there are two or more lifting actuators 3, the positions of the lifting actuators 3 can be any combination of the three scenarios described above. For example, two lifting actuators 3 may be located on the first and second connecting lines respectively; two lifting actuators 3 may both be located on the first connecting line and positioned on both sides of the platform 5; or three lifting actuators 3 may be located on the first connecting line, the second connecting line, or between the first and second connecting lines, etc. These scenarios will not be elaborated further. This configuration enables the lower plate 12 to rotate simultaneously around the first and second connecting lines relative to the upper plate 11, meaning the platform 5 rotates simultaneously around the first and second connecting lines along with the lower plate 12, achieving leveling. The specific force transmission and working principle are the same as in the two scenarios described above and will not be elaborated further.

[0044] The upper plate 11 and the lower plate 12 are connected by the first deformable block 2 and the second deformable block 6. Both the first deformable block 2 and the second deformable block 6 can deform in the horizontal direction and will not swing relative to each other in the vertical direction. Since the lifting actuator 3 is close to the first deformable block 2 or the second deformable block 6, the lower plate 12 only moves downward on the side close to the lifting actuator 3. The deformable block close to the lifting actuator 3 (such as the first first deformable block 2a) drives the upper plate 11 on that side to deform. The same type of deformable block on the opposite side (the second first deformable block 2b) does not deform, and drives the outer part of another type of deformable block (the first second deformable block 6a and the second second deformable block 6b) to move horizontally relative to the inner part. The upper plate 11 and the lower plate 12 rotate relative to each other, thereby achieving leveling.

[0045] Compared to existing lifting structures used as platform adjustment devices, in this solution, the moving end 31 of the lifting actuator 3 does not need to bear the weight of the platform 5 itself or the weight of the load on the platform 5, thus protecting the lifting actuator 3 from overload. The adjustment accuracy of the lifting actuator 3 is not affected by the load, so it can be applied to the adjustment of large-size, high-load platforms 5.

[0046] The lifting actuator 3 is an actuator with high displacement accuracy, thus enabling high-precision, small-angle adjustment of the platform 5. Specifically, the actuator can be a servo motor lifting actuator 3 or a more precise piezoelectric lifting actuator 3, etc., which has micron or even sub-micron level displacement accuracy. The platform is fixed on the lower plate 12 and, during leveling, undergoes small-angle (less than 1°) pitch and roll movements with the lower plate 12. The actuator is fixed to the lower plate 12 by clamping or other means.

[0047] like Figure 1 and Figure 2 As shown, there are three lifting actuators 3 arranged in a triangular shape and surrounding the platform 5. By comprehensively adjusting the movement of the moving end 31 of the lifting actuators 3, the height of the lower plate 12 can be finely adjusted, thus achieving the height adjustment of the platform 5. For example, the first lifting actuator 3 is located between the platform 5 and the first first deformable block 2a, the second lifting actuator 3 is located between the platform 5 and the first second deformable block 6a, and the third lifting actuator 3 is located between the second first deformable block 2b and the second second deformable block 6b.

[0048] The stage adjustment device also includes an interferometer, a host computer, etc., which are controlled in a closed loop with the actuator. It has the advantages of intelligence and high efficiency, and is more in line with the development of automatic optical inspection technology. The specific structure and working principle can be referred to the existing technology, and will not be elaborated here.

[0049] like Figure 3 As shown, the top block assembly 4 is fixed directly above the platform 5. Specifically, it can be a single top plate or three independent top plates. When it is a single top plate, the moving ends 31 of the three lifting actuators 3 can all abut against the top plate. When the top block assembly 4 includes three top plates, the top plate corresponds one-to-one with the lifting actuator 3, and the moving ends 31 of the lifting actuator 3 can abut against the corresponding top plate. It can be set according to the requirements and is not limited.

[0050] like Figure 1 and Figure 2 As shown, the cross-section of the plate assembly 1 is rectangular. Two first deformable blocks 2 are located on both sides of one diagonal direction of the plate assembly 1, and two second deformable blocks 6 are located on both sides of the other diagonal direction of the plate assembly 1. That is, the first connecting line and the second connecting line are the two diagonals, which further improves the adjustment accuracy of the platform 5. In other embodiments, the cross-section of the plate assembly 1 can also be a regular shape such as a circle or an ellipse, or it can also be an irregular shape, etc., as long as the first deformable blocks 2 and the second deformable blocks 6 are symmetrically arranged on the periphery of the plate assembly 1, and there is no limitation. The upper plate 11 has a clearance hole 111, and the platform 5 is located in the clearance hole 111. Specifically, the clearance hole 111 is located at the center of the upper plate 11.

[0051] like Figures 4-6As shown, the first deformable block 2 further includes a first connecting portion 23 connecting the first inner portion 21 and the first outer portion 22. A first gap is provided between the first inner portion 21 and the first outer portion 22 and the first connecting portion 23, allowing the first inner portion 21 and the first outer portion 22 to have room to move and to deform horizontally. Similarly, the second deformable block 6 further includes a second connecting portion connecting the second inner portion and the second outer portion. A second gap is provided between the second inner portion and the second outer portion and the second connecting portion, allowing the first inner portion 21 and the first outer portion 22 to have room to move and to deform horizontally. Optionally, the first deformable block 2 and the second deformable block 6 have the same structure.

[0052] The first outer portion 22 has a first groove 221, and the first connecting portion 23 and the first inner portion 21 are both located within the first groove 221. The first groove 221 is a trapezoidal groove, a rectangular groove, or an arc-shaped groove, and the shapes of the first connecting portion 23 and the first inner portion 21 are adapted to the shape of the first groove 221. The second outer portion has a second groove, and the second connecting portion and the second inner portion are both located within the second groove. The second groove is a trapezoidal groove, a rectangular groove, or an arc-shaped groove, and the shapes of the second connecting portion and the second inner portion are adapted to the shape of the second groove. The first deformable block 2 and the second deformable block 6 have a compact structure.

[0053] Taking the first groove 221 as a rectangular groove as an example, the first deformable block 2 is illustrated by way of example. During processing, the "|" and "U" shaped structures are removed to form the first gap of the "|" and "U" shapes, and the first connecting part 23, the first inner part 21, and the second outer part are separated. When the first outer part 22 or the first inner part 21 is subjected to a lateral force, the width M of the first gap of the "|" and "U" shapes will change. When the first groove 221 is a groove of any shape, such as a trapezoidal groove or an arc groove, the "|" and "U" shapes will be adapted accordingly.

[0054] The width M of the first gap and the width of the second gap are 1mm-2mm, and the width P of the first connecting part 23 and the width of the second connecting part are 0.5mm-1.5mm. By increasing the width of the gap and decreasing the width of the connecting part, the connecting block can be easily deformed.

[0055] like Figure 3 As shown, a third gap is formed between the lower plate 12 and the second inner side. The width N of the third gap is 1mm-5mm, specifically 1mm, 2mm, 3mm, 4mm or 5mm, etc., to prevent the lower plate 12 and the second inner side from coming into contact with each other and generating friction, which would cause the second inner side and the lower plate 12 to move simultaneously, thus improving reliability.

[0056] like Figure 2As shown, in one embodiment, the upper plate 11 has a protrusion 112 relative to the lower plate 12. The length of the protrusion is the width N of the third gap. The protrusion 112 faces the second deformable block 6, so that the lower plate 12 and the second deformable block 6 are spaced apart. The protrusion 112 has a clearance groove 113 to be spaced apart from the second inner side. By providing the protrusion 112, the lower plate 12 and the second inner side form a third gap. By providing the clearance groove 113, the second inner side and the upper plate 11 are prevented from contacting each other. In other embodiments, a clearance structure may also be provided on the second inner side to be spaced apart from the upper plate 11 and the lower plate 12 respectively. Optionally, the upper plate 11 and the first inner side 21 are spaced apart.

[0057] The upper plate 11, lower plate 12, and first deformable block 2 are either an integral structure or separate structures. In the case of a separate structure, fasteners such as screws can be used for connection. The upper plate 11 and the second outer side are either an integral structure or separate structures. In the case of a separate structure, fasteners such as screws can be used for connection. The external structure is connected to the second inner side via fasteners such as screws. For example, a fixing plate (not shown in the figure) is provided, located on the side of the lower plate 12 opposite to the upper plate 11. The second inner side is connected to the fixing plate. The fixing plate and the lower plate 12 are spaced apart, with a distance of 2mm-5mm, specifically, it can be 2mm, 3mm, 4mm, or 5mm, etc. The upper plate 11 and the lower plate 12 are spaced apart, with a distance of 2mm-5mm, specifically, it can be 2mm, 3mm, 4mm, or 5mm, etc.

[0058] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A platform adjustment device, characterized in that, include: The plate assembly (1) includes an upper plate (11) and a lower plate (12) spaced apart, and a platform (5) passes through the upper plate (11) and is connected to the lower plate (12); Two first deformable blocks (2), each first deformable block (2) includes a first inner part (21) and a first outer part (22) that are connected to each other and can only move relative to each other in the horizontal direction. The first inner part (21) abuts against and is connected to the lower plate (12), and the first outer part (22) abuts against and is connected to the upper plate (11). The two first deformable blocks (2) are located on a first connecting line. Two second deformable blocks (6), each second deformable block (6) includes a second inner part and a second outer part that are connected to each other and can only move relative to each other in the horizontal direction. The second inner part is connected to the external structure, and the upper plate (11) and the lower plate (12) are both spaced apart from the second inner part. The second outer part abuts against and is connected to the upper plate (11). The second outer part is spaced apart from the lower plate (12). Two first deformable blocks (2) and two second deformable blocks (6) are alternately spaced on the periphery of the plate assembly (1). The two second deformable blocks (6) are located on the second connecting line. A lifting actuator (3) is provided on the lower plate (12). The lifting actuator (3) is located between the first connecting line and / or the second connecting line and / or the first connecting line and the second connecting line. The moving end (31) of the lifting actuator (3) passes through and extends out of the upper plate (11). The top block assembly (4) is fixed to the external structure and located on the side of the upper plate (11) away from the lower plate (12). The moving end (31) of the lifting actuator (3) can abut against the top block assembly (4).

2. The platform adjustment device according to claim 1, characterized in that, The first deformable block (2) further includes a first connecting portion (23) connecting the first inner side portion (21) and the first outer side portion (22), and a first gap is provided between the first inner side portion (21) and the first outer side portion (22) and the first connecting portion (23); The second deformable block (6) also includes a second connecting portion between the second inner portion and the second outer portion, and a second gap is provided between the second inner portion and the second outer portion and the second connecting portion.

3. The platform adjustment device according to claim 2, characterized in that, The width of the first gap and the second gap is 1mm-2mm, and the width of the first connecting part (23) and the second connecting part is 0.5mm-1.5mm.

4. The platform adjustment device according to claim 2, characterized in that, The first outer part (22) is provided with a first groove (221), the first connecting part (23) and the first inner part (21) are both provided in the first groove (221), the first groove (221) is a trapezoidal groove, a rectangular groove or an arc groove, and the shape of the first connecting part (23) and the first inner part (21) is adapted to the shape of the first groove (221); The second outer part is provided with a second groove, and the second connecting part and the second inner part are both provided in the second groove. The second groove is a trapezoidal groove, a rectangular groove or an arc groove, and the shapes of the second connecting part and the second inner part are adapted to the shape of the second groove.

5. The platform adjustment device according to claim 2, characterized in that, A third gap is formed between the lower plate (12) and the second inner side, and the width (N) of the third gap is 1mm-5mm.

6. The platform adjustment device according to claim 2, characterized in that, The upper plate (11) has a protrusion (112) relative to the lower plate (12), the protrusion (112) facing the second deformable block (6) so that the lower plate (12) and the second deformable block (6) are spaced apart, and the protrusion (112) has a relief groove (113) to be spaced apart from the second inner side.

7. The platform adjustment device according to claim 1, characterized in that, The upper plate (11), the lower plate (12) and the first deformable block (2) are an integral structure or a separate structure; and / or, the upper plate (11) and the second outer side are an integral structure or a separate structure, and the second inner side is connected to the external structure by fasteners.

8. The platform adjustment device according to claim 1, characterized in that, The plate assembly (1) has a rectangular cross-section. Two first deformation blocks (2) are located on both sides of one diagonal direction of the plate assembly (1), and two second deformation blocks (6) are located on both sides of the other diagonal direction of the plate assembly (1).

9. The platform adjustment device according to claim 1, characterized in that, There are three lifting actuators (3), which are arranged in a triangular shape and surround the platform (5).

10. The stage adjustment device according to any one of claims 1-9, characterized in that, The lifting actuator (3) is an actuator.

11. The stage adjustment device according to any one of claims 1-9, characterized in that, The upper plate (11) and the lower plate (12) are spaced apart, with a distance of 2mm-5mm between them; and / or It also includes a fixing plate, which is located on the side of the lower plate (12) away from the upper plate (11). The second inner side is connected to the fixing plate. The fixing plate and the lower plate (12) are spaced apart, with a distance of 2mm-5mm between them.

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