A drying jig for wedge cleaning

Abstract

The present application relates to the technical field of semiconductor production equipment, and particularly relates to a drying clamp for cleaver cleaning, which comprises a box body and an end cover, an air inlet is formed in the end cover, an air outlet is formed in the box body, the air inlet is used for high-pressure airflow, and further comprises a positioning assembly for fixing the cleaver, wherein the end cover is provided with a guide assembly for guiding the air of the air inlet to the positioning assembly; a rotating assembly is used for driving the positioning assembly to rotate according to the air pressure change of the air inlet, so that the water drops on the cleaver are separated from the surface of the cleaver. The present application uses the guide assembly to guide the high-pressure airflow to the positioning assembly, quickly removes the water drops exposed outside the positioning assembly from the cleaver, changes the air pressure of the air inlet, drives the rotating assembly to rotate the positioning assembly, separates the water drops on the cleaver in the positioning assembly from the surface of the cleaver, and realizes the all-around drying of multiple cleavers.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and in particular to a drying fixture for use after cleaning a cleaver. Background Technology

[0002] The wedge is a direct tool for wire bonding. It is expensive and a consumable. In actual use, after multiple welding operations, the wedge will be contaminated with oil stains, debris and other pollutants, resulting in wedge aging. This affects the flatness of the wedge tip and causes severe deformation of the weld joint. Therefore, it is necessary to remove the stains from the surface of the wedge by cleaning. After cleaning, the wedge also needs to be removed and dried.

[0003] Existing drying devices for ceramic cleavers, such as the high-pressure drying fixture disclosed in patent number CN217764162U, include a base, a carrier, and a sealing cover. The carrier has several cleaver mounting holes on its upper surface, is mounted on the base, and has through-holes on both the base and the carrier. The sealing cover seals the base and has a pipe connector for connecting to a high-pressure air source. This utility model provides a high-pressure drying fixture for ceramic cleavers after cleaning. This fixture can quickly dry multiple ceramic cleavers at once, has a simple structure, and is easy to use.

[0004] When drying the splitting blade, this device can only dry the part of the splitting blade located outside the mounting hole, while the part of the splitting blade located inside the mounting hole cannot be effectively dried. Its drying effect on the splitting blade is poor and cannot meet the actual needs. Summary of the Invention

[0005] The purpose of this invention is to address the aforementioned shortcomings in the prior art by providing a drying fixture for cleaning cleavers.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] Design a drying fixture for cleaning cleavers, including a housing and an end cap. The end cap has an air inlet, and the housing has an air outlet. The air inlet is for high-pressure airflow to enter. (Further details omitted)

[0008] A positioning assembly for fixing the chopping knife, wherein the end cap is provided with a guide assembly for directing air from the air inlet to the positioning assembly;

[0009] A rotating component is used to drive the positioning component to rotate according to the change in the intake pressure of the air inlet, so that water droplets on the chopping knife are removed from the surface of the chopping knife.

[0010] Furthermore, the positioning component includes a tube body and a clamping portion disposed along the inner wall of the tube body, with a drying channel formed between adjacent clamping portions.

[0011] Furthermore, the clamping part includes support bars arranged in an array along the inner wall of the tube, contact bars connected to the support bars, and clamping channels disposed between the contact bars.

[0012] Furthermore, the rotating assembly includes a guide groove provided on the tube body and a lower pressure plate that cooperates with the guide groove to drive the tube body to rotate. The lower pressure plate descends under the action of high-pressure airflow and rises under the action of the reset part to realize the forward and reverse rotation of the tube body.

[0013] Furthermore, the guide groove includes an arc-shaped segment I and an arc-shaped segment connected to each other, wherein the arc-shaped recesses of the arc-shaped segment I and the arc-shaped segment are in opposite directions.

[0014] Furthermore, the lower pressure plate has a through hole for placing the tube body, and the through hole has a protrusion that slides in conjunction with the guide groove.

[0015] Furthermore, the reset part includes a support plate fixed in the housing, a second through hole corresponding to the first through hole on the support plate, a support rod provided on the support plate and slidably connected to the lower pressure plate, and a spring connecting the support plate and the lower pressure plate.

[0016] Furthermore, the guide assembly includes a sealing plate disposed on the end cap, a guide hole penetrating the sealing plate, and an air cavity formed between the sealing plate and the top of the end cap.

[0017] Furthermore, the diameter of the guide hole is larger than the diameter of the first through hole.

[0018] The present invention provides a drying fixture for cleaning cleavers, which has the following advantages:

[0019] This invention utilizes a guiding component to direct high-pressure airflow to a positioning component, quickly removing water droplets exposed on the outside of the positioning component from the chopping blades. Simultaneously, by changing the airflow pressure at the air inlet, a rotating component drives the positioning component to rotate, causing water droplets on the chopping blades located inside the positioning component to detach from the blade surface. Combined with the effect of high-pressure airflow, this achieves all-round drying of multiple chopping blades. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a drying fixture for cleaning cleavers proposed in this invention;

[0021] Figure 2 This is a schematic diagram of the positioning component;

[0022] Figure 3 This is a schematic diagram of the rotating component;

[0023] Figure 4Top view of the rotating component; Detailed Implementation

[0024] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0025] Reference Figure 1-4 A drying fixture for cleaning cleavers includes a housing 1 and an end cap 2. The end cap 2 has an air inlet 101, and the housing 1 has an air outlet 102. The air inlet 101 allows high-pressure airflow to enter. In this embodiment, the end cap 2 is fixedly connected to the housing 1 via a latch. It also includes...

[0026] Positioning component 3, which is used to fix the chopping knife, wherein the end cap 2 is provided with a guide component 4 for guiding the air in the air inlet 101 to the positioning component 3;

[0027] The rotating component 5 is used to drive the positioning component 3 to rotate according to the change of the intake pressure of the air inlet 101, so that the water droplets on the chopping knife are removed from the surface of the chopping knife.

[0028] This invention utilizes the guide component 4 to guide the high-pressure airflow to the positioning component 3, quickly removing water droplets exposed on the outside of the positioning component 3 from the chopping blade. Simultaneously, through the pressure change of the airflow at the air inlet 101, the rotating component 5 drives the positioning component 3 to rotate, causing the water droplets on the chopping blade located inside the positioning component 3 to detach from the chopping blade surface. Combined with the effect of the high-pressure airflow, it achieves all-round drying of multiple chopping blades.

[0029] In an optional embodiment of the present invention, the positioning component 3 includes a tube body 301 and a clamping part 302 disposed along the inner wall of the tube body 301. A drying channel 303 is formed between adjacent clamping parts 302. Preferably, a horizontal bar 304 can be disposed at the bottom of the inner wall of the tube body 301 to support the chopping knife entering the tube body 301. After the chopping knife is clamped and fixed by the clamping part 302, the high-pressure airflow passes through the chopping knife and carries away the water droplets on the chopping knife part located outside the tube body 301. At the same time, the high-pressure airflow enters the drying channel 303 and flows out from the bottom of the tube body 301. In conjunction with the rotating component 5, the water droplets on the chopping knife part located inside the tube body 301 are carried away, thereby achieving all-round drying of the chopping knife.

[0030] In an optional embodiment of the present invention, the clamping part 302 includes support bars 3021 arranged in an array along the inner wall of the tube body 301, contact bars 3022 connected to the support bars 3021, and clamping channels 3023 disposed between the contact bars 3022. Preferably, the contact bars 3022 in this embodiment can be made of silicone material, and there are at least four of them. After the chopping knife is inserted into the clamping channel 3023, the contact bars 3022 are tightly attached to the outer surface of the chopping knife to fix the chopping knife.

[0031] In an optional embodiment of the present invention, since the airflow rate entering the tube 301 is small, the drying effect on the chopping blades located inside the tube 301 is not ideal in actual use. The applicant has provided a rotating component 5, which removes water droplets from the surface of the chopping blades. With the help of high-pressure airflow, it achieves all-round drying of multiple chopping blades. The rotating component 5 includes a guide groove 501 on the tube 301 and a lower pressure plate 502 that cooperates with the guide groove 501 to drive the tube 301 to rotate. The lower pressure plate 502 descends under the action of high-pressure airflow and rises under the action of the reset part 503 to realize the forward and reverse rotation of the tube 301.

[0032] In an optional embodiment of the present invention, the guide groove 501 includes an arc-shaped segment 5011 and an arc-shaped segment 5012 connected to each other, wherein the arc-shaped recesses of the arc-shaped segment 5011 and the arc-shaped segment 5012 are in opposite directions.

[0033] In an optional embodiment of the present invention, the lower pressure plate 502 is provided with a through hole 505 for placing the tube body 301. A protrusion 504 is provided in the through hole 505. The protrusion 504 and the guide groove 501 are slidably engaged. During the lifting and lowering of the lower pressure plate 502, the protrusion 504 slides in the arc-shaped section 5011 and arc-shaped section 5012, pushing the tube body 301 to rotate rapidly in the through hole 505, thereby removing the water droplets on the chopping knife located in the positioning component 3 from the surface of the chopping knife.

[0034] In an optional embodiment of the present invention, the reset part 503 includes a support plate 5031 fixed inside the housing 1, a second through hole 5032 corresponding to the first through hole 505 opened on the support plate 5031, a support rod 5033 provided on the support plate 5031 and slidably connected to the lower pressure plate 502, and a spring 5034 connecting the support plate 5031 and the lower pressure plate 502. Preferably, in this embodiment, an upper limit ring plate 5035 and a lower limit ring plate 5036 can be provided at the bottom of the outer wall of the tube 301, and are respectively located on the upper and lower sides of the support plate 5031. This arrangement can ensure that the tube During rotation, the body 301 limits the movement of the tube body 301, preventing it from moving up and down. The tube body 301 and the second through hole 5032 are rotatably connected. As the lower pressure plate 502 descends, the sliding engagement of the protrusion 504 and the guide groove 501 drives the tube body 301 to rotate within the first through hole 505 and the second through hole 5032. After the pressure of the high-pressure airflow decreases, the lower pressure plate 502 rises under the elastic action of the spring 5034, causing the protrusion 504 to slide in the opposite direction within the guide groove 501, and driving the tube body 301 to rotate in the opposite direction within the first through hole 505 and the second through hole 5032.

[0035] In an optional embodiment of the present invention, the guide assembly 4 includes a sealing plate 401 disposed on the end cap 2, a guide hole 402 penetrating the sealing plate 401, and an air cavity 403 formed between the sealing plate 401 and the top of the end cap 2. Preferably, in this embodiment, the guide hole 402 and the through hole 505 correspond one-to-one.

[0036] In an optional embodiment of the present invention, the diameter of the guide hole 402 is larger than the diameter of the through hole 505. After the high-pressure airflow enters the air chamber 403 through the air inlet 101, it flows through the guide hole 402 to the through hole 505 to dry the chopping blade located on the positioning component 3. At the same time, the high-pressure airflow can rush to the lower pressure plate 502 to control the lifting and lowering of the lower pressure plate 502.

[0037] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A drying fixture for cleaning a splitting knife, comprising a housing (1) and an end cap (2), wherein the end cap (2) has an air inlet (101) and the housing (1) has an air outlet (102), the air inlet (101) being used for high-pressure airflow entry, characterized in that: Also includes Positioning component (3) for fixing the chopping knife, wherein the end cap (2) is provided with a guide component (4) for guiding the air in the air inlet (101) to the positioning component (3). Rotating component (5) is used to drive the positioning component (3) to rotate according to the change of the air pressure of the air inlet (101) so that the water droplets on the chopping knife are removed from the surface of the chopping knife. The positioning component (3) includes a tube body (301) and a clamping part (302) disposed along the inner wall of the tube body (301), and a drying channel (303) is formed between adjacent clamping parts (302). The rotating assembly (5) includes a guide groove (501) provided on the tube body (301) and a lower pressure plate (502) that cooperates with the guide groove (501) to drive the tube body (301) to rotate. The lower pressure plate (502) descends under the action of high-pressure airflow and rises under the action of the reset part (503) to realize the forward and reverse rotation of the tube body (301). The guide groove (501) includes an arc segment (5011) and an arc segment (5012) connected to each other, and the arc concave directions of the arc segment (5011) and the arc segment (5012) are opposite.

2. The drying fixture for cleaning a splitting knife according to claim 1, characterized in that: The clamping part (302) includes support bars (3021) arranged in an array along the inner wall of the tube (301), contact bars (3022) connected to the support bars (3021), and clamping channels (3023) provided between the contact bars (3022).

3. The drying fixture for cleaning a splitting knife according to claim 1, characterized in that: The lower pressure plate (502) has a through hole (505) for placing the tube body (301), and a protrusion (504) is provided in the through hole (505). The protrusion (504) and the guide groove (501) are slidably engaged.

4. The drying fixture for cleaning a splitting knife according to claim 3, characterized in that: The reset part (503) includes a support plate (5031) fixed inside the housing (1), a second through hole (5032) corresponding to the first through hole (505) opened on the support plate (5031), a support rod (5033) provided on the support plate (5031) and slidably connected to the lower pressure plate (502), and a spring (5034) connecting the support plate (5031) and the lower pressure plate (502).

5. The drying fixture for cleaning a splitting knife according to claim 3, characterized in that: The guide assembly (4) includes a sealing plate (401) disposed on the end cap (2) and a guide hole (402) penetrating the sealing plate (401), and an air cavity (403) is formed between the sealing plate (401) and the top of the end cap (2).

6. The drying fixture for cleaning a cleaver according to claim 5, characterized in that: The diameter of the guide hole (402) is larger than the diameter of the through hole (505).

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