A method for manufacturing a seal for a semiconductor and a seal structure

Abstract

The application relates to a sealing element preparation method and sealing structure for a semiconductor, which comprises the following steps: preparing a filter part by using metal powder, sintering the metal powder, and then performing preliminary forming treatment by performing carburizing, quenching and tempering processes; then performing machining and rectifying to complete the finished product, and the wall surface is covered with micropores; preparing a metal flat gasket by using a circular thin metal gasket, a circular hole is arranged at the center of the metal flat gasket, a plurality of small air holes are arranged at the circumference of the circular hole, and then the filter part is welded on one side of the metal flat gasket; preparing a fireproof core by using a metal material, the overall section of the fireproof core is in the shape of an I-beam, the vertical part of the fireproof core is sequentially arranged through the circular hole of the metal flat gasket and the filter part, and two metal discs are welded at the two ends of the vertical part respectively, so that the fireproof core cannot be separated from the circular hole of the metal flat gasket and the filter part; and preparing an elastic element by using an elastic part with potential energy, one end of the elastic element is welded to the inner side of the metal disc of the fireproof core on the side of the filter part, and the other end is located in the filter part.

Description

Technical Field

[0001] This invention relates to the field of semiconductor component manufacturing technology, and in particular to a method for manufacturing a semiconductor seal and a sealing structure. Background Technology

[0002] The semiconductor industry employs a wide variety of sealing structures, with complex and demanding requirements. Beyond conventional flat gaskets, there are many specialized sealing structures with unique functionalities.

[0003] In gas pipelines within industries such as semiconductors, gas purity is a critical indicator with extremely high requirements. While achieving pure gas, its flammability and combustibility also increase significantly. Therefore, in high-purity gas environments, a product capable of both filtering impurities and preventing the spread of fire is urgently needed. Pipeline connectors, serving as the starting or intermediate points of pipelines, play a vital role in gas circuits, not only increasing the effective length of the pipeline but also regulating flow and pressure. Therefore, at these crucial interfaces, sealing structures are required as the sealing medium to ensure superior sealing. Summary of the Invention

[0004] To address the aforementioned problems, the present invention aims to provide a method for preparing a semiconductor seal and a sealing structure that has good sealing performance and can filter and flame-retard high-purity gases in semiconductors.

[0005] To achieve the above objectives, in a first aspect, the technical solution adopted by the present invention is as follows: a method for preparing a sealing component for semiconductors, comprising: preparing a filter section using metal powder; sintering the metal powder; then performing preliminary forming treatment by sequentially performing carburizing, quenching, and tempering processes; followed by machining and shaping; and surface treatment to complete the finished filter section, wherein the wall surface of the filter section is covered with micropores; wherein the metal powder is composed of C, Ni, Si, Mn, P, Cu, and Fe elements, with the corresponding contents being: C: 0.01%–0.03%; Ni: 10%–15%; Si: 0.8%–1%; Mn: 0.8%–1.5%; P: 0.1%–0.8%; Cu: 5%. ~8%; the remainder is Fe; a metal flat pad is prepared by using a circular thin metal pad with a circular hole in the center and multiple small vent holes at intervals along the circumference of the circular hole as channels for gas medium flow. The filter part is then welded to one side of the metal flat pad; a flame arrestor core is prepared by using metal material with an I-shaped cross-section. Its vertical part is passed through the circular hole of the metal flat pad and the filter part in sequence, and two metal discs are welded to both ends of the vertical part to prevent the flame arrestor core from coming out of the circular hole of the metal flat pad and the filter part; an elastic element is prepared by using an elastic part with potential energy. One end of the elastic element is welded to the inside of the metal disc of the flame arrestor core located on the side of the filter part, and the other end is located inside the filter part.

[0006] Secondly, the technical solution adopted by the present invention is as follows: a sealing structure based on the above-mentioned semiconductor sealing component preparation method, comprising: a metal flat gasket with a circular hole at its center and a plurality of small vent holes arranged circumferentially along the circular hole as gas medium flow channels; a filter section disposed on one side of the metal flat gasket in the gas inlet direction, the filter section being formed by sintering metal powder and having micropores covering its wall surface; a flame arrestor core, the middle part of which passes through the circular hole and is disposed within the metal flat gasket and the filter section, the first end of the flame arrestor core being disposed at the second end of the filter section, and the second end of the flame arrestor core being located on the other side of the metal flat gasket; and an elastic element, one end of which is fixedly disposed inside the first end of the flame arrestor core, and the other end of which is disposed within the filter section, the elastic element cooperating with the flame arrestor core to perform pipeline flame arrest.

[0007] Furthermore, the porosity of the micropores in the filter section is 10% to 22%.

[0008] Furthermore, the filter section adopts a cylindrical structure, with its first end fixed to the air inlet side of the metal flat pad, and multiple small vent holes on the metal flat pad located inside the first end of the filter section.

[0009] Furthermore, a first groove is provided in the middle of the filter section to accommodate the elastic element, providing energy storage space and initial position limitation for the elastic element; a second groove is provided on the inner side of the second end of the filter section to limit the elastic element.

[0010] Furthermore, the cross-section of the flame-arresting core is an I-shaped structure, and both its first and second ends are circular plate-shaped structures, with the first and second ends connected as one unit by a central cylinder; one end of the elastic element is fixedly disposed inside the first end of the flame-arresting core.

[0011] Furthermore, the first end of the flame arrestor core is a flat metal sheet, and the second end is a raised metal sheet with sealing properties. The diameter of the flat metal sheet is the same as the diameter of the filter section, and the diameter of the raised metal sheet is larger than the diameter of the circle containing the multiple small vent holes on the metal flat pad.

[0012] Furthermore, the elastic element adopts a five-claw spring sheet; the fixed end of the five-claw spring sheet is connected to the connection between the first end of the flame arrestor core and the central cylinder; the movable end is located in the first groove of the filter section during normal use, and when the environmental pressure in the pipeline suddenly increases or the temperature of the pipeline rises sharply, the movable end is located in the second groove of the filter section.

[0013] Furthermore, the elastic element adopts a four-bar spring, each spring adopting an approximately V-shaped structure; the first end of the four-bar spring is located on the inner circumferential side of the first end of the flame arrester core, the second end is close to the central cylinder of the flame arrester core, and the V-shaped protrusion is located in the first groove of the filter section during normal use. When the environmental pressure in the pipeline suddenly increases or the temperature of the pipeline rises sharply, the V-shaped protrusion is located in the second groove of the filter section.

[0014] Furthermore, the elastic element is a compression spring; the compression spring passes through the central cylinder of the flame arrester core, and the first end of the compression spring is fixed inside the first end of the flame arrester core, and the second end is fixed to one side of the metal flat pad; during normal use, the compression spring is in an energy storage state, and the central cylinder of the flame arrester core and the circular hole of the metal flat pad are fixed by welding with a fusible alloy, compressing the compression spring between the filter and the first end of the flame arrester core.

[0015] The present invention has the following advantages due to the adoption of the above technical solutions:

[0016] 1. This invention is applied to the joints and connections of pipelines, and can replace the original flat gaskets. A metal flat gasket provides a hard seal between the joints. The metal flat gasket deforms according to the difference in hardness, tightly fitting the shape of the joint, ensuring that the medium gas cannot leak out.

[0017] 2. In a gas pipeline environment, when the environment is stable, the medium gas steadily passes through a filter section made of metal powder for gas purification and upgrading, and then flows out into another pipeline through multiple small vent holes on a metal flat gasket. The semiconductor sealing structure of this invention not only considers the applicability to various filtration precision requirements, but also takes into account the customer's flow rate requirements and pressure differential control.

[0018] 3. When the ambient pressure of the gas pipeline suddenly increases, or the temperature of the pipeline rises sharply, triggering the release of the elastic element, or reaching the melting temperature of the alloy, the compression spring is activated to release, rapidly closing the gas passage, avoiding excessive gas pollution, and effectively preventing the spread of fire or heat waves, thereby ensuring pipeline safety and having good fire-retardant performance. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the sealing structure using a five-claw spring sheet in an embodiment of the present invention;

[0020] Figure 2 This is a side view of the elastic element in this embodiment of the invention when the five-claw spring is in normal use;

[0021] Figure 3 This is a cross-sectional view of the sealing structure of the five-claw spring sheet used in normal operation in the embodiment of the present invention;

[0022] Figure 4 This is a cross-sectional view of the sealing structure when the elastic element adopts a five-claw spring sheet and the flame arrestor core is closed in the embodiment of the present invention;

[0023] Figure 5 This is a schematic diagram of the overall structure of the sealing structure using a four-bar spring sheet in an embodiment of the present invention;

[0024] Figure 6 This is a cross-sectional view of the sealing structure of the four-bar spring sheet used in the embodiment of the present invention during normal use;

[0025] Figure 7 This is a cross-sectional view of the sealing structure when the elastic element in this embodiment of the invention is closed using a four-bar spring sheet flame arrestor core;

[0026] Figure 8 This is a cross-sectional view of the sealing structure when the elastic element of the embodiment of the present invention is a compression spring in normal use;

[0027] Figure 9 This is a cross-sectional view of the sealing structure when the elastic element is closed using a compression spring flame arrestor core in an embodiment of the present invention;

[0028] Figure 10 This is a schematic diagram of the sealing structure in use in an embodiment of the present invention;

[0029] Figure label:

[0030] 1-Metal flat gasket, 2-Round hole, 3-Small vent hole, 4-Filter section, 5-Flame arrestor core, 6-Elastic element, 7-Pipeline, 8-First groove, 9-Second groove, 10-Central cylinder, 11-Flat metal sheet, 12-Raised metal sheet, 13-Mounting groove, 14-Locking mechanism. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention are within the scope of protection of the present invention.

[0032] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0033] To improve the sealing performance, gas purity, and prevention of fire spread within pipelines in the semiconductor field, this invention provides a method for preparing a semiconductor sealing component and a sealing structure. The method includes: preparing a filter section using metal powder; sintering the metal powder; and then performing preliminary shaping processes such as carburizing, quenching, and tempering; followed by machining and surface treatment to complete the finished product, with the wall surface covered with micropores; preparing a metal flat gasket made of a thin circular metal sheet with a central hole and multiple small vent holes spaced circumferentially around the hole; then welding the filter section to one side of the metal flat gasket; preparing a flame-arresting core made of metal material with an I-shaped cross-section; passing its vertical portion sequentially through the circular hole of the metal flat gasket and the filter section, and welding two metal discs to each end of the vertical portion to prevent the flame-arresting core from detaching from the circular hole of the metal flat gasket and the filter section; and preparing an elastic component made of an elastic part with potential energy, one end of which is welded to the inner side of the metal disc of the flame-arresting core located on the filter section side, and the other end located inside the filter section. Since the semiconductor sealing structure appears very frequently in the gas path, the semiconductor sealing structure of the present invention has a better performance demonstration environment: it not only has good sealing performance, but also effectively filters and flame-retards high-purity gases in the semiconductor.

[0034] In one embodiment of the present invention, a method for manufacturing a semiconductor seal is provided. In this embodiment, the manufacturing method includes the following steps:

[0035] 1) The filter section is prepared using metal powder. The metal powder is sintered, and then subjected to carburizing, quenching, and tempering processes for preliminary shaping. After machining and shaping, the surface is treated to complete the finished filter section, and the wall surface of the filter section is covered with micropores. The metal powder is composed of C, Ni, Si, Mn, P, Cu, and Fe elements, with the following contents: C: 0.01%~0.03%; Ni: 10%~15%; Si: 0.8%~1%; Mn: 0.8%~1.5%; P: 0.1%~0.8%; Cu: 5%~8%; the remainder is Fe.

[0036] 2) Prepare a metal flat pad by using a circular thin metal pad with a circular hole in the center and multiple small vent holes at intervals along the circumference of the circular hole as channels for gas medium flow. Then weld the filter part to one side of the metal flat pad.

[0037] 3) Prepare the flame arrestor core by making an integral I-shaped cross-section from metal material. First, pass its vertical part through the round hole and filter part of the metal flat pad in sequence, and weld two metal discs at both ends of the vertical part to prevent the flame arrestor core from coming out of the round hole and filter part of the metal flat pad.

[0038] 4) Prepare the elastic component, which is made of an elastic component with potential energy. One end of the component is welded to the inside of the metal disc of the flame arrestor core located on the side of the filter section, and the other end is located inside the filter section.

[0039] When used, the semiconductor sealing component prepared by this invention not only has good sealing performance, but also effectively filters and flame-retards high-purity gases in the semiconductor.

[0040] In one embodiment of the present invention, a sealing structure is provided, which is fabricated based on the semiconductor sealing element preparation method described in the above embodiments. In this embodiment, as... Figure 1 , Figure 5 As shown, the sealing structure includes:

[0041] The metal flat pad 1 has a circular hole 2 at its center, which serves as a channel for the flame arrestor core 5 to pass through and move; multiple small vent holes 3 are arranged at intervals around the circular hole 2, which serve as channels for the flow of gas medium.

[0042] The filter section 4 is located on one side of the metal flat pad 1 in the gas inlet direction. The filter section 4 is formed by sintering metal powder and the wall surface is covered with micropores. The gas in the pipeline 7 is filtered through the micropores.

[0043] The metal powder is composed of C, Ni, Si, Mn, P, Cu and Fe elements, with the following contents: C: 0.01% to 0.03%; Ni: 10% to 15%; Si: 0.8% to 1%; Mn: 0.8% to 1.5%; P: 0.1% to 0.8%; Cu: 5% to 8%; the remainder is Fe.

[0044] The flame arrestor core 5 has its middle part inserted through the round hole 2 into the metal flat pad 1 and the filter section 4. The first end of the flame arrestor core 5 is located at the second end of the filter section 4, and the second end of the flame arrestor core 5 is located on the other side of the metal flat pad 1.

[0045] The elastic element 6 has one end fixedly installed inside the first end of the flame arrestor core 5 and the other end installed inside the filter section 4. The elastic element 6 cooperates with the flame arrestor core 5 to achieve flame arrest in the pipeline 7.

[0046] When using, such as Figure 10As shown, the metal flat gasket 1 is installed at the joint of the two connected pipes 7. A hard seal causes the metal flat gasket 1 to deform at the joint connection, tightly fitting the shape of the joint to ensure that the gas medium does not leak. The gas in pipe 7 is filtered through the micropores on the filter section 4 and then flows out through multiple small vent holes 3 on the metal flat gasket 1 into the next section of pipe 7. When a high temperature occurs in pipe 7, i.e., a fire occurs, the flame arrestor core 5 seals the multiple small vent holes 3 on the metal flat gasket 1, and the elastic element 6 limits and fixes the flame arrestor core 5, rapidly closing the gas pipe 7 passage, preventing excessive gas contamination, and effectively preventing the spread of fire or heat waves.

[0047] In one feasible implementation, the metal flat pad 1 is a circular metal pad, and the pads of different materials can be replaced according to the usage scenario to meet the requirements of the corresponding working conditions.

[0048] In one feasible embodiment, the filter section 4 adopts a cylindrical structure, with its first end fixed to the air inlet side of the metal flat pad 1, and multiple small vent holes 3 on the metal flat pad 1 located inside the first end of the filter section 4. Filtration is achieved through the column wall surface of the filter section 4, which is formed by sintering metal powder and is covered with micropores. With micropores as the main medium for filtering impurities from the gas, the purity of the gas can be effectively improved.

[0049] In this embodiment, the filter part 4 formed by sintering metal powder is first sintered by temperature control, and then pre-formed by processes such as carburizing, quenching and tempering. Then, it is improved by machining and surface treatment to achieve the desired performance.

[0050] In this embodiment, the porosity of the micropores in the filter section 4 determines the gas flow rate and pipeline pressure. Preferably, the porosity used in this embodiment is 10% to 22% to best meet the requirements of various working conditions. Filtration precision can be manufactured from 0.2 μm to 200 μm. After processing by the filter section 4, the gas in the pipeline 7 can be effectively kept as high-purity gas, and the need for additional filtration equipment is avoided.

[0051] Optionally, a first groove 8 is provided in the middle of the filter section 4 to accommodate the elastic member 6, providing energy storage space and limiting the initial position of the elastic member 6. A second groove 9 is provided on the inner side of the second end of the filter section 4 to limit the elastic member 6.

[0052] In one feasible implementation, the flame-arresting core 5 has an I-shaped cross-section, with both its first and second ends being circular discs, and the first and second ends are connected as a single unit by a central cylinder 10. One end of the elastic element 6 is fixedly disposed inside the first end of the flame-arresting core 5; optionally, one end of the elastic element 6 is fixed at the connection between the first end of the flame-arresting core 5 and the central cylinder 10.

[0053] The flame arrestor core 5 has a flat metal sheet 11 at one end and a raised metal sheet 12 with sealing properties at the other end. The diameter of the flat metal sheet 11 is the same as the diameter of the filter part 4, and the diameter of the raised metal sheet 12 is larger than the diameter of the circle containing the multiple small vent holes 3 on the metal flat pad 1. In use, the raised metal sheet 12 seals the multiple small vent holes 3 on the metal flat pad 1 to achieve flame arrest.

[0054] The inner circumference of the raised metal sheet 12 has a ring of raised structures for sealing, so as to effectively seal the small vent holes 3 on the metal flat gasket 1.

[0055] In one feasible implementation, the elastic element 6 is an elastic component possessing potential energy. Its structure can vary depending on the application environment. Specifically:

[0056] (1) In environments where rapid response is required and rebound is not possible, such as Figures 1 to 4 As shown, the elastic element 6 adopts a five-claw spring, each of which has the ability to expand outward. The fixed end of the five-claw spring is connected to the connection between the first end of the flame arrestor core 5 and the central cylinder 10; the movable end is located in the first groove 8 during normal use. When the environmental pressure in the pipeline 7 suddenly increases or the temperature of the pipeline 7 rises sharply, the movable end is located in the second groove 9. That is, the five-claw spring is released under the action of the flame arrestor core 5 and expands outward when it reaches the second end of the filter section 4. The second groove 9 tightly locks the five-claw spring on the top of the filter section 4 to prevent the flame arrestor core 5 from swinging back.

[0057] Among them, the five spring pieces in the five-claw spring are evenly arranged in the circumferential direction, which can effectively avoid the problem of the metal flat gasket 1 failing due to the failure of one of the spring pieces, and effectively carry out preventive protection measures.

[0058] (2) In usage environments that require rapid response and rebound buffering, such as Figures 5 to 7 As shown, the elastic element 6 adopts a four-bar spring, each of which has the ability to expand outward, and each spring adopts an approximately V-shaped structure. The first end of the four-bar spring is located on the inner circumferential side of the first end of the flame arrestor core 5, and the second end is close to the central cylinder 10 of the flame arrestor core 5. The V-shaped protrusion of the V-shaped spring is located in the first groove 8 during normal use. When the environmental pressure in the pipeline 7 suddenly increases or the temperature of the pipeline 7 rises sharply, the V-shaped protrusion is located in the second groove 9. That is, the four-bar spring is released under the action of the flame arrestor core 5 and expands outward when it reaches the second end of the filter section 4. The second groove 9 tightly locks the V-shaped protrusion of the four-bar spring onto the top of the filter section 4 to prevent the flame arrestor core 5 from swinging back.

[0059] Among them, the inner circumferential side of the first end of the flame arrestor core 5 is provided with a mounting groove 13 for mounting the first end of the four spring pieces. The four spring pieces are evenly distributed along the circumferential direction, so that even if a single spring piece fails, the remaining spring pieces can still fully perform the corresponding functional requirements.

[0060] (3) In environments where extremely rapid response is required (speeds far exceeding those in the aforementioned environment (1)) and rebound is not possible, such as Figure 8 and Figure 9 As shown, the elastic element 6 is a compression spring. The compression spring passes through the central cylinder 10 of the flame arrestor core 5, with the first end of the compression spring fixed inside the first end of the flame arrestor core 5 and the second end fixed to one side of the metal flat pad 1. During normal use, the compression spring is in an energy storage state, and the central cylinder 10 of the flame arrestor core 5 and the circular hole 2 of the metal flat pad 1 are fixed together by fusible alloy welding, compressing the compression spring between the filter and the first end of the flame arrestor core 5. When the temperature in the pipeline 7 rises sharply, the fusible alloy weld between the central cylinder 10 of the flame arrestor core 5 and the circular hole 2 of the metal flat pad 1 breaks at high temperature, the flame arrestor core 5 is in an active state, the compression spring is released, and the second end of the flame arrestor core 5 seals the small vent hole 3 on the metal flat pad 1, and the compression spring limits the flame arrestor core 5 to prevent it from swinging back.

[0061] In summary, when using this invention, as follows: Figure 10 As shown, the metal flat gasket 1 is installed at the joint of adjacent pipes 7. The filter section 4 and the flame arrestor core 5 are both located inside pipes 7, with the filter section 4 located in the gas inlet direction and the second end of the flame arrestor core 5 located in the gas outlet direction. A locking mechanism 14 is provided on the outside of the joint to further connect and fix the joint of adjacent pipes 7. Under normal use, the gas enters through the left pipe 7 and is filtered by the filter section 4 to ensure its high purity. It then enters the right pipe 7 through the small vent hole 3 on the metal flat gasket 1. When high pressure or high temperature occurs in the right pipe 7, the flame arrestor core 5 moves to the left, thereby sealing the small vent hole 3 on the metal flat gasket 1. The elastic element 6 limits the flame arrestor core 5 to prevent it from swinging back, effectively ensuring the safety of pipe 7.

[0062] Since the entire gas pipeline is composed of multiple sections of pipeline 7 connected together, it has multiple joints. Each joint is provided with the semiconductor sealing structure of the present invention. The joints are effectively sealed by multiple semiconductor sealing structures. In the event of high pressure or high temperature, the multiple semiconductor sealing structures sequentially provide flame arrest, effectively preventing the spread of fire or heat waves, thereby ensuring the safety of pipeline 7 and having good flame arresting performance.

[0063] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A sealing structure based on a method for fabricating semiconductor seals, characterized in that, The method for preparing a semiconductor sealing component includes: preparing a filter section using metal powder, sintering the metal powder, and then performing preliminary shaping processes such as carburizing, quenching, and tempering; followed by machining and surface treatment to complete the finished filter section, with the filter section having micropores distributed on its wall surface; wherein the metal powder is composed of C, Ni, Si, Mn, P, Cu, and Fe elements, with the following corresponding contents: C: 0.01%–0.03%; Ni: 10%–15%; Si: 0.8%–1%; Mn: 0.8%–1.5%; P: 0.1%–0.8%; Cu: 5%–8%; the remainder being Fe element; The sealing structure includes: A metal flat pad has a circular hole at its center and multiple small vent holes arranged at intervals along the circumference of the circular hole to serve as channels for the flow of gas medium. The filter section is located on one side of the metal flat pad in the gas inlet direction. The filter section is formed by sintering metal powder and the wall surface is covered with micropores. A flame-arresting core, the middle part of which passes through the circular hole and is inserted into the metal flat pad and the filter section, the first end of the flame-arresting core is disposed at the second end of the filter section, and the second end of the flame-arresting core is located on the other side of the metal flat pad; An elastic element, one end of which is fixedly disposed inside the first end of the flame arrestor core, and the other end of which is disposed inside the filter section, cooperates with the flame arrestor core through the elastic element to perform pipeline flame arrest. The cross-section of the flame-arresting core is an I-shaped structure, with both its first and second ends being circular plate-shaped structures, and the first and second ends being connected as one unit by a central cylinder; one end of the elastic element is fixedly disposed inside the first end of the flame-arresting core. The elastic element is a five-claw spring; the fixed end of the five-claw spring is connected to the connection between the first end of the flame arrestor core and the central cylinder; the movable end is located in the first groove of the filter section during normal use, and when the environmental pressure in the pipeline suddenly increases or the temperature of the pipeline rises sharply, the movable end is located in the second groove of the filter section.

2. The sealing structure as described in claim 1, characterized in that, The porosity of the micropores in the filter section is 10% to 22%.

3. The sealing structure as described in claim 1, characterized in that, The filter section adopts a cylindrical structure, with its first end fixed to the air inlet side of the metal flat pad, and multiple small vent holes on the metal flat pad located inside the first end of the filter section.

4. The sealing structure as described in claim 3, characterized in that, A first groove is provided in the middle of the filter section to accommodate the elastic element, providing energy storage space and initial position limitation for the elastic element; a second groove is provided on the inner side of the second end of the filter section to limit the elastic element.

5. The sealing structure as described in claim 1, characterized in that, The first end of the flame arrestor core is a flat metal sheet, and the second end is a raised metal sheet with sealing properties. The diameter of the flat metal sheet is the same as the diameter of the filter part, and the diameter of the raised metal sheet is larger than the diameter of the circle containing the multiple small vent holes on the metal flat pad.

6. The sealing structure as described in claim 1, characterized in that, The elastic element adopts a four-bar spring, each spring adopting an approximately V-shaped structure; the first end of the four-bar spring is located on the inner circumferential side of the first end of the flame arrester core, and the second end is close to the central cylinder of the flame arrester core. The V-shaped protrusion is located in the first groove of the filter section during normal use. When the environmental pressure in the pipeline suddenly increases or the temperature of the pipeline rises sharply, the V-shaped protrusion is located in the second groove of the filter section.

7. The sealing structure as described in claim 1, characterized in that, The elastic element is a compression spring; the compression spring passes through the central cylinder of the flame arrester core, and the first end of the compression spring is fixed inside the first end of the flame arrester core, and the second end is fixed to one side of the metal flat pad; during normal use, the compression spring is in an energy storage state, and the central cylinder of the flame arrester core and the circular hole of the metal flat pad are fixed by welding with a fusible alloy, compressing the compression spring between the filter part and the first end of the flame arrester core.

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