A heavy ion scanning beam transport vacuum chamber based on composite flange profiled wall

Abstract

The present invention relates to a heavy ion scanning beam transport vacuum chamber based on a composite flange profiled wall, comprising a channel, a vacuum chamber wall surrounding the channel, and a quick-connect end flange; heavy auxiliary equipment without positional accuracy and high-precision measuring instruments are installed on the above-mentioned vacuum chamber wall. The heavy auxiliary equipment has a large torque on the vacuum chamber wall and the mounting flange, so a thin wall and reinforcing rib structure are used on the installation side of these equipment to ensure the rigidity of the chamber body and reduce the weight. The wall thickness of the vacuum chamber wall on the side where the measuring instrument is installed is relatively thick, and the side wall and flange are integrated to reduce deformation. The problem of welding deformation existing in the past when welding flanges on the vacuum chamber wall to connect these devices, causing displacement errors of auxiliary equipment, is solved. The vacuum chamber described in the present invention compensates for the thin-wall side rigidity through structural design, so that the vacuum chamber as a whole has balanced strength, and can achieve overall deformation at a 360° gravity isotropic installation position to meet the accuracy requirements of heavy ion scanning beam transport.