A lamination device for manufacturing integrated circuit chips
By designing a film pressing device for integrated circuit chip manufacturing, including a transportation mechanism, a flip mechanism and a film pressing mechanism, the problem that the prior art cannot simultaneously press multiple surfaces and ensure the consistent position of the chip and film is achieved, and efficient double-sided film pressing and good coating effect are achieved.
Patent Information
- Application Number
- CN202410930205.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-11
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2044-07-11
AI Technical Summary
The prior art cannot simultaneously perform film compression processing on multiple surfaces of an integrated circuit chip, and cannot ensure that the chip and film are in a consistent position when coating, resulting in low processing efficiency and poor coating effect.
A film pressing device for integrated circuit chip manufacturing is designed, including a transportation mechanism, a flip mechanism and a film pressing mechanism. The transport mechanism and the flip mechanism cooperate with each other to flip the chip during the chip transportation process, and keep the chip suspended through multiple sets of flip rods to buffer the chip after the film is pressed. The film pressing mechanism uses a film pressing roller that presses back and forth, and controls the downward pressure distance of the film pressing roller by adjusting the cam length to ensure that the chip remains in the center state.
The film compression treatment of both sides of the chip is achieved, which improves the processing efficiency and coating effect. At the same time, the yield and film compression effect of the device are ensured through suspended buffering and centralized maintenance.