Two-degree-of-freedom precision positioning platform based on compliant mechanism

Abstract

The invention provides a two-degree-of-freedom precision positioning platform based on a compliant mechanism, which comprises a mounting base, two zero-stiffness mechanisms, four decoupling-guiding mechanisms and two balance mechanisms, and is characterized in that each zero-stiffness mechanism is connected with a workbench through one decoupling-guiding mechanism; the two zero-rigidity mechanisms and the two decoupling-guiding mechanisms are combined to form two constant force output mechanisms respectively, the two constant force output mechanisms are located on an X axis and a Y axis respectively, the X axis is perpendicular to the Y axis, each balance mechanism is connected with the workbench through one decoupling-guiding mechanism, and the balance mechanisms are connected with the workbench through the other decoupling-guiding mechanism. The two balance mechanisms are located on the X axis and the Y axis respectively, and the two balance mechanisms and the two zero-rigidity mechanisms are arranged around the workbench. By means of the precise positioning platform, large-stroke high-precision positioning can be conducted on the X-axis freedom degree and the Y-axis freedom degree respectively, and the working area of the precise positioning platform can be increased.

Description

Technical Field

[0001] The invention relates to the field of precision positioning technology, and in particular to a two-degree-of-freedom precision positioning platform based on a compliant mechanism. Background Art

[0002] As a core technical component in the field of micro-manipulation, precision positioning platforms are crucial to advanced industries such as precision machining of vehicle components, optical engineering, measurement technology, and bioengineering. With the technological advancement and functional enhancement in these fields, increasingly stringent requirements have been placed on the performance parameters of precision positioning platforms, including: improving accuracy to micro-nano or even higher levels, increasing the effective travel range, optimizing the structure to make it compact, improving stability, and accelerating the response rate of the system.

[0003] Traditional technology uses servo motors, ball screws and rigid connecting rods as the basis to build positioning platforms. Due to the existence of gaps, friction and wear and other unfavorable factors, it is difficult to achieve high-precision positioning. In order to meet the high-precision technical requirements, a compliant mechanism is usually selected as the transmission mechanism of the precision positioning platform. Compared with traditional transmission devices, the compliant mechanism uses the elastic deformation of flexible components to transmit motion and force. It has many advantages such as no friction loss, high resolution, high precision, fast response and compact structure, and is particularly good at achieving precise control in precision engineering applications.

[0004] At present, the design and research of precision positioning platforms mainly focuses on the problems of limited motion range and large displacement coupling. It is impossible to achieve motion transmission and decoupling at the same time, and it is difficult to meet the requirements of precision positioning platforms in practical applications. Summary of the invention

[0005] Based on this, the purpose of the present invention is to provide a two-degree-of-freedom precision positioning platform based on a compliant mechanism to solve the deficiencies in the prior art.

[0006] To achieve the above-mentioned object, the present invention provides a two-degree-of-freedom precision positioning platform based on a compliant mechanism, comprising a mounting base, two zero-rigidity mechanisms arranged on the mounting base, four decoupling-guiding mechanisms and two balancing mechanisms; Each of the zero-rigidity mechanisms is connected to the workbench through a decoupling-guide mechanism, and two of the zero-rigidity mechanisms and two of the decoupling-guide mechanisms are respectively combined to form two constant-force output mechanisms, and the two constant-force output mechanisms are respectively located on the X-axis and the Y-axis, and the X-axis and the Y-axis are perpendicular to each other. Each of the balancing mechanisms is connected to the workbench through a decoupling-guide mechanism, and the two balancing mechanisms are respectively located on the X-axis and the Y-axis, and the two balancing mechanisms and the two zero-rigidity mechanisms are arranged around the workbench; Among them, the center point of the workbench is the coordinate origin, the two zero-rigidity mechanisms are respectively used to output constant force to the workbench along the X-axis and the Y-axis, the decoupling-guide mechanism is used to couple the influence of forces in other directions on the workbench when the workbench is subjected to forces on the X-axis or the Y-axis, and the two balancing mechanisms are respectively used to balance the constant forces on the X-axis and the Y-axis.

[0007] The beneficial effects of the present invention are as follows: by arranging a zero stiffness mechanism, a decoupling-guide mechanism and a balancing mechanism on the mounting base, the two zero stiffness mechanisms are respectively connected to the workbench through a decoupling-guide mechanism, and the two balancing mechanisms are respectively connected to the workbench through a decoupling-guide mechanism, and the zero stiffness mechanism is combined with the matching decoupling-guide mechanism to form a constant force output mechanism, the two constant force output mechanisms are respectively located on the X-axis and the Y-axis, and the constant force is output to the workbench respectively through the zero stiffness mechanisms on the X-axis and the Y-axis, so that the workbench can perform high-precision positioning with a large stroke in the two degrees of freedom of the X-axis and the Y-axis without the aid of a force controller, which is beneficial to increasing the working area of ​​the precision positioning platform. At the same time, when the constant force is output to the workbench in the X-axis or Y-axis direction, the influence of the force in other directions on the workbench can be coupled through the corresponding decoupling-guide mechanism, so as to realize motion transmission and decoupling, and assist the workbench in performing precision positioning with a large stroke in the two degrees of freedom of the X-axis and the Y-axis.

[0008] Preferably, the zero-stiffness mechanism includes a first Z-shaped beam, a first steady-state beam and a first guide beam, one end of the first guide beam is connected to the workbench through the decoupling-guiding mechanism, the two ends of the first steady-state beam are respectively connected to the first guide beam and the mounting base, and the two ends of the first Z-shaped beam are respectively connected to the first guide beam and the mounting base.

[0009] Preferably, one end of the first stable beam away from the first guide beam is tilted toward the workbench, and the number of the first stable beams is two, and the two first stable beams are symmetrically arranged with the first guide beam as the center axis.

[0010] Preferably, the first Z-shaped beam is a stepped structure, the number of the first Z-shaped beams is two, and the two first Z-shaped beams are symmetrically arranged with the first guide beam as the central axis.

[0011] Preferably, the decoupling-guiding mechanism comprises a prismatic joint and a leaf-shaped hinge, and both ends of the prismatic joint are respectively connected to the first guide beam and the workbench through a group of the leaf-shaped hinges.

[0012] Preferably, the number of the prismatic joints is two, the two prismatic joints are parallel to each other, and the prismatic joints are parallel to the corresponding first guide beams.

[0013] Preferably, the balancing mechanism includes a second guide beam, a second Z-shaped beam and a second stable beam, one end of the second guide beam is connected to the workbench through the decoupling-guide mechanism, the two ends of the second stable beam are respectively connected to the second guide beam and the mounting base, and the two ends of the second Z-shaped beam are respectively connected to the second guide beam and the mounting base.

[0014] Preferably, the mounting base is a semi-closed square ring structure, and a positioning hole is provided on the mounting base.

[0015] Preferably, the mounting base, the zero-rigidity mechanism, the decoupling-guiding mechanism, the balancing mechanism and the workbench are integrally formed.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A front view of a two-degree-of-freedom precision positioning platform based on a compliant mechanism provided in an embodiment of the present invention; Figure 2 A three-dimensional diagram of a two-degree-of-freedom precision positioning platform based on a compliant mechanism provided in an embodiment of the present invention.

[0018] Description of main component symbols: 10. Mounting base; 11. Fitting groove; 12. Positioning hole; 21. First stable beam; 22. First Z-beam; 23. First guide beam; 31. Prism joint; 41. Second stable beam; 42. Second Z-beam; 43. Second guide beam; 50. Workbench.

[0019] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0020] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0021] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention belongs. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0023] See also Figure 1 to Figure 2 , is a two-degree-of-freedom precision positioning platform based on a compliant mechanism in an embodiment of the present invention, comprising a mounting base 10, a zero-stiffness mechanism, a decoupling-guiding mechanism and a balancing mechanism.

[0024] Among them: the number of zero-stiffness mechanisms is two, the two zero-stiffness mechanisms are arranged on the mounting base 10, the two zero-stiffness mechanisms are respectively connected to the workbench 50 through a decoupling-guide mechanism, each zero-stiffness mechanism is combined with the matching decoupling-guide mechanism to form a constant force output mechanism. It can be understood that there are two constant force output mechanisms, and the two constant force output mechanisms are respectively located on the X-axis and the Y-axis, so that constant force can be output to the workbench 50 through the corresponding zero-stiffness mechanisms in the two degrees of freedom of the X-axis and the Y-axis. At the same time, after the zero-stiffness mechanism on the X-axis provides constant force to the workbench 50, the decoupling-guide mechanism on the Y-axis can couple the influence of the constant force provided by the zero-stiffness mechanism on the X-axis on the workbench 50 in the Y-axis direction, and the decoupling-guide mechanism on the X-axis can couple the influence of the constant force provided by the zero-stiffness mechanism on the Y-axis on the workbench 50 in the X-axis direction, so as to assist the workbench 50 in precise positioning.

[0025] In this embodiment, there are two balancing mechanisms, which are respectively located on the X-axis and the Y-axis. The two balancing mechanisms are respectively connected to the workbench 50 through different decoupling-guiding mechanisms, and the two balancing mechanisms and two zero-rigidity mechanisms are arranged around the workbench 50. The workbench 50 is located at the center position of the two-degree-of-freedom precision positioning platform based on the compliant mechanism. It should be noted that the center point of the workbench 50 is used as the coordinate origin, and then the X-axis and Y-axis are created.

[0026] It should be noted that the zero stiffness mechanism and the balancing mechanism on the X-axis are respectively located on two opposite sides of the workbench 50, the balancing mechanism on the X-axis is used to balance the constant force on the X-axis, the zero stiffness mechanism and the balancing mechanism on the Y-axis are respectively located on two opposite sides of the workbench 50, and the balancing mechanism on the Y-axis is used to balance the constant force on the Y-axis. Specifically, when the constant force is output to the workbench 50 along the X-axis direction through the zero stiffness mechanism on the X-axis, the end of the workbench 50 away from the zero stiffness mechanism can synchronously transmit the relevant constant force through the matching balancing mechanism, ensuring the existence of a constant force effect in the X-axis direction, and also improving the stability of the movement of the workbench 50 when a force is applied in the X-axis direction. Similarly, when the constant force is output to the workbench 50 along the Y-axis direction through the zero stiffness mechanism on the Y-axis, the end of the workbench 50 away from the zero stiffness mechanism can synchronously transmit the relevant constant force through the matching balancing mechanism, ensuring the existence of a constant force effect in the Y-axis direction, and also improving the stability of the movement of the workbench 50 when a force is applied in the Y-axis direction.

[0027] In this embodiment, the mounting base 10, the zero stiffness mechanism, the decoupling-guiding mechanism, the balancing mechanism and the workbench 50 are integrally formed. The workbench 50 is a cubic structure. The workbench 50 is higher than the remaining structures in the precision positioning platform, and the protruding surface of the workbench 50 is the front side, and the other side of the workbench 50 opposite to the protruding surface is the back side.

[0028] In this embodiment, the zero stiffness mechanism includes a first stable beam 21, a first Z-shaped beam 22 and a first guide beam 23, one end of the first guide beam 23 is used to input the force, and the other end of the first guide beam 23 is connected to the workbench 50 through the decoupling-guiding mechanism, one end of the first stable beam 21 is connected to the first guide beam 23, and the other end of the first stable beam 21 is connected to the mounting base 10, and the end of the first stable beam 21 away from the first guide beam 23 is inclined toward the workbench 50, one end of the first Z-shaped beam 22 is connected to the first guide beam 23, and the other end of the first Z-shaped beam 22 is connected to the mounting base 10, the first Z-shaped beam 22 is a stepped structure, and the distance between the end of the first Z-shaped beam 22 close to the first guide beam 23 and the workbench 50 is smaller than the distance between the end of the first Z-shaped beam 22 close to the mounting base 10 and the workbench 50, that is, the end of the first Z-shaped beam 22 close to the first guide beam 23 is closer to the workbench 50 than the end of the first Z-shaped beam 22 close to the mounting base 10.

[0029] It should be noted that in the zero-stiffness mechanism, when the first guide beam 23 is subjected to a force, the first steady-state beam 21 is subjected to pressure, exhibiting negative stiffness, and the first Z-beam 22 is subjected to tension, exhibiting positive stiffness. The positive stiffness and the negative stiffness offset each other, thereby obtaining a constant force acting on the workbench 50.

[0030] It should be noted that there are two first stable beams 21 and two first Z-shaped beams 22. The two first stable beams 21 and the two first Z-shaped beams 22 are symmetrically arranged with the first guide beam 23 as the central axis. The first Z-shaped beam 22 is an integrally formed rigid structure.

[0031] In this embodiment, the balancing mechanism includes a second guide beam 43, a second Z-shaped beam 42 and a second stable beam 41, one end of the second guide beam 43 is connected to the workbench 50, an interlocking groove 11 is opened on the mounting base 10, the other end of the second guide beam 43 is located in the interlocking groove 11, the second guide beam 43 and the first guide beam 23 in the same direction are located on the same straight line, one end of the second stable beam 41 is connected to the second guide beam 43, the other end of the second stable beam 41 is connected to the mounting base 10, and the end of the second stable beam 41 away from the second guide beam 43 is tilted away from the workbench 50, the second Z-shaped beam 42 is a stepped structure, and the distance between the end of the second Z-shaped beam 42 close to the second guide beam 43 and the workbench 50 is greater than the distance between the end of the second Z-shaped beam 42 away from the second guide beam 43 and the workbench 50.

[0032] It should be noted that in the X-axis direction, the second stable beam 41 is formed by translating the first stable beam 21 in the same direction along the X-axis, and in the Y-axis direction, the second stable beam 41 is formed by translating the first stable beam 21 in the same direction along the Y-axis. Similarly, in the X-axis direction, the second Z-beam 42 is formed by translating the first Z-beam 22 in the same direction along the X-axis, and in the Y-axis direction, the second Z-beam 42 is formed by translating the first Z-beam 22 in the same direction along the Y-axis.

[0033] It should be noted that there are two second stable beams 41 and two second Z-shaped beams 42 . The two second stable beams 41 and the two second Z-shaped beams 42 are symmetrically arranged with the second guide beam 43 as the central axis.

[0034] In this embodiment, the decoupling-guiding mechanism includes a prismatic joint 31 and a leaf-shaped hinge. There are two prismatic joints 31, and the two prismatic joints 31 are parallel to each other. The prismatic joints 31 are also parallel to the first guide beam 23 in the same direction. Each prismatic joint 31 is matched with two groups of leaf-shaped hinges, that is, there are four groups of leaf-shaped hinges. The two ends of the prismatic joint 31 are respectively connected to the first guide beam 23 or the second guide beam 43 and the workbench 50 through a group of leaf-shaped hinges. The structure of the combination of the prismatic joint 31 and the leaf-shaped hinge is used to realize the functions of motion transmission and decoupling. It should be noted that there are four decoupling-guiding mechanisms, and two zero-stiffness mechanisms and two balancing mechanisms are matched with one decoupling-guiding mechanism respectively.

[0035] In this embodiment, the mounting base 10 is a semi-enclosed square ring structure. A positioning hole 12 is provided on the mounting base 10 . The mounting base 10 is positioned and fixed through the positioning hole 12 so as to operate the workbench 50 .

[0036] In this embodiment, when the precision positioning platform is working, when the outer side of the first guide beam 23 on the X-axis is subjected to a driving force, the first guide beam 23 on the X-axis will move along the X-axis direction, and push the leaf-shaped hinge and the prismatic joint 31 on the X-axis to transmit the input force of the first guide beam 23 on the X-axis, and the balancing mechanism on the X-axis opposite to the workbench 50 outputs through the matching leaf-shaped hinge. Due to the restraining effect of the first Z-shaped beam 22 and the first stable beam 21 on the X-axis, the first Z-shaped beam 22 and the first stable beam 21 on the X-axis will produce elastic deformation and constrain the input force to act only in the X-axis direction.

[0037] The prismatic joint 31 on the X-axis drives the workbench 50 to translate along the X-axis direction through the matching leaf-shaped hinge. At the same time, due to the decoupling effect of the decoupling-guide mechanism on the Y-axis, it will not affect the zero-rigidity mechanism on the Y-axis to output a constant force to drive the workbench 50 to move. When the driving force on the first guide beam 23 on the X-axis is removed, the first Z-shaped beam 22, the first stable beam 21 and the leaf-shaped hinge on the X-axis will restore their original lengths, and the workbench 50 will return to the initial position under the action of the elastic force. Similarly, when the outer side of the first guide beam 23 on the Y-axis is subjected to a driving force, the workbench 50 will translate along the Y-axis direction. At the same time, due to the decoupling effect of the decoupling-guide mechanism on the X-axis, it will not affect the zero-rigidity mechanism on the X-axis to output a constant force to drive the workbench 50 to move. When the first guide beam 23 on the X-axis and the first guide beam 23 on the Y-axis are simultaneously subjected to driving forces, the workbench 50 will translate along both the X-axis and Y-axis directions.

[0038] In summary, the positive stiffness generated by the deformation of the first Z-beam 22 on the X-axis and the negative stiffness generated by the deformation displacement of the first stable beam 21 on the X-axis offset each other to achieve constant force output in the X-axis direction. Similarly, the positive stiffness generated by the deformation of the first Z-beam 22 on the Y-axis and the negative stiffness generated by the deformation displacement of the first stable beam 21 on the Y-axis offset each other to achieve constant force output in the Y-axis direction. The combination of the constant force in the X-axis direction and the constant force in the Y-axis direction enables the entire precision positioning platform to achieve two-degree-of-freedom constant force output. At the same time, when the X-axis direction provides constant force through the zero-stiffness mechanism , the decoupling-guiding mechanism on the Y-axis composed of the prismatic joint 31 on the Y-axis and the leaf-shaped hinge is used to realize the motion decoupling in the X-axis direction and the transmission of the output force in the Y-axis direction. Similarly, when the constant force in the Y-axis direction is provided by the zero-stiffness mechanism, the decoupling-guiding mechanism on the X-axis composed of the prismatic joint 31 on the X-axis and the leaf-shaped hinge is used to realize the motion decoupling in the Y-axis direction and the transmission of the output force in the X-axis direction. The combination of the decoupling guide in the X-axis direction and the decoupling guide in the Y-axis direction enables the entire precision positioning platform to realize two-degree-of-freedom precision positioning.

[0039] In the specific implementation, a zero stiffness mechanism, a decoupling-guide mechanism and a balancing mechanism are arranged on the mounting base 10, two zero stiffness mechanisms are respectively connected to the workbench 50 through a decoupling-guide mechanism, and two balancing mechanisms are respectively connected to the workbench 50 through a decoupling-guide mechanism, and the zero stiffness mechanism is combined with the matching decoupling-guide mechanism to form a constant force output mechanism. The two constant force output mechanisms are respectively located on the X-axis and the Y-axis. Constant force is output to the workbench 50 through the zero stiffness mechanisms on the X-axis and the Y-axis, respectively, so that the workbench 50 can perform high-precision positioning with a large stroke in the two degrees of freedom of the X-axis and the Y-axis without the aid of a force controller, which is beneficial to increase the working area of ​​the precision positioning platform. At the same time, when a constant force is output to the workbench 50 in the X-axis or Y-axis direction, the influence of the force in other directions on the workbench 50 can be coupled through the corresponding decoupling-guide mechanism, so as to realize motion transmission and decoupling, and assist the workbench 50 in performing precision positioning with a large stroke in the two degrees of freedom of the X-axis and the Y-axis.

[0040] It should be noted that the above implementation process is only for illustrating the feasibility of the present application, but it does not mean that the two-degree-of-freedom precision positioning platform based on the compliant mechanism of the present application has only the above-mentioned only implementation process. On the contrary, as long as the two-degree-of-freedom precision positioning platform based on the compliant mechanism of the present application can be implemented, it can be included in the feasible implementation plan of the present application.

[0041] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0042] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the attached claims.

Claims

1. A two-degree-of-freedom precision positioning platform based on a compliant mechanism, characterized in that: It comprises a mounting base, two zero-stiffness mechanisms arranged on the mounting base, four decoupling-guiding mechanisms and two balancing mechanisms; Each of the zero-rigidity mechanisms is connected to the workbench through a decoupling-guide mechanism, and two of the zero-rigidity mechanisms and two of the decoupling-guide mechanisms are respectively combined to form two constant-force output mechanisms, and the two constant-force output mechanisms are respectively located on the X-axis and the Y-axis, and the X-axis and the Y-axis are perpendicular to each other. Each of the balancing mechanisms is connected to the workbench through a decoupling-guide mechanism, and the two balancing mechanisms are respectively located on the X-axis and the Y-axis, and the two balancing mechanisms and the two zero-rigidity mechanisms are arranged around the workbench; Among them, the center point of the workbench is the coordinate origin, the two zero-rigidity mechanisms are respectively used to output constant force to the workbench along the X-axis and the Y-axis, the decoupling-guide mechanism is used to couple the influence of forces in other directions on the workbench when the workbench is subjected to forces on the X-axis or the Y-axis, and the two balancing mechanisms are respectively used to balance the constant forces on the X-axis and the Y-axis.

2. The two-degree-of-freedom precision positioning platform based on a compliant mechanism according to claim 1, characterized in that: The zero-stiffness mechanism includes a first Z-shaped beam, a first stable beam and a first guide beam, one end of the first guide beam is connected to the workbench through the decoupling-guiding mechanism, the two ends of the first stable beam are respectively connected to the first guide beam and the mounting base, and the two ends of the first Z-shaped beam are respectively connected to the first guide beam and the mounting base.

3. The two-degree-of-freedom precision positioning platform based on a compliant mechanism according to claim 2, characterized in that: One end of the first stable beam away from the first guide beam is tilted toward the workbench. There are two first stable beams, and the two first stable beams are symmetrically arranged with the first guide beam as the center axis.

4. The two-degree-of-freedom precision positioning platform based on a compliant mechanism according to claim 2, characterized in that: The first Z-shaped beam is a stepped structure. There are two first Z-shaped beams, and the two first Z-shaped beams are symmetrically arranged with the first guide beam as the central axis.

5. The two-degree-of-freedom precision positioning platform based on a compliant mechanism according to claim 2, characterized in that: The decoupling-guiding mechanism comprises a prismatic joint and a leaf-shaped hinge, and two ends of the prismatic joint are respectively connected to the first guide beam and the workbench through a group of the leaf-shaped hinges.

6. The two-degree-of-freedom precision positioning platform based on a compliant mechanism according to claim 5, characterized in that: The number of the prismatic joints is two, the two prismatic joints are parallel to each other, and the prismatic joints are parallel to the corresponding first guide beam.

7. The two-degree-of-freedom precision positioning platform based on a compliant mechanism according to claim 2, characterized in that: The balancing mechanism includes a second guide beam, a second Z-shaped beam and a second stable beam, one end of the second guide beam is connected to the workbench through the decoupling-guiding mechanism, the two ends of the second stable beam are respectively connected to the second guide beam and the mounting base, and the two ends of the second Z-shaped beam are respectively connected to the second guide beam and the mounting base.

8. The two-degree-of-freedom precision positioning platform based on a compliant mechanism according to claim 1, characterized in that: The mounting base is a semi-closed square ring structure, and a positioning hole is provided on the mounting base.

9. The two-degree-of-freedom precision positioning platform based on a compliant mechanism according to claim 1, characterized in that: The mounting base, the zero-rigidity mechanism, the decoupling-guiding mechanism, the balancing mechanism and the workbench are integrally formed.

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