Detection device and detection method based on laser intensity in vacuum environment

Abstract

The invention discloses a laser intensity detection device and method based on a vacuum environment. The laser intensity detection device comprises a cavity, a photoelectric sensor and a detector. At least two through holes and an air exhaust hole are formed in the periphery of the cavity; wherein a channel for laser transmission is formed between the two through holes, and the two through holes can be communicated with an external device through a pipeline; the air exhaust hole is connected with external vacuumizing equipment; the photoelectric sensor is movably installed in the cavity and can be switched to the middle of the channel so as to cut off a measurement state of a light path or switch to an idle state that the light path of the channel is smooth. And the detector is electrically connected with the photoelectric sensor. The invention relates to the technical field of laser intensity detection, through the arrangement, the intensity of the laser formed in a vacuum environment is detected by switching the position state of the photoelectric sensor, the vacuum or light path does not need to be damaged, and the detection of the light intensity is completed on the premise that the original light path in equipment is not interfered.

Description

Technical Field

[0001] The present invention belongs to the field of optical communication and relates to a light intensity detection technology, in particular to a detection device and a detection method based on laser intensity in a vacuum environment. Background Art

[0002] In certain scenarios, people often need to detect the intensity of a laser in a certain band in the current environment, so as to cooperate with the debugging method to ensure that the specific laser will not interfere with other components while being used, that is, the intensity of the specific laser is within a predetermined threshold range. Specifically, in the semiconductor manufacturing industry, with the gradual improvement of chip manufacturing requirements and precision, it is usually necessary to use a controlled laser to emit laser pulses to bombard metal target droplets to obtain extreme ultraviolet light, and then use extreme ultraviolet light to complete subsequent lithography operations. However, since extreme ultraviolet light can only propagate in a vacuum, how to quickly obtain extreme ultraviolet light that can meet application requirements and will not cause damage to other components in the equipment during debugging and use has become a technical problem that needs to be solved. Similarly, in optical research and operations from the vacuum ultraviolet band to the soft X-ray band and in special atmospheres, it is also necessary to complete the detection of light intensity without affecting the vacuum or low-pressure atmosphere.

[0003] Therefore, a detection device and a detection method based on laser intensity in a vacuum environment are needed to solve the above problems. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art of measuring laser intensity in a vacuum; to this end, the present invention proposes a detection device and a detection method based on laser intensity in a vacuum environment, so as to complete the detection of the intensity of the laser formed in a vacuum environment without destroying the vacuum or changing the optical path, so as to quickly obtain the required specific intensity of laser. The present invention provides a cavity and a photoelectric sensor, and two through holes and an exhaust hole are provided on the periphery of the cavity for forming a laser passage channel, and the two through holes can be connected to an external device to form a closed chamber, so that a vacuum environment can be formed by connecting a vacuum pumping device with the help of the exhaust hole, thereby meeting the needs of specific laser transmission and intensity detection, and the laser intensity is converted into an electrical signal and a laser output respectively by means of the positional relationship between the photoelectric sensor and the channel, and then the laser intensity can be indirectly reflected by the detector reading with the help of a detector electrically connected to the photoelectric sensor, that is, in the above process, the laser intensity in the vacuum environment can be detected by switching the position state of the photoelectric sensor, without breaking the vacuum or changing the optical path, so that the light intensity detection is completed without interfering with the original optical path inside the device, so as to achieve the purpose of facilitating and quickly obtaining a laser with a specific intensity.

[0005] To achieve the above-mentioned object, a first aspect of the present invention provides a detection device based on the intensity of laser in a vacuum environment, comprising a cavity, a photoelectric sensor and a detector;

[0006] The periphery of the cavity is provided with at least two through holes located in the same horizontal plane and one air extraction hole;

[0007] Wherein, a channel for laser transmission is formed between the two through holes, and the two through holes can be connected to an external device through a pipeline, so that the cavity forms a closed chamber with one air extraction hole;

[0008] The air extraction hole is connected to an external vacuum extraction device to form a vacuum environment inside the closed chamber;

[0009] The photoelectric sensor is movably mounted in the cavity and can be switched to a measuring position where the light path is cut off in the middle of the channel or to an idle state where the light path of the channel is unobstructed;

[0010] When the photoelectric sensor is switched to the middle of the channel, it is used to receive the laser transmitted into the channel and form corresponding parameter information;

[0011] The detector is electrically connected to the photoelectric sensor for visual reading of the parameter information.

[0012] Furthermore, a rotation switching component is provided on the top of the cavity;

[0013] One end of the rotation switching component extends into the cavity and is connected to the photoelectric sensor for switching the relative position between the photoelectric sensor and the channel.

[0014] Furthermore, the rotary switching assembly includes a magnetic fluid rotary sealing device and a supporting connecting plate;

[0015] The output end of the magnetic fluid rotary sealing device extends into the cavity and is fixedly connected to the supporting connecting plate to drive the supporting connecting plate to rotate under the vacuum environment;

[0016] The photoelectric sensor is arranged on one side of the supporting connecting plate;

[0017] The side of the supporting connecting plate on which the photoelectric sensor is mounted can be rotated to be perpendicular or parallel to the channel;

[0018] The supporting connection plate is made of polytetrafluoroethylene, and an insulating colloid is provided at the connection between the supporting connection plate and the photoelectric sensor.

[0019] Furthermore, a limit plate is fixedly installed inside the cavity;

[0020] When the supporting connecting plate rotates to abut against the limiting plate, the supporting connecting plate is just perpendicular to the channel.

[0021] Further, the cavity includes a shell with a top opening and a knife-edge flange;

[0022] The shell is made of stainless steel, and the through hole and the air extraction hole are both arranged on the shell;

[0023] The knife-edge flange is sealed and connected to the housing;

[0024] One end of the rotation switching component extends from the knife-edge flange to the inside of the housing to be connected to the photoelectric sensor.

[0025] Furthermore, a connection port connected to the detector is formed on the upper surface of the knife-edge flange;

[0026] The connection port is made of insulating ceramic material.

[0027] Further, the photoelectric sensor is configured as a photodiode;

[0028] The detector is configured as a high-precision current reading meter.

[0029] Furthermore, there are three through holes, two of which form channels for laser transmission, an observation window is arranged inside the other through hole, and a cover plate is arranged on the outer side of the observation window.

[0030] Furthermore, a lifting assembly is provided at the bottom of the cavity for adjusting the height of the cavity so that the laser can be received by the photoelectric sensor when it is transmitted to the inside of the channel.

[0031] On the other hand, the present invention further proposes a method for detecting laser intensity in a vacuum environment, which uses the detection device for laser intensity in a vacuum environment described in the above embodiment, and specifically includes the following steps:

[0032] The two through holes for forming the passages are connected to two external devices respectively, so that the cavity forms a closed chamber having one of the air extraction holes;

[0033] Connect the vacuum hole to an external vacuum device to create a vacuum environment in the closed chamber;

[0034] A specific laser is formed in one of the external devices, and the specific laser is transmitted into the channel and received by the photoelectric sensor;

[0035] The photoelectric sensor inputs the parameter information of the received specific laser into the detector, and the intensity of the specific laser is reflected according to the reading of the detector.

[0036] Compared with the prior art, the present invention has the following beneficial effects:

[0037] A cavity and a photoelectric sensor are provided, and two through holes and an exhaust hole are provided on the periphery of the cavity for forming a laser passage channel, and the two through holes can be connected to an external device to form a closed chamber, so that a vacuum environment can be formed by connecting a vacuum pumping device with the help of the exhaust hole, thereby meeting the needs of specific laser transmission and intensity detection, and the laser intensity is converted into an electrical signal and a laser output respectively by means of the positional relationship between the photoelectric sensor and the channel, and then with the help of a detector electrically connected to the photoelectric sensor, the laser intensity can be indirectly reflected by the detector indication, thereby achieving the purpose of facilitating the operator to quickly obtain a specific laser within a predetermined threshold through multiple debugging, so that the obtained specific laser can meet the application requirements while ensuring that it will not cause damage to internal components.

[0038] Moreover, in the above process, the intensity of the laser formed in the vacuum environment can be detected by switching the position state of the photoelectric sensor without breaking the vacuum or changing the optical path. This enables the detection of light intensity without interfering with the original optical path inside the equipment, thereby facilitating the rapid acquisition of lasers of a specific intensity, thereby ensuring that the laser will not cause damage to internal equipment during subsequent applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0040] Figure 1 It is a schematic diagram of the structure of a detection device for laser intensity in a vacuum environment according to an embodiment of the present invention;

[0041] Figure 2 It is a front cross-sectional view of a photoelectric sensor in a detection device based on laser intensity in a vacuum environment in one embodiment of the present invention when it is placed in the middle of a channel;

[0042] Figure 3 A side cross-sectional view of a photoelectric sensor in a device for detecting the intensity of laser light formed in a vacuum environment according to an embodiment of the present invention when the photoelectric sensor is placed in the middle of a channel;

[0043] Figure 4It is a front cross-sectional view of a photoelectric sensor and a channel optical path in an idle state in a detection device based on laser intensity in a vacuum environment in one embodiment of the present invention;

[0044] Figure 5 The figure is a flow chart of a method for detecting the intensity of a laser in a vacuum environment in another embodiment of the present invention.

[0045] Figure Number:

[0046] 1. Cavity; 11. Shell; 12. Knife-edge flange; 2. Photoelectric sensor; 3. Detector; 4. Through hole; 5. Exhaust hole; 6. Rotary switching assembly; 61. Magnetic fluid rotary sealing device; 62. Support connecting plate; 7. Connection port; 8. Limit plate. DETAILED DESCRIPTION

[0047] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] Embodiment 1

[0049] See also Figures 1 to 4 As shown, an embodiment of the first aspect of the present invention provides a detection device based on laser intensity in a vacuum environment, including a cavity 1, a photoelectric sensor 2 and a detector 3.

[0050] The periphery of the cavity 1 is provided with at least two through holes 4 and one air extraction hole 5 located in the same horizontal plane.

[0051] It should be noted that a channel for laser transmission is formed between the two through holes 4, and the two through holes 4 can be connected to an external device through a pipeline, so that the cavity 1 forms a closed chamber with an exhaust hole 5, so that air can be subsequently evacuated through the exhaust hole 5 to form a vacuum environment in the closed chamber for the transmission of specific laser (extreme ultraviolet light).

[0052] Specifically, the exhaust hole 5 is connected to an external vacuum pumping device to form a vacuum environment inside the closed chamber.

[0053] It should also be noted that the exhaust hole 5 and the through hole 4 are connected to an external vacuum pumping device or an external device through a flange to ensure the stability of the vacuum environment in the closed chamber.

[0054] In addition, the photoelectric sensor 2 is movably installed in the cavity 1 and can be switched to a measuring state in which the optical path is cut off in the middle of the channel or to an idle state in which the optical path of the channel is unobstructed, so as to receive a specific laser or output a specific laser respectively.

[0055] Specifically, when the photoelectric sensor 2 is switched to the middle of the channel, it is used to receive the laser transmitted into the channel (ie, the specific laser formed in a vacuum environment) and form corresponding parameter information.

[0056] The detector 3 is electrically connected to the photoelectric sensor 2 and is used for visual reading of the parameter information. The photoelectric sensor 2 converts the light intensity signal into an electrical signal, and the detector 3 reads the electrical signal. The magnitude of the specific laser intensity is indirectly reflected by the indication of the current displayed by the detector 3 (i.e., the greater the laser intensity, the greater the indication, and the smaller the laser intensity, the smaller the indication), so that the operator can debug the laser intensity according to the indication, thereby facilitating the rapid acquisition of a laser of a specific intensity to ensure that the laser meets the application requirements while not causing damage to the internal equipment.

[0057] The device is provided with a cavity 1 and a photoelectric sensor 2, and two through holes 4 and an exhaust hole 5 for forming a laser passage channel are provided on the periphery of the cavity 1, and the two through holes 4 can be connected with an external device to form a closed chamber, so that a vacuum environment can be formed by connecting a vacuum pumping device with the help of the exhaust hole 5, thereby meeting the needs of specific laser transmission and intensity detection, and by means of the positional relationship between the photoelectric sensor 2 and the channel (that is, the measurement state when the photoelectric sensor 2 is located in the middle of the channel or the idle state with the channel light path unobstructed), the laser intensity is converted into an electrical signal and the output of the laser respectively, and then by means of a detector 3 electrically connected to the photoelectric sensor 2, the laser intensity can be indirectly reflected by the reading of the detector 3, so as to achieve the purpose of facilitating the operator to quickly obtain a specific laser within a predetermined threshold through multiple debugging, so that the obtained specific laser can meet the application requirements while ensuring that it will not cause damage to internal components.

[0058] Moreover, in the above process, the intensity of the laser formed in the vacuum environment can be detected by switching the position state of the photoelectric sensor 2 without breaking the vacuum or changing the optical path, thereby achieving the detection of light intensity without interfering with the original optical path inside the device.

[0059] In a further embodiment, in order to facilitate the control of the switching of the positional relationship between the photoelectric sensor 2 and the channel, a rotation switching component 6 is additionally provided.

[0060] Specifically, a rotation switching component 6 is provided on the top of the cavity 1, one end of the rotation switching component 6 extends into the cavity 1 and is connected to the photoelectric sensor 2 for switching the relative position between the photoelectric sensor 2 and the channel.

[0061] The rotation switching assembly 6 includes a magnetic fluid rotation sealing device 61 and a supporting connecting plate 62 .

[0062] The output end of the magnetic fluid rotary sealing device 61 extends into the cavity 1 and is fixedly connected to the supporting connecting plate 62 to drive the supporting connecting plate 62 to rotate under the vacuum environment.

[0063] Specifically, the photoelectric sensor 2 is arranged on one side of the supporting connecting plate 62 .

[0064] It should be noted that the magnetic fluid rotary sealing device 61 utilizes the characteristics of the magnetic fluid, and the magnet fixes the magnetic fluid around the rotating shaft to form a liquid "O-ring". The magnetic circuit is formed by the magnet, the magnetic pole and the shaft, and the magnetic fluid is injected between the magnetic pole and the shaft to form several sections of liquid sealing rings. Therefore, even if the shaft rotates at a high speed, there is no friction between the solids. It is a dynamic sealing part with a very long service life. It is commonly used in the sealing of vacuum equipment such as single crystal silicon furnaces, vacuum brazing furnaces, vacuum melting furnaces, chemical vapor deposition, ion plating, liquid crystal regeneration, as well as the sealing of high-temperature and high-pressure equipment and equipment with high environmental requirements. This is a prior art, which can ensure the vacuum inside the cavity 1 while driving the photoelectric sensor 2 to switch positions by setting a magnetic fluid rotary sealing device 61.

[0065] In this embodiment, the side of the supporting connecting plate 62 on which the photoelectric sensor 2 is mounted can be rotated to be perpendicular or parallel to the channel. For example, when the supporting connecting plate 62 is perpendicular to the channel, the photoelectric sensor 2 can just receive a specific laser (such as Figure 2 and Figure 3 As shown, the photoelectric sensor 2 is in a measuring state at this time), and when the supporting connecting plate 62 is parallel to the channel, the laser can smoothly pass through the channel and does not contact the photoelectric sensor 2 (as shown Figure 4 As shown, the photoelectric sensor 2 is in an idle state at this time).

[0066] Among them, the supporting connecting plate 62 is set to be made of polytetrafluoroethylene material, and an insulating colloid is set at the connection between the supporting connecting plate 62 and the photoelectric sensor 2. By setting an insulating colloid at the connection between the supporting connecting plate 62 and the photoelectric sensor 2, the magnetic fluid rotating sealing device 61 is prevented from generating electric charges when driving the supporting connecting plate 62 to rotate, thereby affecting the electrical signal formed by the photoelectric sensor 2 when receiving the laser, resulting in inaccurate readings read by the detector 3.

[0067] In this embodiment, a limiting plate 8 is fixedly installed inside the cavity 1 .

[0068] When the support connecting plate 62 rotates to abut against the limiting plate 8, the support connecting plate 62 is exactly perpendicular to the channel, and the support connecting plate 62 is limited by the limiting plate 8 to ensure that after the support connecting plate 62 rotates to a specific position, the photoelectric sensor 2 can just receive the specific laser (that is, the photoelectric sensor 2 is located in the middle of the channel and is in a measuring state of cutting off the light path), thereby ensuring the detection effect of the laser intensity.

[0069] In other embodiments, the chamber 1 includes a shell 11 with an opening at the top and a knife-edge flange 12.

[0070] The shell 11 is made of stainless steel, and the through hole 4 and the air extraction hole 5 are both arranged on the shell 11 . The knife-edge flange 12 is sealed and connected to the shell 11 to improve the sealing effect.

[0071] Furthermore, one end of the rotation switching assembly 6 extends from the knife-edge flange 12 to the inside of the housing 11 to be connected to the photoelectric sensor 2 .

[0072] In addition, if Figure 2 As shown, a connection port 7 connected to the detector 3 is formed on the upper surface of the knife-edge flange 12, and the connection port 7 is set to an insulating ceramic material to ensure that the parameter information received by the detector 3 will not be affected by charged particles in the air, thereby ensuring measurement accuracy.

[0073] Wherein, the photoelectric sensor 2 is configured as a photodiode, and the detector 3 is configured as a high-precision current reading meter.

[0074] In a further embodiment, three through holes 4 are provided, two of which form channels for laser transmission, an observation window (not shown in the figure) is provided inside the other through hole 4, and a cover plate is provided on the outer side of the observation window.

[0075] Preferably, a lifting assembly (not shown in the figure) is provided at the bottom of the cavity 1 for adjusting the height of the cavity 1 so that the laser can be received by the photoelectric sensor 2 when it is transmitted into the channel.

[0076] Embodiment 2

[0077] like Figure 5As shown, this embodiment further proposes a detection method based on laser intensity in a vacuum environment on the basis of the first embodiment, so as to better facilitate the operator to debug and quickly obtain a specific laser within a predetermined threshold range, so that the specific laser can meet the application requirements while ensuring that it does not cause damage to internal components.

[0078] A method for detecting laser intensity in a vacuum environment specifically comprises the following steps:

[0079] The two through holes 4 for forming the passages are connected to two external devices respectively, so that the cavity 1 forms a closed chamber with one air extraction hole 5 .

[0080] The vacuum hole 5 is connected to an external vacuum device to form a vacuum environment in the closed chamber to meet the needs of specific laser transmission and applications.

[0081] A specific laser is formed in one of the external devices, and the specific laser is transmitted into the channel and received by the photoelectric sensor 2. It should be noted that a filter should be installed in the external device so that a laser of a specific wavelength band (i.e., the specific laser) is transmitted into the channel, so that it is received by the photoelectric sensor 2 and the thickness intensity is measured.

[0082] The photoelectric sensor 2 inputs the parameter information of the received specific laser into the detector 3, and the intensity of the specific laser is reflected according to the indication of the detector 3. Therefore, the specific laser of the corresponding intensity can be obtained by setting the indication of the detector 3, such as when recording the intensity of the specific laser when it meets the application requirements and does not damage the internal components, the intensity is converted into the indication of the detector 3, and then the specific laser is debugged based on the indication of the detector 3, so as to quickly obtain the specific laser that can meet the application requirements and does not damage the internal components, so as to achieve the purpose of convenient use and easy detection and debugging.

[0083] In addition, in the above process, the detection of laser intensity in a vacuum environment only needs to be completed by controlling the position state of the switching photoelectric sensor 2, that is, the original optical path and vacuum environment of the equipment will not be destroyed. Therefore, the function of light intensity detection is realized without interfering with the original optical path inside the equipment.

[0084] The above embodiments are only used to illustrate the technical method of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical method of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the present invention.

Claims

1. A detection device based on laser intensity in a vacuum environment, It is characterized in that It comprises a cavity (1), a photoelectric sensor (2) and a detector (3); The periphery of the cavity (1) is provided with at least two through holes (4) located in the same horizontal plane and an air extraction hole (5); A channel for laser transmission is formed between the two through holes (4), and the two through holes (4) can be connected to an external device through a pipeline, so that the cavity (1) forms a closed chamber with one exhaust hole (5); The air extraction hole (5) is connected to an external vacuum extraction device and is used to form a vacuum environment inside the sealed chamber; The photoelectric sensor (2) is movably installed in the cavity (1) and can be switched to the middle of the channel to cut off the light path for measurement or switched to an idle state in which the light path of the channel is unobstructed; When the photoelectric sensor (2) is switched to the middle of the channel, it is used to receive the laser transmitted into the channel and form corresponding parameter information; The detector (3) is electrically connected to the photoelectric sensor (2) for visual reading of the parameter information.

2. The detection device based on laser intensity in a vacuum environment according to claim 1, It is characterized in that A rotation switching component (6) is provided on the top of the cavity (1); One end of the rotation switching component (6) extends into the interior of the cavity (1) and is connected to the photoelectric sensor (2) for switching the relative position between the photoelectric sensor (2) and the channel.

3. The detection device based on laser intensity in a vacuum environment according to claim 2, It is characterized in that The rotary switching assembly (6) comprises a magnetic fluid rotary sealing device (61) and a supporting connecting plate (62); The output end of the magnetic fluid rotary sealing device (61) extends into the cavity (1) and is fixedly connected to the supporting connecting plate (62) so as to drive the supporting connecting plate (62) to rotate under the vacuum environment; The photoelectric sensor (2) is arranged on one side of the supporting connecting plate (62); The side of the supporting connecting plate (62) on which the photoelectric sensor (2) is mounted can be rotated to be perpendicular or parallel to the channel; The supporting connection plate (62) is made of polytetrafluoroethylene, and an insulating colloid is provided at the connection between the supporting connection plate (62) and the photoelectric sensor (2).

4. The detection device based on laser intensity in a vacuum environment according to claim 3, It is characterized in that A limiting plate (8) is fixedly installed inside the cavity (1); When the supporting connecting plate (62) rotates to abut against the limiting plate (8), the supporting connecting plate (62) is exactly perpendicular to the channel.

5. The detection device based on laser intensity in a vacuum environment according to claim 2, It is characterized in that The cavity (1) comprises a shell (11) with an opening at the top and a knife-edge flange (12); The shell (11) is made of stainless steel, and the through hole (4) and the air extraction hole (5) are both arranged on the shell (11); The knife-edge flange (12) is sealedly connected to the housing (11); One end of the rotation switching component (6) extends from the knife-edge flange (12) to the inside of the housing (11) to be connected to the photoelectric sensor (2).

6. The detection device based on laser intensity in a vacuum environment according to claim 5, It is characterized in that A connection port (7) connected to the detector (3) is formed on the upper surface of the knife-edge flange (12); The connection port (7) is made of insulating ceramic material.

7. The detection device based on laser intensity in a vacuum environment according to claim 1, It is characterized in that The photoelectric sensor (2) is configured as a photodiode; The detector (3) is configured as a high-precision current reading meter.

8. The detection device based on laser intensity in a vacuum environment according to claim 1, It is characterized in that Three through holes (4) are provided, two of which form channels for laser transmission, an observation window is provided inside another through hole (4), and a cover plate is provided on the outside of the observation window.

9. The detection device based on laser intensity in a vacuum environment according to claim 1, It is characterized in that A lifting assembly is provided at the bottom of the cavity (1) for adjusting the height of the cavity (1) so that the laser light can be received by the photoelectric sensor (2) when it is transmitted to the inside of the channel.

10. A method for detecting laser intensity in a vacuum environment. It is characterized in that The detection device for laser intensity in a vacuum environment according to any one of claims 1 to 9 specifically comprises the following steps: The two through holes (4) for forming the passages are respectively connected to two external devices, so that the cavity (1) forms a closed chamber having one of the air extraction holes (5); Connecting the air extraction hole (5) to an external vacuum device to form a vacuum environment in the sealed chamber; A specific laser is formed in one of the external devices, and the specific laser is transmitted into the channel and received by the photoelectric sensor (2); The photoelectric sensor (2) inputs the parameter information of the received specific laser into the detector (3), and the intensity of the specific laser is reflected according to the reading of the detector (3).

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