Vacuum ultraviolet detector linearity calibration device

Abstract

The invention discloses a vacuum ultraviolet detector linearity calibration device which comprises a vacuum ultraviolet light source, a vacuum ultraviolet energy adjusting system, a vacuum ultraviolet convergence system, a double-diaphragm and baffle switching mechanism, a data acquisition and comprehensive control system and a vacuum bin system. The vacuum ultraviolet light source adopts a deuterium lamp; the vacuum ultraviolet energy adjusting system adopts a vacuum ultraviolet monochromator; the vacuum ultraviolet convergence system adopts a transmission form, performs energy convergence on emergent light of the monochromator, and images a converged light spot to a photosensitive surface of the detector; the double-diaphragm and baffle switching mechanism realizes three light-passing states of diaphragm A + B light-passing, diaphragm A light-passing and diaphragm B light-passing; an output signal of the detector is sent to the data acquisition and comprehensive control system; the oil-free vacuum bin provides a vacuum calibration environment. And the linearity calibration of the detector with the vacuum ultraviolet wave band of 115-200 nm is realized.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum ultraviolet standard equipment, and in particular to a vacuum ultraviolet detector linearity calibration device capable of working normally under vacuum conditions. Background Art

[0002] Vacuum ultraviolet photons of 115nm to 200nm in the space environment mainly come from the radiation generated by the interaction between solar high-temperature plasma, ionospheric plasma, interplanetary high-energy particles and the Earth's magnetosphere. Detection of 115nm to 200nm radiation is very suitable for overall detection of solar eruptions, ionosphere, and space environment disturbances, and has advantages in space environment detection that other methods do not have.

[0003] With the rapid development of space exploration technology, vacuum ultraviolet remote sensing technology has become an important means of space exploration and an important way for humans to understand the natural world. Application research in this band has also been launched. Many natural phenomena can be observed in the vacuum ultraviolet band, such as ionospheric disturbance information, the physical composition of the sun and its changing laws, the earth's atmospheric airglow and aurora. At the same time, many stars in the universe have very high temperatures, and many of their radiation peaks are in the vacuum ultraviolet spectrum. By studying the radiation spectrum, we can know the composition of stars and the physical and chemical changes that occur in them, understand the mechanism of interaction between the sun and the earth's atmosphere, invert the content of various trace gases and aerosols in the atmosphere, and realize real-time monitoring of the atmospheric environment.

[0004] During the development of vacuum ultraviolet space payloads, vacuum ultraviolet detectors are required to acquire and measure signals. The accuracy of the value is directly related to the inversion accuracy of the measured data. The linearity of vacuum ultraviolet detectors is a key parameter. China does not yet have the corresponding development capabilities, which is a blank area. Summary of the invention

[0005] The purpose of the present invention is to provide a vacuum ultraviolet detector linearity calibration device, which is used to calibrate the linearity of detectors in the vacuum ultraviolet band of 115nm to 200nm. After metrological calibration, the linearity value of the calibrated detector is obtained and used as a standard detector to realize metrological calibration of other calibrated devices.

[0006] The present invention comprises a vacuum ultraviolet light source, a vacuum ultraviolet energy regulating system, a vacuum ultraviolet focusing system, a double aperture and baffle switching mechanism, a data acquisition and integrated control system, and a vacuum chamber system;

[0007] The vacuum ultraviolet light source adopts a deuterium lamp, and its wavelength range covers the spectrum energy of the vacuum ultraviolet wavelength band of 115nm to 200nm;

[0008] The vacuum ultraviolet energy regulation system adopts a vacuum ultraviolet monochromator;

[0009] The vacuum ultraviolet focusing system adopts a transmission form to focus the energy of the monochromator output light and image the focused light spot onto the detector photosensitive surface;

[0010] The double diaphragm and baffle switching mechanism includes a double diaphragm, a movable baffle, and a movable baffle switching mechanism. The double diaphragm is consistent in size with the vacuum ultraviolet focusing system, and a separator is designed in the middle; three light-through states of diaphragm A+B light-through, diaphragm A light-through, and diaphragm B light-through are realized;

[0011] The output signal of the detector is sent to the data acquisition and integrated control system through a weak signal amplification processing component under vacuum conditions;

[0012] The oil-free vacuum chamber provides a vacuum calibration environment, and the converging mirror, the dual-light moving baffle, the detector and the weak signal amplification processing component are located in the oil-free vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 The present invention provides a vacuum ultraviolet detector linearity calibration device, wherein:

[0014] Figure 1 a: The aperture A+B of the present invention is fully open

[0015] Figure 1 b: The aperture A of the present invention is open

[0016] Figure 1 c: The aperture B of the present invention is open DETAILED DESCRIPTION

[0017] The preferred embodiment of the present invention will be further described below in conjunction with the accompanying drawings:

[0018] The invention comprises a vacuum ultraviolet light source, a vacuum ultraviolet energy regulating system, a vacuum ultraviolet focusing system, a double aperture and baffle switching mechanism, a data acquisition and integrated control system, and a vacuum chamber system.

[0019] The vacuum ultraviolet light source uses a 150W deuterium lamp as the vacuum ultraviolet light source, and its band range covers the spectral energy of the vacuum ultraviolet band of 115nm to 200nm; it has the characteristics of continuity of the spectrum from the far ultraviolet light region to the visible light region, the spherical gas discharge part forms a nearly point-shaped light source, the radiation light source has high stability, high radiation density, low noise, precise calibration, and long service life.

[0020] The vacuum ultraviolet energy regulation system adopts the form of a vacuum ultraviolet monochromator, and adjusts the output light energy through the incident slit and exit slit of the monochromator, thereby covering the requirement of 20dB linear measurement dynamic range and realizing the adjustment of light source output and output energy.

[0021] The vacuum ultraviolet focusing system adopts a transmission form to focus the energy of the monochromator's output light, achieve the convergence of the output energy, and image the focused light spot onto the detector's photosensitive surface.

[0022] A double diaphragm, a movable baffle and a movable baffle switching mechanism are designed for linearity calibration to achieve three light-through states, namely, diaphragm A+B through, diaphragm A through, and diaphragm B through; the double diaphragm is consistent in size with the vacuum ultraviolet focusing system, with an aperture of Φ90mm and a 10mm wide dividing strip designed in the middle.

[0023] The output signal of the detector is sent to the data acquisition and integrated control system through the weak signal amplification and processing component under vacuum conditions to realize the collection and processing of vacuum ultraviolet signals. It has good spectral response characteristics in the 115nm~200nm band, high quantum efficiency, low noise, no external voltage required during measurement, and is insensitive to external magnetic fields.

[0024] The oil-free vacuum chamber includes mechanical pumps, turbomolecular pumps, Rhodes pumps, air compressors, etc., to achieve calibration of the detector to be calibrated in a vacuum environment, and to achieve a vacuum degree of less than 6×10-3Pa. It provides a vacuum calibration environment and shields stray light outside the vacuum chamber. The converging mirror, dual-light moving baffle, detector, and weak signal amplification processing components are located in the oil-free vacuum chamber.

[0025] Although the technical solutions of the present invention have been described with reference to the best embodiments, it is easy for those skilled in the art to understand that the protection scope of the present invention is not limited to these specific embodiments. Without departing from the basic principles of the present invention, the embodiments and the specific technical features therein - such as the modules - may be split, combined or changed, and the technical solutions after splitting, combining or changing will still fall within the protection scope of the present invention.

Claims

1. A vacuum ultraviolet detector linearity calibration device, characterized in that: It includes vacuum ultraviolet light source, vacuum ultraviolet energy regulation system, vacuum ultraviolet focusing system, double aperture and baffle switching mechanism, data acquisition and integrated control system, and vacuum chamber system; The vacuum ultraviolet light source adopts a deuterium lamp, and its wavelength range covers the spectrum energy of the vacuum ultraviolet wavelength band of 115nm to 200nm; The vacuum ultraviolet energy regulation system adopts a vacuum ultraviolet monochromator; The vacuum ultraviolet focusing system adopts a transmission form to focus the energy of the monochromator output light and image the focused light spot onto the detector photosensitive surface; The double diaphragm and baffle switching mechanism includes a double diaphragm, a movable baffle, and a movable baffle switching mechanism. The double diaphragm is consistent in size with the vacuum ultraviolet focusing system, and a separator is designed in the middle; three light-through states of diaphragm A+B light-through, diaphragm A light-through, and diaphragm B light-through are realized; The output signal of the detector is sent to the data acquisition and integrated control system through a weak signal amplification processing component under vacuum conditions; The oil-free vacuum chamber provides a vacuum calibration environment, and the converging mirror, the dual-light moving baffle, the detector and the weak signal amplification processing component are located in the oil-free vacuum chamber.

2. A vacuum ultraviolet detector linearity calibration device as described in claim 1, wherein the oil-free vacuum chamber includes a mechanical pump, a turbomolecular pump, a Rhodes pump, and an air compressor to achieve a vacuum degree of less than 6×10-3Pa.

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