High frequency signal power detection method, device, electronic device and storage medium

Abstract

The present application belongs to the technical field of detecting signal power, and discloses a high-frequency signal power detection method, device, electronic device and storage medium. The method comprises: obtaining the voltage signal digital quantity and the current signal digital quantity of the high-frequency signal, using the segmented integration method of multi-cycle effective value to calculate the voltage effective value, the current effective value and the synthetic signal effective value, calculating the phase difference information by using the preset triangle inner angle formula, calculating the actual voltage and the actual current based on the preset actual voltage calculation formula and the preset actual current calculation formula, and calculating the high-frequency signal power according to the preset high-frequency signal power calculation formula; performing power detection on the high-frequency signal by using the segmented integration method of multi-cycle effective value, the triangle inner angle calculation formula, the actual voltage calculation formula, the actual current calculation formula and the high-frequency signal power calculation formula, thereby improving the power detection efficiency of the high-frequency signal.

Description

Technical Field

[0001] The present application relates to the technical field of detecting signal power, and in particular, to a high-frequency signal power detection method, device, electronic device and storage medium. Background Art

[0002] Competition in the semiconductor chip field depends largely on the competition of semiconductor equipment and core components. The anti-interference ability, rapid response ability and stability of the equipment are important criteria for measuring the quality of the equipment. For RF technology, the accuracy, stability and rapid response of the control loop are important indicators that determine the quality of RF devices, and power detection is often an important part of it. Power detection plays an indispensable role in the power regulation and automatic impedance matching process of RF power supply.

[0003] When calculating signal power, traditional digital frequency conversion technology generally uses numerical algorithms to modulate and low-pass filter high-frequency signals to obtain low-frequency signals containing phase information. However, this traditional signal power calculation and amplification will have pain points such as high resource utilization, severe ripple, and large signal systematic errors.

[0004] Therefore, in order to solve the technical problems of existing signal power detection methods such as large resource occupancy, severe ripple and large signal systematic error, there is an urgent need for a high-frequency signal power detection method, device, electronic device and storage medium. Summary of the invention

[0005] The purpose of the present application is to provide a high-frequency signal power detection method, device, electronic device and storage medium. The high-frequency signal power is calculated through the piecewise integration method of multi-cycle effective values, the preset triangle internal angle formula, the preset actual voltage calculation formula, the preset actual current calculation formula and the preset high-frequency signal power calculation formula. The problems of the existing signal power detection method such as large resource occupancy, severe ripple and large signal systematic error are solved. The power of the high-frequency signal can be calculated accurately and quickly, thereby improving the power detection efficiency of the high-frequency signal.

[0006] In a first aspect, the present application provides a high-frequency signal power detection method, comprising:

[0007] Obtaining the digital quantity of the voltage signal and the digital quantity of the current signal of the high-frequency signal;

[0008] According to the digital quantity of the voltage signal and the digital quantity of the current signal, a voltage effective value, a current effective value and a synthetic signal effective value are calculated by using a multi-cycle effective value segmentation integration method;

[0009] The phase difference information is calculated by combining the voltage effective value, the current effective value and the synthetic signal effective value through a preset triangle internal angle formula;

[0010] Based on a preset actual voltage calculation formula and a preset actual current calculation formula, combined with the voltage effective value and the current effective value, the actual voltage and the actual current are calculated;

[0011] The high-frequency signal power is calculated according to a preset high-frequency signal power calculation formula in combination with the actual voltage, the actual current and the phase difference information.

[0012] The high-frequency signal power detection method provided in the present application can realize power detection of high-frequency signals. The high-frequency signal power is calculated through the piecewise integration method of multi-cycle effective values, the preset triangle internal angle formula, the preset actual voltage calculation formula, the preset actual current calculation formula and the preset high-frequency signal power calculation formula. The problems of existing signal power detection methods such as large resource occupancy, severe ripple and large signal systematic errors are solved. The power of high-frequency signals can be calculated accurately and quickly, thereby improving the power detection efficiency of high-frequency signals.

[0013] Optionally, according to the digital quantity of the voltage signal and the digital quantity of the current signal, a multi-cycle effective value segmentation method is used to calculate the voltage effective value, the current effective value and the synthetic signal effective value, including:

[0014] Performing vector superposition on the voltage signal digital quantity and the current signal digital quantity to obtain a composite signal digital quantity;

[0015] According to the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity, the voltage effective value, the current effective value and the synthetic signal effective value are calculated by using the multi-cycle effective value segmentation integration method.

[0016] Optionally, according to the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity, the voltage effective value, the current effective value and the synthetic signal effective value are calculated by using the multi-cycle effective value segmentation method, including:

[0017] Taking a preset division period as a division unit, the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity are respectively divided into a plurality of voltage signal digital quantity data sets, a plurality of current signal digital quantity data sets and a plurality of synthetic signal digital quantity data sets;

[0018] Based on the piecewise integration method of the multi-period effective value, an effective value calculation formula is constructed;

[0019] According to the effective value calculation formula, the voltage effective value, the current effective value and the synthetic signal effective value are calculated by combining the multiple voltage signal digital quantity data sets, the multiple current signal digital quantity data sets and the multiple synthetic signal digital quantity data sets.

[0020] The high-frequency signal power detection method provided in the present application can realize power detection of high-frequency signals. The voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity are divided into multiple corresponding data sets with a preset division period as the division unit. The multiple data sets are used to calculate the effective value of the voltage, the effective value of the current and the effective value of the synthetic signal according to the effective value calculation formula constructed by the piecewise integration method of the multi-period effective value. The power of the high-frequency signal is analyzed by the effective value of the voltage, the effective value of the current and the effective value of the synthetic signal, which is beneficial to improving the power detection efficiency of the high-frequency signal.

[0021] Optionally, the effective value calculation formula includes a voltage effective value calculation formula, a current effective value calculation formula and a synthetic signal effective value calculation formula.

[0022] Optionally, the high-frequency signal power includes load power, forward power and reflected power.

[0023] Optionally, the preset high-frequency signal power calculation formula includes a load power calculation formula, a forward power calculation formula and a reflected power value calculation formula.

[0024] Optionally, the high-frequency signal power is calculated according to a preset high-frequency signal power calculation formula in combination with the actual voltage, the actual current and the phase difference information, including:

[0025] The load power is calculated by using the load power calculation formula in combination with the actual voltage, the actual current and the phase difference information;

[0026] The forward power is calculated by combining the actual voltage, the actual current and the phase difference information through the forward power calculation formula;

[0027] The reflected power is calculated according to the reflected power value calculation formula in combination with the actual voltage, the actual current and the phase difference information.

[0028] The high-frequency signal power detection method provided in the present application can realize power detection of high-frequency signals. By using the load power calculation formula, the forward power calculation formula and the reflected power value calculation formula, the load power, the forward power and the reflected power are calculated to determine the power of the high-frequency signal, which can improve the power detection efficiency of the high-frequency signal.

[0029] In a second aspect, the present application provides a high-frequency signal power detection device, comprising:

[0030] An acquisition module, used to acquire the digital quantity of the voltage signal and the digital quantity of the current signal of the high-frequency signal;

[0031] A first calculation module is used to calculate the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital value and the current signal digital value by using a multi-cycle effective value segmentation integration method;

[0032] A second calculation module is used to calculate the phase difference information by combining the voltage effective value, the current effective value and the synthetic signal effective value through a preset triangle internal angle formula;

[0033] A third calculation module, configured to calculate the actual voltage and the actual current based on a preset actual voltage calculation formula and a preset actual current calculation formula, combined with the voltage effective value and the current effective value;

[0034] The fourth calculation module is used to calculate the high-frequency signal power according to a preset high-frequency signal power calculation formula in combination with the actual voltage, the actual current and the phase difference information.

[0035] The high-frequency signal power detection device calculates the high-frequency signal power through a piecewise integration method of multi-cycle effective values, a preset triangle internal angle formula, a preset actual voltage calculation formula, a preset actual current calculation formula and a preset high-frequency signal power calculation formula, thereby solving the problems of existing signal power detection methods such as large resource occupancy, severe ripple and large signal systematic errors, and can accurately and quickly calculate the power of high-frequency signals, thereby improving the power detection efficiency of high-frequency signals.

[0036] In a third aspect, the present application provides an electronic device, including a processor and a memory, wherein the memory stores a computer program executable by the processor, and when the processor executes the computer program, it runs the steps in the high-frequency signal power detection method described above.

[0037] In a fourth aspect, the present application provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the steps in the high-frequency signal power detection method described above are executed.

[0038] Beneficial effects: The high-frequency signal power detection method, device, electronic device and storage medium provided in the present application calculate the high-frequency signal power through the piecewise integration method of multi-period effective values, the preset triangle internal angle formula, the preset actual voltage calculation formula, the preset actual current calculation formula and the preset high-frequency signal power calculation formula, thereby solving the pain points of the existing signal power detection methods such as large resource occupancy, severe ripple and large signal systematic errors, and can accurately and quickly calculate the power of the high-frequency signal, thereby improving the power detection efficiency of the high-frequency signal. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 A flowchart of a high-frequency signal power detection method provided in an embodiment of the present application.

[0040] Figure 2 A schematic diagram of the structure of a high-frequency signal power detection device provided in an embodiment of the present application.

[0041] Figure 3 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application.

[0042] Figure 4 This is a diagram illustrating the principle of vector superposition characteristics.

[0043] Explanation of reference numerals: 1. Acquisition module; 2. First calculation module; 3. Second calculation module; 4. Third calculation module; 5. Fourth calculation module; 301. Processor; 302. Memory; 303. Communication bus. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0045] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0046] Please refer to Figure 1 , Figure 1 A high-frequency signal power detection method in some embodiments of the present application is used to detect the power of a high-frequency signal, comprising the steps of:

[0047] Step S101, obtaining a digital value of a voltage signal and a digital value of a current signal of a high frequency signal;

[0048] Step S102, according to the digital quantity of the voltage signal and the digital quantity of the current signal, the voltage effective value, the current effective value and the combined signal effective value are calculated by using the multi-cycle effective value segmentation integration method;

[0049] Step S103, using a preset triangle internal angle formula, combined with the voltage effective value, current effective value and synthetic signal effective value, to calculate the phase difference information;

[0050] Step S104, based on a preset actual voltage calculation formula and a preset actual current calculation formula, combined with the voltage effective value and the current effective value, calculate the actual voltage and the actual current;

[0051] Step S105, calculating the high-frequency signal power according to a preset high-frequency signal power calculation formula in combination with the actual voltage, the actual current and the phase difference information.

[0052] The high-frequency signal power detection method calculates the high-frequency signal power through a piecewise integration method of multi-cycle effective values, a preset triangle internal angle formula, a preset actual voltage calculation formula, a preset actual current calculation formula and a preset high-frequency signal power calculation formula, thereby solving the problems of existing signal power detection methods such as large resource occupancy, severe ripple and large signal systematic errors, and can accurately and quickly calculate the power of high-frequency signals, thereby improving the power detection efficiency of high-frequency signals.

[0053] Specifically, in step S101, a high-frequency signal is collected by a high-frequency signal detection device, and a voltage signal digital quantity and a current signal digital quantity of the high-frequency signal are obtained by AD sampling (such as by an AD sampling module provided in the high-frequency signal detection device), wherein the voltage signal digital quantity is a digital quantity representation of the voltage signal, and the current signal digital quantity is a digital quantity representation of the current signal.

[0054] Specifically, in step S102, according to the digital quantity of the voltage signal and the digital quantity of the current signal, the effective value of the voltage, the effective value of the current and the effective value of the composite signal are calculated by using the multi-cycle effective value segmentation method, including:

[0055] Performing vector superposition on the voltage signal digital quantity and the current signal digital quantity to obtain the synthetic signal digital quantity;

[0056] According to the digital quantity of the voltage signal, the digital quantity of the current signal and the digital quantity of the composite signal, the effective value of the voltage, the effective value of the current and the effective value of the composite signal are calculated by using the piecewise integration method of the multi-cycle effective value.

[0057] In step S102, the digital quantity of the voltage signal and the digital quantity of the current signal are added by vector superposition to calculate a digital quantity of a composite signal, that is, the sum of the digital quantities of the voltage signal and the current signal.

[0058] Specifically, in step S102, according to the digital quantity of the voltage signal, the digital quantity of the current signal and the digital quantity of the composite signal, the effective value of the voltage, the effective value of the current and the effective value of the composite signal are calculated by using the multi-cycle effective value segmentation method, including:

[0059] Taking a preset division period as a division unit, the voltage signal digital quantity, the current signal digital quantity and the composite signal digital quantity are respectively divided into a plurality of voltage signal digital quantity data sets, a plurality of current signal digital quantity data sets and a plurality of composite signal digital quantity data sets (i.e., a collection of a plurality of voltage signal digital quantities in different periods, a collection of a plurality of current signal digital quantities in different periods and a collection of a plurality of composite signal digital quantities in different periods);

[0060] Based on the piecewise integration method of multi-period effective value, the effective value calculation formula is constructed;

[0061] According to the effective value calculation formula, multiple voltage signal digital quantity data sets, multiple current signal digital quantity data sets and multiple synthetic signal digital quantity data sets are combined to calculate the voltage effective value, current effective value and synthetic signal effective value.

[0062] It should be noted that if a DC current and an AC current pass through resistors of the same resistance value respectively, and if the heat generated by the two currents passing through the resistors in the same period of time is the same, then the current value and voltage value of the DC current are the effective current value and voltage value of the AC current.

[0063] In step S102, the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity in the same period are divided into a data set respectively with the preset division period as the division unit, so as to obtain multiple voltage signal digital quantity data sets, multiple current signal digital quantity data sets and multiple synthetic signal digital quantity data sets.

[0064] Through the piecewise integration method of multi-cycle effective values, when solving the current effective value, voltage effective value and synthetic signal effective value, the average values ​​of the current signal digital quantity, voltage signal digital quantity and synthetic signal digital quantity within the cycle can be obtained respectively as the current effective value, voltage effective value and synthetic signal effective value of the cycle. Therefore, the effective value calculation formula is set to calculate the average value of the current signal digital quantity, the average value of the voltage signal digital quantity and the average value of the synthetic signal digital quantity within the cycle.

[0065] According to the effective value calculation formula, multiple voltage signal digital quantity data sets, multiple current signal digital quantity data sets and multiple synthetic signal digital quantity data sets are combined to calculate the voltage effective value, current effective value and synthetic signal effective value. Among them, the preset division period can be set according to actual needs.

[0066] Among them, the effective value calculation formula includes a voltage effective value calculation formula, a current effective value calculation formula and a synthetic signal effective value calculation formula. The voltage effective value, current effective value and synthetic signal effective value of each cycle are calculated by the voltage effective value calculation formula, the current effective value calculation formula and the synthetic signal effective value calculation formula respectively.

[0067] The specific formula for calculating the effective value of voltage is:

[0068] ;

[0069] in, is the effective value of voltage; is the digital quantity of the voltage signal; n is the number of the digital quantities of the voltage signal in a cycle (the number of the digital quantities of the voltage signal, the digital quantity of the current signal and the digital quantity of the composite signal in a cycle are equal).

[0070] The specific calculation formula for the effective value of current is:

[0071] ;

[0072] in, is the effective value of current; is the digital quantity of the current signal; n is the number of digital quantities of the current signal in a cycle.

[0073] The calculation formula of the effective value of the synthetic signal is as follows:

[0074] ;

[0075] in, is the effective value of the synthetic signal; is the digital quantity of the synthetic signal; n is the number of digital quantities of the synthetic signal in the cycle.

[0076] Specifically, in step S103, in the high-frequency signal circuit, when the load impedance is a pure capacitive load, the current leads the voltage by 90°, and when the load impedance is a pure inductive load, the voltage leads the current by 90°. Therefore, regardless of how the load impedance changes, the phase difference information between the voltage and current in the circuit . And for the load power output by the RF power supply , , so the power factor has non-negativity.

[0077] As Figure 4 shown, Figure 4 is the principle illustration of the vector superposition characteristic. Among them, A is the principle illustration of the vector superposition characteristic when the voltage leads the current, and B is the principle illustration of the vector superposition characteristic when the voltage lags behind the current, is the effective value of the synthesized signal, is the effective value of the voltage, is the effective value of the current, is the phase difference information. Utilizing the vector superposition characteristic of the voltage and current, the signal is generated through superposition. When 90° > phase > 0°, at this time, using the triangle interior angle formula, the power factor F can be obtained:

[0078] ;

[0079] When -90° < phase < 0°, at this time, for the power factor F:

[0080] ;

[0081] Among them, F is the power factor, is the phase difference information.

[0082] When phase = 0° (i.e., the phase difference information is 0°), the directions of the voltage and current are the same, and it is calculated that 1, , that is , so when phase = 0°, the triangle interior angle formula is still applicable. When phase = 90° or phase = -90° (i.e., the phase difference information is 90° or -90°), the voltage direction and the current direction are at a right angle relationship, and through the Pythagorean theorem, is obtained, and it is calculated that 0, , that is , so when phase = 90° or phase = -90°, the triangle interior angle formula is still applicable.

[0083] Therefore, the preset triangle interior angle formula is specifically:

[0084] .

[0085] In summary, the phase difference information is obtained by using the preset triangle interior angle formula and combining the voltage effective value, current effective value and synthetic signal effective value.

[0086] Specifically, in step S104, based on a preset actual voltage calculation formula and a preset actual current calculation formula, the actual voltage and the actual current are calculated in combination with the effective value of the voltage and the effective value of the current.

[0087] Among them, the preset actual voltage calculation formula is:

[0088] ;

[0089] The preset actual current calculation formula is:

[0090] ;

[0091] in, is the actual voltage, is the actual current, a is the first voltage parameter, b is the second voltage parameter, c is the first current parameter, d is the second current parameter, and the first voltage parameter a, the second voltage parameter b, the first current parameter c, and the second current parameter d can be calibrated by a high-frequency signal detection device.

[0092] Specifically, the high-frequency signal power includes the load power , forward power and reflected power The preset high-frequency signal power calculation formula includes a load power calculation formula, a forward power calculation formula and a reflected power value calculation formula; in step S105, according to the preset high-frequency signal power calculation formula, combined with the actual voltage, actual current and phase difference information, the high-frequency signal power is calculated, including:

[0093] The load power is calculated by using the load power calculation formula, combining the actual voltage, actual current and phase difference information;

[0094] The forward power is calculated by combining the actual voltage, actual current and phase difference information through the forward power calculation formula;

[0095] The reflected power is calculated based on the reflected power value calculation formula and combined with the actual voltage, actual current and phase difference information.

[0096] In step S105, the load power, the forward power and the reflected power are calculated using the load power calculation formula, the forward power calculation formula and the reflected power value calculation formula to detect and obtain the signal power of the high frequency signal.

[0097] The specific load power calculation formula is:

[0098] ;

[0099] The forward power calculation formula is as follows:

[0100] ;

[0101] The specific calculation formula for the reflected power value is:

[0102] ;

[0103] in, is the load power, is the forward power, is the reflected power; , ; is the system impedance, which can be obtained through the parameters of the high-frequency signal detection device. Usually 50 .

[0104] As can be seen from the above, the high-frequency signal power detection method obtains the voltage signal digital quantity and the current signal digital quantity of the high-frequency signal, and calculates the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital quantity and the current signal digital quantity by using the segmented integration method of multi-cycle effective value, and calculates the phase difference information by combining the voltage effective value, the current effective value and the synthetic signal effective value through the preset triangle inner angle formula, and calculates the actual voltage and the actual current based on the preset actual voltage calculation formula and the preset actual current calculation formula, and calculates the actual voltage and the actual current according to the preset high-frequency signal power calculation formula, and calculates the high-frequency signal power according to the actual voltage, the actual current and the phase difference information; thus, the high-frequency signal power is calculated by the segmented integration method of multi-cycle effective value, the preset triangle inner angle calculation formula, the preset actual voltage calculation formula, the preset actual current calculation formula and the preset high-frequency signal power calculation formula, so as to solve the problems of large resource occupancy, severe ripple and large signal systematic error in the existing signal power detection method, and can accurately and quickly calculate the power of the high-frequency signal, thereby improving the power detection efficiency of the high-frequency signal.

[0105] refer to Figure 2 The present application provides a high-frequency signal power detection device for detecting the power of a high-frequency signal, comprising:

[0106] An acquisition module 1 is used to acquire a voltage signal digital quantity and a current signal digital quantity of a high-frequency signal;

[0107] The first calculation module 2 is used to calculate the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital value and the current signal digital value by using the multi-cycle effective value segmentation integration method;

[0108] The second calculation module 3 is used to calculate the phase difference information by combining the voltage effective value, the current effective value and the synthetic signal effective value through a preset triangle internal angle formula;

[0109] A third calculation module 4 is used to calculate the actual voltage and the actual current based on a preset actual voltage calculation formula and a preset actual current calculation formula, combined with the voltage effective value and the current effective value;

[0110] The fourth calculation module 5 is used to calculate the high-frequency signal power according to a preset high-frequency signal power calculation formula in combination with the actual voltage, the actual current and the phase difference information.

[0111] The high-frequency signal power detection device calculates the high-frequency signal power through a piecewise integration method of multi-cycle effective values, a preset triangle internal angle formula, a preset actual voltage calculation formula, a preset actual current calculation formula and a preset high-frequency signal power calculation formula, thereby solving the problems of existing signal power detection methods such as large resource occupancy, severe ripple and large signal systematic errors, and can accurately and quickly calculate the power of high-frequency signals, thereby improving the power detection efficiency of high-frequency signals.

[0112] Specifically, when the acquisition module 1 is executed, the high-frequency signal is collected by a high-frequency signal detection device, and the voltage signal digital quantity and the current signal digital quantity of the high-frequency signal are acquired through AD sampling (such as through an AD sampling module set in the high-frequency signal detection device), wherein the voltage signal digital quantity is the digital quantity representation form of the voltage signal, and the current signal digital quantity is the digital quantity representation form of the current signal.

[0113] Specifically, when the first calculation module 2 calculates the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital value and the current signal digital value by using the multi-cycle effective value segmentation integration method, it executes:

[0114] Performing vector superposition on the voltage signal digital quantity and the current signal digital quantity to obtain the synthetic signal digital quantity;

[0115] According to the digital quantity of the voltage signal, the digital quantity of the current signal and the digital quantity of the composite signal, the effective value of the voltage, the effective value of the current and the effective value of the composite signal are calculated by using the piecewise integration method of the multi-cycle effective value.

[0116] When the first calculation module 2 is executed, the digital quantity of the voltage signal and the digital quantity of the current signal are added by vector superposition to calculate the digital quantity of the composite signal, that is, the sum of the digital quantities of the voltage signal and the current signal.

[0117] Specifically, when the first calculation module 2 calculates the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity by using the multi-cycle effective value segmentation integration method, it executes:

[0118] Taking a preset division period as a division unit, the voltage signal digital quantity, the current signal digital quantity and the composite signal digital quantity are respectively divided into a plurality of voltage signal digital quantity data sets, a plurality of current signal digital quantity data sets and a plurality of composite signal digital quantity data sets (i.e., a collection of a plurality of voltage signal digital quantities in different periods, a collection of a plurality of current signal digital quantities in different periods and a collection of a plurality of composite signal digital quantities in different periods);

[0119] Based on the piecewise integration method of multi-period effective value, the effective value calculation formula is constructed;

[0120] According to the effective value calculation formula, multiple voltage signal digital quantity data sets, multiple current signal digital quantity data sets and multiple synthetic signal digital quantity data sets are combined to calculate the voltage effective value, current effective value and synthetic signal effective value.

[0121] It should be noted that if a DC current and an AC current pass through resistors of the same resistance value respectively, and if the heat generated by the two currents passing through the resistors in the same period of time is the same, then the current value and voltage value of the DC current are the effective current value and voltage value of the AC current.

[0122] When the first calculation module 2 is executed, it divides the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity in the same period into a data set respectively, taking the preset division period as the division unit, to obtain multiple voltage signal digital quantity data sets, multiple current signal digital quantity data sets and multiple synthetic signal digital quantity data sets.

[0123] Through the piecewise integration method of multi-cycle effective values, when solving the current effective value, voltage effective value and synthetic signal effective value, the average values ​​of the current signal digital quantity, voltage signal digital quantity and synthetic signal digital quantity within the cycle can be obtained respectively as the current effective value, voltage effective value and synthetic signal effective value of the cycle. Therefore, the effective value calculation formula is set to calculate the average value of the current signal digital quantity, the average value of the voltage signal digital quantity and the average value of the synthetic signal digital quantity within the cycle.

[0124] According to the effective value calculation formula, multiple voltage signal digital quantity data sets, multiple current signal digital quantity data sets and multiple synthetic signal digital quantity data sets are combined to calculate the voltage effective value, current effective value and synthetic signal effective value. Among them, the preset division period can be set according to actual needs.

[0125] Among them, the effective value calculation formula includes a voltage effective value calculation formula, a current effective value calculation formula and a synthetic signal effective value calculation formula. The voltage effective value, current effective value and synthetic signal effective value of each cycle are calculated by the voltage effective value calculation formula, the current effective value calculation formula and the synthetic signal effective value calculation formula respectively.

[0126] The specific formula for calculating the effective value of voltage is:

[0127] ;

[0128] in, is the effective value of voltage; is the digital quantity of the voltage signal; n is the number of the digital quantities of the voltage signal in a cycle (the number of the digital quantities of the voltage signal, the digital quantity of the current signal and the digital quantity of the composite signal in a cycle are equal).

[0129] The specific calculation formula for the effective value of current is:

[0130] ;

[0131] in, is the effective value of current; is the digital quantity of the current signal; n is the number of digital quantities of the current signal in a cycle.

[0132] The calculation formula of the effective value of the synthetic signal is as follows:

[0133] ;

[0134] in, is the effective value of the synthetic signal; is the digital quantity of the synthetic signal; n is the number of digital quantities of the synthetic signal in the cycle.

[0135] Specifically, the second calculation module 3 is executed. In the circuit of the high-frequency signal, when the load impedance is a pure capacitive load, the current leads the voltage phase by 90°, and when the load impedance is a pure inductive load, the voltage leads the current phase by 90°. Therefore, no matter how the load impedance changes, the phase difference information between the voltage and the current in the circuit . For the load power output of the RF power supply , , so the power factor It has non-negativity.

[0136] As Figure 4 shown, Figure 4 it is a schematic diagram for explaining the principle of vector superposition characteristics. Among them, A is a schematic diagram for explaining the principle of vector superposition characteristics when the voltage leads the current, and B is a schematic diagram for explaining the principle of vector superposition characteristics when the voltage lags behind the current. is the effective value of the synthesized signal, is the effective value of the voltage, is the effective value of the current, is the phase difference information. Utilizing the vector superposition characteristics of the voltage and the current, a signal is generated through superposition. When 90° > phase > 0°, at this time, using the formula for finding the interior angle of a triangle, the power factor F can be obtained:

[0137] ;

[0138] When -90° < phase < 0°, at this time, for the power factor F:

[0139] ;

[0140] Among them, F is the power factor, is the phase difference information.

[0141] When phase = 0° (that is, the phase difference information is 0°), the directions of the voltage and the current are the same, and it is calculated that 1, , that is , therefore, when phase = 0°, the formula for finding the interior angle of a triangle is still applicable. When phase = 90° or phase = -90° (that is, the phase difference information is 90° or -90°), the directions of the voltage and the current are at a right angle relationship. Through the Pythagorean theorem, is obtained, and it is calculated that 0, , that is , therefore, when phase = 90° or phase = -90°, the formula for finding the interior angle of a triangle is still applicable.

[0142] Therefore, the preset formula for finding the interior angle of a triangle is specifically:

[0143] .

[0144] In summary, through the preset formula for finding the interior angle of a triangle, combined with the effective value of the voltage, the effective value of the current, and the effective value of the synthesized signal, the phase difference information is solved.

[0145] Specifically, when the third calculation module 4 executes, based on the preset actual voltage calculation formula and the preset actual current calculation formula, combined with the effective value of the voltage and the effective value of the current, the actual voltage and the actual current are calculated.

[0146] Among them, the preset actual voltage calculation formula is:

[0147] ;

[0148] The preset actual current calculation formula is:

[0149] ;

[0150] in, is the actual voltage, is the actual current, a is the first voltage parameter, b is the second voltage parameter, c is the first current parameter, d is the second current parameter, and the first voltage parameter a, the second voltage parameter b, the first current parameter c, and the second current parameter d can be calibrated by a high-frequency signal detection device.

[0151] Specifically, the high-frequency signal power includes the load power , forward power and reflected power The preset high-frequency signal power calculation formula includes a load power calculation formula, a forward power calculation formula and a reflected power value calculation formula; when the fourth calculation module 5 calculates the high-frequency signal power according to the preset high-frequency signal power calculation formula, combined with the actual voltage, actual current and phase difference information, the fourth calculation module 5 executes:

[0152] The load power is calculated by using the load power calculation formula, combining the actual voltage, actual current and phase difference information;

[0153] The forward power is calculated by combining the actual voltage, actual current and phase difference information through the forward power calculation formula;

[0154] The reflected power is calculated based on the reflected power value calculation formula and combined with the actual voltage, actual current and phase difference information.

[0155] When the fourth calculation module 5 is executed, the load power calculation formula, the forward power calculation formula and the reflected power value calculation formula are used to calculate the load power, the forward power and the reflected power to detect and obtain the signal power of the high-frequency signal.

[0156] The specific load power calculation formula is:

[0157] ;

[0158] The forward power calculation formula is as follows:

[0159] ;

[0160] The specific calculation formula for the reflected power value is:

[0161] ;

[0162] in, is the load power, is the forward power, is the reflected power; , ; is the system impedance, which can be obtained through the parameters of the high-frequency signal detection device. Usually 50 .

[0163] As can be seen from the above, the high-frequency signal power detection device obtains the voltage signal digital quantity and the current signal digital quantity of the high-frequency signal, and calculates the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital quantity and the current signal digital quantity by using the multi-cycle effective value segmentation integration method, and calculates the phase difference information by combining the voltage effective value, the current effective value and the synthetic signal effective value through the preset triangle inner angle formula, and calculates the actual voltage and the actual current based on the preset actual voltage calculation formula and the preset actual current calculation formula, and calculates the high-frequency signal power according to the preset high-frequency signal power calculation formula, combined with the actual voltage, the actual current and the phase difference information; thus, the high-frequency signal power is calculated by the multi-cycle effective value segmentation integration method, the preset triangle inner angle calculation formula, the preset actual voltage calculation formula, the preset actual current calculation formula and the preset high-frequency signal power calculation formula, so as to solve the problems of large resource occupancy, severe ripple and large signal systematic error in the existing signal power detection method, and can accurately and quickly calculate the power of the high-frequency signal, thereby improving the power detection efficiency of the high-frequency signal.

[0164] Please refer to Figure 3 , Figure 3The present invention provides a structural schematic diagram of an electronic device provided in an embodiment of the present application. The present application provides an electronic device, including: a processor 301 and a memory 302. The processor 301 and the memory 302 are interconnected and communicate with each other through a communication bus 303 and / or other forms of connection mechanisms (not shown). The memory 302 stores a computer program executable by the processor 301. When the electronic device is running, the processor 301 executes the computer program to execute the high-frequency signal power detection method in any optional implementation of the above embodiment to achieve the following functions: obtaining a voltage signal digital quantity and a current signal digital quantity of the high-frequency signal, and calculating the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital quantity and the current signal digital quantity by using a multi-cycle effective value segmentation integration method, calculating the phase difference information by combining the voltage effective value, the current effective value and the synthetic signal effective value through a preset triangle internal angle calculation formula, and calculating the actual voltage and the actual current based on a preset actual voltage calculation formula and a preset actual current calculation formula, and calculating the actual voltage and the actual current based on the voltage effective value and the current effective value, and calculating the high-frequency signal power according to a preset high-frequency signal power calculation formula and combining the actual voltage, the actual current and the phase difference information.

[0165] The embodiment of the present application provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the high-frequency signal power detection method in any optional implementation of the above-mentioned embodiment is executed to achieve the following functions: obtaining the voltage signal digital quantity and the current signal digital quantity of the high-frequency signal, and calculating the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital quantity and the current signal digital quantity by using the piecewise integration method of multi-cycle effective values, and calculating the phase difference information by combining the voltage effective value, the current effective value and the synthetic signal effective value through a preset triangle internal angle formula, and calculating the actual voltage and the actual current based on a preset actual voltage calculation formula and a preset actual current calculation formula in combination with the voltage effective value and the current effective value, and calculating the high-frequency signal power according to a preset high-frequency signal power calculation formula in combination with the actual voltage, the actual current and the phase difference information. Among them, the storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable red-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk or optical disk.

[0166] In the embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of the devices or units can be electrical, mechanical or other forms.

[0167] In addition, the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, and may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0168] Furthermore, the functional modules in the various embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.

[0169] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0170] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A high-frequency signal power detection method, used for detecting the power of a high-frequency signal, characterized in that: Includes steps: Obtaining the digital quantity of the voltage signal and the digital quantity of the current signal of the high-frequency signal; According to the digital quantity of the voltage signal and the digital quantity of the current signal, a voltage effective value, a current effective value and a synthetic signal effective value are calculated by using a multi-cycle effective value segmentation integration method; The phase difference information is calculated by combining the voltage effective value, the current effective value and the synthetic signal effective value through a preset triangle internal angle formula; Based on a preset actual voltage calculation formula and a preset actual current calculation formula, combined with the voltage effective value and the current effective value, the actual voltage and the actual current are calculated; The high-frequency signal power is calculated according to a preset high-frequency signal power calculation formula, combined with the actual voltage, the actual current and the phase difference information; According to the digital quantity of the voltage signal and the digital quantity of the current signal, the voltage effective value, the current effective value and the synthetic signal effective value are calculated by using the multi-cycle effective value segmentation integration method, including: Performing vector superposition on the voltage signal digital quantity and the current signal digital quantity to obtain a composite signal digital quantity; According to the digital quantity of the voltage signal, the digital quantity of the current signal and the digital quantity of the synthetic signal, the voltage effective value, the current effective value and the synthetic signal effective value are calculated by using the piecewise integration method of the multi-cycle effective value; According to the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity, the voltage effective value, the current effective value and the synthetic signal effective value are calculated by using the multi-cycle effective value segmentation method, including: Taking a preset division period as a division unit, the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity are respectively divided into a plurality of voltage signal digital quantity data sets, a plurality of current signal digital quantity data sets and a plurality of synthetic signal digital quantity data sets; Based on the piecewise integration method of the multi-period effective value, an effective value calculation formula is constructed; According to the effective value calculation formula, combining the plurality of voltage signal digital quantity data sets, the plurality of current signal digital quantity data sets and the plurality of synthetic signal digital quantity data sets, the voltage effective value, the current effective value and the synthetic signal effective value are calculated; The preset triangle internal angle formula is specifically: ； in, is the phase difference information, is the effective value of the synthetic signal, is the effective value of voltage, is the effective value of current.

2. The high frequency signal power detection method according to claim 1, characterized in that: The effective value calculation formula includes a voltage effective value calculation formula, a current effective value calculation formula and a synthetic signal effective value calculation formula.

3. The high frequency signal power detection method according to claim 1, characterized in that: The high frequency signal power includes load power, forward power and reflected power.

4. The high-frequency signal power detection method according to claim 3, characterized in that: The preset high-frequency signal power calculation formula includes a load power calculation formula, a forward power calculation formula and a reflected power value calculation formula.

5. The high frequency signal power detection method according to claim 4, characterized in that: According to a preset high-frequency signal power calculation formula, the high-frequency signal power is calculated in combination with the actual voltage, the actual current and the phase difference information, including: The load power is calculated by using the load power calculation formula in combination with the actual voltage, the actual current and the phase difference information; The forward power is calculated by combining the actual voltage, the actual current and the phase difference information through the forward power calculation formula; The reflected power is calculated according to the reflected power value calculation formula in combination with the actual voltage, the actual current and the phase difference information.

6. A high-frequency signal power detection device, used for detecting the power of a high-frequency signal, characterized in that: include: An acquisition module, used to acquire the digital quantity of the voltage signal and the digital quantity of the current signal of the high-frequency signal; A first calculation module is used to calculate the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital value and the current signal digital value by using a multi-cycle effective value segmentation integration method; A second calculation module is used to calculate the phase difference information by combining the voltage effective value, the current effective value and the synthetic signal effective value through a preset triangle internal angle formula; A third calculation module, configured to calculate the actual voltage and the actual current based on a preset actual voltage calculation formula and a preset actual current calculation formula, combined with the voltage effective value and the current effective value; A fourth calculation module, configured to calculate the high-frequency signal power according to a preset high-frequency signal power calculation formula in combination with the actual voltage, the actual current and the phase difference information; The first calculation module is used to calculate the voltage effective value, the current effective value and the synthetic signal effective value according to the voltage signal digital value and the current signal digital value by using the multi-cycle effective value segmentation integration method, including: Performing vector superposition on the voltage signal digital quantity and the current signal digital quantity to obtain a composite signal digital quantity; According to the digital quantity of the voltage signal, the digital quantity of the current signal and the digital quantity of the synthetic signal, the voltage effective value, the current effective value and the synthetic signal effective value are calculated by using the piecewise integration method of the multi-cycle effective value; According to the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity, the voltage effective value, the current effective value and the synthetic signal effective value are calculated by using the multi-cycle effective value segmentation method, including: Taking a preset division period as a division unit, the voltage signal digital quantity, the current signal digital quantity and the synthetic signal digital quantity are respectively divided into a plurality of voltage signal digital quantity data sets, a plurality of current signal digital quantity data sets and a plurality of synthetic signal digital quantity data sets; Based on the piecewise integration method of the multi-period effective value, an effective value calculation formula is constructed; According to the effective value calculation formula, combining the plurality of voltage signal digital quantity data sets, the plurality of current signal digital quantity data sets and the plurality of synthetic signal digital quantity data sets, the voltage effective value, the current effective value and the synthetic signal effective value are calculated; The preset triangle internal angle formula is specifically: ； in, is the phase difference information, is the effective value of the synthetic signal, is the effective value of voltage, is the effective value of current.

7. An electronic device, characterized in that: It comprises a processor and a memory, wherein the memory stores a computer program executable by the processor, and when the processor executes the computer program, it runs the steps in the high-frequency signal power detection method according to any one of claims 1 to 5.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the high-frequency signal power detection method according to any one of claims 1 to 5 are executed.

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