A mask device and a method for manufacturing a mask

Abstract

The present application provides a mask device and a method for manufacturing a mask, and relates to the technical field of mask plates. The mask device includes a mask body and a net-stretching frame; the net-stretching frame includes a frame body; a hollow portion is provided in the middle of the frame body; a support portion and a tensioning device are provided on both sides of the frame body; the support portion includes a support surface; an extrusion member of the tensioning device includes an extrusion surface; the extrusion surface is arranged opposite to the support surface; the extrusion member is rotatably arranged on the frame body; when the extrusion member rotates relative to the frame body toward a preset direction: the distance between the extrusion surface and the support surface gradually decreases, so that the end of the mask body is clamped in the accommodation space; the pressure surface applies friction to the mask body, so that the mask body is tensioned. The mask device can realize the net-stretching operation of the mask body, so as to give the mask body a certain pre-tension, thereby reducing the expansion deformation rate of the mask body during the PVD process.

Description

Technical Field

[0001] The present application relates to the field of mask technology, and in particular to a mask device and a mask manufacturing method. Background Art

[0002] Precision electronic components such as heat sinks, circuit boards, and display screens are usually manufactured using the PVD (physical vapor deposition) process, of which the mask is the core component in the PVD process.

[0003] The mask used in the PVD process is covered with dense holes. The main function of this type of mask is to ensure that the coating material is accurately deposited in specific areas on the substrate during the PVD process.

[0004] During the PVD process, the coating material releases a lot of heat, which increases the temperature of the mask and substrate, resulting in irregular deposition of the coating material, thus affecting the quality of the finished product. How to avoid this is an urgent problem to be solved. Summary of the invention

[0005] The purpose of the present application is to overcome the defects of the prior art and provide a mask device and a mask manufacturing method to solve the problems in the prior art.

[0006] In order to solve the above problems, a first aspect of an embodiment of the present application provides a mask device, including a mask body and a screen frame;

[0007] The net-stretching frame comprises a frame body; a hollow portion is arranged in the middle of the frame body; support portions and tensioning devices are arranged on both sides of the frame body, and the tensioning devices correspond to the support portions one by one;

[0008] The support portion includes a support surface; the tensioning device includes an extrusion member, and the extrusion member includes an extrusion surface; the extrusion surface is arranged opposite to the support surface, wherein a receiving space is provided between the extrusion surface and the support surface, and the receiving space is used to receive an end of the mask body;

[0009] The extrusion member is rotatably arranged on the frame body; wherein the extrusion member is driven by a power device;

[0010] When the extrusion member rotates toward a preset direction relative to the frame body: the distance between the extrusion surface and the supporting surface gradually decreases, so that the end of the mask body is clamped in the accommodating space; and the extrusion surface applies friction force to the mask body, so that the mask body is tensioned.

[0011] In a possible implementation manner, the support surface and the extrusion surface are both parts of a cylindrical surface, wherein the rotation axis of the extrusion piece is parallel to and not coaxial with the central axis of the support surface;

[0012] The thickness of the mask body is 20-100 μm;

[0013] The radius difference between the support surface and the extrusion surface is 10 μm or less, and the roundness of the support surface and the extrusion surface is 5 μm or less.

[0014] In a possible implementation manner, an anti-slip coating is provided on the extrusion surface, and the anti-slip coating is used to increase the friction between the extrusion surface and the mask body;

[0015] The surface roughness of the supporting surface is 0.05 μm or less.

[0016] In a possible implementation, the anti-slip coating includes a fluoride coating or a nano coating.

[0017] In a possible implementation manner, the support portion and the frame body are an integrated structure, and both the support portion and the frame body are made of Invar alloy;

[0018] The mask plate body is made of metal foil, and the metal foil is made of Invar alloy.

[0019] In a possible implementation manner, the tensioning device and the frame body are detachable.

[0020] A second aspect of an embodiment of the present application provides a method for manufacturing a mask, using the mask device as described above, comprising:

[0021] Place the main body of the mask plate onto the hollow part;

[0022] Inserting the first end and the second end of the mask body into the accommodation spaces on both sides of the frame body respectively; wherein the first end and the second end are respectively located on both sides of the main body;

[0023] Driving the extrusion member to rotate toward the preset direction corresponding to the extrusion member, so that the first end and the second end are clamped in the corresponding accommodation space, and the mask body is tensioned;

[0024] Welding and fixing the first end portion and the second end portion to the corresponding supporting surface;

[0025] A through hole is made in the main body.

[0026] In a possible implementation, the mask body is pre-processed before the mask body and the stretching frame are assembled; wherein the pre-processing includes: coating a protective layer on the front and back sides of the main body respectively; roughening the front or back sides of the first end and the second end to obtain a rough surface; and removing the protective layer coated on the main body;

[0027] When the first end and the second end of the mask body are respectively inserted into the accommodation spaces on both sides of the frame body, the rough surface faces the extrusion surface.

[0028] In a possible implementation manner, laser drilling is performed on the main body by using a laser device to obtain the through hole; or,

[0029] The through hole is formed on the main body by an etching process.

[0030] In a possible implementation manner, the roughening process includes sandblasting or acid etching.

[0031] The beneficial effects of this application include:

[0032] The mask device proposed in the present application includes a mask body and a tensioning frame, the tensioning frame includes a frame body, a hollow portion is provided in the middle of the frame body, a support portion and a tensioning device are provided on both sides of the frame body, and the tensioning device corresponds to the support portion one by one. The support portion includes a support surface, and the extrusion member of the tensioning device includes an extrusion surface, which is arranged opposite to the support surface, wherein there is a receiving space between the extrusion surface and the support surface.

[0033] When stretching the network, the two ends of the mask body are respectively inserted into the corresponding accommodating spaces. Subsequently, the extrusion piece is driven by a power device to rotate in a preset direction, thereby clamping the ends of the mask body and tensioning the mask body. In this way, a certain pre-tension is given to the mask body, thereby reducing the expansion deformation rate of the mask body during the PVD process.

[0034] The mask device can realize the stretching operation of the mask body to give the mask body a certain pre-tension, thereby reducing the expansion deformation rate of the mask body during the PVD process. Among them, by controlling the rotation amplitude of the extrusion member, the tension of the mask body can be adjusted within a certain range. In addition, the mask device also has the advantages of simple structure and easy use. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 A schematic diagram of a stretched net frame is shown;

[0037] Figure 2 A schematic diagram of a web-stretching frame is shown when an extrusion member is in an initial position;

[0038] Figure 3 A schematic diagram of a web-stretching frame is shown when an extrusion member is in a compressed position;

[0039] Figure 4 A schematic diagram showing a mask main body in a flattened state;

[0040] Figure 5 A schematic diagram showing a mask main body in a tensioned state;

[0041] Figure 6 A schematic diagram of a connecting arm is shown;

[0042] Figure 7 A flow chart of a method for manufacturing a mask is shown.

[0043] Description of main component symbols:

[0044] 100-frame body; 110-hollow portion; 120-support portion; 1201-support surface; 130-tensioning device; 131-extrusion member; 1311-extrusion surface; 132-connecting arm; 1321-first column; 1322-second column; 140-accommodation space; 200-mask body; 210-main body; 221-first end; 222-second end; 223-rough surface. DETAILED DESCRIPTION

[0045] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0046] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0047] In the application, the front side and the back side of a part refer to two surfaces located in the thickness direction of the part.

[0048] During the PVD process, the coating material will release a large amount of heat, which will cause the mask to lengthen due to thermal expansion, change the distance between the mask and the substrate, and deform the holes on the mask, thereby affecting the deposition effect of the coating material.

[0049] The mask plate device proposed in the present application can realize the net stretching operation on the mask plate body to give the mask plate body a certain pre-tension, thereby reducing the expansion deformation rate of the mask plate body during the PVD process, thereby ensuring the precise deposition of the coating material. In addition, the present application also proposes a method for manufacturing a mask plate, by which the mask plate body is pre-tensioned, and then a hole is opened on the mask plate body, thereby ensuring the precision of the opening and the accuracy of the hole position. Since the mask plate body is pre-tensioned, the expansion deformation rate of the mask plate body will be very low during the PVD process, thereby ensuring that the through holes opened will not be deformed or offset, thereby ensuring that the coating material is accurately deposited after passing through the through holes.

[0050] Example

[0051] See also Figure 1 In this embodiment, a mask device is proposed, including a mask body and a stretching frame, wherein the stretching frame includes a frame body 100.

[0052] A hollow portion 110 is provided in the middle of the frame body 100 .

[0053] Supporting parts 120 and tensioning devices 130 are provided on both sides of the frame body 100 , and the tensioning devices 130 correspond to the supporting parts 120 one by one.

[0054] The support portion 120 includes a support surface 1201. The tensioning device 130 includes an extrusion member 131, and the extrusion member 131 includes an extrusion surface 1311. The extrusion surface 1311 is arranged opposite to the support surface 1201, wherein there is an accommodation space 140 between the extrusion surface 1311 and the support surface 1201, and the accommodation space 140 is used to accommodate the end of the mask body 200.

[0055] The extrusion member 131 is rotatably disposed on the frame body 100. The extrusion member 131 is driven by a power device.

[0056] When the extrusion member 131 rotates toward a preset direction relative to the frame body 100: the distance between the extrusion surface 1311 and the support surface 1201 gradually decreases, so that the end of the mask body 200 is clamped in the accommodating space 140; and the extrusion surface 1311 applies friction force to the mask body 200, so that the mask body 200 is tensioned.

[0057] Reference Figure 2 , the extrusion member 131 is in the initial position. At this time, the distance between any position of the extrusion surface 1311 and the support surface 1201 is greater than the thickness of the mask body 200 , thereby allowing the mask body 200 to move freely in the accommodating space 140 .

[0058] Reference Figure 3-Figure 5 When the mask main body 200 is stretched, the first end 221 and the second end 222 of the mask main body 200 are first inserted into the accommodating spaces 140 on both sides of the frame main body 100 respectively; then, the extrusion piece 131 on the left is driven to rotate counterclockwise, and the extrusion piece 131 on the right is driven to rotate clockwise. During this process, the distance between the extrusion surface 1311 and the corresponding support surface 1201 is gradually reduced, so that the first end 221 and the second end 222 of the mask main body 200 are respectively clamped in the corresponding accommodating space 140; wherein, as the extrusion piece 131 rotates, the extrusion surface 1311 will be in close contact with the mask main body 200 and exert friction thereon, and since the first end 221 and the second end 222 of the mask main body 200 are respectively subjected to the mutually symmetrical friction forces F1 and F2, the mask main body 200 is stretched.

[0059] exist Figure 4 In the embodiment, the surfaces of the first end 221 and the second end 222 of the mask body 200 are both roughened.

[0060] like Figure 2 and Figure 3As shown, the tensioning device 130 also includes a connecting arm 132, one end of the connecting arm 132 is connected to the extrusion member 131, and the other end is rotatably connected to the frame body 100. When the connecting arm 132 rotates, the connecting arm 132 will drive the extrusion member 131 to rotate synchronously therewith.

[0061] The connecting arm 132 can be driven to rotate by a power device such as a motor or a hydraulic device, thereby realizing the rotation of the extrusion member 131. For example, the motor and the connecting arm 132 can be connected to each other through a transmission mechanism such as a gear set.

[0062] During the net stretching operation, the rotation amplitude of the connecting arm 132 can be set by the power device, and then the rotation amplitude of the extrusion member 131 can be controlled, so that the tension of the mask body can be adjusted within a certain range.

[0063] like Figure 6 As shown, a first column 1321 and a second column 1322 are respectively provided at both ends of the connecting arm 132 , the first column 1321 is used to connect with the extrusion piece 131 , and the second column 1322 is used to connect with the frame body 100 .

[0064] Specifically, the extrusion piece 131 is provided with a first plug hole corresponding to the first column 1321, and the frame body 100 is provided with a second plug hole corresponding to the second column 1322. During assembly, the first column 1321 is plugged into the first plug hole, and the second column 1322 is plugged into the second plug hole. The first plug hole and the second plug hole can be made by fine processing methods such as wire cutting, thereby ensuring the accuracy of assembly. It should be noted that the first plug hole and the second plug hole are not shown in the drawings.

[0065] In this embodiment, the support surface 1201 and the extrusion surface 1311 are both part of a cylindrical surface, wherein the rotation axis of the extrusion member 131 is parallel to and not coaxial with the central axis of the support surface 1201. The thickness of the mask body is 20-100 μm.

[0066] When manufacturing the net stretching frame, laser positioning or other positioning methods can be used to determine the position of the first plug hole on the extrusion 131 and the position of the second plug hole on the frame body 100, thereby accurately positioning the assembly parts to ensure assembly accuracy and meet form and position tolerance requirements.

[0067] In this embodiment, the radius difference between the support surface 1201 and the extrusion surface 1311 is 10 μm or less, and the roundness of the support surface 1201 and the extrusion surface 1311 is 5 μm or less.

[0068] Therefore, the thickness of the mask body 200 is very thin, so the above tolerance requirements need to be met so that the tensioning frame can meet the use standard. After testing, if the tolerance does not meet the above requirements, when the mask body 200 is stretched, the tensioning force of different parts of the mask body 200 will be obviously inconsistent, and even wrinkles will appear in some parts of the mask body 200.

[0069] The requirements for processing accuracy and geometric tolerance of the net frame are very high. By adopting a simple structural design, the manufacturing cost of the net frame can be effectively reduced. It is estimated that if a more complex net frame is used, the overall manufacturing difficulty and cost will be doubled.

[0070] In this embodiment, an anti-skid coating is provided on the extrusion surface 1311, and the anti-skid coating is used to increase the friction between the extrusion surface 1311 and the mask body 200. When the net stretching operation is implemented, the greater friction coefficient between the extrusion component 131 and the mask body 200 can further increase the friction between the two, so that the mask body 200 can be stretched more quickly and stably to avoid slipping, etc. Among them, the anti-skid coating includes a fluoride coating or a nano coating, etc.

[0071] The surface roughness of the support surface 1201 is 0.05 μm or less, which can greatly reduce the friction between the support surface 1201 and the mask body 200. If the extrusion surface 1311 and the support surface 1201 apply friction to the mask body 200 at the same time, but because the directions of the two friction forces are inconsistent, wrinkles will appear on the mask body 200 between the two, thereby affecting the tensioning effect of the mask body 200.

[0072] In this embodiment, the support portion 120 and the frame body 100 are an integrated structure, and both the support portion 120 and the frame body 100 are made of Invar alloy; the mask body 200 is a metal foil material, and the metal foil material is made of Invar alloy.

[0073] The material used for the support portion 120 is the same as that for the mask body 200. Thus, when welding the mask body 200 and the support surface 1201, it is easier to achieve high-quality welding because the chemical and physical properties of the two are the same. Since the surface roughness of the support surface 1201 is very low, it is not easy for a cold weld to occur between the mask body 200 and the support surface 1201, thereby more effectively ensuring the strength and reliability of the welding. Among them, welding can be performed by laser welding or other methods.

[0074] The tensioning device 130 is detachable from the frame body 100. After the tensioning of the mask body 200 and the welding between the mask body 200 and the support surface 1201 are completed, the tensioning device 130 can be disassembled, thereby reducing the weight and volume of the tensioning frame, which is convenient for the subsequent processing and use of the mask body 200.

[0075] In this embodiment, a method for manufacturing a mask is also proposed, which uses the mask device mentioned above.

[0076] See also Figure 7 , the manufacturing method comprises:

[0077] S1, placing the main body 210 of the mask main body 200 on the hollow part 110;

[0078] S2, inserting the first end 221 and the second end 222 of the mask body 200 into the accommodation spaces 140 on both sides of the frame body 100 respectively; wherein the first end 221 and the second end 222 are respectively located on both sides of the main body 210;

[0079] S3, driving the extrusion member 131 to rotate toward a preset direction corresponding to the extrusion member 131, so that the first end 221 and the second end 222 are clamped in the corresponding accommodation space 140, and the mask body 200 is tensioned;

[0080] S4, welding and fixing the first end portion 221 and the second end portion 222 to the corresponding support surface 1201;

[0081] S5 , making a through hole in the main body 210 .

[0082] By pre-tensioning the mask body 200 through the above method, and then performing the hole-opening operation on the mask body 200, the precision of the hole opening and the accuracy of the hole position can be ensured. Since the mask body 200 is pre-tensioned, the expansion deformation rate of the mask body 200 will be very low during the subsequent PVD process, thereby ensuring that the opened through hole will not be deformed or offset, thereby ensuring that the coating material is accurately deposited after passing through the through hole.

[0083] In this embodiment, before assembling the mask main body 200 and the web frame, the mask main body 200 is pre-processed.

[0084] Specifically, preprocessing includes:

[0085] A protective layer is applied to the front and back of the main body 210 respectively;

[0086] Roughening the front or back sides of the first end 221 and the second end 222 to obtain a rough surface 223;

[0087] The protective layer coated on the main body 210 is removed.

[0088] By providing a protective layer on the surface of the main body 210 , it is possible to prevent the surface of the main body 210 from being adversely affected during the roughening process.

[0089] When the first end 221 and the second end 222 of the mask body 200 are respectively inserted into the accommodation spaces 140 on both sides of the frame body 100, the rough surface 223 faces the extrusion surface 1311. By providing the rough surface 223, the friction between the extrusion piece 131 and the mask body 200 can be effectively enhanced, so that when the net is stretched, the mask body 200 can be stretched more quickly and stably to avoid slipping.

[0090] Roughening treatments include sandblasting or acid etching.

[0091] In this embodiment, laser drilling can be performed on the main body 210 by using a laser device to obtain a through hole; or a through hole can be formed on the main body 210 by an etching process.

[0092] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0093] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A mask device, characterized in that: It includes a mask main body and a screen frame; The net-stretching frame comprises a frame body; a hollow portion is arranged in the middle of the frame body; support portions and tensioning devices are arranged on both sides of the frame body, and the tensioning devices correspond to the support portions one by one; The support portion includes a support surface; the tensioning device includes an extrusion member, and the extrusion member includes an extrusion surface; the extrusion surface is arranged opposite to the support surface, wherein a receiving space is provided between the extrusion surface and the support surface, and the receiving space is used to receive an end of the mask body; The extrusion member is rotatably arranged on the frame body; wherein the extrusion member is driven by a power device; When the extrusion member rotates toward a preset direction relative to the frame body: the distance between the extrusion surface and the supporting surface gradually decreases, so that the end of the mask body is clamped in the accommodating space; and the extrusion surface applies friction force to the mask body, so that the mask body is tensioned.

2. The mask device according to claim 1, characterized in that: The support surface and the extrusion surface are both parts of a cylindrical surface, wherein the rotation axis of the extrusion piece is parallel to and not coaxial with the central axis of the support surface; The thickness of the mask body is 20-100 μm; The difference in radius between the support surface and the extrusion surface is less than 10 μm, and the roundness of the support surface and the extrusion surface is less than 5 μm.

3. The mask device according to claim 2, characterized in that: The extrusion surface is provided with an anti-slip coating, and the anti-slip coating is used to increase the friction between the extrusion surface and the mask body; The surface roughness of the supporting surface is less than 0.05 μm.

4. The mask device according to claim 3, characterized in that: The anti-slip coating includes a fluoride coating or a nano coating.

5. The mask device according to claim 1, characterized in that: The support part and the frame body are an integrated structure, and both the support part and the frame body are made of Invar alloy; The mask plate body is made of metal foil, and the metal foil is made of Invar alloy.

6. The mask device according to claim 1, characterized in that: The tensioning device is detachable from the frame body.

7. A method for manufacturing a mask, using the mask device according to any one of claims 1 to 6, characterized in that: include: Placing the main body of the mask plate on the hollow part; Inserting the first end and the second end of the mask body into the accommodation spaces on both sides of the frame body respectively; wherein the first end and the second end are respectively located on both sides of the main body; Driving the extrusion member to rotate toward the preset direction corresponding to the extrusion member, so that the first end and the second end are clamped in the corresponding accommodation space, and the mask body is tensioned; Welding and fixing the first end portion and the second end portion to the corresponding supporting surface; A through hole is made in the main body.

8. The method for manufacturing a mask according to claim 7, characterized in that: Before assembling the mask body and the stretching frame, pre-processing the mask body; wherein the pre-processing comprises: coating a protective layer on the front and back of the main body respectively; roughening the front or back of the first end and the second end to obtain a rough surface; removing the protective layer coated on the main body; When the first end and the second end of the mask body are respectively inserted into the accommodation spaces on both sides of the frame body, the rough surface faces the extrusion surface.

9. The method for manufacturing a mask according to claim 7, characterized in that: Performing laser drilling on the main body by a laser device to obtain the through hole; or, The through hole is formed on the main body by an etching process.

10. The method for manufacturing a mask according to claim 8, characterized in that: The roughening treatment includes sandblasting or acid etching.

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