Galvanometer correction method for adapting a circular scanning area

Abstract

The application relates to a galvanometer correction method suitable for a circular scanning area, which comprises the following steps: determining a scanning area, a first correction area and a center point of a field mirror; taking the center point as a reference, making a plurality of auxiliary right-angled triangles in a clockwise or counterclockwise direction, taking the short right-angled side of each auxiliary right-angled triangle as a side length, making a plurality of auxiliary squares, fitting all the auxiliary squares which are completely in the scanning area of the field mirror into one piece to form a second correction area. The scheme designs a correction method of multiple corrections in different areas and then fitting, can effectively increase the correction range, makes the correction area fill the whole field mirror circular area, and effectively avoids area waste.

Description

[0001] This application is a divisional application of the invention patent application with application number CN202410222996.4, application date February 28, 2024, entitled 'Correction Method and Apparatus for Galvanometer'. Technical Field

[0002] This invention relates to the field of laser processing, and in particular to a galvanometer calibration method adapted for circular scanning areas. Background Technology

[0003] In laser applications, especially when using systems with F-Theta field lenses and galvanometers, galvanometer calibration is necessary to ensure accurate laser processing position and dimensions. A calibration file is then generated and used during processing. In conventional calibration methods, because the F-Theta field lens is circular while the actual processing area in production is rectangular, the calibration range is typically an inscribed square within the field lens circle. This inscribed square calibration method is currently common, but its effective area is limited; areas not calibrated cannot be used properly, resulting in some waste. Summary of the Invention

[0004] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a galvanometer correction method adapted to a circular scanning region.

[0005] The present invention also proposes a galvanometer correction method and apparatus having the above-mentioned adaptive circular scanning area.

[0006] On one hand, the galvanometer calibration method for adapting to a circular scanning area according to an embodiment of the present invention is applied to a galvanometer calibration device. The galvanometer calibration device includes a laser, a galvanometer, and a field lens connected in sequence. The laser emitted by the laser passes through the galvanometer and the field lens in sequence and then irradiates a processing platform. The portion of the processing platform irradiated by the field lens is the scanning area. The device also includes a calibration area that needs to be calibrated. The calibration area is located within the scanning area, and the area of ​​the calibration area is not greater than the area of ​​the scanning area. The galvanometer calibration method for adapting to a circular scanning area includes the following steps:

[0007] S100, Determine the scanning area, first correction area, and center point of the field lens;

[0008] S200. Using the center point as a reference, construct multiple auxiliary right-angled triangles in a clockwise or counterclockwise direction. Using the shorter right-angled side of each auxiliary right-angled triangle as the side length, construct multiple auxiliary squares. Fit the area formed by stitching together all the auxiliary squares that are completely within the scanning area of ​​the field lens into a single piece to form the second correction area.

[0009] According to some embodiments of the present invention, the galvanometer calibration method for adapting to a circular scanning area further includes the following steps:

[0010] S300. Using multiple auxiliary squares as a reference, the auxiliary squares are divided to obtain new auxiliary squares and new correction areas;

[0011] S400. Based on the preset accuracy threshold, iteratively execute step S300 to obtain a new correction area. Stop iterating when the side length of the new auxiliary square is less than or equal to the preset accuracy threshold. Fit the area formed by stitching together the new auxiliary squares that are completely within the scanning area of ​​the field lens into one piece to obtain the final correction area.

[0012] S500: Based on the new correction area, the galvanometer is calibrated.

[0013] According to some embodiments of the present invention, step S100 includes:

[0014] S110. Determine the area where the laser emitted from the laser, after passing through the field lens, illuminates the processing platform and a light spot appears. The area of ​​the light spot is the scanning area of ​​the field lens, and the scanning area of ​​the field lens is a circular scanning area.

[0015] S120. Construct an inscribed square within the scanning area of ​​the field lens, wherein the area enclosed by the inscribed square is the first correction area;

[0016] S130. Determine the position of the center point based on the intersection of the diagonals of the inscribed square in the circle.

[0017] Furthermore, in step S210,

[0018] The hypotenuse of the auxiliary right triangle is the radius of the scanning area of ​​the field lens, the longer leg of the auxiliary right triangle is a horizontal or vertical line with the center point as the reference, and the shorter leg of the auxiliary right triangle is the perpendicular line from the intersection of the hypotenuse and the scanning area of ​​the field lens to the horizontal or vertical line, such that the tangent of the smallest angle of each auxiliary right triangle is 0.5.

[0019] Furthermore, in step S200,

[0020] The number of auxiliary right triangles is 8, the length of the longer right-angled side of each auxiliary right-angled triangle is twice the length of the shorter right-angled side, and the length of the hypotenuse of each auxiliary right-angled triangle is the radius of the field lens scanning area.

[0021] Furthermore, in step S200,

[0022] There are 16 auxiliary squares, which are pieced together to form a large square. In the large square, except for the four auxiliary squares where the four vertices are located, which are not completely within the scanning area of ​​the field lens, the other 12 auxiliary squares are completely within the scanning area of ​​the field lens.

[0023] Furthermore, step S300 includes:

[0024] S310. Using multiple auxiliary squares as a reference, each auxiliary square is evenly divided into 4 new auxiliary squares;

[0025] S320. In the new auxiliary square, the area formed by stitching together the new auxiliary squares that are completely within the scanning area of ​​the field lens is fitted into a single piece to form a new correction area.

[0026] Furthermore, step S500 includes:

[0027] S510. Based on a combined standard graphic formed by splicing multiple new auxiliary squares, determine the ideal coordinate information of each intersection point;

[0028] S520. Place the standard combined graphic on the processing platform, so that the center of the combined standard graphic coincides with the center point;

[0029] S530: Acquire the calibration image through the image acquisition device on the processing platform, calculate the actual coordinate information of each intersection point, compare the actual coordinate information with the ideal coordinate information and generate a calibration file, and finally generate a calibration file in the corresponding format through the calibration conversion program.

[0030] On the other hand, the galvanometer correction device according to an embodiment of the present invention includes a galvanometer correction method for adapting a circular scanning area according to the above embodiments of the present invention, the galvanometer correction device comprising:

[0031] Laser;

[0032] A galvanometer, which is connected to the laser, includes two sets of reflectors controlled by independent motors.

[0033] A field lens, which is connected to the galvanometer;

[0034] A processing platform is provided, which is located within the effective illumination range of the field lens. The processing platform includes a scanning area and a correction area. The scanning area is the portion illuminated by the field lens, and the correction area is the area where the coordinates need to be corrected. The correction area is located within the scanning area.

[0035] The processing device includes the laser, the galvanometer, the field mirror, and the processing platform, which are respectively connected to the processing device.

[0036] Furthermore, the present invention also proposes a computer-readable storage medium storing program instructions thereon, which, when executed by a processor, implement the galvanometer correction method for adapting to the circular scanning region.

[0037] The embodiments of the present invention have at least the following beneficial effects: The present solution designs a correction method that performs multiple corrections in different regions and then performs fitting, which can effectively increase the correction range and make the correction region fill the entire field mirror circle region, effectively avoiding region waste.

[0038] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0039] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0040] Figure 1 This is a flowchart of a galvanometer calibration method for adapting a circular scanning area according to an embodiment of the present invention;

[0041] Figure 2 This is a flowchart illustrating the process of determining the scanning area, the first correction area, and the center point of the field lens in the galvanometer correction method for adapting to a circular scanning area according to an embodiment of the present invention.

[0042] Figure 3 The flowchart illustrates the galvanometer correction method for adapting a circular scanning area in this embodiment of the invention, which uses multiple auxiliary squares as a reference to divide the auxiliary squares to obtain new auxiliary squares and new correction areas.

[0043] Figure 4 This is a schematic diagram showing the relative positions of the scanning area and the correction area on the processing platform in the galvanometer correction method for adapting a circular scanning area according to an embodiment of the present invention.

[0044] Figure 5 This is a schematic diagram of the scanning area, the first correction area, and the center point of the field mirror in the galvanometer correction method for adapting to a circular scanning area according to an embodiment of the present invention.

[0045] Figure 6 This is a schematic diagram illustrating the galvanometer correction method for adapting a circular scanning area in an embodiment of the present invention, which divides the scanning area of ​​the field mirror into multiple auxiliary right-angled triangles and multiple auxiliary squares.

[0046] Figure 7This is a schematic diagram of multiple auxiliary squares and a second correction region in the galvanometer correction method for adapting a circular scanning region according to an embodiment of the present invention.

[0047] Figure 8 This is a schematic diagram of the new correction area (third correction) in the galvanometer correction method for adapting to the circular scanning area according to an embodiment of the present invention.

[0048] Figure 9 This is a schematic diagram of the new correction area (fourth correction) in the galvanometer correction method for adapting to the circular scanning area according to an embodiment of the present invention.

[0049] Figure 10 This is a schematic diagram of the galvanometer correction device according to an embodiment of the present invention.

[0050] Figure 11 This is a schematic diagram of the image before correction in the galvanometer correction method for adapting a circular scanning area according to an embodiment of the present invention.

[0051] Figure 12 This is a schematic diagram of the corrected image in the galvanometer correction method for adapting to a circular scanning area according to an embodiment of the present invention.

[0052] Figure label:

[0053] Detailed Implementation

[0054] The following will provide a clear and complete description of the concept, specific structure, and technical effects of the present invention in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, solution, and effects of the present invention. It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0055] It should be noted that, unless otherwise specified, when a feature is referred to as "fixed" or "connected" to another feature, it can be directly fixed or connected to the other feature, or indirectly fixed or connected to the other feature. Furthermore, the descriptions of "upper," "lower," "left," "right," "top," and "bottom" used in this invention are only relative to the relative positional relationships of the various components of the invention in the accompanying drawings.

[0056] It should be noted that, unless otherwise specified, when one feature is referred to as having an "electrical connection" with another feature, the two features can be connected directly via pins, via cables, or via wireless transmission. Specific electrical connection methods are common to those skilled in the art, and they can implement the connection as needed.

[0057] Furthermore, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in this specification is for the purpose of describing particular embodiments only and not for limiting the invention. The term "and / or" as used herein includes any combination of one or more of the associated listed items.

[0058] It should be understood that although the terms first, second, third, etc., may be used in this disclosure to describe various elements, these elements should not be limited to these terms. These terms are only used to distinguish elements of the same type from one another. For example, without departing from the scope of this disclosure, a first element may also be referred to as a second element, and similarly, a second element may also be referred to as a first element.

[0059] On the one hand, refer to Figures 1 to 12 According to an embodiment of the present invention, a galvanometer calibration method for an adapted circular scanning area is provided.

[0060] According to an embodiment of the present invention, a galvanometer calibration method for an adaptive circular scanning area is applied to a galvanometer calibration device. The galvanometer calibration device includes a laser 100, a galvanometer 200, and a field lens 300 (focusing lens) connected in sequence. The laser emitted by the laser 100 passes sequentially through the galvanometer 200 and the field lens 300 (focusing lens) before irradiating a processing platform 400. The portion of the processing platform 400 irradiated by the field lens 300 (focusing lens) is the scanning area 410. The device also includes a calibration area 420 that requires calibration. The calibration area 420 is disposed within the scanning area 410, and the area of ​​the calibration area 420 is not larger than the area of ​​the scanning area 410. (Refer to...) Figure 1 The galvanometer calibration method for adapting to a circular scanning area includes the following steps:

[0061] S100, Determine the scanning area 410, the first correction area 421, and the center point 422 of the field lens 300 (focusing lens);

[0062] S200. Using the center point 422 as a reference, construct multiple auxiliary right triangles 423 in a clockwise or counterclockwise direction. Using the shorter right-angled side of each auxiliary right triangle 423 as the side length, construct multiple auxiliary squares 424. Fit the area formed by stitching together all the auxiliary squares 424 that are completely within the scanning area 410 of the field lens 300 into one piece to form the second correction area 425.

[0063] The embodiments of the present invention have at least the following beneficial effects: The present solution designs a correction method that performs multiple corrections in different regions and then performs fitting, which can effectively increase the correction range and make the correction region 420 fill the entire circular region of the field lens 300 (focusing lens), effectively avoiding region waste.

[0064] In actual processing, the obtained processing results often contain deviations, which have a significant impact on our processing outcomes. These errors mainly originate from fundamental errors, linear errors, nonlinear errors, and systematic errors. Fundamental errors primarily lead to geometric distortions such as pincushion distortion and barrel distortion. Therefore, before using the Laser 100 system for processing, it needs to be calibrated. However, conventional calibration involves calibrating a square inscribed in a circle. The effective area of ​​this calibration is limited; areas that cannot be calibrated cannot be used properly, resulting in some waste.

[0065] This invention increases the area of ​​the correction region 420 by gradually increasing the number of squares while reducing the area of ​​a single square, thereby improving the effective utilization area and ultimately making the correction region 420 as close as possible to the scanning region 410, thus avoiding waste.

[0066] According to some embodiments of the present invention, with reference to Figure 1 The galvanometer calibration method for adapting to a circular scanning area further includes the following steps:

[0067] S300. Using multiple auxiliary squares 424 as a reference, the auxiliary squares 424 are divided to obtain new auxiliary squares 426 and new correction regions 427.

[0068] S400. Based on the preset accuracy threshold, step S300 is executed iteratively to obtain a new correction area 427. The iteration stops when the side length of the new auxiliary square 426 is less than or equal to the preset accuracy threshold. The area formed by stitching together the new auxiliary square 426, which is completely within the scanning area 410 of the field lens 300 (focusing lens), is fitted into one piece to obtain the final correction area 420.

[0069] S500, based on the new correction region 420, the galvanometer 200 is calibrated.

[0070] According to some embodiments of the present invention, with reference to Figure 1 and Figure 2 Step S100 includes:

[0071] S110. Determine that the laser emitted from the laser 100, after passing through the field lens 300 (focusing lens), illuminates the area where a light spot appears on the processing platform 400. The area of ​​the light spot is the scanning area 410 of the field lens 300 (focusing lens), and the scanning area 410 of the field lens 300 (focusing lens) is a circular scanning area 410.

[0072] S120. Construct an inscribed square within the scanning area 410 of the field lens 300 (focusing lens), and the area enclosed by the inscribed square is the first correction area 421.

[0073] S130. Based on the intersection of the diagonals of the inscribed square in the circle, determine the position of the center point 422.

[0074] Specifically, refer to Figure 4 and Figure 5 For steps S110 and S120, the area inside the circular region is the scanning area 410 of the field lens 300 (focusing lens), while the square is the inscribed square of the circle, initialized as the first correction area 421. The conventional correction method is the inscribed square of the processing range of the field lens 300, i.e. the shadow area. Apart from this, other areas of the scanning area 410 of the field lens 300 (focusing lens) cannot be corrected and cannot be used, wasting these areas and reducing the processing area.

[0075] For step S130, since the geometric distortion of the center point 422 is almost zero, it can be considered as having no deviation. The more the area deviates from the center point 422, the more obvious the distortion becomes. Therefore, determining the position of the center point 422 lays the foundation for subsequent steps.

[0076] Furthermore, refer to Figure 1 In step S200,

[0077] The hypotenuse of the auxiliary right triangle 423 is the radius of the scanning area 410 of the field lens 300 (focusing lens). The major right-angled side of the auxiliary right triangle 423 is a horizontal or vertical line with the center point 422 as the reference. The minor right-angled side of the auxiliary right triangle 423 is the perpendicular line from the intersection of the hypotenuse and the scanning area 410 of the field lens 300 (focusing lens) to the horizontal or vertical line. The tangent of the smallest angle of each auxiliary right triangle 423 is 0.5.

[0078] Specifically, refer to Figure 6 With center point 422 as the center and radius as the hypotenuse, rotate clockwise or counterclockwise for one revolution. The intersection of the radius and the outer edge of the scanning area 410 of the field lens 300 with the perpendicular line to the horizontal line or the vertical line will result in countless right triangles. However, only the auxiliary right triangle 423 that meets the condition that the tangent of the smallest angle of the right triangle is 0.5 is required.

[0079] In practice, the criterion for determining whether to draw a perpendicular line from the intersection point to the horizontal line or a perpendicular line from the intersection point to the vertical line is whether the vertex of the smallest angle of the right triangle is the center point after drawing the perpendicular line. If the vertex of the smallest angle is not the center point after drawing the perpendicular line, then a perpendicular line needs to be drawn in another direction.

[0080] Furthermore, refer to Figure 1 and Figure 6 In step S200,

[0081] The number of auxiliary right triangles 423 is 8. The length of the longer right-angled side of the auxiliary right triangle 423 is twice the length of the shorter right-angled side. The length of the hypotenuse of the auxiliary right triangle 423 is the radius of the scanning area 410 of the field lens 300 (focusing lens).

[0082] Specifically, refer to Figure 6 There are 8 auxiliary right triangles 423. Using the shorter side of each auxiliary right triangle 423 as the side length, a square is drawn towards the center point 422 to obtain 8 squares. These 8 squares are then mirrored and copied to the intersection of the center point 422 and the four edges to obtain 16 auxiliary squares 424.

[0083] Furthermore, refer to Figure 1 and Figure 6 In step S200,

[0084] There are 16 auxiliary squares 424, which are pieced together to form a large square. In the large square, except for the four auxiliary squares 424 at the four vertices which are not completely within the scanning area 410 of the field lens 300 (focusing lens), the other 12 auxiliary squares 424 are completely within the scanning area 410 of the field lens 300 (focusing lens).

[0085] Specifically, refer to Figure 6 and Figure 7 The 12 auxiliary squares 424 that are completely within the scanning area 410 of the field lens 300 (focusing lens) are fitted together to obtain the second correction area 425.

[0086] Furthermore, refer to Figure 3 and Figure 9 Step S300 includes:

[0087] S310. Using multiple auxiliary squares 424 as a reference, each auxiliary square 424 is evenly cut into 4 new auxiliary squares 426;

[0088] S320, In the new auxiliary square 426, the area formed by stitching together the new auxiliary square 426 that is completely within the scanning area 410 of the field lens 300 (focusing lens) is fitted into a single piece to form a new correction area 427.

[0089] Specifically, refer to Figure 8Based on the division of the second correction area 425, i.e. the third correction, each auxiliary square 424 is divided into four small squares. At the four vertices of the original second correction area 425, a new small square is added and completely included in the scanning area 410. Therefore, by dividing the auxiliary squares 424, the technical effect of increasing the correction area 420 is achieved.

[0090] In the first step of step S400, refer to Figure 9 If the side length of the new auxiliary square 426 is greater than the accuracy threshold, the iteration continues randomly. Based on the third correction, a fourth correction is performed, and the auxiliary square 424 is divided into four equal parts again. This results in the area of ​​the new correction region 427 being increased by the area of ​​four small squares compared to the area of ​​the original correction region 420, thus achieving the technical effect of further increasing the area of ​​the correction region 420.

[0091] After multiple iterations, the area of ​​the correction region 420 gradually approaches the area of ​​the scanning region 410, thereby achieving the technical effect of making the most of the area of ​​the scanning region 410.

[0092] However, due to the existence of the accuracy threshold, the area of ​​the correction region 420 cannot be greater than or equal to the area of ​​the scanning region 410.

[0093] Furthermore, after step S400, the area of ​​the correction region 420 no longer increases, and the field lens 300 (focusing lens) is then corrected based on this.

[0094] Furthermore, step S500 includes the following steps: S510, determining the ideal coordinate information of each intersection point based on the combined standard graphic formed by splicing multiple new auxiliary squares 426;

[0095] S520. Place the standard combined graphic on the processing platform, so that the center of the combined standard graphic coincides with the center point 422.

[0096] S530: Acquire the calibration image through the image acquisition device on the processing platform, calculate the actual coordinate information of each intersection point, compare the actual coordinate information with the ideal coordinate information and generate a calibration file, and finally generate a calibration file in the corresponding format through the calibration conversion program.

[0097] Specifically, regarding the calculation of calibration point coordinates, after line processing, the resulting line information includes vertical lines, horizontal lines, and diagonal lines. These are stored in a dictionary (a Python data structure) called `Lines`. The `Lines` dictionary contains three key-value pairs, corresponding to vertical, horizontal, and diagonal lines respectively. Theoretically, the relationship between the number of lines in `Lines` and the number of calibration points `n` is as follows:

[0098] ,

[0099] The ideal calibration point corresponds to the first two key-value pairs in `Lines`. The first key-value pair contains information about the vertical line segment, and the second key-value pair contains information about the horizontal line segment; both are stored in an array. After image distortion correction, the vertical and horizontal lines are essentially free of tilt, so the array stores the intercepts of the lines on the X or Y axis. The array `listver` corresponding to the vertical line is represented as follows:

[0100] listver= [x1, x2, x3, … , xm]

[0101] The array `listhor` corresponding to the horizontal line is represented as:

[0102] listhor= [y1, y2, y3, … , ym]

[0103] Where m = Therefore, the ideal calibration point pixel coordinates are the intersection of the vertical line and the horizontal line. The pixel coordinates of the ideal calibration point are stored in the array listideal, where each element is represented by a two-dimensional array:

[0104] listideal= [(x1, y1), (x2, y2), (x3, y4), … , (xm, ym)]

[0105] After obtaining the pixel coordinates of the ideal calibration points, center normalization is performed on them. Taking a 3×3 calibration point as an example, the pixel coordinates of the center point are (x5, y5). Refer to Table 1 for the coordinate normalization process of all ideal calibration points:

[0106] Table 1

[0107]

[0108] The actual checkpoint corresponds to the last key-value pair in Lines, stored in the array listreal:

[0109] list𝑟𝑒𝑎l= [(x1′,y1′), (x2′, y2′), (x3′, y3′), … , (xm′, ym′)]。

[0110] When calculating, you need to first determine whether the slope lines are in the same area and the slope directions are opposite. Find their intersection points to get the pixel coordinates of the actual calibration point. It should be noted that when normalizing the center of the actual proofreading point, the actual proofreading center point needs to be used as the benchmark. Because when obtaining the proofreading image, the center position of the proofreading pattern and the "standard ruler" is aligned, ideally, when the proofreading software processes the proofreading image, the positions of the two center points should overlap. However, due to this process Manual operation, there may be deviations from the naked eye. Therefore, when the actual proofreading point is normalized, its own center point is used as the normalization standard, which can reduce unnecessary errors. In the same way, refer to Table 2 for the normalization of the central pixel coordinates of the actual proofreading point.

[0111] Table 2

[0112]

[0113] Specifically, refer to Figure 11 and Figure 12 , through the correction effect of the proofreading file, the actual coordinate information is corrected to the ideal coordinate information.

[0114] On the other hand, refer to Figure 10 , the galvanometer correction device according to the embodiment of the present invention, including the galvanometer correction method according to the above embodiment of the present invention, the galvanometer correction device includes:

[0115] laser 100;

[0116] galvanometer 200, which is connected to the laser 100, which includes two sets of reflectors controlled separately by independent motors;

[0117] field mirror 300 (focusing lens), the field mirror 300 (focusing lens) is connected to the galvanometer 200;

[0118] Processing platform 400, the processing platform 400 is disposed within the effective illumination range of the field mirror 300 (focusing lens), the processing platform 400 includes a scanning area 410 and a correction area 420, the scanning area 410 is The part illuminated by the field mirror 300 (focusing lens);

[0119] The processing device includes the laser 100, the galvanometer 200, the field lens 300 (focusing lens), and the processing platform 400, which are respectively connected to the processing device.

[0120] Specifically, a galvanometer scanning system typically consists of an X-mirror, a Y-mirror, an X-drive motor, a Y-drive motor, a motor servo circuit, and a control circuit. The control circuit, also called a control card, receives data from the host computer software and outputs control signals. The entire laser galvanometer processing system, besides the optical galvanometer scanning system, also includes a light source, laser 100, circuitry, and objective lenses. Depending on the order of the objective lens and the galvanometer, it can be divided into front-objective scanning and back-objective scanning. Front-objective scanning refers to the laser beam being focused onto the image surface by the objective lens after passing through the galvanometer; back-objective scanning refers to the laser beam being focused by the objective lens first, and then output onto the image surface after passing through the galvanometer. Therefore, front-objective scanning is typically used for small-format processing, such as laser marking; while back-objective scanning is typically used for large-format processing.

[0121] In some embodiments of the present invention, a front-scanning method is used, while in other embodiments, a back-scanning method may be used.

[0122] Specifically, the scanning area 410 is the portion illuminated by the field lens 300 (focusing lens), and the correction area 420 is the area whose coordinates need to be corrected. The correction area 420 is located within the scanning area 410.

[0123] Furthermore, refer to Figure 1 The present invention also proposes a computer-readable storage medium having program instructions stored thereon, which, when executed by a processor, implement the galvanometer 200 correction method.

[0124] Other configurations and operations of the galvanometer correction device according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0125] According to embodiments of the present invention, by such a configuration, at least the following effects can be achieved:

[0126] The above description is merely a preferred embodiment of the present invention. The present invention is not limited to the above-described embodiments. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this disclosure, as long as they achieve the same technical effects, should be included within the scope of protection of this disclosure and fall under the protection scope of the present invention. Within the protection scope of the present invention, the technical solutions and / or implementation methods can have various modifications and variations.

Claims

1. A galvanometer correction method for adapting a circular scanning area, applied to a galvanometer correction device, the galvanometer correction device comprising a laser (100), a galvanometer (200) and a field lens (300) connected in sequence, the laser (100) emitting laser light which passes through the galvanometer (200) and the field lens (300) in sequence and then irradiates on a processing platform (400), the part of the processing platform (400) irradiated by the field lens (300) being a scanning area (410), further comprising a correction area (420) which needs to be corrected, the correction area (420) being arranged in the scanning area (410), and the area of the correction area (420) being not greater than the area of the scanning area (410), characterized in that, The galvanometer (200) correction method comprises the following steps: S100, determining a scanning area (410), a first correction area (421) and a center point (422) of a field lens (300); S200, taking the center point (422) as a reference, making a plurality of auxiliary right-angled triangles (423) in a clockwise or counterclockwise direction, making a plurality of auxiliary squares (424) with the short leg of each auxiliary right-angled triangle (423) as the side length, and fitting the area formed by splicing all the auxiliary squares (424) completely within the scanning area (410) of the field lens (300) into a piece to form a second correction area (425); In the step S200, The hypotenuse of the auxiliary right-angled triangle (423) is the radius of the scanning area (410) of the field lens (300), the long leg of the auxiliary right-angled triangle (423) is a horizontal line or a vertical line with the center point (422) as a reference, and the short leg of the auxiliary right-angled triangle (423) is a perpendicular line from the intersection point of the hypotenuse and the scanning area (410) of the field lens (300) to the horizontal line or the vertical line, and the tangent value of the smallest angle of each auxiliary right-angled triangle (423) is 0.

5.

2. The galvanometer correction method for adapting a circular scan area according to claim 1, characterized in that: The galvanometer correction method for adapting to a circular scanning area further comprises the following steps: S300, taking the plurality of auxiliary squares (424) as a reference, dividing the auxiliary squares (424) to obtain new auxiliary squares (426) and new correction areas (427); S400, based on a preset precision threshold, iteratively performing the step S300 to obtain new correction areas (427) until the side length of the new auxiliary square (426) is less than or equal to the preset precision threshold, and then stopping iteration, and fitting the area formed by splicing the new auxiliary square (426) completely within the scanning area (410) of the field lens (300) into a piece to obtain a final correction area (420); S500, based on the final correction area (420), correcting the galvanometer (200).

3. The galvanometer correction method for adapting a circular scan area according to claim 1, characterized in that: The step S100 comprises: S110, determining the area where the light spot appears on the machining platform (400) after the laser emitted from the laser (100) passes through the field lens (300), the light spot area being the scanning area (410) of the field lens (300), and the scanning area (410) of the field lens (300) being a circular scanning area (410); S120, constructing a circle-inscribed square in the scanning area (410) of the field lens (300), and the area surrounded by the circle-inscribed square being the first correction area (421); S130, determining the position of the center point (422) based on the intersection point of the diagonal lines of the circle-inscribed square.

4. The galvanometer correction method for adapting a circular scan area according to claim 1, wherein: In the step S200, The number of the auxiliary squares (424) is 16, and the 16 auxiliary squares (424) are spliced into a large square. In the large square, except for the four auxiliary squares (424) at the four vertices which are not completely in the scanning area (410) of the field lens (300), the other 12 auxiliary squares (424) are completely in the scanning area (410) of the field lens (300).

5. The galvanometer correction method for adapting a circular scan area according to claim 2, characterized in that: The step S300 comprises: S310, cutting each auxiliary square (424) into four new auxiliary squares (426) according to the plurality of auxiliary squares (424); S320, fitting the region spliced by the new auxiliary squares (426) which are completely in the scanning area (410) of the field lens (300) into a piece to form a new correction area (427). 6.A computer readable storage medium having program instructions stored thereon, the program instructions, when executed by a processor, implement the method of any one of claims 1 to 5.

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