Liquid treatment device based on high frequency sound waves

Abstract

The application relates to a liquid processing device based on high-frequency sound waves, comprising a base provided with a flow channel structure and a high-frequency sound wave driver; the flow channel structure is provided with a flow channel, an inlet and an outlet, liquid enters the flow channel through the inlet and flows out of the flow channel through the outlet; the high-frequency sound wave driver is arranged at the outlet and has a preset position corresponding relationship with the outlet; when the liquid flows out of the flow channel structure and covers the high-frequency sound wave driver, the high-frequency sound wave driver generates high-frequency sound waves, the high-frequency sound waves are attenuated after contacting the liquid, and a volume force is generated to act on the liquid. The application can promote the liquid to break through the surface tension under the action of the volume force, break, form small-size atomized droplets, avoid the problems of low atomization efficiency and large power consumption caused by the direct action of the sound waves on the liquid surface in the prior art, and the application can also be used as a jet generator to form a jet in the liquid.

Description

Liquid handling device based on high-frequency sound waves Technical Field

[0001] This application relates to the field of microelectromechanical technology, and in particular to a liquid handling device based on high-frequency sound waves. Background Technology

[0002] Nebulization technology, capable of producing tiny droplets, is widely used in mass spectrometry, inhalation therapy, spraying, and surface deposition. Traditional liquid nebulization techniques mainly include four types: heated nebulization, pressure jet nebulization, mesh vibration nebulization, and ultrasonic nebulization.

[0003] 1) Heating atomization uses localized high temperatures to heat liquids into aerosols. However, localized high temperatures can cause some liquids to denature or decompose, especially biological liquids, which have strict temperature requirements.

[0004] 2) Jet atomizers use high-pressure airflow to produce a high-throughput atomization effect, but they are expensive and can easily lead to waste of drugs.

[0005] 3) The mesh vibration method uses piezoelectric ceramics in conjunction with a mesh screen to atomize small particles, but it is prone to clogging of the mesh screen when atomizing liquid, which reduces its service life.

[0006] 4) For pharmaceuticals, excessive atomization can easily lead to drug waste. Ultrasonic atomization uses ultrasound waves to act on the liquid surface, thereby producing atomization. This type of method has been applied to all aspects of life. However, the low frequency of ultrasound waves results in relatively large droplet diameters, with a particle size distribution of around 10μm, which cannot meet the demand for smaller particle sizes.

[0007] In addition, researchers proposed an acoustic atomization technology. This method uses 30MHz surface acoustic waves to act on a liquid, which is added to the center of an interdigital transducer via a pipette. The surface tension is then overcome by the perturbation of the sound waves to generate droplets. However, due to the energy loss caused by the sound waves propagating through the air, efficient energy conversion cannot be achieved. The atomization requires an applied power of up to 7W, and the atomized particle size is 10.66μm. The overall power consumption is high, and miniaturization and integration are difficult.

[0008] In summary, although various atomization methods have been developed, the increasing demand for precision has placed higher performance requirements on atomization technology, such as smaller and more uniform particle size, lower power consumption, and ease of integration, which the aforementioned technologies cannot achieve. Summary of the Invention

[0009] In view of the above problems of the prior art, this application provides a liquid processing device based on high-frequency sound waves. One application of this device is to generate volume force by means of the attenuation of high-frequency sound waves in the liquid environment for atomization, so as to achieve smaller and more uniform particle size and lower power consumption. Another application of this device is liquid jetting.

[0010] To achieve the above objectives, this application provides a liquid handling device based on high-frequency sound waves, comprising:

[0011] A substrate on which a flow channel structure and a high-frequency acoustic wave driver are disposed;

[0012] The flow channel structure has a flow channel, an inlet and an outlet, through which liquid enters the flow channel and flows out of the flow channel through the outlet;

[0013] A high-frequency acoustic wave driver is located at the outlet and has a preset positional correspondence with the outlet;

[0014] When the liquid flows out of the flow channel structure and covers the high-frequency acoustic wave driver, the high-frequency acoustic wave driver generates high-frequency acoustic waves. The high-frequency acoustic waves attenuate upon contact with the liquid, generating a volume force that acts on the liquid.

[0015] In some feasible ways, the generation of volume force acting on the liquid includes: the liquid breaking through surface tension and atomizing under the action of the volume force, or the liquid generating a jet away from the high-frequency acoustic wave driver under the action of the volume force.

[0016] Therefore, this application can be used for atomization. The atomization technology based on high-frequency sound waves utilizes an inlet to deliver liquid into the range of sound wave action. Under the action of volume force, the liquid overcomes surface tension, causing it to break and form small-sized atomized droplets. This avoids the problems of low atomization efficiency and high power consumption caused by directly applying sound waves to the liquid surface in previous methods. This application can also be used in jet generators, using volume force to act on the liquid to achieve jetting within the liquid.

[0017] In some feasible implementations, the width of the flow channel is not less than the outer circumferential diameter of the high-frequency acoustic wave driver, or the width of the flow channel is not less than the size of the contour of the vibrating portion within the core of the high-frequency acoustic wave driver.

[0018] In some feasible implementations, the outlet of the flow channel structure has a preset positional correspondence, including: the distance between the lateral central axis of the outlet and the lateral geometric central axis of the high-frequency acoustic wave driver satisfies a preset first distance range; the distance between the outlet and the longitudinal geometric central axis of the high-frequency acoustic wave driver satisfies a preset second distance range.

[0019] In some possible implementations, the preset first distance range is 0μm-20mm, and / or the preset second distance range is 0μm-20mm.

[0020] In some possible implementations, the inlet and / or the flow channel may comprise multiple components, and / or the high-frequency acoustic wave driver may comprise multiple components arranged in a preset array pattern.

[0021] In some possible implementations, a control circuit for the high-frequency acoustic wave driver is also included, which is disposed on, inside or outside the substrate. For example, it may be located below the high-frequency acoustic wave driver.

[0022] In some feasible implementations, a liquid replenishment device is also included for replenishing liquid into the flow channel through the inlet.

[0023] In some feasible implementations, the resonant frequency range of the high-frequency acoustic wave driver is 0.5 GHz to 10 GHz.

[0024] In some possible implementations, the outlet has a sidewall extending along the outlet on the substrate, the sidewall being open to the top of the substrate, and the inner edge of the top of the sidewall being used to combine the surface tension of the liquid to form a liquid surface at a first height matching the height of the sidewall; the high-frequency acoustic wave actuator has a preset positional correspondence with the outlet, including: the position of the high-frequency acoustic wave actuator corresponds to the position at the first height.

[0025] In some feasible embodiments, the two sidewalls extending along both sides of the outlet are partially closed or not closed on the sidewalls away from the outlet. Attached Figure Description

[0026] Figure 1 is a perspective view of a liquid processing device based on high-frequency sound waves provided in an embodiment of this application;

[0027] Figure 2 is a bottom-up structural diagram of a liquid processing device based on high-frequency sound waves provided in an embodiment of this application;

[0028] Figure 3 is a top view of a liquid processing device based on high-frequency sound waves provided in an embodiment of this application;

[0029] Figure 4 is a cross-sectional view of the central interface of a liquid processing device based on high-frequency sound waves provided in an embodiment of this application;

[0030] Figure 5 is a top view of a liquid processing device based on high-frequency sound waves provided in an embodiment of this application, including the positional relationships;

[0031] Figure 6 is a top view of a high-frequency acoustic wave-based liquid processing device including multiple inlets provided in an embodiment of this application;

[0032] Figure 7 is a top view of a high-frequency acoustic wave-based liquid processing device including multiple inlets and multiple high-frequency acoustic wave drivers provided in an embodiment of this application.

[0033] Figure 8 is a test diagram of the atomized particle size of a liquid processing device based on high-frequency sound waves provided in an embodiment of this application;

[0034] Figure 9 is a high-speed camera image of the atomization process of a liquid processing device based on high-frequency sound waves provided in an embodiment of this application.

[0035] Figure 10A is a first embodiment of the outlet sidewall provided in this application;

[0036] Figure 10B is a second embodiment of the present application, which provides a sidewall for the outer side of the outlet.

[0037] Figure 10C is a third embodiment of the present application, which provides an outlet with a sidewall.

[0038] Figure 10D is a fourth embodiment of the outlet sidewall provided in this application.

[0039] It should be understood that the dimensions and shapes of the blocks in the above structural diagrams are for reference only and should not constitute an exclusive interpretation of the embodiments of the present invention. The relative positions and inclusion relationships between the blocks presented in the structural diagrams are only schematic representations of the structural relationships between the blocks, and are not intended to limit the physical connection methods of the embodiments of the present invention. Detailed Implementation

[0040] The technical solutions provided in this application will be further described below with reference to the accompanying drawings and embodiments. It should be understood that the system architecture and business scenarios provided in the embodiments of this application are mainly for illustrating possible implementations of the technical solutions of this application and should not be construed as the sole limitation on the technical solutions of this application. Those skilled in the art will recognize that the technical solutions provided in this application are equally applicable to similar technical problems as system architectures evolve and new business scenarios emerge.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. In case of any inconsistency, the meaning set forth in this specification or derived from the content described herein shall prevail. Furthermore, the terminology used herein is for the purpose of describing embodiments of this application only and is not intended to limit this application. To accurately describe the technical content of this application and to accurately understand the invention, the following explanations or definitions of the terms used in this specification are provided before describing specific embodiments.

[0042] In view of the problems existing in the prior art, this application provides a liquid processing device based on high-frequency sound waves, as shown in Figures 1 to 4, including:

[0043] A substrate 1, on which a flow channel structure 4 and a high-frequency acoustic wave driver 2 are disposed;

[0044] The flow channel structure 4 has a flow channel, an inlet and an outlet. Liquid 3 enters the flow channel through the inlet and flows out of the flow channel through the outlet.

[0045] A high-frequency acoustic wave driver 2 is disposed at the outlet and has a preset positional correspondence with the outlet;

[0046] When the liquid 3 flows out of the flow channel structure 4, it covers the high-frequency acoustic wave driver 2. The high-frequency acoustic wave driver 2 generates high-frequency acoustic waves. The high-frequency acoustic waves attenuate upon contact with the liquid 3, generating a volume force that acts on the liquid.

[0047] In some embodiments, the control circuit for a built-in, integrated, or external high-frequency acoustic wave driver may also be included.

[0048] In some embodiments, the liquid breaks through the surface tension and atomizes under the action of the volume force, or the liquid generates a jet that flows away from the high-frequency acoustic wave driver under the action of the volume force.

[0049] In this application, the substrate 1 and the flow channel structure 4 are two separate structures made of different materials. The substrate 1 is made of materials including, but not limited to, semiconductor materials, metallic materials, inorganic materials, and composite materials. The flow channel structure 4 may be made of materials such as PDMS, PMMA, glass, plastics, metals, and other materials suitable for forming flow channels.

[0050] Alternatively, the base 1 and the flow channel structure 4 can be integrally molded using the same material.

[0051] In this application, the flow channel structure 4 includes an inlet, through which liquid can be introduced into the flow channel from the outside. The inlet can be located at the bottom, top, side wall, or other positions of the flow channel structure 4. The inlet can be connected to an external pipe, through which liquid flows into the flow channel structure 4.

[0052] The flow channel structure 4 includes an outlet, which controls the distance from the range of sound waves so that the outflowing liquid is located in the area where it can be atomized or jetted.

[0053] The liquid can be water, ethanol, pharmaceutical solutions, or other liquids with a certain degree of fluidity.

[0054] In this application, since the propagation speed of sound waves differs in different media, the sound wave attenuates when it travels from a solid to a liquid. The expression for the attenuation coefficient β is as follows:

[0055]

[0056] Among them, c L The speed of sound propagation in a liquid is given by ω, where ω is the frequency of the sound wave, ρ is the density of the liquid, and μ is the viscosity of the liquid. B This is the volume viscosity of the liquid. From the above formula, it can be seen that when the properties of the liquid are determined, the attenuation rate of sound waves propagating in the liquid is proportional to the square of the sound wave frequency. The nonlinear attenuation of sound waves propagating in the liquid induces volume forces, the expression of which is:

[0057] F B =2ρβω 2 u 2 e -2β

[0058] Where u is the velocity amplitude of the sound wave in the z direction, it can be seen that the magnitude of the volume force is positively correlated with the frequency of the sound wave, that is, the higher the frequency of the sound wave, the greater the volume force generated.

[0059] Therefore, in one embodiment of this application, a high-frequency acoustic wave driver is proposed to drive atomization. Unlike previous methods where sound waves directly act on the liquid surface, this high-frequency acoustic wave driver generates high-frequency sound waves (0.5-10GHz, preferably 1GHz-3GHz). At low power (which can be 0.4W), the high-frequency sound waves couple with the liquid to generate a huge volume force, causing the liquid to break through surface tension, rupture, and rapidly atomize into small-sized atomized droplets. This avoids the problems of low atomization efficiency and high power consumption caused by the previous method of directly acting on the liquid surface with sound waves.

[0060] Furthermore, compared to electrical heating atomization, this method generates less heat, does not cause liquid reaction or decomposition, causes less thermal damage to the atomized liquid, and is applicable to a wider range of liquids.

[0061] Furthermore, in the atomized particle size test, high-frequency sound waves are used, and the average particle size of the atomized particles can be 1.8μm. This makes the average atomized particle size less than 5μm, and even produces droplets at the nm level. Compared with traditional ultrasonic atomization, the particle size produced is smaller.

[0062] Furthermore, the power of the high-frequency acoustic wave driver can be increased, which can increase the amount of liquid atomization. When used to generate a jet, this can increase the flow rate or range of the liquid jet.

[0063] Furthermore, since it does not use a screen or nozzle structure, there is no clogging problem.

[0064] Furthermore, when applied to atomization, due to the effect of super-strong volume force, this device can not only atomize low-viscosity fluids such as water, but also atomize glycerol, honey, and other fluids with a viscosity as high as 3000cp.

[0065] The high-frequency acoustic wave driver used in this application has shapes including, but not limited to, pentagons, circles, rings, triangles, etc.

[0066] In some embodiments, the width of the flow channel is not less than the outer circumferential diameter of the high-frequency acoustic wave driver, or the width of the flow channel is not less than the size of the outline of the vibrating portion within the core of the high-frequency acoustic wave driver.

[0067] In this way, since the high-frequency acoustic wave actuator is matched with the flow channel, the width of the flow channel is set to be greater than the outer circumference diameter of the high-frequency acoustic wave actuator, or the width of the flow channel is not less than the size of the outline of the vibrating part inside the core of the high-frequency acoustic wave actuator, so that the liquid can completely cover the entire high-frequency acoustic wave actuator after flowing out of the flow channel, so that the high-frequency acoustic waves of the high-frequency acoustic wave actuator can act well on the liquid.

[0068] In addition, the height of the flow channel is generally 1μm-500μm. However, it is not limited to this. The height of the flow channel allows the liquid surface of the liquid in the third stroke to contact the vibrating part of the core of the high-frequency acoustic wave actuator 2.

[0069] In some embodiments, the outlet of the flow channel structure has a preset positional correspondence, including:

[0070] The distance between the transverse central axis of the outlet and the transverse geometric central axis of the high-frequency acoustic wave driver meets a preset first distance range.

[0071] The distance between the outlet and the longitudinal geometric center axis of the high-frequency acoustic wave driver satisfies a preset second distance range.

[0072] When applied to atomization, the preset first distance range is 0um-20mm, and / or the preset second distance range is 0um-20mm.

[0073] When applied to atomization, specifically as shown in Figure 5, the high-frequency acoustic wave actuator and the outlet of the flow channel have a certain positional correspondence, constrained by two dimensions, X and Y. X represents the distance between the lateral central axis of the outlet and the lateral geometric central axis of the high-frequency acoustic wave actuator, typically 0-20 mm, with a preferred spacing of 0 mm (where the device center and the flow channel center coincide, resulting in higher atomization throughput). Y represents the distance between the outlet and the longitudinal geometric central axis of the high-frequency acoustic wave actuator, typically 0-20 mm, with a preferred spacing of 1 μm-500 μm. Unless otherwise specified, X and Y represent absolute values. Ideally, the high-frequency acoustic wave actuator should be located on the centerline of the flow channel outlet.

[0074] In some embodiments, the inlet and / or the flow channel may include a plurality of channels.

[0075] Specifically, Figure 6 shows a top view of the device corresponding to the two inlets. It allows the introduction of two liquids for different concentrations of solution preparation, which are then directly delivered to the vicinity of the high-frequency acoustic wave driver for atomization or jetting. Of course, more inlets can also be set up for preparing liquids of various concentrations.

[0076] Multiple flow channels can be configured, each corresponding to a different inlet, allowing the introduction of various liquids.

[0077] In some embodiments, the high-frequency acoustic wave driver includes multiple drivers arranged in a preset array pattern.

[0078] Specifically, as shown in Figure 7, there are two high-frequency acoustic wave drivers 2-1 and 2-2 corresponding to the two inlets, which are used for atomization or jetting of liquids of different concentrations and to increase the flow rate and range of the atomization flux or jet. In the figure, device 2-2 has no independent or discrete flow channel in contact with it, and the possible range of liquid 3 is not marked.

[0079] Multiple high-frequency acoustic wave drivers can be configured in a preset array pattern, such as a horizontal array or a ring array. Using multiple high-frequency acoustic wave drivers can further improve atomization or jet flux. The corresponding control circuit is also fabricated in an array.

[0080] In some embodiments, the liquid processing device based on high-frequency acoustic waves may further include a control circuit for a high-frequency acoustic wave driver, which is disposed on, inside or outside the substrate, and located below the high-frequency acoustic wave driver.

[0081] In some embodiments, the device further includes: a signal generator connected to the control circuit of the high-frequency acoustic wave driver, used to control the high-frequency acoustic wave driver to generate high-frequency acoustic waves through the control circuit of the high-frequency acoustic wave driver.

[0082] Specifically, the control circuit is connected to the signal generator and the high-frequency acoustic wave driver. Under the control of the signal generator, the control circuit drives the high-frequency acoustic wave driver to generate high-frequency acoustic waves.

[0083] In some embodiments, it further includes: a liquid replenishment device for replenishing liquid into the flow channel through the inlet.

[0084] In some embodiments, the fluid replenishment device is further configured to: control the flow rate of the fluid.

[0085] Specifically, the atomization or jet flow rate can be further enhanced by controlling the liquid flow rate in combination with the powerful volume force generated by high-frequency sound waves.

[0086] In some embodiments, the outlet has a sidewall extending along the outlet on the substrate, the sidewall being open to the top of the substrate (open means without a top cover), and the inner edge of the top of the sidewall being used to combine the surface tension of the liquid to form a liquid surface of a first height matching the height of the sidewall;

[0087] The high-frequency acoustic wave driver and the outlet have a preset positional correspondence, including: the position of the high-frequency acoustic wave driver corresponds to the position at the first height.

[0088] The liquid level of the liquid exiting the outlet can be adjusted via the aforementioned sidewall. Figures 10A, 10B, 10C, and 10D illustrate some examples, which are described below:

[0089] In Figure 10A, the sidewall A gradually decreases along the extension direction. Combined with the surface tension of the liquid, the liquid surface will also gradually decrease. The high-frequency acoustic wave driver can be set at the desired liquid level to achieve atomization or jetting.

[0090] In Figure 10B, sidewall A decreases in height along its extension direction. Furthermore, in the portion of sidewall A furthest from the outlet, a section of sidewall with a relatively uniform height is formed. Considering the liquid surface tension, the liquid surface in this section is not only lower than at the outlet, but also maintains a relatively uniform height. The high-frequency acoustic wave actuator can be positioned below this height of the sidewall to achieve atomization or jetting. Therefore, this method allows the desired liquid level to be maintained within a certain range along the sidewall, enabling more convenient and flexible placement of the high-frequency acoustic wave actuator.

[0091] In Figure 10C, compared to the example in Figure 10B, the sidewall A rises as a whole along the extension direction. Furthermore, in the part of the sidewall far from the outlet, a section of the sidewall with a basically uniform height is formed. Combined with the liquid surface tension, the liquid surface in this section is not only higher than that at the outlet, but the liquid surface height in this section is also basically uniform. The high-frequency acoustic wave driver can be set below the sidewall at this height to achieve atomization or jetting.

[0092] In Figures 10A, 10B, and 10C, the two sidewalls A extending along both sides of the outlet are not enclosed at the portion away from the outlet. In Figure 10D, the two sidewalls A extending along both sides of the outlet are enclosed at the portion away from the outlet. This not only limits the droplet area but also, due to the increased number of sidewalls, provides better support for the liquid surface tension, allowing for better control of the liquid level.

[0093] In some embodiments, when the two sidewalls A extending along both sides of the outlet are partially closed off away from the outlet, they can form a rectangle as seen in the top view of FIG10D. In other embodiments, the sidewalls in this top view can also form any or any combination of the following shapes: rectangular portions, annular portions, or other closed curved shapes, such as shapes resembling the outline of a ping-pong paddle. The ping-pong paddle outline shape includes a first portion forming an annular portion with an opening, and a second portion connecting the annular opening to the outlet. The annular portion can be circular, with a uniform height. The heights of the first and second portions can be transitioned, resulting in an annular portion that is higher than, lower than, or equal to the height of the outlet. A circular annular portion with a uniform height can better accommodate the surface tension of the liquid.

[0094] In some embodiments, the outlet can be positioned upwards or downwards, i.e., the substrate is located below or above it. When positioned downwards, the liquid surface effect of the above embodiments can also be achieved due to the combined effect of the capillary force of the outlet and / or the sidewall A at the outlet and the surface tension of the liquid.

[0095] In some embodiments, when the two sidewalls A extending along both sides of the outlet are partially closed off away from the outlet, multiple liquid channels may be connected to the space formed by the sidewalls.

[0096] In some embodiments, the high-frequency acoustic wave driver acts on the liquid to generate atomization or jet ejection, which is also related to the liquid level height. When there is no sidewall outside the outlet, the position where atomization or jet can be determined based on the change in the height of the liquid level formed along the substrate at the liquid outlet, such as the preset first distance range and preset second distance range for atomization mentioned above.

[0097] In some embodiments, when a sidewall A is provided outside the outlet, a matching liquid level height can be obtained based on the height of the sidewall, thereby achieving atomization or jetting at that liquid level. In some embodiments, the sidewall height required for atomization is lower than that required for jetting. In other embodiments, the liquid level height can be finely adjusted by simultaneously coordinating the liquid supply speed with the liquid surface on the outer sidewall of the outlet to be convex, horizontal, or concave just before atomization or jetting. That is, the shape of the liquid surface formed at the top of the outer sidewall of the outlet (i.e., the aforementioned convex, horizontal, or concave shape) is related to capillary force, surface tension, and liquid supply speed. Accordingly, the liquid surface shape can be adjusted based on the liquid supply speed to achieve fine-tuning of the liquid level height, so that the liquid level reaches the desired atomization or jetting height.

[0098] In some embodiments, the high-frequency acoustic wave driver may be located on the upper surface of the substrate, as shown in FIG2. In some embodiments, it may also be located on the lower surface of the substrate with the working surface facing upward, or it may be embedded in the substrate.

[0099] In embodiments where a sidewall is provided outside the outlet, the high-frequency acoustic wave actuator is positioned to achieve a desired location where its effective range covers the sidewall (as described above, at the desired height of the sidewall). Since the liquid is confined within the sidewall, in a top view, the high-frequency acoustic wave actuator is preferably located in a position that is partially surrounded by the inner sidewall (between the sidewalls in Figures 10A, 10B, or 10C) or surrounded (in the area enclosed by the sidewall in Figure 10D), particularly at the desired location inside the sidewall.

[0100] Specific examples:

[0101] When the high-frequency acoustic wave-based liquid processing device shown in Figure 1 is used for atomization, an octanol solution is pumped externally at a rate of 10 μL / min to the inlet of the flow channel structure 4. The liquid is then transported along the flow channel structure, which is 100 μm wide and 85 μm high, to the position of the high-frequency acoustic wave driver 2. Due to surface tension, the fluid 3 forms a certain contact angle with the substrate 1 after flowing out of the flow channel and continues to move forward. In this embodiment, the distance between the high-frequency acoustic wave driver 2 and the outlet of the flow channel structure 4 is 50 μm, and their geometric centers are aligned. The high-frequency acoustic wave driver 2 operates at a frequency of 2 GHz, and its outer circumscribed circle diameter is 80 μm. A power signal is applied to the control circuit through an external signal generator to drive the high-frequency acoustic wave driver 2, thereby causing liquid atomization.

[0102] Figure 8 shows the corresponding atomized droplet size test results. The horizontal axis represents the atomized droplet size, and the vertical axis represents the corresponding particle size distribution percentage. The particle size standard reference material Dv(50) represents the particle size corresponding to 50% of the volume distribution.

[0103] As shown in Figure 8, the device we proposed atomizes particles with a diameter of 1.483 μm, providing a method for applications with smaller particle sizes.

[0104] Figure 9 shows the effect of a fogging high-speed camera.

[0105] The high-frequency acoustic wave-based liquid processing device proposed in this application can be applied to atomization. Under certain relative positional conditions between the flow channel and the high-frequency acoustic wave, and in conjunction with the entry of fluid, a high-frequency acoustic wave is generated by an external signal generator connected to the underlying control circuit. The high-frequency acoustic wave interacts with the liquid at the flow channel outlet, causing the liquid to overcome surface tension and atomize. This device has the advantages of being miniaturized, low-power, simple in structure, producing small atomized particles, adjustable atomization volume, and compatible with semiconductor processes. It can also be carried wirelessly. Furthermore, the high-frequency acoustic wave-based liquid processing device proposed in this application can also be applied to jet processing, similarly possessing the advantages of being miniaturized, low-power, simple in structure, adjustable jet volume, compatible with semiconductor processes, and also portable through wireless operation.

[0106] Note that the above are merely preferred embodiments and the technical principles employed in this application. Those skilled in the art will understand that this application is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of this application. Therefore, although this application has been described in detail through the above embodiments, this application is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of this application, all of which fall within the scope of protection of this application.

Claims

1. A liquid processing device based on high-frequency sound waves, characterized in that, include: A substrate on which a flow channel structure and a high-frequency acoustic wave driver are disposed; The resonant frequency range of the high-frequency acoustic wave driver is 0.5GHz-10GHz; The flow channel structure has a flow channel, an inlet, and an outlet. Liquid enters the flow channel through the inlet and flows out of the flow channel through the outlet. A high-frequency acoustic wave driver is disposed at the outlet and has a preset positional correspondence with the outlet. When the liquid flows out of the flow channel structure and covers the high-frequency acoustic wave driver, the high-frequency acoustic wave driver generates high-frequency acoustic waves. The high-frequency acoustic waves attenuate upon contact with the liquid, generating a volume force that acts on the liquid. The generation of volume force acting on the liquid includes: the liquid breaking through surface tension and atomizing under the action of the volume force, or the liquid generating a jet away from the high-frequency acoustic wave driver under the action of the volume force; the outer side of the outlet has a sidewall extending along the outlet on the substrate, the sidewall being open to the top of the substrate, and the inner edge of the top of the sidewall being used to combine with the surface tension of the liquid to form a liquid surface of a first height matching the height of the sidewall; the high-frequency acoustic wave driver and the outlet have a preset positional correspondence relationship, including: the position of the high-frequency acoustic wave driver corresponding to the position at the first height.

2. The apparatus as claimed in claim 1, characterized in that, The width of the flow channel is not less than the outer circumferential diameter of the high-frequency acoustic wave driver, or the width of the flow channel is not less than the outline of the vibrating part inside the core of the high-frequency acoustic wave driver.

3. The apparatus as described in claim 1, characterized in that, The outlet of the flow channel structure has a preset positional correspondence, including: the distance between the transverse central axis of the outlet and the transverse geometric central axis of the high-frequency acoustic wave driver meets a preset first distance range; the distance between the outlet and the longitudinal geometric central axis of the high-frequency acoustic wave driver meets a preset second distance range.

4. The apparatus as described in claim 3, characterized in that, The preset first distance range is 0μm-20mm, and / or the preset second distance range is 0μm-20mm.

5. The apparatus as claimed in claim 1, characterized in that, The inlet and / or the flow channel may include multiple components, and / or the high-frequency acoustic wave driver may include multiple components, arranged in a preset array pattern.

6. The apparatus as claimed in claim 1, characterized in that, It also includes the control circuit of the high-frequency acoustic wave driver, which is disposed on, inside or outside the substrate.

7. The apparatus as claimed in claim 1, characterized in that, Also includes: A liquid replenishment device is used to replenish liquid into the flow channel through the inlet.

8. The apparatus as claimed in claim 1, characterized in that, The sidewall height required for atomization is lower than that required for jetting.

9. The apparatus as claimed in claim 1, characterized in that, By adjusting the liquid supply speed, the liquid surface at the outer wall of the outlet can be made to bulge outward, be horizontal, or be concave inward, thus achieving fine adjustment of the liquid level height to ensure that the liquid level reaches the optimal height for atomization or jetting.

10. The apparatus as claimed in claim 1, characterized in that, The two sidewalls extending along both sides of the outlet are either partially closed or not closed.

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