Stepping motion device for inhibiting counter-acting force of external interface

Abstract

The invention, which relates to the technical field of the semiconductor manufacturing equipment, provides a stepping motion apparatus for inhibiting the counter-acting force of an external interface, comprising a load, a Y-direction execution mechanism, an X-direction execution mechanism, a Y-direction counter-acting force balance mechanism, an X-direction counter-acting force balance mechanism, a support frame and a marble platform. The load is arranged on the Y-direction executing mechanism, the Y-direction executing mechanism is arranged on the X-direction executing mechanism, the X-direction executing mechanism is arranged on the supporting frame, the supporting frame is arranged on the marble platform, and the Y-direction counter-acting force balancing mechanism and the X-direction counter-acting force balancing mechanism are both arranged on the supporting frame. Compared with the prior art, the stepping type motion device for restraining the counter-acting force of the external interface can restrain the counter-acting force generated by the stepping type motion device on the mechanical installation interface of the foundation frame in the working process, and the motion and measurement precision of the stepping type motion device is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, and in particular to a stepping motion device for suppressing reaction force of an external interface. Background Art

[0002] With the rapid development of modern information technology, integrated circuits (ICs) have become the core of the information age. Since the birth of the first integrated circuit in 1958, its process technology has continued to develop at a high speed, greatly promoting the rapid progress of industries such as computers, communications and consumer electronics. The famous Moore's Law not only predicts the reduction in transistor size and the continuous improvement of transistor integration on integrated circuits, but also heralds the exponential growth of integrated circuit computing power. As the core equipment for integrated circuit manufacturing, lithography machines play a vital role in the semiconductor industry. They usually need to achieve nanometer or even sub-nanometer motion accuracy under high-speed and high-acceleration conditions.

[0003] The step-and-scan lithography machine is mainly composed of an optical projection lens system, a motion stage system, and an alignment system. Among them, the motion stage system includes a mask stage and a workpiece stage, which undertakes the important task of carrying masks and silicon wafers, and is one of the key subsystems for completing silicon wafer exposure. The trajectory tracking performance and stability of the motion platform directly affect the feature size, overlay accuracy, and production efficiency of the integrated circuit. However, the impact of the motion platform on the basic frame during high-speed movement will lead to the deterioration of the motion measurement results, affecting the motion and measurement accuracy of the motion mechanism. Summary of the invention

[0004] The problem to be solved by the present invention is: how to suppress the reaction force generated by the stepping motion device on the mechanical installation interface of the base frame during the operation process.

[0005] The present invention provides a stepping motion device for suppressing the reaction force of an external interface, comprising: a load, a Y-direction actuator, an X-direction actuator, a Y-direction reaction force balancing mechanism, an X-direction reaction force balancing mechanism, a support frame and a marble platform, wherein the support frame is used to be connected with the mechanical installation interface of a base frame, the load is arranged on the Y-direction actuator, the Y-direction actuator is arranged on the X-direction actuator, the X-direction actuator is arranged on the support frame, the support frame is arranged on the marble platform, the Y-direction reaction force balancing mechanism and the X-direction reaction force balancing mechanism are both arranged on the support frame, the Y-direction reaction force balancing mechanism comprises a first driving mechanism and a Y-direction balancing mass block, the first driving mechanism is used to drive the Y-direction balancing mass block to move along the Y direction on the support frame, the X-direction reaction force balancing mechanism comprises a second driving mechanism and an X-direction balancing mass block, and the second driving mechanism is used to drive the X-direction balancing mass block to move along the X direction on the support frame.

[0006] The stepping motion device for suppressing the reaction force of the external interface provided by the present invention has, compared with the prior art, but is not limited to the following beneficial effects:

[0007] The stepping motion device for suppressing the reaction force of the external interface described in the present invention is used to connect the four corners of the support frame to the mechanical installation interface of the base frame respectively, and the load is usually installed with relevant sensors. The Y-direction actuator can drive the load to move in the Y direction according to the instruction of the host computer, and the X-direction actuator can drive the load 1 to move in the X direction according to the instruction of the host computer. The X-direction actuator and the Y-direction actuator are used to drive the load to move to perform related work. The first drive mechanism and the second drive mechanism are used to drive the Y-direction balance mass block and the X-direction balance mass block to move along the support frame to offset the reaction force generated by the load on the mechanical installation interface of the base frame during the movement. Specifically, during the process of driving the load to move by the X-direction actuator and the Y-direction actuator, the support frame will generate a reaction force on the mechanical installation interface of the base frame. In order to offset the force at the installation interface, the first drive mechanism of the Y-direction reaction force balance mechanism can drive the Y-direction balance mass block to move along the Y direction on the support frame, and the second drive mechanism of the X-direction reaction force balance mechanism can also drive the X-direction balance mass block to move along the X direction on the support frame, thereby suppressing or avoiding the support frame from generating a force on the installation interface. Compared with the prior art, the stepping motion device for suppressing the reaction force of the external interface of the present invention can suppress the reaction force generated by the load on the mechanical installation interface of the basic frame during movement. Compared with the passive compensation mechanism, the response frequency and accuracy of the compensation are improved, thereby ensuring the movement and measurement accuracy of the stepping motion device.

[0008] Optionally, the first driving mechanism includes a Y-axis balanced linear motor, a Y-axis balanced linear guide and a first slider, the Y-axis balanced linear guide is arranged on the Y-axis balanced mass block, the first slider is arranged on the support frame, the first slider is slidingly connected to the Y-axis balanced linear guide, the Y-axis balanced linear motor includes a third U-shaped magnet and a third coil, the third U-shaped magnet is connected to the Y-axis balanced mass block, and the third coil is connected to the support frame.

[0009] Optionally, the Y-axis reaction force balancing mechanism also includes a third connecting frame, a fourth connecting frame, a third grating scale and a third reading head. The Y-axis balancing mass block is provided with a first long slot hole that penetrates the Y-axis balancing mass block. One end of the third connecting frame is connected to the supporting frame, and the other end extends out of the first long slot hole. The third reading head is arranged at one end of the third connecting frame away from the supporting frame. The fourth connecting frame is connected to the Y-axis balancing mass block. The third grating scale is arranged on the fourth connecting frame. The third reading head is used to read the scale on the third grating scale.

[0010] Optionally, the second driving mechanism includes an X-axis balanced linear motor, an X-axis balanced linear guide and a second slider, the X-axis balanced linear guide is arranged on the X-axis balanced mass block, the second slider is arranged on the support frame, the second slider is slidingly connected to the X-axis balanced linear guide, the X-axis balanced linear motor includes a fourth U-shaped magnet and a fourth coil, the fourth U-shaped magnet is connected to the X-axis balanced mass block, and the fourth coil is connected to the support frame.

[0011] Optionally, the X-axis reaction force balancing mechanism also includes a fifth connecting frame, a sixth connecting frame, a fourth grating scale and a fourth reading head. The X-axis balancing mass block is provided with a second long slot hole penetrating the X-axis balancing mass block. One end of the fifth connecting frame is connected to the supporting frame, and the other end extends out of the second long slot hole. The fourth reading head is arranged at one end of the fifth connecting frame away from the supporting frame. The sixth connecting frame is connected to the X-axis balancing mass block. The fourth grating scale is arranged on the sixth connecting frame. The fourth reading head is used to read the scale on the fourth grating scale.

[0012] Optionally, the X-axis actuator includes a first layer frame, an X-axis linear motor, and an X-axis cross roller guide, the first layer frame is arranged on the marble platform, the X-axis cross roller guide is respectively connected to the first layer frame and the support frame, the X-axis linear motor includes a first U-shaped magnetic steel and a first coil, the first U-shaped magnetic steel is connected to the support frame, and the first coil is connected to the first layer frame.

[0013] Optionally, the X-axis actuator also includes a first connecting frame, a first grating scale and a first reading head, the first connecting frame is respectively connected to the first layer frame and the first coil, the first grating scale is arranged on the supporting frame, the first reading head is arranged on the first connecting frame, and the first reading head is used to read the scale on the first grating scale.

[0014] Optionally, the Y-axis actuator includes a second layer frame, a Y-axis linear motor, and a Y-axis cross roller guide. The load is connected to the second layer frame. The Y-axis cross roller guide is respectively connected to the first layer frame and the second layer frame. The second layer frame is located above the first layer frame, and there is a gap between the first layer frame and the second layer frame. The Y-axis linear motor includes a second U-shaped magnet and a second coil. The second U-shaped magnet is connected to the second layer frame, and the second coil is connected to the first layer frame.

[0015] Optionally, the Y-axis actuator also includes a second connecting frame, a second grating scale and a second reading head, the second connecting frame is respectively connected to the first layer frame and the second coil, the second grating scale is arranged on the second layer frame, the second reading head is arranged on the second connecting frame, and the second reading head is used to read the scale on the second grating scale.

[0016] Optionally, the stepping motion device for suppressing the reaction force of the external interface also includes an air floating pad, the air floating pad includes a load air floating pad and an actuator air floating pad, a plurality of the load air floating pads are arranged at intervals on the end surface of the load facing the marble platform, and the load air floating pad is used to form an air film between the load air floating pad and the marble platform; a plurality of the actuator air floating pads are arranged at intervals on the end surface of the first layer frame facing the marble platform, and the actuator air floating pad is used to form an air film between the actuator air floating pad and the marble platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of a stepping motion device for suppressing the reaction force of an external interface according to an embodiment of the present invention;

[0018] Figure 2 A cross-sectional view of a stepping motion device for suppressing the reaction force of an external interface according to an embodiment of the present invention Figure 1 ;

[0019] Figure 3 for Figure 2 A partial enlarged view of the middle part;

[0020] Figure 4 for Figure 2 A partial enlarged view of point B in the middle;

[0021] Figure 5 A cross-sectional view of a stepping motion device for suppressing the reaction force of an external interface according to an embodiment of the present invention Figure 2 ;

[0022] Figure 6 for Figure 5 A partial enlarged view of point C in the middle;

[0023] Figure 7 A cross-sectional view of a stepping motion device for suppressing the reaction force of an external interface according to an embodiment of the present invention Figure 3 .

[0024] Description of reference numerals:

[0025] Load 1;

[0026] Y-axis actuator 2, second layer frame 21, Y-axis linear motor 22, second U-shaped magnetic steel 221, second coil 222, Y-axis cross roller guide 23, second connecting frame 24, second grating ruler 25, second reading head 26;

[0027] X-axis actuator 3, first layer frame 31, X-axis linear motor 32, first U-shaped magnetic steel 321, first coil 322, X-axis cross roller guide 33, first connecting frame 34, first grating ruler 35, first reading head 36;

[0028] Y-direction reaction force balancing mechanism 4, Y-direction balanced linear motor 41, third U-shaped magnetic steel 411, third coil 412, Y-direction balanced linear guide rail 42, first slider 43, Y-direction balanced mass block 44, third connecting frame 45, fourth connecting frame 46, third grating ruler 47, third reading head 48;

[0029] X-direction reaction force balancing mechanism 5, X-direction balancing linear motor 51, fourth U-shaped magnetic steel 511, fourth coil 512, X-direction balancing linear guide 52, second slider 53, X-direction balancing mass block 54, fifth connecting frame 55, sixth connecting frame 56, fourth grating ruler 57, fourth reading head 58;

[0030] Support frame 6;

[0031] Marble platform 7;

[0032] Loading air flotation cushion 8;

[0033] Actuator air cushion 9. DETAILED DESCRIPTION

[0034] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0035] In the description of the present invention, the directions or positional relationships indicated by “up”, “down”, “left”, “right”, “top”, “bottom”, “front”, “back”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention. They do not indicate or imply that the device referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the scope of protection of the present invention.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In the description of this specification, the description with reference to the terms "embodiment", "one embodiment" and "one implementation" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or implementation are included in at least one embodiment or implementation of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or implementation. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or implementations in a suitable manner.

[0038] Moreover, the Z-axis in the accompanying drawings represents the vertical direction, that is, the up and down position, and the positive direction of the Z-axis (that is, the direction of the arrow of the Z-axis) represents the top, and the negative direction of the Z-axis (that is, the direction opposite to the positive direction of the Z-axis) represents the bottom; the X-axis in the accompanying drawings represents the horizontal direction, that is, the left and right position, and the positive direction of the X-axis (that is, the direction of the arrow of the X-axis) represents the right, and the negative direction of the X-axis (that is, the direction opposite to the positive direction of the X-axis) represents the left; the Y-axis in the accompanying drawings represents the longitudinal direction, that is, the front and back position, and the positive direction of the Y-axis (that is, the direction of the arrow of the Y-axis) represents the front, and the negative direction of the Y-axis (that is, the direction opposite to the positive direction of the Y-axis) represents the back.

[0039] It should also be noted that the aforementioned Z-axis, X-axis and Y-axis are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

[0040] like Figures 1 to 2As shown, the stepping motion device for suppressing the reaction force of the external interface according to the embodiment of the present invention comprises: a load 1, a Y-direction actuator 2, an X-direction actuator 3, a Y-direction reaction force balancing mechanism 4, an X-direction reaction force balancing mechanism 5, a support frame 6 and a marble platform 7, wherein the support frame 6 is used to connect with the mechanical installation interface of the base frame, the load 1 is arranged on the Y-direction actuator 2, the Y-direction actuator 2 is arranged on the X-direction actuator 3, the X-direction actuator 3 is arranged on the support frame 6, and the support frame 6 is arranged on the On the marble platform 7, the Y-direction reaction force balancing mechanism 4 and the X-direction reaction force balancing mechanism 5 are both arranged on the supporting frame 6, the Y-direction reaction force balancing mechanism 4 includes a first driving mechanism and a Y-direction balancing mass block 44, the first driving mechanism is used to drive the Y-direction balancing mass block 44 to move along the Y direction on the supporting frame 6, and the X-direction reaction force balancing mechanism 5 includes a second driving mechanism and an X-direction balancing mass block 54, the second driving mechanism is used to drive the X-direction balancing mass block 54 to move along the X direction on the supporting frame 6.

[0041] In this embodiment, combined with the attached Figure 1 As shown, the four corners of the support frame 6 are used to connect with the mechanical installation interface of the base frame respectively. The load 1 is usually equipped with relevant sensors. The Y-axis actuator 2 can drive the load 1 to move in the Y direction (see Figure 1) according to the instructions of the host computer. Figure 1 The X-axis direction) movement, the X-axis actuator 3 can drive the load 1 to move in the X-axis direction (attached Figure 1 The first driving mechanism and the second driving mechanism are used to drive the Y-axis balancing mass block 44 and the X-axis balancing mass block 54 to move along the support frame 6 to offset the reaction force generated by the load 1 on the mechanical installation interface of the base frame during the movement. Specifically, during the process of the X-axis balancing mechanism 3 and the Y-axis balancing mechanism 2 driving the load 1 to move, the support frame 6 will generate a reaction force on the mechanical installation interface of the base frame. To offset the force at the installation interface, the first driving mechanism of the Y-axis reaction force balancing mechanism 4 can drive the Y-axis balancing mass block 44 to move along the Y direction on the support frame 6, and the second driving mechanism of the X-axis reaction force balancing mechanism 5 can also drive the X-axis balancing mass block 54 to move along the X direction on the support frame 6, thereby suppressing or avoiding the support frame 6 from generating a force on the installation interface. Compared with the prior art, the stepping motion device for suppressing the reaction force of the external interface of the present invention can suppress the reaction force generated by the load on the mechanical installation interface of the basic frame during movement. Compared with the passive compensation mechanism, the response frequency and accuracy of the compensation are improved, thereby ensuring the movement and measurement accuracy of the stepping motion device.

[0042] It should be noted that when the X-axis actuator 3 and the Y-axis actuator 2 drive the load 1 to move, according to the law of conservation of momentum of the closed system, the support frame 6 will generate a reaction force on the mechanical installation interface of the base frame, thereby affecting the movement and measurement accuracy of the stepping motion device. If the reaction force of the stepping motion device on the external interface is zero, it is necessary to make the product of the mass of the moving part of the load during the operation of the stepping motion device (including the reaction force balancing mechanism) and the product of the balance mass and the balance mass speed equal in magnitude and opposite in direction.

[0043] Here’s how it works:

[0044] The law of conservation of momentum of a closed system is used to suppress the reaction force of the stepping motion device on the external interface. If the reaction force of the stepping motion device on the external interface is zero, then F 1f =-F 2f , the F 1f is the reaction force on the support frame 6 when the load moves, -F 2f It is the reaction force of the reaction force balancing mechanism (Y-direction reaction force balancing mechanism 4 and X-direction reaction force balancing mechanism 5) on the support frame 6 when the reaction force balancing mechanism moves, and the two are equal in magnitude and opposite in direction.

[0045] It can be further obtained that F1=-F2, where F1 is the force required for the load to perform the target motion, and F2 is the force required for the reaction force balancing mechanism to perform the target motion, and the two are equal in magnitude and opposite in direction.

[0046] Furthermore, according to Newton's second law, m1a1=-m2a2, wherein m1 is the mass of the moving part when the load moves, a1 is the acceleration of the moving part when the load moves, m2 is the balancing mass, and a2 is the acceleration of the balancing mass.

[0047] Depend on p=mv, and we can further get, Right now p1+p2=constant, v1 is the speed of the moving part during load movement, v2 is the speed of the balancing mass, p1 is the momentum of the moving part during load movement, and p2 is the momentum of the balancing mass. Therefore, as long as the product of the mass of the moving part during load movement and the speed of the moving part during load movement and the product of the balancing mass and the speed of the balancing mass are equal in magnitude and opposite in direction during the operation of the stepping motion device (including the reaction force balancing mechanism), the reaction force on the external interface during the operation of the stepping motion device (including the reaction force balancing mechanism) can be suppressed.

[0048] In addition, the stepping motion device of this embodiment that suppresses the reaction force of the external interface can be used as a ground simulation device.

[0049] In addition, combined with Figure 1 As shown, two Y-direction actuators, two X-direction actuators, two Y-direction reaction force balancing mechanisms and two X-direction reaction force balancing mechanisms are provided, and they are arranged opposite to each other. The marble platform 7 can be a rectangular structure, and the support frame 6 can be a rectangular frame structure, and the support frame 6 is located directly above the marble platform 7 (see FIG. Figure 1 In the positive direction of the center Z axis), there is a distance between the support frame 6 and the upper end surface of the marble platform 7, and the support frame 6 and the marble platform 7 can be connected by a column structure.

[0050] Optionally, the X-axis actuator 3 includes a first-layer frame 31, an X-axis linear motor 32, and an X-axis cross-roller guide 33. The first-layer frame 31 is arranged on the marble platform 7. The X-axis cross-roller guide 33 is respectively connected to the first-layer frame 31 and the support frame 6. The X-axis linear motor 32 includes a first U-shaped magnetic steel 321 and a first coil 322. The first U-shaped magnetic steel 321 is connected to the support frame 6, and the first coil 322 is connected to the first-layer frame 31.

[0051] Specifically, the crossed roller guide is composed of two guide rails with V-shaped raceways, roller cages, cylindrical rollers, etc. The cylindrical rollers arranged crosswise with each other reciprocate on the precision-ground V-shaped raceway surface, can withstand loads in all directions, and achieve high-precision and smooth linear motion.

[0052] In this embodiment, combined with the attached Figure 5 and attached Figure 6 As shown, attached Figure 5 It is attached Figure 1 The first layer frame 31 is a rectangular frame structure, and the first layer frame 31 is arranged above the marble platform 7 (through the actuator air floating pad 9). The two guide rails of the X-axis cross roller guide 33 can be connected to the first layer frame 31 and the support frame 6 by bolts respectively. The first U-shaped magnetic steel 321 of the X-axis linear motor 32 can be connected to the support frame 6 by bolts, and the first coil 322 can be connected to the first layer frame 31 by bolts. When the X-axis linear motor 32 is powered on, it will drive the first layer frame 31 to move relative to the support frame 6 along the attached Figure 1 There is a gap between the first layer frame 31 and the support frame 6 to avoid hard friction between the first layer frame 31 and the support frame 6.

[0053] Optionally, the X-axis actuator 3 also includes a first connecting frame 34, a first grating scale 35 and a first reading head 36, the first connecting frame 34 is respectively connected to the first layer frame 31 and the first coil 322, the first grating scale 35 is arranged on the supporting frame 6, and the first reading head 36 is arranged on the first connecting frame 34, and the first reading head 36 is used to read the scale on the first grating scale 35.

[0054] In this embodiment, combined with the attached Figure 6 As shown, the cross-section of the first connecting frame 34 is a Z-shaped structure, one end of the first connecting frame 34 can be connected to the first coil 322 by bolts, and the other end can be connected to the supporting frame 6 by bolts, the first grating scale 35 can be connected to the supporting frame 6 by bolts, and the first reading head 36 can be connected to the first connecting frame 34 by bolts, wherein the first reading head 36 is used to read the scale on the first grating scale 35, so that the moving distance of the first layer frame 31 relative to the supporting frame 6 can be read.

[0055] Optionally, the Y-axis actuator 2 includes a second-layer frame 21, a Y-axis linear motor 22, and a Y-axis cross-roller guide 23. The load 1 is connected to the second-layer frame 21. The Y-axis cross-roller guide 23 is respectively connected to the first-layer frame 31 and the second-layer frame 21. The second-layer frame 21 is located above the first-layer frame 31, and there is a gap between the first-layer frame 31 and the second-layer frame 21. The Y-axis linear motor 22 includes a second U-shaped magnetic steel 221 and a second coil 222. The second U-shaped magnetic steel 221 is connected to the second-layer frame 21, and the second coil 222 is connected to the first-layer frame 31.

[0056] In this embodiment, combined with the attached Figure 2 and attached Figure 3 As shown, attached Figure 3 It is attached Figure 1 The second layer frame 21 is a rectangular frame structure, the second layer frame 21 is located above the first layer frame 31, the two guide rails of the Y-direction cross roller guide 23 can be connected to the first layer frame 31 and the second layer frame 21 by bolts, the second U-shaped magnetic steel 221 of the Y-direction linear motor 22 can be connected to the second layer frame 21 by bolts, and the second coil 222 can be connected to the first layer frame 31 by bolts. When the Y-direction linear motor 22 is powered on, it will drive the second layer frame 21 to move relative to the first layer frame 31 along the attached Figure 1 There is a gap between the first frame 31 and the second frame 21 to avoid hard friction between the first frame 31 and the second frame 21.

[0057] Optionally, the Y-axis actuator 2 also includes a second connecting frame 24, a second grating scale 25 and a second reading head 26, the second connecting frame 24 is respectively connected to the first layer frame 31 and the second coil 222, the second grating scale 25 is arranged on the second layer frame 21, the second reading head 26 is arranged on the second connecting frame 24, and the second reading head 26 is used to read the scale on the second grating scale 25.

[0058] In this embodiment, combined with the attached Figure 3 As shown, the cross-section of the second connecting frame 24 is an L-shaped structure. One end of the second connecting frame 24 can be connected to the first layer frame 31 by bolts, and the other end can be connected to the second coil 222 by bolts. The second grating scale 25 can be connected to the second layer frame 21 by bolts. The second reading head 26 can be connected to the second connecting frame 24 by bolts. The second reading head 26 is used to read the scale on the second grating scale 25, so that the moving distance of the second layer frame 21 relative to the first layer frame 31 can be read.

[0059] Optionally, the first driving mechanism includes a Y-axis balanced linear motor 41, a Y-axis balanced linear guide 42 and a first slider 43, the Y-axis balanced linear guide 42 is arranged on the Y-axis balanced mass block 44, the first slider 43 is arranged on the support frame 6, the first slider 43 is slidingly connected to the Y-axis balanced linear guide 42, the Y-axis balanced linear motor 41 includes a third U-shaped magnet 411 and a third coil 412, the third U-shaped magnet 411 is connected to the Y-axis balanced mass block 44, and the third coil 412 is connected to the support frame 6.

[0060] In this embodiment, combined with the attached Figure 2 and attached Figure 4 As shown, the upper end surface of the support frame 6 can be attached along Figure 1 A plurality of first sliders 43 are arranged at intervals in the Y-axis direction, wherein the plurality of first sliders 43 can be connected to the support frame 6 by bolts respectively, and the Y-axis balancing linear guide 42 is slidably connected to the first slider 43, that is, the first slider 43 is fixed, and the Y-axis balancing linear guide 42 can be relatively moved along the first slider 43. Figure 1The middle Y-axis slides, and the cross-section of the Y-axis balancing mass block 44 is an inverted L-shaped structure. The horizontal plate of the Y-axis balancing mass block 44 can be connected to the Y-axis balancing linear guide 42 by bolts, and the third U-shaped magnetic steel 411 of the Y-axis balancing linear motor 41 can be connected to the vertical plate of the Y-axis balancing mass block 44 by bolts. The third coil 412 of the Y-axis balancing linear motor 41 can be connected to the support frame 6 by bolts. In this way, when the Y-axis balancing linear motor 41 is powered on, it will drive the Y-axis balancing mass block 44 to move relative to the support frame 6, so that an external force opposite to the direction of the force can be applied to offset the force of the mounting interface.

[0061] Optionally, the Y-axis reaction force balancing mechanism 4 also includes a third connecting frame 45, a fourth connecting frame 46, a third grating ruler 47 and a third reading head 48. The Y-axis balancing mass block 44 is provided with a first long slot hole that penetrates the Y-axis balancing mass block 44. One end of the third connecting frame 45 is connected to the supporting frame 6, and the other end extends out of the first long slot hole. The third reading head 48 is arranged at one end of the third connecting frame 45 away from the supporting frame 6. The fourth connecting frame 46 is connected to the Y-axis balancing mass block 44. The third grating ruler 47 is arranged on the fourth connecting frame 46. The third reading head 48 is used to read the scale on the third grating ruler 47.

[0062] In this embodiment, combined with the attached Figure 4 As shown, the Y-axis balancing mass block 44 is provided with a first long slot hole penetrating the Y-axis balancing mass block 44, wherein the extending direction of the first long slot hole is the adjacent Figure 1 In the middle Y-axis direction, the third connecting frame 45 can be a square block structure, one end of the third connecting frame 45 can be connected to the supporting frame 6 by bolts, and the other end extends out of the first long slot, the cross-section of the fourth connecting frame 46 is an inverted L-shaped structure, the horizontal plate of the fourth connecting frame 46 can be connected to the Y-axis balancing mass block 44 by bolts, the end of the third connecting frame 45 away from the supporting frame 6 is toward the vertical plate direction of the fourth connecting frame 46, the third reading head 48 can be connected to the end of the third connecting frame 45 away from the supporting frame 6 by bolts, the third grating scale 47 can be connected to the end face of the vertical plate of the fourth connecting frame 46 facing the third connecting frame 45 by bolts, the third reading head 48 is used to read the scale on the third grating scale 47, so that the moving distance of the Y-axis balancing mass block 44 relative to the supporting frame 6 can be read.

[0063] Optionally, the second driving mechanism includes an X-axis balanced linear motor 51, an X-axis balanced linear guide 52 and a second slider 53, the X-axis balanced linear guide 52 is arranged on the X-axis balanced mass block 54, the second slider 53 is arranged on the support frame 6, the second slider 53 is slidingly connected to the X-axis balanced linear guide 52, the X-axis balanced linear motor 51 includes a fourth U-shaped magnet 511 and a fourth coil 512, the fourth U-shaped magnet 511 is connected to the X-axis balanced mass block 54, and the fourth coil 512 is connected to the support frame 6.

[0064] In this embodiment, combined with the attached Figure 5 and attached Figure 6 As shown, the upper end surface of the support frame 6 can be attached along Figure 1 A plurality of second sliders 53 are arranged at intervals in the X-axis direction, wherein the plurality of second sliders 53 can be connected to the support frame 6 by bolts respectively, and the X-axis balancing linear guide 52 is slidably connected to the second slider 53, that is, the second slider 53 is fixed, and the X-axis balancing linear guide 52 can be relatively moved along the second slider 53. Figure 1 Sliding in the middle X-axis direction, the cross-section of the X-axis balancing mass block 54 is an inverted L-shaped structure, the horizontal plate of the X-axis balancing mass block 54 can be connected to the X-axis balancing linear guide 52 by bolts, the fourth U-shaped magnetic steel 511 of the X-axis balancing linear motor 51 can be connected to the vertical plate of the X-axis balancing mass block 54 by bolts, and the fourth coil 512 of the X-axis balancing linear motor 51 can be connected to the support frame 6 by bolts. In this way, when the X-axis balancing linear motor 51 is powered on, it will drive the X-axis balancing mass block 54 to move relative to the support frame 6, so that an external force opposite to the direction of the force can be applied to offset the force of the mounting interface.

[0065] Optionally, the X-axis reaction force balancing mechanism 5 also includes a fifth connecting frame 55, a sixth connecting frame 56, a fourth grating scale 57 and a fourth reading head 58. The X-axis balancing mass block 54 is provided with a second long slot hole penetrating the X-axis balancing mass block 54. One end of the fifth connecting frame 55 is connected to the supporting frame 6, and the other end extends out of the second long slot hole. The fourth reading head 58 is arranged at one end of the fifth connecting frame 55 away from the supporting frame 6. The sixth connecting frame 56 is connected to the X-axis balancing mass block 54. The fourth grating scale 57 is arranged on the sixth connecting frame 56. The fourth reading head 58 is used to read the scale on the fourth grating scale 57.

[0066] In this embodiment, combined with the attached Figure 6 As shown, the X-axis balancing mass block 54 is provided with a second long slot hole penetrating the X-axis balancing mass block 54, wherein the extension direction of the second long slot hole is the adjacent Figure 1In the X-axis direction, the fifth connecting frame 55 can be a square block structure, one end of the fifth connecting frame 55 can be connected to the supporting frame 6 by bolts, and the other end extends out of the second long slot, the cross-section of the sixth connecting frame 56 is an inverted L-shaped structure, the horizontal plate of the sixth connecting frame 56 can be connected to the X-axis balancing mass block 54 by bolts, the end of the fifth connecting frame 55 away from the supporting frame 6 is toward the vertical plate direction of the sixth connecting frame 56, the fourth reading head 58 can be connected to the end of the fifth connecting frame 55 away from the supporting frame 6 by bolts, the fourth grating scale 57 can be connected to the end face of the vertical plate of the sixth connecting frame 56 facing the fifth connecting frame 55 by bolts, the fourth reading head 58 is used to read the scale on the fourth grating scale 57, so that the moving distance of the X-axis balancing mass block 54 relative to the supporting frame 6 can be read.

[0067] Optionally, the stepping motion device for suppressing the reaction force of the external interface also includes an air floating pad, which includes a load air floating pad 8 and an actuator air floating pad 9. A plurality of the load air floating pads 8 are arranged at intervals on the end surface of the load 1 facing the marble platform 7, and the load air floating pad 8 is used to form an air film between the load air floating pad 8 and the marble platform 7; a plurality of the actuator air floating pads 9 are arranged at intervals on the end surface of the first layer frame 31 facing the marble platform 7, and the actuator air floating pad 9 is used to form an air film between the actuator air floating pad 9 and the marble platform 7.

[0068] In this embodiment, combined with the attached Figure 2 , Attachment Figure 5 and attached Figure 7 As shown, a plurality of load air-floating pads 8 are arranged at intervals on the end surface of the load 1 facing the marble platform 7. The load air-floating pads 8 can be connected to the end surface of the load 1 facing the marble platform 7 by bolts. The load air-floating pads 8 are used to form an air film between the load air-floating pads 8 and the marble platform 7, so that the load 1 can be gravity unloaded. A plurality of actuator air-floating pads 9 are arranged at intervals on the end surface of the first layer frame 31 facing the marble platform 7. The actuator air-floating pads 9 can be connected to the end surface of the first layer frame 31 facing the marble platform 7 by bolts. The actuator air-floating pads 9 are used to form an air film between the actuator air-floating pads 9 and the marble platform 7 to reduce the influence of external vibration on the step-type motion device and reduce friction. The load 1 is supported by the air buoyancy of the air-floating pads without wear and friction with the surface of the marble platform 7 during the movement. The rigidity of the structure is increased by the interaction of the bolt connection and the air buoyancy of the air-floating pads, making the movement more stable and reliable.

[0069] It should be noted that the stepping motion device for suppressing the reaction force of the external interface also includes an air supply device for providing compressed air to the air floating cushion.

[0070] Optionally, the Y-direction actuator 2 and the X-direction actuator 3 are arranged in the vertical direction (attached Figure 1 The load 1 is stacked in the Z-axis direction, and the output centers of the Y-axis linear motor 22 and the X-axis linear motor 32 coincide with the center of mass of the load 1, which can avoid the overturning moment generated when the motor is working, while taking into account the motion accuracy and size limitation of the stepping motion device.

[0071] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0072] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. A stepping motion device that suppresses the reaction force of an external interface, characterized in that: include: A load (1), a Y-direction actuator (2), an X-direction actuator (3), a Y-direction reaction force balancing mechanism (4), an X-direction reaction force balancing mechanism (5), a support frame (6) and a marble platform (7), wherein the support frame (6) is used to be connected to a mechanical installation interface of a base frame, the load (1) is arranged on the Y-direction actuator (2), the Y-direction actuator (2) is arranged on the X-direction actuator (3), the X-direction actuator (3) is arranged on the support frame (6), the support frame (6) is arranged on the marble platform (7), and the Y The Y-direction reaction force balancing mechanism (4) and the X-direction reaction force balancing mechanism (5) are both arranged on the support frame (6); the Y-direction reaction force balancing mechanism (4) comprises a first driving mechanism and a Y-direction balancing mass block (44); the first driving mechanism is used to drive the Y-direction balancing mass block (44) to move along the Y direction on the support frame (6); the X-direction reaction force balancing mechanism (5) comprises a second driving mechanism and an X-direction balancing mass block (54); the second driving mechanism is used to drive the X-direction balancing mass block (54) to move along the X direction on the support frame (6).

2. The stepping motion device for suppressing the reaction force of the external interface according to claim 1, characterized in that: The first driving mechanism comprises a Y-axis balanced linear motor (41), a Y-axis balanced linear guide rail (42) and a first slider (43); the Y-axis balanced linear guide rail (42) is arranged on the Y-axis balanced mass block (44); the first slider (43) is arranged on the support frame (6); the first slider (43) is slidably connected to the Y-axis balanced linear guide rail (42); the Y-axis balanced linear motor (41) comprises a third U-shaped magnetic steel (411) and a third coil (412); the third U-shaped magnetic steel (411) is connected to the Y-axis balanced mass block (44); and the third coil (412) is connected to the support frame (6).

3. The stepping motion device for suppressing the reaction force of the external interface according to claim 2, characterized in that: The Y-axis reaction force balancing mechanism (4) also includes a third connecting frame (45), a fourth connecting frame (46), a third grating ruler (47) and a third reading head (48). The Y-axis balancing mass block (44) is provided with a first long slot hole penetrating the Y-axis balancing mass block (44). One end of the third connecting frame (45) is connected to the supporting frame (6), and the other end extends out of the first long slot hole. The third reading head (48) is arranged at one end of the third connecting frame (45) away from the supporting frame (6). The fourth connecting frame (46) is connected to the Y-axis balancing mass block (44). The third grating ruler (47) is arranged on the fourth connecting frame (46). The third reading head (48) is used to read the scale on the third grating ruler (47).

4. The stepping motion device for suppressing the reaction force of the external interface according to claim 1, characterized in that: The second driving mechanism comprises an X-axis balanced linear motor (51), an X-axis balanced linear guide rail (52) and a second slider (53); the X-axis balanced linear guide rail (52) is arranged on the X-axis balanced mass block (54); the second slider (53) is arranged on the support frame (6); the second slider (53) is slidably connected to the X-axis balanced linear guide rail (52); the X-axis balanced linear motor (51) comprises a fourth U-shaped magnetic steel (511) and a fourth coil (512); the fourth U-shaped magnetic steel (511) is connected to the X-axis balanced mass block (54); and the fourth coil (512) is connected to the support frame (6).

5. The stepping motion device for suppressing the reaction force of the external interface according to claim 4, characterized in that: The X-axis reaction force balancing mechanism (5) also includes a fifth connecting frame (55), a sixth connecting frame (56), a fourth grating ruler (57) and a fourth reading head (58); a second long slot hole penetrating the X-axis balancing mass block (54) is provided on the X-axis balancing mass block (54); one end of the fifth connecting frame (55) is connected to the supporting frame (6), and the other end extends out of the second long slot hole; the fourth reading head (58) is arranged at one end of the fifth connecting frame (55) away from the supporting frame (6); the sixth connecting frame (56) is connected to the X-axis balancing mass block (54); the fourth grating ruler (57) is arranged on the sixth connecting frame (56); and the fourth reading head (58) is used to read the scale on the fourth grating ruler (57).

6. The stepping motion device for suppressing the reaction force of the external interface according to claim 1, characterized in that: The X-axis actuator (3) comprises a first-layer frame (31), an X-axis linear motor (32), and an X-axis cross roller guide rail (33); the first-layer frame (31) is arranged on the marble platform (7); the X-axis cross roller guide rail (33) is respectively connected to the first-layer frame (31) and the support frame (6); the X-axis linear motor (32) comprises a first U-shaped magnetic steel (321) and a first coil (322); the first U-shaped magnetic steel (321) is connected to the support frame (6); and the first coil (322) is connected to the first-layer frame (31).

7. The stepping motion device for suppressing the reaction force of the external interface according to claim 6, characterized in that: The X-axis actuator (3) further comprises a first connecting frame (34), a first grating ruler (35) and a first reading head (36); the first connecting frame (34) is connected to the first layer frame (31) and the first coil (322) respectively; the first grating ruler (35) is arranged on the supporting frame (6); the first reading head (36) is arranged on the first connecting frame (34); and the first reading head (36) is used to read the scale on the first grating ruler (35).

8. The stepping motion device for suppressing the reaction force of the external interface according to claim 6, characterized in that: The Y-axis actuator (2) comprises a second layer frame (21), a Y-axis linear motor (22), and a Y-axis cross roller guide rail (23); the load (1) is connected to the second layer frame (21); the Y-axis cross roller guide rail (23) is respectively connected to the first layer frame (31) and the second layer frame (21); the second layer frame (21) is located above the first layer frame (31), and there is a gap between the first layer frame (31) and the second layer frame (21); the Y-axis linear motor (22) comprises a second U-shaped magnetic steel (221) and a second coil (222); the second U-shaped magnetic steel (221) is connected to the second layer frame (21), and the second coil (222) is connected to the first layer frame (31).

9. The stepping motion device for suppressing the reaction force of the external interface according to claim 8, characterized in that: The Y-axis actuator (2) further comprises a second connecting frame (24), a second grating ruler (25) and a second reading head (26); the second connecting frame (24) is respectively connected to the first layer frame (31) and the second coil (222); the second grating ruler (25) is arranged on the second layer frame (21); the second reading head (26) is arranged on the second connecting frame (24); and the second reading head (26) is used to read the scale on the second grating ruler (25).

10. The stepping motion device for suppressing the reaction force of the external interface according to claim 6, characterized in that: It also comprises an air floating pad, which comprises a load air floating pad (8) and an actuator air floating pad (9). A plurality of the load air floating pads (8) are arranged at intervals on the end surface of the load (1) facing the marble platform (7), and the load air floating pad (8) is used to form an air film between the load air floating pad (8) and the marble platform (7); a plurality of the actuator air floating pads (9) are arranged at intervals on the end surface of the first layer frame (31) facing the marble platform (7), and the actuator air floating pad (9) is used to form an air film between the actuator air floating pad (9) and the marble platform (7).

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